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Heat Transfer: Volume 3最新文献

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Effect of Thin Films on Radiative Transport in Chemical Vapor Deposition Systems 薄膜对化学气相沉积系统辐射输运的影响
Pub Date : 1999-11-14 DOI: 10.1115/imece1999-1057
S. Mazumder, A. Kersch
The thermal behavior of a wafer during a Rapid Thermal Chemical Vapor Deposition (RTCVD) process depends on its spectral radiative properties, along with other factors. One of the major contributing factors is the thin film that is deposited on the wafer substrate. The presence of a thin film (of thickness anywhere above 0.1 nm) can drastically alter the radiative properties of the wafer surface, thereby leading to significantly different wafer temperatures. This article presents a model to simulate thin film effects in RTCVD processes. Radiative transfer is modeled using a Monte-Carlo ray-tracing technique. Radiative properties are calculated using fundamental Electromagnetic Wave Theory. Simulation results match remarkably well with experimental data, demonstrating the importance of thin film effects.
在快速热化学气相沉积(RTCVD)过程中,晶圆片的热行为取决于其光谱辐射特性以及其他因素。其中一个主要的影响因素是沉积在晶圆衬底上的薄膜。薄膜(厚度在0.1 nm以上)的存在会极大地改变晶圆表面的辐射特性,从而导致晶圆温度的显著不同。本文提出了一个模拟RTCVD过程中薄膜效应的模型。利用蒙特卡罗射线追踪技术模拟辐射传输。辐射特性是用基本电磁波理论计算的。仿真结果与实验数据吻合良好,证明了薄膜效应的重要性。
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引用次数: 1
Design Analysis of an Electroless Plating Bath Using CFD Technique 基于CFD技术的化学镀液设计分析
Pub Date : 1999-11-14 DOI: 10.1109/TEPM.2000.895061
T. Lee, Jong-Kai Lin
The fluid field of the electroless plating bath was analyzed using a Computational Fluid Dynamics Tool. By solving continuity and momentum equations, the pressure and velocity distributions in the plating bath were predicted. The analysis was performed under various design options: flow direction, flowrate, diffuser plate design, and wafer cassette design. It was found that with the reverse flow option; it seems to deliver uniform flow as compared to the forward flow option. Flow pattern was similar among different flowrates and diffuser designs. Low velocity flow always existed at the top portion of the wafer and near the last row of the wafer cassette. With the hypothesis that slower flowrate results in higher plating rate; a qualitative agreement has been observed between the predicted flow pattern and the plated nickel height uniformity.
利用计算流体动力学工具对化学镀液的流场进行了分析。通过求解连续性方程和动量方程,预测了镀液中的压力和速度分布。在不同的设计方案下进行了分析:流向、流量、扩散板设计和晶圆盒设计。研究发现,采用反向流动选项;与前向流选项相比,它似乎提供均匀的流量。不同流量和扩压器设计的流型相似。低速流一直存在于晶圆片的顶部和靠近晶圆盒的最后一排。假设流速越慢,电镀速率越高;在预测的流动模式和镀镍高度均匀性之间观察到定性的一致。
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引用次数: 1
Determination of Surface Heat Flux in Quenching 淬火时表面热流密度的测定
Pub Date : 1999-11-14 DOI: 10.1115/imece1999-1092
M. K. Alam, H. Pasic, K. Anagurthi, R. Zhong
Quench probes have been used to collect temperature data in controlled quenching experiments; the data is then used to deduce the heat transfer coefficients in the quenching medium. The process of determination of the heat transfer coefficient at the surface is the inverse heat conduction problem, which is extremely sensitive to measurement errors. This paper reports on an experimental and theoretical study of quenching carried out to determine the surface heat flux history during a quenching process by an inverse algorithm based on an analytical solution. The algorithm is applied to experimental data from a quenching experiment. The surface heat flux is then calculated, and the theoretical curve obtained from the analytical solution is compared with experimental results. The inverse calculation appears to produce fast, stable, but approximate results. These results can be used as the initial guess to improve the efficiency of iterative numerical solutions which are sensitive to the initial guess.
