Pub Date : 2000-10-22DOI: 10.1109/ULTSYM.2000.922693
J. Zara, S. Bobbio, S.W. Smith
We have previously described a hand crafted prototype intracardiac scanner that consists of a single high frequency PZT piston transducer that is mechanically steered by a micromachine (MEMS) actuator to produce a sector scan. More recently, we have improved the mechanical sector scanner design using finite element analysis and integrated circuit fabrication. Our new devices were designed using ANSYS finite element software to maximize the sector scan angle for the forces produced by the linear actuator, the integrated force array (IFA). These new devices are fabricated on silicon wafers using conventional integrated circuit technology. The designs include both a forward looking hinged table similar to the previous prototypes and a new side viewing device that has a transducer table tilting on miniature torsion hinges. In this paper we will present results from the design, fabrication, and testing of these new devices.
{"title":"Micromachine intracardiac ultrasound scanner fabricated with integrated circuit technology","authors":"J. Zara, S. Bobbio, S.W. Smith","doi":"10.1109/ULTSYM.2000.922693","DOIUrl":"https://doi.org/10.1109/ULTSYM.2000.922693","url":null,"abstract":"We have previously described a hand crafted prototype intracardiac scanner that consists of a single high frequency PZT piston transducer that is mechanically steered by a micromachine (MEMS) actuator to produce a sector scan. More recently, we have improved the mechanical sector scanner design using finite element analysis and integrated circuit fabrication. Our new devices were designed using ANSYS finite element software to maximize the sector scan angle for the forces produced by the linear actuator, the integrated force array (IFA). These new devices are fabricated on silicon wafers using conventional integrated circuit technology. The designs include both a forward looking hinged table similar to the previous prototypes and a new side viewing device that has a transducer table tilting on miniature torsion hinges. In this paper we will present results from the design, fabrication, and testing of these new devices.","PeriodicalId":350384,"journal":{"name":"2000 IEEE Ultrasonics Symposium. Proceedings. An International Symposium (Cat. No.00CH37121)","volume":"43 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114066710","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2000-10-22DOI: 10.1109/ULTSYM.2000.922668
B. O'Neill, R. Maev, F. Severin
Friction coupled interfaces closed under pressure are considered as a possible source of nonlinearity for the case of horizontally polarized shear waves. The distortion of a normally incident harmonic wave is calculated. From the Fourier transform, it is explicitly shown that only odd harmonics will be produced.
{"title":"Distortion of shear waves passing through a friction coupled interface","authors":"B. O'Neill, R. Maev, F. Severin","doi":"10.1109/ULTSYM.2000.922668","DOIUrl":"https://doi.org/10.1109/ULTSYM.2000.922668","url":null,"abstract":"Friction coupled interfaces closed under pressure are considered as a possible source of nonlinearity for the case of horizontally polarized shear waves. The distortion of a normally incident harmonic wave is calculated. From the Fourier transform, it is explicitly shown that only odd harmonics will be produced.","PeriodicalId":350384,"journal":{"name":"2000 IEEE Ultrasonics Symposium. Proceedings. An International Symposium (Cat. No.00CH37121)","volume":"111 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121617523","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2000-10-22DOI: 10.1109/ULTSYM.2000.921600
F. Lupotti, A. V. D. van der Steen
In recent years, a new method to measure transverse blood flow, based on the decorrelation of the radio frequency (RF) signals has been introduced. We investigated the decorrelation characteristics of transverse blood flow using an intravascular ultrasound (IVUS) array catheter by means of computer modeling. Blood was simulated as a collection of randomly located point scatterers; moving this scattering medium transversally across the acoustical beam represented flow. Two velocity profiles were simulated: random spread of blood-flow velocity and a linear blood-flow velocity gradient. RF signals were used to calculate the decorrelation pattern. The results were compared to the ones for plug blood-flow showing a good agreement between them. This agreement suggests that the decorrelation properties of an IVUS array catheter for measuring quantitative transverse blood flow is not affected by different transverse blood-flow conditions.
