Pub Date : 2003-10-22DOI: 10.1109/ICSENS.2003.1279056
D. Greve, I. Oppenheim
MEMS ultrasonic transducers are potentially valuable in both medical and non-destructive testing applications. A prime advantage of these transducers is their wide bandwidth together with the potential for economical fabrication of detector arrays. In this paper, we discuss issues related to the coupling of these transducers to solid and liquid media. We will show that appropriate choice of the coupling medium thickness is required in order to prevent spurious pulses.
{"title":"Coupling of MEMS ultrasonic transducers","authors":"D. Greve, I. Oppenheim","doi":"10.1109/ICSENS.2003.1279056","DOIUrl":"https://doi.org/10.1109/ICSENS.2003.1279056","url":null,"abstract":"MEMS ultrasonic transducers are potentially valuable in both medical and non-destructive testing applications. A prime advantage of these transducers is their wide bandwidth together with the potential for economical fabrication of detector arrays. In this paper, we discuss issues related to the coupling of these transducers to solid and liquid media. We will show that appropriate choice of the coupling medium thickness is required in order to prevent spurious pulses.","PeriodicalId":369277,"journal":{"name":"Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498)","volume":"16 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122298157","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2003-10-22DOI: 10.1109/ICSENS.2003.1279025
B. Stein, M. Kunnavakkam, S. Stelick, C. Batt
High strength, hard, electroformed stampers are formed from a silicon master using Nickel-Cobalt electrodeposited alloy. They are found to replicate structures from sub-micron dimensions like optical gratings and to hundreds of microns like micro-fluidic channels without distortion. The channels and optical elements constitute building blocks of many biosensors. Electroform is a negative replica of the silicon master and a low cost reproduction of the master is obtained by embossing it onto plastic substrates. We find that damage free reproduction in the plastic substrate is achieved when the aspect ratio of the structures is less than 3.
{"title":"NiColoy: a versatile electroforming process for biosensor fabrication by embossing","authors":"B. Stein, M. Kunnavakkam, S. Stelick, C. Batt","doi":"10.1109/ICSENS.2003.1279025","DOIUrl":"https://doi.org/10.1109/ICSENS.2003.1279025","url":null,"abstract":"High strength, hard, electroformed stampers are formed from a silicon master using Nickel-Cobalt electrodeposited alloy. They are found to replicate structures from sub-micron dimensions like optical gratings and to hundreds of microns like micro-fluidic channels without distortion. The channels and optical elements constitute building blocks of many biosensors. Electroform is a negative replica of the silicon master and a low cost reproduction of the master is obtained by embossing it onto plastic substrates. We find that damage free reproduction in the plastic substrate is achieved when the aspect ratio of the structures is less than 3.","PeriodicalId":369277,"journal":{"name":"Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498)","volume":"36 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134443005","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2003-10-22DOI: 10.1109/ICSENS.2003.1279095
M. Fortsch, H. Zimmermann, H. Pless
We propose a PIN photodiode combining high responsivity, fast drift times and low junction capacitance in BiCMOS technology. This fast PIN photodiode allows the design of fast optoelectronic integrated circuits (OEIC) for many advanced applications in optical sensing, optical data transmission and optical storage systems. Because of the low capacitance of 0.0105fF/ /spl mu/m/sup 2/ it is possible to design fast OEICs with large-area photodetectors. The proposed optical receiver applying a PIN photodiode with a diameter of 500 /spl mu/m and a capacitance of only 2pF attains a -3dB bandwidth of 220MHz, which corresponds to a maximum data rate of 300Mbit/s.