在控制淬火实验中,淬火探头用于采集温度数据;然后用这些数据推导出淬火介质中的传热系数。表面换热系数的确定过程是一个对测量误差极为敏感的反热传导问题。本文报道了采用基于解析解的逆算法确定淬火过程中表面热通量历史的实验和理论研究。将该算法应用于一个淬火实验的实验数据。计算了表面热流密度,并将解析解得到的理论曲线与实验结果进行了比较。反计算似乎产生快速、稳定但近似的结果。这些结果可以作为初始猜测,以提高对初始猜测敏感的迭代数值解的效率。
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引用次数: 1
Local Pressure Measurement of Gaseous Flow Through Microchannels 微通道气体流动的局部压力测量
Pub Date : 1999-11-14 DOI: 10.1115/imece1999-1064
S. Turner, Hongwei Sun, M. Faghri, O. Gregory
This paper presents an experimental investigation on nitrogen and helium flow in microchannels etched in silicon with hydraulic diameters of 9.7, 19.6, and 46.6 μm, and Reynolds numbers ranging from 0. 2 to 1000. The objectives of this research are (1) to measure the pressure distribution along the length of a microchannel; and (2) to determine the friction factor within the fully developed region of the microchannel. The pressure distribution is presented as absolute local pressure plotted against the distance from the microchannel inlet. The friction factor results are presented as the product of friction factor and Reynolds number plotted against Reynolds number with the outlet Knudsen number, Kn, as a curve parameter. The following conclusions have been reached in the present investigation: (1) Pressure losses at the microchannel entrance can be significant; (2) the product, f*Re, when measured sufficiently far away from the entrance and exit is a constant in the laminar flow region; and (3) the friction factor decreases as the Knudsen number increases.
本文研究了液力直径为9.7、19.6和46.6 μm、雷诺数为0。2到1000。本研究的目的是:(1)测量沿微通道长度的压力分布;(2)确定微通道完全发育区域内的摩擦系数。压力分布表示为与微通道入口距离相关的绝对局部压力。摩擦因数的结果表示为摩擦因数与雷诺数的乘积,并以出口克努森数Kn作为曲线参数绘制为雷诺数。研究结果表明:(1)微通道入口压力损失较大;(2)在离进出口足够远的地方测量时,积f*Re在层流区为常数;(3)摩擦系数随Knudsen数的增加而减小。
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引用次数: 5
A Study of Particle Growth Using Light Scattering and Local Sampling in Flame Synthesis of Nano Particles 火焰合成纳米颗粒中光散射和局部采样的颗粒生长研究
Pub Date : 1999-11-14 DOI: 10.1115/imece1999-1075
J. Cho, Jeonghoon Lee, H. W. Kim, Mansoo Choi
The growth of silica particles in coflow diffusion flames has been studied experimentally using light scattering and local thermophoretic sampling techniques. The number densities and volume fractions of both aggregates and spherical particles have been determined calculated by a novel method of using the scattering cross section measured from 90° light scattering with the combination of particle sizes and morphology measured from the localized sampling and TEM image analysis under the assumption of monodisperse distribution of primary particles in an aggregate. Rayleigh-Debye-Gans and Mie theories have been applied to the calculations for fractal aggregates and spherical particles, respectively. Of particular interests are the effects of carrier gas flow rates on the evolution of silica particles and the roles of radial heat and H2O diffusion have been studied when using N2 or O2 as a carrier gas.