{"title":"Correlation-based blood-flow velocity estimation: effect of transverse spread of flow velocity and flow velocity gradients","authors":"F. Lupotti, A. V. D. van der Steen","doi":"10.1109/ULTSYM.2000.921600","DOIUrl":"https://doi.org/10.1109/ULTSYM.2000.921600","url":null,"abstract":"In recent years, a new method to measure transverse blood flow, based on the decorrelation of the radio frequency (RF) signals has been introduced. We investigated the decorrelation characteristics of transverse blood flow using an intravascular ultrasound (IVUS) array catheter by means of computer modeling. Blood was simulated as a collection of randomly located point scatterers; moving this scattering medium transversally across the acoustical beam represented flow. Two velocity profiles were simulated: random spread of blood-flow velocity and a linear blood-flow velocity gradient. RF signals were used to calculate the decorrelation pattern. The results were compared to the ones for plug blood-flow showing a good agreement between them. This agreement suggests that the decorrelation properties of an IVUS array catheter for measuring quantitative transverse blood flow is not affected by different transverse blood-flow conditions.","PeriodicalId":350384,"journal":{"name":"2000 IEEE Ultrasonics Symposium. Proceedings. An International Symposium (Cat. No.00CH37121)","volume":"76 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124301636","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2000-10-22DOI: 10.1109/ULTSYM.2000.922627
K. Telschow, V. Deason, D. Cottle, John D. Larson
An important characteristic of acoustic resonator design at ultra high frequencies (UHF) is the efficiency of the device, which is affected by leakage radiation beyond the active transducer area. In order to directly measure leakage radiation, acoustic microscopic imaging of the ultrasonic resonant motion at 880 MHz has been performed with an autocompensating interferometer and heterodyne demodulation. A method of interferometric detection based on two-wave mixing in a photorefractive material was employed to allow for automatic quadrature detection and compensation of low frequency vibrational effects. Heterodyne phase modulation was used to produce a beat frequency of 25 kHz to allow for narrowband detection utilizing lock-in amplifier techniques. A sensitivity of 5/spl times/10/sup -5/ nm was obtained with a 10 sec time constant and detection light power of about 0.5 mW. Over 90 dB dynamic drive range was recorded at the UHF operating frequency without vibration isolation of the microscope or optics. The method of calibration and results of scanning measurements on various resonators are presented and discussed in connection with current limitations and future improvements.
{"title":"UHF acoustic microscopic imaging of resonator motion","authors":"K. Telschow, V. Deason, D. Cottle, John D. Larson","doi":"10.1109/ULTSYM.2000.922627","DOIUrl":"https://doi.org/10.1109/ULTSYM.2000.922627","url":null,"abstract":"An important characteristic of acoustic resonator design at ultra high frequencies (UHF) is the efficiency of the device, which is affected by leakage radiation beyond the active transducer area. In order to directly measure leakage radiation, acoustic microscopic imaging of the ultrasonic resonant motion at 880 MHz has been performed with an autocompensating interferometer and heterodyne demodulation. A method of interferometric detection based on two-wave mixing in a photorefractive material was employed to allow for automatic quadrature detection and compensation of low frequency vibrational effects. Heterodyne phase modulation was used to produce a beat frequency of 25 kHz to allow for narrowband detection utilizing lock-in amplifier techniques. A sensitivity of 5/spl times/10/sup -5/ nm was obtained with a 10 sec time constant and detection light power of about 0.5 mW. Over 90 dB dynamic drive range was recorded at the UHF operating frequency without vibration isolation of the microscope or optics. The method of calibration and results of scanning measurements on various resonators are presented and discussed in connection with current limitations and future improvements.","PeriodicalId":350384,"journal":{"name":"2000 IEEE Ultrasonics Symposium. Proceedings. An International Symposium (Cat. No.00CH37121)","volume":"6 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126354596","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2000-10-22DOI: 10.1109/ULTSYM.2000.921682
C. Sumi, Y. Ichiki, H. Kanai
We have previously developed an ultrasonic strain measurement-based shear modulus reconstruction technique. The iterative RF-echo phase matching method uses successively acquired RF-echo data frames for measuring strains generated in vivo in soft tissues due to spontaneous heart motion and/or externally applied pressures. Together with development of a suitable configuration technique for mechanical sources and reference regions, we developed a numerical method for stably reconstructing the globally relative shear modulus distribution with respect to reference shear moduli from the measured strain data. As the elasticity of soft tissues changes on being heated, we propose that the developed shear modulus reconstruction technique can be used as a monitoring technique for the effectiveness of thermal therapy. We applied the reconstruction technique to interstitial RF electromagnetic wave therapy. To verify the feasibility we conducted in vitro experiments using fresh calf liver.
