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Modelling and simulation of selective Si3N4 etching in 3D NAND structures 三维NAND结构中Si3N4选择性蚀刻的建模与仿真
IF 4.3 2区 工程技术 Q2 ENGINEERING, CHEMICAL Pub Date : 2026-01-28 DOI: 10.1016/j.ces.2026.123473
Daoming Yang, Lei Zhou, Shuangyu Hao, Guanghua Ye, Xinggui Zhou
Selective Si3N4 etching is a critical step in 3D NAND fabrication, and its rational design requires an appropriate model. This work proposes a numerical model that can describe the microstructure evolution and the influences of supporting columns. The results show that the etched depths of Si3N4 and SiO2 layers decrease along the trench depth due to the strong diffusion limitation of H2SiO3. This diffusion limitation can be alleviated by widening the trench that acts as a highway for diffusion. The presence of supporting columns leads to the periodic reduction of H2SiO3 concentration, which considerably reduces etch time and selectivity. The effects of temperature and H3PO4 fraction in etchant are also evaluated, showing that a moderate temperature and H3PO4 fraction can balance etch time, selectivity, and oxide redeposition. This work provides some useful knowledge that should serve to guide the optimal design of selective Si3N4 etching in high-aspect-ratio 3D NAND structures.
选择性Si3N4蚀刻是3D NAND制造的关键步骤,其合理设计需要合适的模型。本文提出了一种能够描述结构演变和支撑柱影响的数值模型。结果表明,由于H2SiO3的强扩散限制,Si3N4和SiO2层的蚀刻深度沿沟槽深度减小;这种扩散限制可以通过加宽作为扩散高速公路的沟槽来缓解。支撑柱的存在导致H2SiO3浓度的周期性降低,这大大降低了蚀刻时间和选择性。结果表明,适当的温度和H3PO4分数可以平衡蚀刻时间、选择性和氧化物再沉积。这项工作提供了一些有用的知识,应该有助于指导高纵横比3D NAND结构中选择性Si3N4蚀刻的优化设计。
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引用次数: 0
Eco-friendly schiff base derived from 4-aminoantipyrine as an efficient inhibitor for copper corrosion in nitric acid media 从4-氨基安替比林衍生的环保希夫碱作为硝酸介质中铜腐蚀的有效缓蚀剂
IF 4.3 2区 工程技术 Q2 ENGINEERING, CHEMICAL Pub Date : 2026-01-28 DOI: 10.1016/j.ces.2026.123475
Elsayed M. AbouElleef , A.Z. El-Sonbati , M.A. Diab , Ahmed M. Eldesoky , Sh.M. Morgan
A new Schiff base compound derived from 4-aminoantipyrine and 2-hydroxynaphthaldehyde, namely (E)-4-(((2-hydroxynaphthalen-1-yl)methylene)amino)-1,5-dimethyl-2-phenyl-1,2-dihydro-3H-pyrazol-3-one (HL), was synthesized and explored as a corrosion inhibitor for copper in highly aggressive nitric acid media. Unlike previously reported inhibitors, the corrosion inhibition behavior of this compound in 2 M HNO3 has not been investigated before. The protective performance of HL was assessed using weight loss measurements alongside several electrochemical techniques, including potentiodynamic polarization, electrochemical impedance spectroscopy, and electrochemical frequency modulation. The results demonstrate that HL provides substantial corrosion protection even at very low concentrations, achieving an inhibition efficiency of 89.1% at 11 × 10−6 M. Electrochemical findings reveal that the inhibitor influences both anodic and cathodic reactions, indicating an inhibition behavior. Adsorption studies show that HL adsorbs strongly onto the copper surface and follows the Langmuir adsorption model, suggesting the formation of a stable protective layer. The inhibition mechanism was further clarified through quantum chemical calculations, which correlate the molecular electronic structure of HL with its high adsorption tendency and inhibition efficiency. The combined experimental and theoretical outcomes confirm that HL is an effective and environmentally benign candidate for copper corrosion protection in acidic environments.
