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Capacity analysis of automated material handling systems in semiconductor fabs 半导体晶圆厂自动化物料搬运系统的容量分析
Pub Date : 2004-12-05 DOI: 10.1109/WSC.2004.1371556
M. Kuhl, J. Christopher
A critical aspect of semiconductor manufacturing is the design and analysis of material handling and production control polices to optimize fab performance. As wafer sizes have increased, semiconductor fabs have moved toward the use of automated material handling systems (AMHS). However, the behavior of AMHS and the effects of AMHS on fab productivity is not well understood. This research involves the development of a design and analysis methodology for evaluating the throughput capacity of AMHS. A set of simulation experiments is used to evaluate the throughput capacity of an AMHS and the effects on fab performance measures. The analysis uses SEMATECH fab data for full semiconductor fabs to evaluate the AMHS throughput capacity.
半导体制造的一个关键方面是设计和分析材料处理和生产控制政策,以优化晶圆厂的性能。随着晶圆尺寸的增加,半导体晶圆厂已经转向使用自动化材料处理系统(AMHS)。然而,AMHS的行为及其对晶圆厂生产率的影响尚不清楚。本研究涉及开发一种设计和分析方法来评估AMHS的吞吐能力。通过一组仿真实验来评估AMHS的吞吐能力及其对晶圆厂性能指标的影响。该分析使用SEMATECH全半导体晶圆厂数据来评估AMHS吞吐能力。
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引用次数: 4
Optimal computing budget allocation for multi-objective simulation models 多目标仿真模型的最优计算预算分配
Pub Date : 2004-12-05 DOI: 10.5555/1161734.1161843
L. Lee, E. P. Chew, S. Teng, D. Goldsman
Simulation plays a vital role in identifying the best system design from among a set of competing designs. To improve simulation efficiency, ranking and selection techniques are often used to determine the number of simulation replications required so that a pre-specified level of correct selection is guaranteed at a modest possible computational expense. As most real-life systems are multi-objective in nature, in this paper, we consider a multi-objective ranking and selection problem, where the system designs are evaluated in terms of more than one performance measure. We incorporate the concept of Pareto optimality into the ranking and selection scheme, and try to find all of the non-dominated designs rather than a single "best" one. A simple sequential solution method is proposed to allocate the simulation replications. Computational results show that the proposed algorithm is efficient in terms of the total number of replications needed to find the Pareto set.
仿真在从一组竞争设计中识别最佳系统设计方面起着至关重要的作用。为了提高模拟效率,通常使用排序和选择技术来确定所需的模拟复制数量,以便以适度的计算费用保证预先指定的正确选择水平。由于大多数现实生活中的系统本质上是多目标的,在本文中,我们考虑了一个多目标排名和选择问题,其中系统设计根据多个性能指标进行评估。我们将帕累托最优的概念融入到排序和选择方案中,并试图找到所有非主导设计,而不是单一的“最佳”设计。提出了一种简单的顺序求解方法来分配仿真副本。计算结果表明,就寻找帕累托集所需的重复次数而言,该算法是有效的。
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引用次数: 70
Development of a parametric estimating model for technology-driven deployment projects 为技术驱动的部署项目开发参数化估算模型
Pub Date : 2004-12-05 DOI: 10.1109/WSC.2004.1371462
R. Watson, Y. Kwak
The purpose of this paper is to define the process used to develop a parametric estimating model and to explain the use of the model as it allows a non subject matter expert to predict the cost of deployment of a technology-driven project with improved accuracy.The overall objective is to define criteria for organizations to use as a rule of thumb estimating model for determining potential resource requirements during the pre-concept and concept phase of a technology-driven project.The use of the model will determine the complexity level of a project and then using a matrix simulating the task complexity knowledge of a deployment subject matter expert, the organization deployment resource required will be estimated based upon responses to certain inquiries. The user of the model will then have the capability to modify the output to derive their specific deployment estimates.
本文的目的是定义用于开发参数化估算模型的过程,并解释该模型的使用,因为它允许非主题专家以更高的准确性预测技术驱动项目的部署成本。总体目标是为组织定义标准,作为经验估计模型的规则,用于在技术驱动项目的概念前期和概念阶段确定潜在的资源需求。模型的使用将确定项目的复杂性级别,然后使用模拟部署主题专家的任务复杂性知识的矩阵,将根据对某些查询的响应估计所需的组织部署资源。然后,模型的用户将有能力修改输出,以得出他们特定的部署估计。
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引用次数: 1
Simulation planning and rostering: a discrete event simulation for the crew assignment process in north american freight railroads 模拟计划与调度:北美货运铁路机组分配过程的离散事件模拟
Pub Date : 2003-12-07 DOI: 10.5555/1030818.1031048
Rainer Guttkuhn, Todd Dawson, U. Trutschel, Jon Walker, M. Moroz
This paper introduces a discrete event simulation for crew assignments and crew movements as a result of train traffic, labor rules, government regulations and optional crew schedules. The software is part of a schedule development system, FRCOS (Freight Rail Crew Optimization System), that was co-developed by Canadian National (CN) Rail and Circadian Technologies, Inc. The simulation allows verification of the impact of changes to trainflow, labor rules or government regulations on the overall operational efficiency of how crews are called to work. The system helps to evaluate changes to current crew assignments and can test new crew assignment scenarios such as crew schedules. Potential problems can be detected before the actual implementation, saving unnecessary costs. The software is also used to assess the impact of traffic changes on existing crew schedules in order to implement reactive corrections to these schedules.