利用光散射和局部热电泳取样技术研究了二氧化硅颗粒在共流扩散火焰中的生长。采用90°光散射测得的散射截面,结合局部采样测得的颗粒大小和形貌,结合TEM图像分析,在假设团聚体中初级颗粒单分散分布的情况下,计算了团聚体和球形颗粒的数量密度和体积分数。Rayleigh-Debye-Gans和Mie理论分别应用于分形聚集体和球形颗粒的计算。特别感兴趣的是载气流速对二氧化硅颗粒演化的影响,以及当使用N2或O2作为载气时径向热量和H2O扩散的作用。
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引用次数: 0
Visualization and Measurements of Picoliter-Size Molten Droplet Impact Dynamics and Solidification on a Surface 皮升尺寸熔滴冲击动力学和表面凝固的可视化和测量
Pub Date : 1999-11-14 DOI: 10.1115/imece1999-1074
Daniel Attinger, Z. Zhao, D. Poulikakos
The basic problem of the impact and solidification of molten solder droplets on a flat substrate is of central importance to the novel micromanufacturing process of solder jetting, in which microscopic size solder droplets are dispensed for the attachment of microelectronic components. Under certain conditions, “frozen ripples” appear on the surface of solidified solder microbumps deposited using the solder jetting technology (Waldvogel et al. 1996). The mechanism for the formation of these “frozen ripples” was later explained and quantified in a theoretical study by Waldvogel and Poulikakos (1997) as a consequence of the dynamic competition between flow oscillations and rapid solidification. However, no analogous experimental results for the transient impact process have been reported to date to the best of our knowledge. Such a study is reported in this paper. Eutectic solder (63Sn37Pb) was melted to a preset superheat and used in a specially designed droplet generator to produce droplets with diameters in the range 50–100 μm. The size, temperature, and impacting speed of the molten droplets were maintained constant. The primary variable is the temperature of the substrate that was controlled in the range from 48 °C to 135 °C. The dynamics of molten solder microdroplet impact and solidification on the substrate was investigated using a flash microscopy technique. The duration of flash used in the study was 1 μs. The time for the completion of solidification from the moment of a solder droplet impact on the substrate varies between 150 μs and 350 μs. The dynamic interaction between the oscillation in the liquid region and the rapid advance of solidification front was visualized, quantified and presented in this paper. To the best of our knowledge, this study presents the first published experimental results on the transient fluid dynamics and solidification of molten microdroplets impacting on a substrate at the above mentioned time and length scales that are directly relevant to the novel solder jetting technology. Existing results on this problem pertain to time and length scales at least one order of magnitude higher (Jonas et al. 1997; Pasandideh-Fard et al. 1998; Zhao et al. 1996). The visualization results on the oscillatory motion and rapid solidification shed light on a host of interesting phenomena and also support the frozen ripple formation theory presented by Waldvogel and Poulikakos (1997).
焊锡液滴在平面基板上的冲击和凝固的基本问题是新型微制造工艺的核心问题,在这种工艺中,微观尺寸的焊锡液滴被分配用于微电子元件的附着。在一定条件下,使用焊料喷射技术沉积的固化焊料微凸点表面出现“冻结波纹”(Waldvogel et al. 1996)。后来,Waldvogel和Poulikakos(1997)在一项理论研究中解释并量化了这些“冻结波纹”的形成机制,认为这是流动振荡和快速凝固之间动态竞争的结果。然而,据我们所知,到目前为止还没有报道过瞬态撞击过程的类似实验结果。本文报道了这一研究。将共晶焊料(63Sn37Pb)熔化至预先设定的过热度,并在专门设计的液滴发生器中产生直径在50-100 μm范围内的液滴。熔滴的尺寸、温度和冲击速度保持不变。主要变量是衬底的温度,控制在48°C到135°C的范围内。利用闪光显微技术研究了熔融焊料微滴在基体上的冲击和凝固动力学。实验中使用的闪光时间为1 μs。从钎料液滴撞击基体的瞬间开始,凝固完成的时间在150 ~ 350 μs之间。本文对液相区振荡与凝固锋快速推进之间的动态相互作用进行了可视化、定量分析。据我们所知,这项研究首次发表了在上述时间和长度尺度上影响基板的瞬态流体动力学和熔融微滴凝固的实验结果,这与新型焊喷技术直接相关。关于这个问题的现有结果涉及至少高一个数量级的时间和长度尺度(Jonas et al. 1997;Pasandideh-Fard et al. 1998;Zhao et al. 1996)。振荡运动和快速凝固的可视化结果揭示了许多有趣的现象,也支持了Waldvogel和Poulikakos(1997)提出的冻结纹波形成理论。