以4-氨基安替比林和2-羟基萘乙醛为原料合成了一种新的希夫碱化合物(E)-4-((2-羟基萘-1-基)亚甲基)氨基)-1,5-二甲基-2-苯基-1,2-二氢- 3h -吡唑-3-酮(HL),并对其作为铜在强腐蚀性硝酸介质中的缓蚀剂进行了研究。与先前报道的抑制剂不同,该化合物在2 M HNO3中的缓蚀行为尚未被研究过。通过失重测量和几种电化学技术(包括动电位极化、电化学阻抗谱和电化学调频)来评估HL的保护性能。结果表明,即使在非常低的浓度下,HL也能提供有效的腐蚀保护,在11 × 10 - 6 m的条件下,其缓蚀效率达到89.1%。电化学研究结果表明,HL对阳极和阴极反应都有影响,表明其具有缓蚀行为。吸附研究表明,HL在铜表面有较强的吸附,符合Langmuir吸附模型,形成了稳定的保护层。通过量子化学计算进一步阐明了HL的抑制机理,将其分子电子结构与其高吸附倾向和抑制效率联系起来。实验和理论结果相结合,证实了HL是一种有效的、环境友好的酸性环境铜腐蚀防护材料。
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引用次数: 0
An improved CFD study of direct reduction shaft furnace for low-carbon ironmaking 低碳炼铁直接还原竖炉的改进CFD研究
IF 4.7 2区 工程技术 Q2 ENGINEERING, CHEMICAL Pub Date : 2026-01-28 DOI: 10.1016/j.ces.2026.123463
Rui Hong, Xiaobing Yu, Yansong Shen
The direct reduction shaft furnace (DR-SF) process is a key alternative technology for ironmaking decarbonisation, however, the in-furnace phenomena remain unclear. In this work, a two-dimensional axisymmetric steady-state SF model based on the two-fluid model (TFM) framework is developed and improved by considering reversible homogeneous reactions. It is validated against industrial plant data. Then, the simulation captures the key smelting behaviours, including the gas flow pattern, temperature field, and species distribution, as well as iron oxides reduction and carburisation processes. The cases with and without reversible homogeneous reactions are compared, indicating that neglecting reversible reactions may be misleading in predicting carbon content, with deviations exceeding 15%. Additionally, the effect of the flow rate at the cooling gas outlet (FR-CGO) on the SF internal state and DRI quality is studied and quantified. The simulation results show that (1) the FR-CGO increase suppresses the space available for its uniform upward flow, by 4.08% for every 1% increase in the proportion of FR-CGO to the flow rate at the cooling gas inlet (FR-CGI); (2) when 96% of cooling gas flows out from the cooling gas outlet, the gas flow pattern will be significantly altered, leading to mixing of the cooling gas and reducing gas, which is undesired and unfavourable for the cooling gas cycle system; and (3) the metallisation rate and carbon content of DRI can be regulated by adjusting the FR-CGO, with increasing by 0.94% and 0.21%, respectively, as the proportion of FR-CGO to FR-CGI rises by 1% from 86% to 95%. This study reports an improved cost-effective tool capable of studying the complex in-reactor behaviours and provide SF process optimisation, advancing low-carbon ironmaking.
竖炉直接还原(DR-SF)工艺是炼铁脱碳的关键替代技术,但炉内现象尚不清楚。本文建立了基于双流体模型(TFM)框架的二维轴对称稳态SF模型,并考虑了可逆均相反应,对其进行了改进。它是根据工业工厂数据进行验证的。然后,模拟捕获关键的冶炼行为,包括气体流动模式,温度场和物种分布,以及氧化铁还原和渗碳过程。比较了存在可逆均相反应和不存在可逆均相反应的情况,表明忽略可逆反应可能会在预测碳含量时产生误导,偏差超过15%。此外,还研究和量化了冷却气出口流量(FR-CGO)对SF内部状态和DRI质量的影响。仿真结果表明:(1)FR-CGO在冷却气入口流量(FR-CGI)中所占比例每增加1%,FR-CGO的增加就会抑制其均匀向上流动的可用空间4.08%;(2)当96%的冷却气体从冷却气体出口流出时,气体流态将发生明显改变,导致冷却气体与还原气体混合,这对冷却气体循环系统是不希望和不利的;(3)通过调节FR-CGO可以调节DRI的金属化率和碳含量,当FR-CGO与FR-CGI的比例从86%增加到95%时,金属化率和碳含量分别增加0.94%和0.21%。本研究报告了一种改进的经济有效的工具,能够研究复杂的反应器内行为,并提供SF过程优化,推进低碳炼铁。
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引用次数: 0
Experimental study on short-term oxidation behavior of carbon black agglomerates under laminar flow conditions 层流条件下炭黑团块短期氧化行为的实验研究
IF 4.7 2区 工程技术 Q2 ENGINEERING, CHEMICAL Pub Date : 2026-01-28 DOI: 10.1016/j.ces.2026.123468
Chengcheng Yi, Zhongwei Meng, Shilong Li, Daigeng Wu, Hengxi Wang, Yu Li, Long Yang, Xingyu Liang