{"title":"Monitoring of the effectiveness of the interstitial RF electromagnetic wave thermal therapy by shear modulus reconstruction","authors":"C. Sumi, Y. Ichiki, H. Kanai","doi":"10.1109/ULTSYM.2000.921682","DOIUrl":"https://doi.org/10.1109/ULTSYM.2000.921682","url":null,"abstract":"We have previously developed an ultrasonic strain measurement-based shear modulus reconstruction technique. The iterative RF-echo phase matching method uses successively acquired RF-echo data frames for measuring strains generated in vivo in soft tissues due to spontaneous heart motion and/or externally applied pressures. Together with development of a suitable configuration technique for mechanical sources and reference regions, we developed a numerical method for stably reconstructing the globally relative shear modulus distribution with respect to reference shear moduli from the measured strain data. As the elasticity of soft tissues changes on being heated, we propose that the developed shear modulus reconstruction technique can be used as a monitoring technique for the effectiveness of thermal therapy. We applied the reconstruction technique to interstitial RF electromagnetic wave therapy. To verify the feasibility we conducted in vitro experiments using fresh calf liver.","PeriodicalId":350384,"journal":{"name":"2000 IEEE Ultrasonics Symposium. Proceedings. An International Symposium (Cat. No.00CH37121)","volume":"C-23 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126475293","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2000-10-22DOI: 10.1109/ULTSYM.2000.921557
H. Kanai, A. Umezawa, Y. Koiwa
The pulse wave velocity (PWV) is the propagation speed of the pulsation along the artery due to the heartbeat; its measurement is being reported to estimate the elasticity of the arterial wall for noninvasive diagnosis of arteriosclerosis. It is important for advanced diagnosis, to determine the PWV for each frequency and for each instance in time during the cardiac cycle. Using a phased tracking method developed, the movement of the arterial wall is accurately tracked and small velocity signals at multiple points in the human carotid artery along a linear-type probe are all simultaneously measured with sub-micrometer accuracy. By applying a spatial autoregressive modeling to the measured signals after using the Hilbert transform, the regional PWV of each frequency component was determined at the beginning of the ejection period, T/sub E/, and at the beginning of the ventricular diastole, T/sub D/. The novel detection of the PWV offers potential for quantitative diagnosis of atherosclerosis.