本文介绍了一种离散事件仿真方法,用于模拟列车交通、劳动规则、政府法规和可选的机组调度等因素对机组分配和调度的影响。该软件是时间表开发系统FRCOS(货运铁路人员优化系统)的一部分,该系统由加拿大国家铁路公司和昼夜节律技术公司共同开发。模拟可以验证列车流、劳动规则或政府法规的变化对如何召集工作人员的整体运营效率的影响。该系统有助于评估当前船员分配的变化,并可以测试新的船员分配方案,如船员时间表。可以在实际实施之前检测到潜在的问题,从而节省不必要的成本。该软件还用于评估交通变化对现有机组时间表的影响,以便对这些时间表实施反应性修正。
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引用次数: 6
Emerging areas: urban operations and UCAVs: a game engine based simulation of the NIST urban search and rescue arenas 新兴领域:城市行动和无人驾驶飞机:基于NIST城市搜索和救援领域模拟的游戏引擎
Pub Date : 2003-12-07 DOI: 10.5555/1030818.1030956
Jijun Wang, M. Lewis, J. Gennari
We are developing interactive simulations of the National Institute of Standards and Technology (NIST) Reference Test Facility for Autonomous Mobile Robots (Urban Search and Rescue). The NIST USAR Test Facility is a standardized disaster environment consisting of three scenarios of progressive difficulty: Yellow, Orange, and Red arenas. The USAR task focuses on robot behaviors, and physical interaction with standardized but disorderly rubble filled environments. The simulation will be used to test and evaluate designs for teleoperation interfaces and robot sensing and cooperation that will subsequently be incorporated into experimental robots. This paper describes our novel simulation approach using an inexpensive game engine to rapidly construct a visually and dynamically accurate simulation for both individual robots and robot teams.
我们正在开发国家标准与技术研究所(NIST)自主移动机器人(城市搜索和救援)参考测试设施的交互式模拟。NIST USAR测试设施是一个标准化的灾难环境,由三种逐步困难的场景组成:黄色,橙色和红色竞技场。USAR的任务侧重于机器人的行为,以及与标准化但无序的碎石填充环境的物理交互。模拟将用于测试和评估远程操作界面和机器人传感与合作的设计,这些设计随后将被纳入实验机器人。本文描述了我们的新型仿真方法,使用廉价的游戏引擎快速构建单个机器人和机器人团队的视觉和动态精确仿真。
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引用次数: 18
The process of process reengineering: simulation for business processes and information systems design 流程再造的过程:模拟业务流程和信息系统设计
Pub Date : 2003-12-07 DOI: 10.5555/1030818.1031063
R. Paul, A. Serrano
Business Process (BP) literature promotes the value of business processes as essential gearwheels that help organizations to reach their goals. Similarly, many process design approaches claim that Information Technology (IT) is a major enabler of business process, a view also shared by the Information Systems (IS) community. Despite this, BP and IS approaches do not provide clear guidance on how to assess the benefits that a given IS design may bring to the BP prior the IS implementation. Nor is clear indication of which modeling techniques could be used to assess such relationship. This paper uses the insights gained during a UK funded research project, namely ASSESS-IT, that aimed to depict the dynamic relationships between BP and IT to propose an alternative framework to develop BP simulation models that depict the dynamic behavior of the relationships between BP and IS.
业务流程(BP)文献将业务流程的价值提升为帮助组织实现其目标的基本齿轮。类似地,许多流程设计方法声称信息技术(IT)是业务流程的主要推动者,信息系统(is)社区也认同这一观点。尽管如此,BP和IS的方法并没有提供明确的指导,说明如何在实施IS之前评估给定的IS设计可能给BP带来的好处。也没有明确指出哪种建模技术可以用来评估这种关系。本文利用在英国资助的研究项目(即assessment -IT)中获得的见解,该项目旨在描述BP和IT之间的动态关系,并提出了一个替代框架来开发描述BP和IS之间关系动态行为的BP仿真模型。
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引用次数: 18
New manufacturing modeling methodology: a hybrid approach to manufacturing enterprise simulation 新的制造建模方法:制造企业仿真的混合方法
Pub Date : 2003-12-07 DOI: 10.5555/1030818.1030968
L. Rabelo, M. Helal, Albert T. Jones, Jason Min, Y. Son, A. Deshmukh
Manufacturing enterprise decisions can be classified into four groups: business decisions, design decisions. engineering decisions, and production decisions. Numerous physical and software simulation techniques have been used to evaluate specific decisions by predicting their impact on the system as measured by one or more performance measures. In this paper, we focus on production decisions, where discrete-event simulation models perform that evaluation. We argue that such an evaluation is limited in time and scope, and does not capture the potential impact of these decisions on the whole enterprise. We propose integrating these discrete-event models with system dynamic models and we show the potential benefits of such an integration using an example of semiconductor enterprise.