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引用次数: 0
Multiscale Modeling of Area-Selective Atomic Layer Deposition of SiO2 on Al2O3 and SiO2 Surfaces with Intermediate Etching Steps Al2O3和SiO2表面区域选择性原子层沉积的多尺度模拟
IF 4.7 2区 工程技术 Q2 ENGINEERING, CHEMICAL Pub Date : 2026-01-28 DOI: 10.1016/j.ces.2026.123422
Feiyang Ou, Abdulrahman Alghamdi, Chun-Pei Lin, Gerassimos Orkoulas, Panagiotis D. Christofides
{"title":"Multiscale Modeling of Area-Selective Atomic Layer Deposition of SiO2 on Al2O3 and SiO2 Surfaces with Intermediate Etching Steps","authors":"Feiyang Ou, Abdulrahman Alghamdi, Chun-Pei Lin, Gerassimos Orkoulas, Panagiotis D. Christofides","doi":"10.1016/j.ces.2026.123422","DOIUrl":"https://doi.org/10.1016/j.ces.2026.123422","url":null,"abstract":"","PeriodicalId":271,"journal":{"name":"Chemical Engineering Science","volume":"76 1","pages":""},"PeriodicalIF":4.7,"publicationDate":"2026-01-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"146071889","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Gold-iron oxide multicomponent nanoparticles differentially modulate TLR signaling in Microglia: a comparative study using primary and immortalized models 金-铁氧化物多组分纳米颗粒对小胶质细胞中TLR信号的差异调节:一项使用原生和永生化模型的比较研究
IF 4.7 2区 工程技术 Q2 ENGINEERING, CHEMICAL Pub Date : 2026-01-28 DOI: 10.1016/j.ces.2026.123474
Zaira I. González-Sánchez, Carlos Caro, Pedro Quaresma, Eulália Pereira, David Pozo
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引用次数: 0
Experimental investigation of supersaturation decay induced by bubble evolution in a pipe flow 管道流动中气泡演化引起过饱和衰减的实验研究
IF 4.7 2区 工程技术 Q2 ENGINEERING, CHEMICAL Pub Date : 2026-01-28 DOI: 10.1016/j.ces.2026.123435
J. Manthey, M. Guesmi, H. Mehdipour, S. Unz, M. Beckmann
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引用次数: 0
Oxygen vacancy/Cu NPs synergically assists brookite TiO2/photo-driven antibiotic removal: High photocatalytic activity with a low environmental effect 氧空位/Cu NPs协同协助brookite TiO2/光驱动抗生素去除:高光催化活性,低环境影响
IF 4.3 2区 工程技术 Q2 ENGINEERING, CHEMICAL Pub Date : 2026-01-27 DOI: 10.1016/j.ces.2026.123464
Kefan Chen , Bingwen Hu , Jialiang Wu , Gang Cheng , Wenju Zhang , Zhipan Wen
Photocatalytic elimination of antibiotic residues in wastewater offers a promising way to address the issue of environmental crisis. In this study, a simple solvothermal method was employed to simultaneously involve copper and oxygen vacancies into brookite TiO2 for obtaining Cu@TiO2-x photocatalysts. With composition and structure confirmation through different characterization techniques, the enhanced photocatalytic performance of the Cu@TiO2-x was evaluated towards the degradation of Ciprofloxacin (CIP). The kinetic rate constant of 0.6Cu@TiO2-x sample is 1.83 and 1.48 times higher than that of TiO2 and TiO2-x, respectively. The photo/electrochemical measurements demonstrated that simultaneously introducing Cu and oxygen vacancy could improve the light absorption and photoinduced charge migration, facilitating the generation of more active species and the following CIP degradation. The radical trapping experiments revealed that e- and ·O2 were the main active radical during CIP degradation. The degradation pathway was inferred by HRMS, and the conducted toxicity prediction and bean seedling experiments showed that the degradation intermediate products had low ecological toxicity.