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引用次数: 0
Emission and Laser-Induced Fluorescence Spectroscopy of Laser-Ablated Titanium Plume 激光烧蚀钛羽的发射和激光诱导荧光光谱
Pub Date : 1999-11-14 DOI: 10.1115/imece1999-1080
S. Chu, C. Grigoropoulos
Pulsed laser deposition (PLD) of thin films has evolved into a well-recognized technique for a wide range of materials and in a variety of devices. There is great interest in the energy characterization of the ablated plume because this is a key parameter in determining the quality of the deposited film. Spectroscopic techniques, such as optical time-of-flight (TOF,) emission spectroscopy, and laser-induced-fluorescence (LIF) are excellent methods for this purpose since they offer temporal and spatial resolution as well as the capability of distinguishing different species. The effects of laser fluence and background gas pressure on the kinetic energies of the ablated species were found by the optical time-of flight technique and by emission imaging. Furthermore, laser-induced-fluorescence was employed for spectrally resolved imaging. The results provide additional data on the kinetic energy and the distribution of neutral titanium. The axial velocity of neutral titanium was found to be as high as 2 × 104 m/s. The distribution of species within the plume was also determined.
脉冲激光沉积(PLD)薄膜已经发展成为一种广泛的材料和各种器件公认的技术。烧蚀羽流的能量表征引起了极大的兴趣,因为这是决定沉积膜质量的关键参数。光谱学技术,如光学飞行时间(TOF)发射光谱学和激光诱导荧光(LIF)是实现这一目的的极好方法,因为它们提供了时间和空间分辨率以及区分不同物种的能力。利用光学飞行时间技术和发射成像技术,研究了激光能量和背景气体压力对烧蚀物质动能的影响。此外,采用激光诱导荧光进行光谱分辨成像。这些结果为中性钛的动能和分布提供了额外的数据。中性钛的轴向速度高达2 × 104 m/s。还确定了羽流中的物种分布。
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引用次数: 0
Temperature Dependent Thermal Conductivity of Symmetrically Strained Si/Ge Superlattices 对称应变Si/Ge超晶格的温度相关热导率
Pub Date : 1999-11-14 DOI: 10.1115/imece1999-1069
T. Borca-Tasciuc, Jianlin Liu, T. Zeng, Weili Liu, D. Song, C. Moore, Gang Chen, Kang L. Wang, M. Goorsky, T. Radetić, R. Gronsky
Experimental evidence for a significant thermal conductivity reduction has been reported in recent years for GaAs/AlAs, Si/Ge, and Bi2Te3/Sb2Te3 superlattices. Previously reported experimental studies on Si/Ge superlattices are based on samples grown by metal oxide chemical vapor deposition (MOCVD) on GaAs substrates with Ge buffers. In this work, we present experimental results on the temperature dependent thermal conductivity of symmetrically strained Si/Ge superlattices grown by molecular beam epitaxy (MBE) as a function of the superlattice period and the growth temperature. Thermal conductivity measurements are performed using a differential 3ω method. In this technique, the temperature drop across the superlattice film is experimentally determined and used to estimate the thermal conductivity of the film. Transmission electron microscopy (TEM) is employed to study the quality of the superlattice and the influence of the growth temperature on the superlattice structure. For all the superlattices studied, the measured thermal conductivity values are lower than that of the Si0.5Ge0.5 alloy. Furthermore, the measured thermal conductivity of a 40Å period Si/Ge superlattice with high dislocation density is comparable to the calculated minimum thermal conductivity of the constituent bulk materials.
