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Sub-Continuum Simulations of Heat Conduction in Silicon-on-Insulator Transistors 绝缘体上硅晶体管热传导的亚连续统模拟
Pub Date : 1999-11-14 DOI: 10.1115/1.1337651
P. Sverdrup, Y. Ju, K. Goodson
The temperature rise in compact silicon devices is predicted at present by solving the heat diffusion equation based on Fourier’s law. The validity of this approach needs to be carefully examined for semiconductor devices in which the region of strongest electronphonon coupling is narrower than the phonon mean free path, Λ, and for devices in which Λ is comparable to or exceeds the dimensions of the device. Previous research estimated the effective phonon mean free path in silicon near room temperature to be near 300 nm, which is already comparable with the minimum feature size of current generation transistors. This work numerically integrates the phonon Boltzmann transport equation (BTE) within a two-dimensional Silicon-on-Insulator (SOI) transistor. The BTE is coupled with the classical heat diffusion equation, which is solved in the silicon dioxide layer beneath a transistor with a channel length of 400 nm. The sub-continuum simulations yield a peak temperature rise that is 159 percent larger than predictions using only the classical heat diffusion equation. This work will facilitate the development of simpler calculation strategies, which are appropriate for commercial device simulators.
目前,基于傅里叶定律求解热扩散方程是预测致密硅器件温升的基本方法。对于电子-声子耦合最强区域比声子平均自由程Λ窄的半导体器件,以及Λ与器件尺寸相当或超过器件尺寸的器件,需要仔细检查这种方法的有效性。先前的研究估计室温下硅中的有效声子平均自由程接近300nm,这已经与当前一代晶体管的最小特征尺寸相当。这项工作在二维绝缘体上硅(SOI)晶体管中对声子玻尔兹曼输运方程(BTE)进行了数值集成。BTE与经典的热扩散方程相耦合,该方程在沟道长度为400nm的晶体管下面的二氧化硅层中求解。亚连续统模拟产生的峰值温度上升比仅使用经典热扩散方程的预测高出159%。这项工作将有助于开发更简单的计算策略,适用于商业设备模拟器。
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引用次数: 151
Nanosecond Laser Experiments of Microstructure Adhesion Reduction 微结构减粘的纳秒激光实验
Pub Date : 1999-11-14 DOI: 10.1115/imece1999-1059
J. W. Rogers, L. Phinney
Due to the small size of structures in modern microdevices, surface forces can create undesirable adhesion between microstructures, which is referred to as stiction. Prior investigations have used ultrashort-pulse lasers to recover stiction-failed microcantilevers. The current experiments study the use of a 400 ns, 1064 nm, Nd:YAG laser to free polycrystalline silicon microcantilevers stuck to the underlying substrate. The results show that a Nd:YAG, 1064 nm laser is capable of recovering failed microstructures with yields exceeding those reported in earlier studies. Yields of 100 percent for cantilevers up to 1 mm in length were demonstrated for several laser operating conditions. The yields are strongly dependent on laser fluence and slightly dependent on exposure time, with a single-shot at 160 mJ/cm2 resulting in yields around 60 percent.
由于现代微器件的结构尺寸小,表面力可以在微结构之间产生不希望的粘附,这被称为粘附。先前的研究使用超短脉冲激光来恢复伸缩失效的微悬臂梁。目前的实验研究使用400 ns, 1064 nm的Nd:YAG激光去除粘在衬底上的多晶硅微悬臂梁。结果表明,Nd:YAG, 1064 nm激光器能够恢复失效的微结构,其产额超过了先前研究的报道。在几种激光操作条件下,长度为1毫米的悬臂的产量达到100%。产率在很大程度上依赖于激光辐照量,并与曝光时间有轻微的关系,在160 mJ/cm2的单次照射下,产率约为60%。
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引用次数: 1
Radiation Mechanism for a Single Bubble Sonoluminescence 单泡声致发光的辐射机理
Pub Date : 1999-11-14 DOI: 10.1143/JPSJ.69.112
J. Jeon, I. Yang, J. Na, H. Kwak
A mechanism of light emission from a single bubble sonoluminescence (SBSL) was formulated by assuming that the source for the light emission is bremsstrahlung in partially ionized gases. Also the spectrum was measured and the observed results were compared with the calculated ones. Calculated and experimental results yield common spectral behavior in the visible region: the spectral radiance shows power-law dependence on wavelength with an exponent of −2.5. The SBSL spectrum which is characterized by the continuous one with no major peaks has been confirmed experimentally.