{"title":"Transcutaneous measurement of frequency dispersion in the regional pulse wave velocity","authors":"H. Kanai, A. Umezawa, Y. Koiwa","doi":"10.1109/ULTSYM.2000.921557","DOIUrl":"https://doi.org/10.1109/ULTSYM.2000.921557","url":null,"abstract":"The pulse wave velocity (PWV) is the propagation speed of the pulsation along the artery due to the heartbeat; its measurement is being reported to estimate the elasticity of the arterial wall for noninvasive diagnosis of arteriosclerosis. It is important for advanced diagnosis, to determine the PWV for each frequency and for each instance in time during the cardiac cycle. Using a phased tracking method developed, the movement of the arterial wall is accurately tracked and small velocity signals at multiple points in the human carotid artery along a linear-type probe are all simultaneously measured with sub-micrometer accuracy. By applying a spatial autoregressive modeling to the measured signals after using the Hilbert transform, the regional PWV of each frequency component was determined at the beginning of the ejection period, T/sub E/, and at the beginning of the ventricular diastole, T/sub D/. The novel detection of the PWV offers potential for quantitative diagnosis of atherosclerosis.","PeriodicalId":350384,"journal":{"name":"2000 IEEE Ultrasonics Symposium. Proceedings. An International Symposium (Cat. No.00CH37121)","volume":"90 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115947049","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2000-10-22DOI: 10.1109/ULTSYM.2000.922639
M. Takeuchi, R. Murayama, K. Kobayashi, T. Kojima
Previously we have proposed ultrasonic micromanipulation (UMM) techniques for micron-sized particles in liquid based on the radiation forces of very-high-frequency (VHF) ultrasound. In this paper, we report a new laser ultrasonic micromanipulator (LUMM) in which the acoustic radiation force and optical radiation force combine complementarily as noncontact force. An experimental LUMM consists of an acoustic leaky wave transducer of center frequency 49 MHz, a laser diode with a maximum power 5 mW at 675 nm and a biological microscope. Using the LUMM, we have carried out successfully the rapid selection of a specific particle in liquid by the removal of unwanted particles from large number of 12-/spl mu/m-diameter polystyrene spheres. The LUMM was also used to estimate the horizontal component of the ultrasonic radiation force based on the Stokes law from the measured critical velocity at which the trapping is released by mechanically moving particles.
{"title":"Laser ultrasonic micromanipulator","authors":"M. Takeuchi, R. Murayama, K. Kobayashi, T. Kojima","doi":"10.1109/ULTSYM.2000.922639","DOIUrl":"https://doi.org/10.1109/ULTSYM.2000.922639","url":null,"abstract":"Previously we have proposed ultrasonic micromanipulation (UMM) techniques for micron-sized particles in liquid based on the radiation forces of very-high-frequency (VHF) ultrasound. In this paper, we report a new laser ultrasonic micromanipulator (LUMM) in which the acoustic radiation force and optical radiation force combine complementarily as noncontact force. An experimental LUMM consists of an acoustic leaky wave transducer of center frequency 49 MHz, a laser diode with a maximum power 5 mW at 675 nm and a biological microscope. Using the LUMM, we have carried out successfully the rapid selection of a specific particle in liquid by the removal of unwanted particles from large number of 12-/spl mu/m-diameter polystyrene spheres. The LUMM was also used to estimate the horizontal component of the ultrasonic radiation force based on the Stokes law from the measured critical velocity at which the trapping is released by mechanically moving particles.","PeriodicalId":350384,"journal":{"name":"2000 IEEE Ultrasonics Symposium. Proceedings. An International Symposium (Cat. No.00CH37121)","volume":"54 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129978964","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2000-10-22DOI: 10.1109/ULTSYM.2000.921550
J. Schulze-Clewing, M. J. Eberle, D. Stephens
Intravascular ultrasound demands miniature transducers that can be guided through tiny blood vessels. Other applications in medicine and industry can also benefit from a highly miniaturized catheter based transducer design. The smaller the geometry the more useful and versatile the resulting device will be. Design consideration of geometry versus performance tradeoffs, other acoustic properties in array design and the methods of synthetic aperture beamforming are well known. Therefore, we have focused our paper on the details and intricacies of manufacturing extremely small ultrasound arrays.
{"title":"Miniaturized circular array [for intravascular ultrasound]","authors":"J. Schulze-Clewing, M. J. Eberle, D. Stephens","doi":"10.1109/ULTSYM.2000.921550","DOIUrl":"https://doi.org/10.1109/ULTSYM.2000.921550","url":null,"abstract":"Intravascular ultrasound demands miniature transducers that can be guided through tiny blood vessels. Other applications in medicine and industry can also benefit from a highly miniaturized catheter based transducer design. The smaller the geometry the more useful and versatile the resulting device will be. Design consideration of geometry versus performance tradeoffs, other acoustic properties in array design and the methods of synthetic aperture beamforming are well known. Therefore, we have focused our paper on the details and intricacies of manufacturing extremely small ultrasound arrays.","PeriodicalId":350384,"journal":{"name":"2000 IEEE Ultrasonics Symposium. Proceedings. An International Symposium (Cat. No.00CH37121)","volume":"16 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130016376","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2000-10-22DOI: 10.1109/ULTSYM.2000.922677
K. M. Lakin, K. McCarron, J. McDonald
Thin film resonators have been made that exhibit a high degree of temperature compensation. These resonators are composed of piezoelectric aluminum nitride films, aluminum top and bottom electrodes, and are compensated with layers of silicon dioxide within the resonator. The resonators are fabricated with the solidly mounted resonator (SMR) configuration using a sequence of aluminum nitride and silicon dioxide reflector layers. Silicon dioxide has a positive temperature coefficient and can be used to offset the -25 ppm per degree C coefficient of aluminum nitride. Results are reported on hermetic packaging, temperature cycle testing, temperature coefficient measurements, and preliminary ageing.