近年来,有实验证据表明,GaAs/AlAs、Si/Ge和Bi2Te3/Sb2Te3超晶格的热导率显著降低。先前报道的Si/Ge超晶格的实验研究是基于金属氧化物化学气相沉积(MOCVD)在GaAs衬底上与Ge缓冲液生长的样品。在这项工作中,我们给出了由分子束外延(MBE)生长的对称应变Si/Ge超晶格的热导率随温度变化的实验结果,作为超晶格周期和生长温度的函数。导热系数测量采用差分3ω方法进行。在这种技术中,通过实验确定了超晶格薄膜上的温降,并用于估计薄膜的导热性。利用透射电子显微镜(TEM)研究了超晶格的质量以及生长温度对超晶格结构的影响。在所研究的所有超晶格中,测得的导热系数值均低于Si0.5Ge0.5合金。此外,测量的高位错密度40Å周期Si/Ge超晶格的导热系数与计算的组成块体材料的最小导热系数相当。
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引用次数: 0
Wavelets and the Numerical Solution of Heat Transfer Problems: A Discussion of Two Methods 小波与传热问题的数值解:两种方法的讨论
Pub Date : 1999-11-14 DOI: 10.1115/imece1999-1091
A. Sowayan, A. Benard, A. Diaz
Two methods for solving heat transfer problems using wavelets are reviewed and discussed, namely the so-called “Fictitious Boundary” and “Fictitious Domain/Penalty” methods. Evaluation of the two methods is performed by solving simple two-dimensional heat conduction problems using fixed scale expansion of the unknowns. A discussion on the implemention of the boundary conditions and the ease of solving the resulting system of equations is presented. For each problem the error is computed so that the accuracy of the solution can be evaluated. It is found that the Fictitious Domain/Penalty method shows better agreement with the exact solutions than the Fictitious Boundary method as it introduces less computational errors due the methodology used to implement the boundary conditions in the extended domain.
综述和讨论了用小波求解传热问题的两种方法,即“虚拟边界法”和“虚拟域/惩罚法”。通过求解简单的二维热传导问题,利用固定尺度的未知量展开,对两种方法进行了评价。讨论了边界条件的实现和由此产生的方程组的易解性。对每个问题都计算误差,以便评估解的准确性。结果表明,虚拟域/惩罚法比虚拟边界法更符合精确解,因为它采用了在扩展域中实现边界条件的方法,引入的计算误差更小。
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引用次数: 0
Transient, Three-Dimensional Heat Transfer Model for Partially Stabilized Zirconia Undergoing Laser-Assisted Machining 激光辅助加工部分稳定氧化锆的瞬态三维传热模型
Pub Date : 1999-11-14 DOI: 10.1115/imece1999-1078
F. Pfefferkorn, F. Incropera, Y. Shin
A three-dimensional, unsteady heat transfer model has been developed for predicting the temperature field in partially stabilized zirconia (PSZ) undergoing laser-assisted machining (LAM). PSZ is a semi-transparent ceramic which volumetrically absorbs, emits and scatters radiation across a spectral region extending from approximately 0.5 to 8 μm. As a first approximation, it is treated as optically thick within this spectral band, and the high density of scattering centers, as well as the random orientation of grain boundaries, permits the assumption of isotropic scattering. Accordingly, the Rosseland diffusion approximation is used to model internal radiative transfer. Since most of the CO2 laser radiation (λ = 10.6 μm) is absorbed in the first layer of control volumes adjacent to the surface, incident laser radiation is treated as a surface phenomenon. The equivalent radiation conductivity of PSZ is strongly temperature dependent and enhances thermal energy transfer within regions of the workpiece which are close to the location of laser irradiation. However, the effective thermal conductivity of PSZ remains relatively low, even at the highest temperatures achieved during LAM, and is responsible for large temperature gradients near the irradiated surface of the workpiece. For representative operating conditions, comparative calculations are performed with and without the radiation model to assess the influence of volumetric radiation effects on the temperature field. Numerical simulations are also performed to consider the effect of operating conditions, such as the laser power, laser/tool feed and depth-of-cut, on thermal conditions in close proximity to the material removal zone. The results are contrasted with those for silicon nitride, which is an opaque ceramic that exhibits quasi-plastic deformation when its temperature is raised above a threshold value at the depth-of-cut and can therefore be machined with a cutting tool.