假设单泡声致发光的发光源是部分电离气体中的轫致辐射,提出了单泡声致发光的发光机理。对光谱进行了测量,并将观测结果与计算结果进行了比较。计算和实验结果在可见区域产生共同的光谱行为:光谱辐射与波长呈幂律关系,指数为- 2.5。实验证实了SBSL光谱具有连续无主峰的特征。
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引用次数: 21
Microscale Heat Conduction in Dielectric Thin Tubes 介质薄管中的微尺度热传导
Pub Date : 1999-11-14 DOI: 10.1115/imece1999-1070
Long-Jye Sheu, Jenn-Der Lin, F. Chou
The radial heat conduction in the tube wall of dielectric thin tubes is studied in this work. An equation of phonon radiative transfer (EPRT) is used in association with nodal approximation technique for examining the heat transport in the thin tubes. The effective thermal conductivity of thin tubes is calculated based on the heat flux in the middle surface of the tubes. Results indicate that the energy distribution in the annulus is dominated by phonons excited by outer surface. Consequently, the temperature distribution is considerably affected by the temperature of outer surface. In addition to tube wall thickness, R2-R1, which was usually considered as the size effect on heat conduction, the curvature effect would significantly change the heat flux across the tube wall and consequently affect the effective thermal conductivity.
本文研究了介质薄管管壁径向热传导问题。利用声子辐射传递方程(EPRT)结合节点近似技术研究了薄管内的热传递。根据薄管中间表面的热流密度计算薄管的有效导热系数。结果表明,环内的能量分布主要由外表面激发的声子主导。因此,温度分布受外表面温度的影响很大。除了通常被认为是尺寸效应的管壁厚度R2-R1外,曲率效应会显著改变管壁上的热流密度,从而影响有效导热系数。
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引用次数: 0
Benchmark Boundary Element Solutions for Some Problems Governed by the Boussinesq Equations 一些由Boussinesq方程控制的问题的基准边界元解
Pub Date : 1999-11-14 DOI: 10.1115/imece1999-1090
M. Grigoriev, G. Dargush
The boundary element formulation developed previously by the authors for incompressible isothermal viscous fluid flows is extended for non-isothermal flows governed by Boussinesq equations. The new boundary element method is applied to the classical Rayleigh-Benard problem and to a stratified flow over a backward-facing step. In all cases, the boundary element results are in good agreement with published finite element solutions. However, in some instances, the boundary element solutions are more accurate, particularly in terms of resolving surface tractions and heat fluxes.
由作者先前发展的不可压缩等温粘性流体流动的边界元公式推广到由Boussinesq方程控制的非等温流动。新的边界元方法应用于经典的瑞利-贝纳德问题和后台阶上的分层流动。在所有情况下,边界元结果与已发表的有限元解很好地吻合。然而,在某些情况下,边界元解更准确,特别是在求解表面牵引力和热通量方面。
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引用次数: 0
Prediction of Humid Air Heat Exchanger Performance Using Artificial Neural Networks 基于人工神经网络的湿空气换热器性能预测
Pub Date : 1999-11-14 DOI: 10.1115/imece1999-1087
A. Pacheco-Vega, M. Sen, K. T. Yang, R. McClain
In the present study we apply an artificial neural network to predict the operation of a humid air-water fin-tube compact heat exchanger. The network configuration is of the feedforward type with a sigmoid activation function and a backpropagation algorithm. Published experimental data, corresponding to humid air flowing over the heat exchanger tubes and water flowing inside them, are used to train the neural network. After training with known experimental values of the humid-air flow rates, dry-bulb and wet-bulb inlet temperatures for various geometrical configurations, the j-factor and heat transfer rate predictions of the network were tested against the experimental values. Comparisons were made with published predictions of power-law correlations which were obtained from the same data. The results demonstrate that the neural network is able to predict the performance of this heat exchanger much better than the correlations.