光催化去除废水中抗生素残留为解决环境危机提供了一条有希望的途径。在本研究中,采用简单的溶剂热法将铜和氧空位同时掺杂到brookite TiO2中,得到Cu@TiO2-x光催化剂。通过不同表征技术确定了Cu@TiO2-x的组成和结构,评价了Cu@TiO2-x对环丙沙星(CIP)的增强光催化性能。0.6Cu@TiO2-x样品的动力学速率常数分别是TiO2和TiO2-x的1.83倍和1.48倍。光/电化学测量表明,同时引入Cu和氧空位可以改善光吸收和光诱导电荷迁移,促进活性物质的产生和后续的CIP降解。自由基捕获实验表明,e-和·O2 -是CIP降解过程中主要的活性自由基。通过HRMS推测了降解途径,并进行了毒性预测和豆苗试验,结果表明降解中间产物具有较低的生态毒性。
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引用次数: 0
Accelerated and Broadband Electrochemical Impedance Spectroscopy of Lithium-ion Batteries using Segmented Chirp Signals 基于分段啁啾信号的锂离子电池加速和宽带电化学阻抗谱
IF 4.7 2区 工程技术 Q2 ENGINEERING, CHEMICAL Pub Date : 2026-01-27 DOI: 10.1016/j.ces.2026.123440
Rigved Samant, Resmi Suresh, Omkar S. Deshmukh, Raghunathan Rengaswamy
Accelerated Electrochemical Impedance Spectroscopy (EIS) is essential for monitoring electrochemical systems. The amplitude envelope–based single-chirp EIS method shows limitations when constructing impedance spectra over a broad frequency range of <span><span style=""></span><span data-mathml='<math xmlns="http://www.w3.org/1998/Math/MathML"><mrow is="true"><mo is="true">(</mo><msup is="true"><mn is="true">10</mn><mrow is="true"><mo is="true">&#x2212;</mo><mn is="true">3</mn></mrow></msup><mo linebreak="goodbreak" is="true">&#x2212;</mo><msup is="true"><mn is="true">10</mn><mn is="true">4</mn></msup><mo is="true">)</mo></mrow></math>' role="presentation" style="font-size: 90%; display: inline-block; position: relative;" tabindex="0"><svg aria-hidden="true" focusable="false" height="3.24ex" role="img" style="vertical-align: -1.043ex;" viewbox="0 -945.9 5600.2 1395" width="13.007ex" xmlns:xlink="http://www.w3.org/1999/xlink"><g fill="currentColor" stroke="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"><g is="true"><use is="true" xlink:href="#MJSZ1-28"></use><g is="true" transform="translate(458,0)"><g is="true"><use xlink:href="#MJMAIN-31"></use><use x="500" xlink:href="#MJMAIN-30" y="0"></use></g><g is="true" transform="translate(1001,393)"><g is="true"><use transform="scale(0.707)" xlink:href="#MJMAIN-2212"></use></g><g is="true" transform="translate(550,0)"><use transform="scale(0.707)" xlink:href="#MJMAIN-33"></use></g></g></g><g is="true" transform="translate(2686,0)"><use xlink:href="#MJMAIN-2212"></use></g><g is="true" transform="translate(3686,0)"><g is="true"><use xlink:href="#MJMAIN-31"></use><use x="500" xlink:href="#MJMAIN-30" y="0"></use></g><g is="true" transform="translate(1001,393)"><use transform="scale(0.707)" xlink:href="#MJMAIN-34"></use></g></g><use is="true" x="5141" xlink:href="#MJSZ1-29" y="-1"></use></g></g></svg><span role="presentation"><math xmlns="http://www.w3.org/1998/Math/MathML"><mrow is="true"><mo is="true">(</mo><msup is="true"><mn is="true">10</mn><mrow is="true"><mo is="true">−</mo><mn is="true">3</mn></mrow></msup><mo is="true" linebreak="goodbreak">−</mo><msup is="true"><mn is="true">10</mn><mn is="true">4</mn></msup><mo is="true">)</mo></mrow></math></span></span><script type="math/mml"><math><mrow is="true"><mo is="true">(</mo><msup is="true"><mn is="true">10</mn><mrow is="true"><mo is="true">−</mo><mn is="true">3</mn></mrow></msup><mo linebreak="goodbreak" is="true">−</mo><msup is="true"><mn is="true">10</mn><mn is="true">4</mn></msup><mo is="true">)</mo></mrow></math></script></span> Hz, particularly in the low-frequency region below 0.1 Hz. This work proposes a segmented-chirp method that divides the spectrum into three segments, each excited by a distinct chirp signal. The approach is validated on a nonlinear electrochemical
