Pub Date : 2018-12-14DOI: 10.1201/9781315274164-25
{"title":"Chemical, Photochemical, and Electrochemical Forming Techniques","authors":"","doi":"10.1201/9781315274164-25","DOIUrl":"https://doi.org/10.1201/9781315274164-25","url":null,"abstract":"","PeriodicalId":288278,"journal":{"name":"Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set","volume":"39 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-12-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117202541","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-12-14DOI: 10.1201/9781315274164-43
{"title":"MEMS and NEMS Applications","authors":"","doi":"10.1201/9781315274164-43","DOIUrl":"https://doi.org/10.1201/9781315274164-43","url":null,"abstract":"","PeriodicalId":288278,"journal":{"name":"Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set","volume":"75 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-12-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124056212","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-12-14DOI: 10.1201/9781315274164-38
{"title":"Selected Materials and Processes for MEMS and NEMS","authors":"","doi":"10.1201/9781315274164-38","DOIUrl":"https://doi.org/10.1201/9781315274164-38","url":null,"abstract":"","PeriodicalId":288278,"journal":{"name":"Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set","volume":"2 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-12-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133568900","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-12-14DOI: 10.1201/9781315274164-33
{"title":"Acknowledgments","authors":"","doi":"10.1201/9781315274164-33","DOIUrl":"https://doi.org/10.1201/9781315274164-33","url":null,"abstract":"","PeriodicalId":288278,"journal":{"name":"Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set","volume":"94 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-12-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114325607","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-12-14DOI: 10.1201/9781315274164-42
{"title":"Power and Brains in Miniature Devices","authors":"","doi":"10.1201/9781315274164-42","DOIUrl":"https://doi.org/10.1201/9781315274164-42","url":null,"abstract":"","PeriodicalId":288278,"journal":{"name":"Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set","volume":"51 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-12-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114563388","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-07-11DOI: 10.5772/intechopen.71518
Volker Ziemann
{"title":"Actuators","authors":"Volker Ziemann","doi":"10.5772/intechopen.71518","DOIUrl":"https://doi.org/10.5772/intechopen.71518","url":null,"abstract":"","PeriodicalId":288278,"journal":{"name":"Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set","volume":"25 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-07-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124399793","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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