Pub Date : 2018-12-14DOI: 10.1201/9781315274164-11
{"title":"Electrochemical and Optical Analytical Techniques","authors":"","doi":"10.1201/9781315274164-11","DOIUrl":"https://doi.org/10.1201/9781315274164-11","url":null,"abstract":"","PeriodicalId":288278,"journal":{"name":"Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set","volume":"212 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-12-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114572606","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-12-14DOI: 10.1201/9781315274164-17
{"title":"Acknowledgments","authors":"","doi":"10.1201/9781315274164-17","DOIUrl":"https://doi.org/10.1201/9781315274164-17","url":null,"abstract":"","PeriodicalId":288278,"journal":{"name":"Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set","volume":"26 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-12-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114205615","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-12-14DOI: 10.1201/9781315274164-36
{"title":"Nanotechnology: Top-Down and Bottom-Up Manufacturing Approaches Compared","authors":"","doi":"10.1201/9781315274164-36","DOIUrl":"https://doi.org/10.1201/9781315274164-36","url":null,"abstract":"","PeriodicalId":288278,"journal":{"name":"Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set","volume":"12 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-12-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130770000","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-12-14DOI: 10.1201/9781315274164-34
{"title":"Nonlithography-Based (Traditional) and Lithography-Based (Nontraditional) Manufacturing Compared","authors":"","doi":"10.1201/9781315274164-34","DOIUrl":"https://doi.org/10.1201/9781315274164-34","url":null,"abstract":"","PeriodicalId":288278,"journal":{"name":"Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set","volume":"22 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-12-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134536159","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-12-14DOI: 10.1201/9781420015416.pt1
In Short
Photolithography is a multi-step lithography process in which user-defined patterns are transferred to substrates with the help of ultraviolet light and a pattern-carrying mask. In this process, the substrate is first thoroughly cleaned by wet chemical treatments to render the surface free of organic and inorganic impurities. The substrate is then coated with a layer of photoresist by spin coating after exposing the substrate to a chemical (e.g., hexamethyldisilazane) that improves adhesion between the photoresist and the substrate.
{"title":"Photolithography","authors":"In Short","doi":"10.1201/9781420015416.pt1","DOIUrl":"https://doi.org/10.1201/9781420015416.pt1","url":null,"abstract":"Photolithography is a multi-step lithography process in which user-defined patterns are transferred to substrates with the help of ultraviolet light and a pattern-carrying mask. In this process, the substrate is first thoroughly cleaned by wet chemical treatments to render the surface free of organic and inorganic impurities. The substrate is then coated with a layer of photoresist by spin coating after exposing the substrate to a chemical (e.g., hexamethyldisilazane) that improves adhesion between the photoresist and the substrate.","PeriodicalId":288278,"journal":{"name":"Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set","volume":"13 6","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-12-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"120923727","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-12-14DOI: 10.1201/9781315274164-27
{"title":"Micromolding Techniques—LIGA","authors":"","doi":"10.1201/9781315274164-27","DOIUrl":"https://doi.org/10.1201/9781315274164-27","url":null,"abstract":"","PeriodicalId":288278,"journal":{"name":"Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set","volume":"106 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-12-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126993131","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-12-14DOI: 10.1201/9781315274164-21
{"title":"Wet Chemical Etching and Wet Bulk Micromachining—Pools as Tools","authors":"","doi":"10.1201/9781315274164-21","DOIUrl":"https://doi.org/10.1201/9781315274164-21","url":null,"abstract":"","PeriodicalId":288278,"journal":{"name":"Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set","volume":"24 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-12-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129073490","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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