本文应用人工神经网络对湿空气-水翅片管紧凑型换热器的运行进行了预测。网络配置为前馈型,具有s型激活函数和反向传播算法。发表的实验数据,对应于流经热交换器管的潮湿空气和管内流动的水,被用来训练神经网络。在使用已知的各种几何构型的湿空气流速、干球和湿球入口温度的实验值进行训练后,根据实验值对网络的j因子和传热率预测进行了测试。与从相同数据中获得的幂律相关性的已发表预测进行了比较。结果表明,神经网络对换热器性能的预测效果优于相关预测。
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引用次数: 2
Analysis of Conjugate Heat Transfer in a Three-Dimensional Microchannel Heat Sink for Cooling of Electronic Components 电子元件三维微通道散热片的共轭传热分析
Pub Date : 1999-11-14 DOI: 10.1115/imece1999-1066
A. Fedorov, R. Viskanta
A three-dimensional model is developed to investigate flow and conjugate heat transfer in the microchannel-based heat sink for electronic packaging applications. The incompressible laminar flow Navier-Stokes equations of motion as well as the energy conservation equations for the fluid and solid are employed as the governing model equations which are numerically solved using the generalized single-equation framework for solving conjugate problems. First, the theoretical model developed is validated by comparing the model predictions of the thermal resistance and the friction coefficient with available experimental data for a wide range of Reynolds numbers. Then, the parametric calculations are performed to investigate the effects of different working fluids, solid substrate materials and channel geometry on conjugate heat transfer in the microchannel heat sink. The bulk and wall temperature and heat flux distributions as well as the average heat transfer characteristics are reported and discussed. Important practical design recommendations are also provided regarding the cooling efficiency of the microchannel heat sink.
建立了电子封装用微通道散热器的三维流动和共轭传热模型。采用不可压缩层流Navier-Stokes运动方程以及流体和固体的能量守恒方程作为控制模型方程,采用求解共轭问题的广义单方程框架进行数值求解。首先,通过将热阻和摩擦系数的模型预测与广泛雷诺数范围内的可用实验数据进行比较,验证了所建立的理论模型。然后,通过参数计算研究了不同工质、固体衬底材料和通道几何形状对微通道散热器内共轭传热的影响。报道并讨论了体温、壁温、热流密度分布以及平均换热特性。本文还对微通道散热器的散热效率提出了重要的实用设计建议。
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引用次数: 3
The Dispersion in Finite Element Solutions to the One-Dimensional Heat Equation 一维热方程有限元解中的色散
Pub Date : 1999-11-14 DOI: 10.1115/imece1999-1085
A. Emery, W. Dauksher
A method for evaluating the numerically introduced dispersion in finite element solutions to the one-dimensional heat equation is presented. The dispersion is quantified for linear and quadratic elements as a function of time step, mesh refinement and capacitance matrix formulation. It is demonstrated that an analysis of the dispersion is a useful tool in estimating the accuracy and in understanding the behavior of the numerical algorithm.
提出了一种计算一维热方程有限元解中数值引入色散的方法。将线性和二次元的色散量化为时间步长、网格细化和电容矩阵的函数。结果表明,色散分析是估计精度和理解数值算法行为的有用工具。
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引用次数: 0
Experimental and Numerical Study of Conjugate Heat Transfer in a Horizontal Channel Heated From Below: Applications to CVD Processing 从下加热的水平通道中共轭传热的实验与数值研究:在CVD加工中的应用
Pub Date : 1999-11-14 DOI: 10.1115/imece1999-1071
W. Chiu, C. J. Richards, Y. Jaluria
A detailed experimental and numerical study is carried out to investigate conjugate heat transfer in a horizontal channel with a heated section which simulates Chemical Vapor Deposition (CVD) processing. Since film quality, uniformity and deposition rate have strong dependence on temperature, the role of conjugate heat transfer in influencing temperature distribution is significant in thin film production. Experimental data obtained from this study provides physical insight into conjugate heat transfer effects and allows for comparison and validation of numerical conjugate heat transfer models. The basic characteristics of the flow and the thermal transport are studied. The numerical model is used to perform a parametric study of operational parameters, allowing for the characterization of conjugate heat transfer effects on temperature at the susceptor surface, reactor walls and the gas phase. The study yields valuable guidelines for the thermal design of CVD reactors.