加速电化学阻抗谱(EIS)是监测电化学系统的重要手段。在(10−3−104)(10−3−104)Hz的宽频率范围内,特别是在0.1 Hz以下的低频区域,基于幅值包络的单啁啾EIS方法在构建阻抗谱时存在局限性。本文提出了一种分段啁啾方法,该方法将频谱分成三段,每段由一个不同的啁啾信号激发。在锂离子电池非线性电化学反应机理和非线性Doyle-Fuller-Newman (DFN)模型上对该方法进行了验证。对传统的单正弦EIS进行基准测试表明,对于非线性反应机制,分段方法在(10−3−104)(10−3−104)Hz范围内将测量时间缩短了81-98%,误差为4-0.1%。对于DFN模型,该方法实现了五倍的时间减少,在(10−2−104)(10−2−104)Hz上误差<; 8%,在(10−3−104)Hz上误差<; 2.5%。并将DFN模型的阻抗谱拟合到等效电路模型(ECM)中。与两种技术的光谱拟合的ECM在所有情况下都表现出几乎相同的NRSS、R2和RMSE( <; 3.5%)。这证实了分段啁啾EIS提供了与传统EIS具有相同保真度的线性模型估计(ECM参数),而只需要一小部分计算时间。
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引用次数: 0
Gradient-designed mineral composite cartridge for stable strontium/metasilicic acid co-release in continuous-flow drinking water systems 梯度设计的矿物复合药筒,用于稳定锶/偏硅酸在连续流动饮用水系统中的共同释放
IF 4.3 2区 工程技术 Q2 ENGINEERING, CHEMICAL Pub Date : 2026-01-27 DOI: 10.1016/j.ces.2026.123401
Jiaxi Chen , Jing Liu , Yihe Zhang, Junzhi Yi, Shuo Zhao, Jiangbin Zhao, Na Zhang
This study addresses the scientific challenges of unstable ion co-release and pH fluctuation in conventional mineralization materials by investigating the synergistic mechanisms of gradient formulation and multi-method modification. A strontium (Sr)- and metasilicic acid (H2SiO3)-enriched mineral composite was designed via gradient mass ratios of Sr-rich minerals (celestite, dolomite) and silicate-rich minerals (maifan stone, zeolite, etc.) (Sr:SiO32− = 1:2 to 1:12). Mineral surface modification (mechanical/thermal/acid/salt treatments) was employed to regulate surface properties (specific surface area, surface charge), and the underlying mechanism was clarified via XRD, BET, and XPS characterizations. Static/dynamic dissolution tests combined with kinetic modeling revealed that gradient ratios (1:4, 1:6, 1:12) achieved synergistic release of Sr2+ (>0.2 mg/L) and H2SiO3 (up to 34.8% enhancement) by matching dissolution rates of different minerals. The pH buffering mechanism was quantified: CO32− from dolomite and amphoteric Al3+ from maifan stone synergistically maintained pH at 7.0–8.9 without external additives. Composite cartridges (minerals/activated carbon/UHMWPE = 5:7:8) exhibited compressive strength of 4.24 MPa, and 1000-L continuous flow tests confirmed stable release (Sr2+ ≥0.65 mg/L, H2SiO3 ≥0.33 mg/L) due to sustained mineral dissolution, which is validated by SEM-EDS and BET. Hygienic safety compliance (GB 8537-2022) and favorable sensory acceptance (96.15%) were achieved as indirect evidence of mechanism effectiveness. This work reveals the gradient formulation-regulated ion co-release mechanism and multi-mineral pH buffering synergy, providing a scientific paradigm for the design of functional mineral materials for drinking water mineralization.
本研究通过研究梯度配方和多方法改性的协同机制,解决了传统矿化材料中不稳定离子共释放和pH波动的科学挑战。通过富锶矿物(天青石、白云石)和富硅酸盐矿物(麦饭石、沸石等)(Sr:SiO32−= 1:2 ~ 1:12)的梯度质量比,设计了富锶-偏硅酸(H2SiO3)矿物复合材料。采用矿物表面改性(机械/热/酸/盐处理)来调节表面性能(比表面积,表面电荷),并通过XRD, BET和XPS表征阐明了其潜在机理。静态/动态溶解试验结合动力学模型表明,梯度比(1:4,1:6,1:12)通过匹配不同矿物的溶解速率,实现了Sr2+ (>0.2 mg/L)和H2SiO3的协同释放(提高34.8%)。研究了pH缓冲机制:白云岩中的CO32−和麦饭石中的两性Al3+在没有外部添加剂的情况下协同维持pH在7.0 ~ 8.9之间。复合药筒(矿物/活性炭/UHMWPE = 5:7:8)抗压强度为4.24 MPa, 1000 L连续流动试验证实,由于矿物持续溶解,其释放稳定(Sr2+≥0.65 mg/L, H2SiO3≥0.33 mg/L), SEM-EDS和BET验证了这一结果。卫生安全达标(GB 8537-2022)和良好的感官接受度(96.15%)是机制有效性的间接证据。本研究揭示了梯度配方调控离子共释放机制和多矿物pH缓冲协同作用,为饮用水矿化功能矿物材料的设计提供了科学范式。
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引用次数: 0
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Chemical Engineering Science
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