{"title":"Temperature compensated bulk acoustic thin film resonators","authors":"K. M. Lakin, K. McCarron, J. McDonald","doi":"10.1109/ULTSYM.2000.922677","DOIUrl":"https://doi.org/10.1109/ULTSYM.2000.922677","url":null,"abstract":"Thin film resonators have been made that exhibit a high degree of temperature compensation. These resonators are composed of piezoelectric aluminum nitride films, aluminum top and bottom electrodes, and are compensated with layers of silicon dioxide within the resonator. The resonators are fabricated with the solidly mounted resonator (SMR) configuration using a sequence of aluminum nitride and silicon dioxide reflector layers. Silicon dioxide has a positive temperature coefficient and can be used to offset the -25 ppm per degree C coefficient of aluminum nitride. Results are reported on hermetic packaging, temperature cycle testing, temperature coefficient measurements, and preliminary ageing.","PeriodicalId":350384,"journal":{"name":"2000 IEEE Ultrasonics Symposium. Proceedings. An International Symposium (Cat. No.00CH37121)","volume":"7 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130219389","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2000-10-22DOI: 10.1109/ULTSYM.2000.922691
Cheol-Hyun Han, E. S. Kim
This paper describes the fabrication and characterization of a micromachined ultrasonic airborne transducer built on a 1 /spl mu/m thick parylene polymer diaphragm (flat 5000*5000 /spl mu/m/sup 2/ square diaphragm) with electrodes and a piezoelectric ZnO film in a silicon substrate. The sound pressure level at 20 mm away from the fabricated transducer is measured to be around 0.44 Pa at 32.9 kHz (the transducer is driven by a 11 V/sub rms/ sinusoidal source and measured with B&K 4135 microphone). The vibration amplitude is measured (with a laser Doppler meter) to be about 1 /spl mu/m at 32.9 kHz. Finite element analysis with ANSYS 5.6 has been performed to analyze the static and dynamic behaviors of the transducer under both pressure and voltage loadings.
{"title":"Micromachined piezoelectric ultrasonic transducers based on parylene diaphragm in silicon substrate","authors":"Cheol-Hyun Han, E. S. Kim","doi":"10.1109/ULTSYM.2000.922691","DOIUrl":"https://doi.org/10.1109/ULTSYM.2000.922691","url":null,"abstract":"This paper describes the fabrication and characterization of a micromachined ultrasonic airborne transducer built on a 1 /spl mu/m thick parylene polymer diaphragm (flat 5000*5000 /spl mu/m/sup 2/ square diaphragm) with electrodes and a piezoelectric ZnO film in a silicon substrate. The sound pressure level at 20 mm away from the fabricated transducer is measured to be around 0.44 Pa at 32.9 kHz (the transducer is driven by a 11 V/sub rms/ sinusoidal source and measured with B&K 4135 microphone). The vibration amplitude is measured (with a laser Doppler meter) to be about 1 /spl mu/m at 32.9 kHz. Finite element analysis with ANSYS 5.6 has been performed to analyze the static and dynamic behaviors of the transducer under both pressure and voltage loadings.","PeriodicalId":350384,"journal":{"name":"2000 IEEE Ultrasonics Symposium. Proceedings. An International Symposium (Cat. No.00CH37121)","volume":"85 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134554115","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}