本文对模拟化学气相沉积(CVD)工艺的水平通道加热段的共轭传热进行了详细的实验和数值研究。由于薄膜质量、均匀性和沉积速率对温度有很强的依赖性,因此在薄膜生产中,共轭传热对温度分布的影响是非常重要的。从本研究中获得的实验数据提供了对共轭传热效应的物理见解,并允许对数值共轭传热模型进行比较和验证。研究了流动和热输运的基本特性。该数值模型用于执行操作参数的参数化研究,允许表征共轭传热对感受器表面、反应器壁和气相温度的影响。该研究为CVD反应器的热设计提供了有价值的指导。
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引用次数: 0
Modeling and Visualization of Plasma Spray Process for Depositing Functionally Graded Materials 等离子喷涂沉积功能梯度材料的建模与可视化
Pub Date : 1999-11-14 DOI: 10.1115/imece1999-1096
Y. Wan, V. Gupta, H. Zhang, A. Varshney, S. Sampath, V. Prasad, J. Fincke
Recently, several models have been developed to simulate the plasma spraying process. The present paper extends our previous model (Wan et al., 1999a) to the plasma spray system of two-component materials with two different feed nozzles. It accounts for plasma-particle interaction, particle heating/melting/evaporation and solidification on the substrate. A special visualization algorithm has been developed to demonstrate the effects of various parameters on particle conditions while in flight, growth of functionally graded materials and distribution of the two components in the coating. Visualization of thermal processes is a challenging task if it has to be used for materials design and system development. It requires special schemes for data management in a multivariate system that includes at least velocity, temperature and species in four co-ordinates (space and time). Our effort is focused on developing a visualization scheme which goes far beyond the process animation and can be ultimately used for virtual prototyping of the processes, an area that needs special research efforts. Simulation and visualization have been performed for spraying of zirconia and NiCrAlY powders, with many combinations of powder injection features, e.g., number of nozzles, nozzle location and injection velocity. The fluctuation of the voltage is also simulated and animated to show its effect on both plasma gas and particle behavior. The optimized operating parameters are deduced from the distribution of these two materials in the coating layer. Issues related to visualization are also discussed.
近年来,人们建立了几个模型来模拟等离子喷涂过程。本文将我们之前的模型(Wan et al., 1999a)扩展到具有两种不同进料喷嘴的双组分材料等离子喷涂系统。它解释了等离子体-粒子相互作用,粒子加热/熔化/蒸发和基底上的凝固。开发了一种特殊的可视化算法来演示各种参数对飞行过程中颗粒状况的影响,功能梯度材料的生长以及两种组分在涂层中的分布。热过程的可视化是一项具有挑战性的任务,如果它必须用于材料设计和系统开发。它需要在多元系统中进行数据管理的特殊方案,该系统至少包括四个坐标(空间和时间)中的速度、温度和物种。我们的工作重点是开发一个可视化方案,它远远超出了过程动画,最终可以用于过程的虚拟原型,这是一个需要特别研究的领域。对氧化锆和NiCrAlY粉末的喷涂进行了仿真和可视化,使用了许多粉末喷射特征的组合,例如喷嘴数量、喷嘴位置和喷射速度。模拟和动画显示了电压的波动对等离子体气体和粒子行为的影响。根据这两种材料在涂层中的分布,推导出了优化的操作参数。还讨论了与可视化相关的问题。
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引用次数: 0
期刊
Heat Transfer: Volume 3
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