建立了一种三维非稳态传热模型,用于预测部分稳定氧化锆(PSZ)激光辅助加工(LAM)过程中的温度场。PSZ是一种半透明陶瓷,其吸收、发射和散射辐射的光谱范围约为0.5 ~ 8 μm。作为第一个近似,它在该光谱带内被视为光学厚度,并且散射中心的高密度以及晶界的随机取向允许假设各向同性散射。因此,采用Rosseland扩散近似来模拟内部辐射传输。由于大部分CO2激光辐射(λ = 10.6 μm)在靠近表面的第一层控制体中被吸收,因此入射激光辐射被视为表面现象。PSZ的等效辐射电导率对温度有很强的依赖性,并增强了靠近激光照射位置的工件区域内的热能传递。然而,即使在LAM期间达到的最高温度下,PSZ的有效导热系数仍然相对较低,并且导致工件辐照表面附近的温度梯度较大。对于具有代表性的操作条件,在使用和不使用辐射模型的情况下进行了比较计算,以评估体积辐射效应对温度场的影响。还进行了数值模拟,以考虑操作条件(如激光功率、激光/刀具进给和切割深度)对材料去除区附近热条件的影响。结果与氮化硅形成对比,氮化硅是一种不透明的陶瓷,当其温度在切割深度超过阈值时表现出准塑性变形,因此可以用切削工具进行加工。
{"title":"Transient, Three-Dimensional Heat Transfer Model for Partially Stabilized Zirconia Undergoing Laser-Assisted Machining","authors":"F. Pfefferkorn, F. Incropera, Y. Shin","doi":"10.1115/imece1999-1078","DOIUrl":"https://doi.org/10.1115/imece1999-1078","url":null,"abstract":"\u0000 A three-dimensional, unsteady heat transfer model has been developed for predicting the temperature field in partially stabilized zirconia (PSZ) undergoing laser-assisted machining (LAM). PSZ is a semi-transparent ceramic which volumetrically absorbs, emits and scatters radiation across a spectral region extending from approximately 0.5 to 8 μm. As a first approximation, it is treated as optically thick within this spectral band, and the high density of scattering centers, as well as the random orientation of grain boundaries, permits the assumption of isotropic scattering. Accordingly, the Rosseland diffusion approximation is used to model internal radiative transfer. Since most of the CO2 laser radiation (λ = 10.6 μm) is absorbed in the first layer of control volumes adjacent to the surface, incident laser radiation is treated as a surface phenomenon.\u0000 The equivalent radiation conductivity of PSZ is strongly temperature dependent and enhances thermal energy transfer within regions of the workpiece which are close to the location of laser irradiation. However, the effective thermal conductivity of PSZ remains relatively low, even at the highest temperatures achieved during LAM, and is responsible for large temperature gradients near the irradiated surface of the workpiece. For representative operating conditions, comparative calculations are performed with and without the radiation model to assess the influence of volumetric radiation effects on the temperature field. Numerical simulations are also performed to consider the effect of operating conditions, such as the laser power, laser/tool feed and depth-of-cut, on thermal conditions in close proximity to the material removal zone. The results are contrasted with those for silicon nitride, which is an opaque ceramic that exhibits quasi-plastic deformation when its temperature is raised above a threshold value at the depth-of-cut and can therefore be machined with a cutting tool.","PeriodicalId":306962,"journal":{"name":"Heat Transfer: Volume 3","volume":"25 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-11-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126801808","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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Heat Transfer: Volume 3
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