制造企业的决策可分为四类:业务决策、设计决策。工程决策和生产决策。许多物理和软件模拟技术已经被用来评估特定的决策,通过一个或多个性能度量来预测它们对系统的影响。在本文中,我们关注生产决策,其中离散事件模拟模型执行该评估。我们认为这样的评估在时间和范围上是有限的,并且没有捕捉到这些决策对整个企业的潜在影响。我们建议将这些离散事件模型与系统动态模型集成,并通过一个半导体企业的例子展示了这种集成的潜在好处。
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引用次数: 15
Logistics 2: applications of simulation in logistics combat developments 物流2:模拟在物流作战发展中的应用
Pub Date : 2002-12-08 DOI: 10.5555/1030453.1030582
G. H. Graves, J. L. Higgins
As the Army undergoes a transformation from the logistics intensive organizations that currently comprise the force to a more agile and sustainable force, changes in logistics concepts and organizations are inevitable. Because much of the Army's future equipment and most future organizations are still in the conceptual stages, these elements must be modeled. Simulation provides a valuable tool for not only modeling the structure or attributes of a future system, but also for comparing alternative concepts for how systems should be employed and equipped. In this paper, we present three applications of how simulation was used within the U.S. Army Combined Arms Support Command in the design and analysis of current and emerging logistical systems in the Army.
随着陆军从目前组成部队的后勤密集型组织向更加灵活和可持续的部队转变,后勤概念和组织的变化是不可避免的。由于陆军的大部分未来装备和大多数未来组织仍处于概念阶段,因此必须对这些要素进行建模。仿真不仅为未来系统的结构或属性建模提供了一个有价值的工具,而且还为如何使用和装备系统的替代概念进行了比较。在本文中,我们介绍了美国陆军联合兵种支援司令部如何在陆军当前和新兴后勤系统的设计和分析中使用仿真的三种应用。
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引用次数: 0
Methods for special applications: Cell-DEVS quantization techniques in a fire spreading application 特殊应用方法:在火灾蔓延应用中的Cell-DEVS量化技术
Pub Date : 2002-12-08 DOI: 10.5555/1030453.1030529
A. Muzy, E. Innocenti, A. Aiello, J. Santucci, Gabriel A. Wainer
We present the use of the CD++ tool to model and simulate forest fire-spread. A semi-physical fire spread model is implemented using the Cell-DEVS formalism. The use of Cell-DEVS enables proving the correctness of the simulation engines and permits to model the problem even by a non-computer science specialist. The high level language of CD++ reduces the algorithmic complexity for the modeler while allowing complex cellular timing behaviors. Different Cell-DEVS quantization techniques are used and developed to decrease execution time. The study is realized regarding time improvement and trades-off between model evolution, simulation time and incurred error. Finally, based on experimentations, interesting perspectives are defined to develop new quantization techniques.
我们介绍了使用cd++工具来模拟和模拟森林火灾的蔓延。使用Cell-DEVS形式化实现了半物理火灾蔓延模型。Cell-DEVS的使用可以证明模拟引擎的正确性,并且允许即使是非计算机科学专家也可以对问题进行建模。cd++的高级语言降低了建模器的算法复杂性,同时允许复杂的蜂窝定时行为。不同的Cell-DEVS量化技术的使用和发展,以减少执行时间。在模型演化、仿真时间和产生误差之间进行了时间改进和权衡。最后,在实验的基础上,提出了新的量化技术的发展方向。
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引用次数: 9
Virtual worlds: VRML clients linked through concurrent chat 虚拟世界:通过并发聊天链接的VRML客户端
Pub Date : 2002-12-08 DOI: 10.5555/1030453.1030525
L. Belfore, S. Battula
Internet based virtual reality offers the opportunity to render content in three dimensions. In addition, the Internet provides a medium to support collaborative activities. In this work, we describe how collaborative capabilities are integrated into the Interactive Land use VRML Application (ILUVA). ILUVA is a VRML based application that supports highly interactive functionality, live updates, and the dynamic generation of VRML content. The collaborative functions have been added in the context of an Internet chat session in which multiple users may participate from the Internet. In addition to the usual functions supported by chat applications, user information sharing is supported. The union or intersection of sessions from different users may be produced and reviewed in the world.
基于互联网的虚拟现实提供了以三维呈现内容的机会。此外,因特网提供了一种支持协作活动的媒介。在这项工作中,我们描述了如何将协作能力集成到交互式土地使用VRML应用程序(ILUVA)中。ILUVA是一个基于VRML的应用程序,支持高度交互功能、实时更新和动态生成VRML内容。协作功能已添加到Internet聊天会话的上下文中,其中多个用户可以从Internet参与其中。除了聊天应用程序支持的常用功能外,还支持用户信息共享。来自不同用户的会议的联合或交集可能在世界范围内产生和审查。
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引用次数: 2
期刊
Online World Conference on Soft Computing in Industrial Applications
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