Pub Date : 2018-12-14DOI: 10.1201/9781315274164-35
{"title":"Nature as an Engineering Guide: Biomimetics","authors":"","doi":"10.1201/9781315274164-35","DOIUrl":"https://doi.org/10.1201/9781315274164-35","url":null,"abstract":"","PeriodicalId":288278,"journal":{"name":"Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set","volume":"17 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-12-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114259408","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Quantum Mechanics and the Band Theory of Solids","authors":"","doi":"10.1201/9781315274164-7","DOIUrl":"https://doi.org/10.1201/9781315274164-7","url":null,"abstract":"","PeriodicalId":288278,"journal":{"name":"Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set","volume":"374 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-12-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123479268","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Silicon Single Crystal Is Still King","authors":"","doi":"10.1201/9781315274164-8","DOIUrl":"https://doi.org/10.1201/9781315274164-8","url":null,"abstract":"","PeriodicalId":288278,"journal":{"name":"Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set","volume":"78 2 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-12-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126219665","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-12-14DOI: 10.1201/9781315274164-24
{"title":"Physical and Chemical Vapor Deposition—Thin Film Properties and Surface Micromachining","authors":"","doi":"10.1201/9781315274164-24","DOIUrl":"https://doi.org/10.1201/9781315274164-24","url":null,"abstract":"","PeriodicalId":288278,"journal":{"name":"Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set","volume":"50 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-12-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127940456","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Historical Note: The Ascent of Silicon, MEMS, and NEMS","authors":"","doi":"10.1201/9781315274164-5","DOIUrl":"https://doi.org/10.1201/9781315274164-5","url":null,"abstract":"","PeriodicalId":288278,"journal":{"name":"Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set","volume":"10 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-12-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129376176","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-12-14DOI: 10.1201/9781315274164-19
{"title":"Next-Generation Lithographies and Lithography Research","authors":"","doi":"10.1201/9781315274164-19","DOIUrl":"https://doi.org/10.1201/9781315274164-19","url":null,"abstract":"","PeriodicalId":288278,"journal":{"name":"Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set","volume":"10 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-12-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129189393","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-12-14DOI: 10.1201/9781315274164-39
{"title":"Metrology and MEMS/NEMS Modeling","authors":"","doi":"10.1201/9781315274164-39","DOIUrl":"https://doi.org/10.1201/9781315274164-39","url":null,"abstract":"","PeriodicalId":288278,"journal":{"name":"Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set","volume":"9 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-12-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114106476","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-12-14DOI: 10.1007/978-1-4419-9601-5_2
Amitabha Ghosh, A. Ghosh
{"title":"Scaling Laws","authors":"Amitabha Ghosh, A. Ghosh","doi":"10.1007/978-1-4419-9601-5_2","DOIUrl":"https://doi.org/10.1007/978-1-4419-9601-5_2","url":null,"abstract":"","PeriodicalId":288278,"journal":{"name":"Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set","volume":"6 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-12-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122171520","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-12-14DOI: 10.1201/9781315274164-37
{"title":"Packaging, Assembly, and Self-Assembly","authors":"","doi":"10.1201/9781315274164-37","DOIUrl":"https://doi.org/10.1201/9781315274164-37","url":null,"abstract":"","PeriodicalId":288278,"journal":{"name":"Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set","volume":"64 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-12-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130314018","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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