{"title":"220 MHz optical receiver with large-area integrated PIN photodiode","authors":"M. Fortsch, H. Zimmermann, H. Pless","doi":"10.1109/ICSENS.2003.1279095","DOIUrl":"https://doi.org/10.1109/ICSENS.2003.1279095","url":null,"abstract":"We propose a PIN photodiode combining high responsivity, fast drift times and low junction capacitance in BiCMOS technology. This fast PIN photodiode allows the design of fast optoelectronic integrated circuits (OEIC) for many advanced applications in optical sensing, optical data transmission and optical storage systems. Because of the low capacitance of 0.0105fF/ /spl mu/m/sup 2/ it is possible to design fast OEICs with large-area photodetectors. The proposed optical receiver applying a PIN photodiode with a diameter of 500 /spl mu/m and a capacitance of only 2pF attains a -3dB bandwidth of 220MHz, which corresponds to a maximum data rate of 300Mbit/s.","PeriodicalId":369277,"journal":{"name":"Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498)","volume":"352 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134517935","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2003-10-22DOI: 10.1109/ICSENS.2003.1279148
V. Chodavarapu, S. Khanolkar, E.C. Tehan, A. Titus, A. Cartwright, F. Bright
In this paper, we present an integrated fiber optic sensor based on a phase detection technique. The operation principle of the sensor as a xerogel based oxygen sensor has been demonstrated The integrated device includes a light emitting diode, an oxygen sensing probe and a CMOS Integrated Circuit (IC). The CMOS IC combines the LED driver circuitry, optical detector and the phase detector circuitry on a single chip. The integrated sensor provides accurate, low cost and low power detection for quantifying oxygen and for recording excited-state lifetimes ranging from nanoseconds to milliseconds.
{"title":"CMOS integrated optical sensor using phase detection","authors":"V. Chodavarapu, S. Khanolkar, E.C. Tehan, A. Titus, A. Cartwright, F. Bright","doi":"10.1109/ICSENS.2003.1279148","DOIUrl":"https://doi.org/10.1109/ICSENS.2003.1279148","url":null,"abstract":"In this paper, we present an integrated fiber optic sensor based on a phase detection technique. The operation principle of the sensor as a xerogel based oxygen sensor has been demonstrated The integrated device includes a light emitting diode, an oxygen sensing probe and a CMOS Integrated Circuit (IC). The CMOS IC combines the LED driver circuitry, optical detector and the phase detector circuitry on a single chip. The integrated sensor provides accurate, low cost and low power detection for quantifying oxygen and for recording excited-state lifetimes ranging from nanoseconds to milliseconds.","PeriodicalId":369277,"journal":{"name":"Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132236988","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2003-10-22DOI: 10.1109/ICSENS.2003.1278945
F. Mathew, E. Alocilja
A porous silicon-based biosensor for detection of bacteria was fabricated. Silicon (0.01 ohm-cm, p-type) was anodized electrochemically in a hydrofluoric acid solution containing electrochemical cell using different current and time conditions ranging from 100 mA/cm2 for 30 sec to 2 mA/cm for 1 hr to produce sponge like porous layer of silicon. Anodizing conditions of 5 mA/cm/sup 2/ for 1 hr was best for biosensor fabrication. Porous silicon chips were functionalized using silanization and antibodies immobilized to the porous surface. Chemiluminescence-based assay was used to assess the functionalization of the biosensor. Light emission, for the silanized porous silicon biosensor chip with Salmonella was 10-fold greater than that of the control and non-silanized porous silicon with Salmonella. Higher light emission was observed for porous silanized biosensor with Salmonella compared to that of the non-porous chip. Porous silicon-based biosensor was fabricated and functionalized to successfully detect Salmonella.
{"title":"Fabrication of porous silicon-based biosensor","authors":"F. Mathew, E. Alocilja","doi":"10.1109/ICSENS.2003.1278945","DOIUrl":"https://doi.org/10.1109/ICSENS.2003.1278945","url":null,"abstract":"A porous silicon-based biosensor for detection of bacteria was fabricated. Silicon (0.01 ohm-cm, p-type) was anodized electrochemically in a hydrofluoric acid solution containing electrochemical cell using different current and time conditions ranging from 100 mA/cm2 for 30 sec to 2 mA/cm for 1 hr to produce sponge like porous layer of silicon. Anodizing conditions of 5 mA/cm/sup 2/ for 1 hr was best for biosensor fabrication. Porous silicon chips were functionalized using silanization and antibodies immobilized to the porous surface. Chemiluminescence-based assay was used to assess the functionalization of the biosensor. Light emission, for the silanized porous silicon biosensor chip with Salmonella was 10-fold greater than that of the control and non-silanized porous silicon with Salmonella. Higher light emission was observed for porous silanized biosensor with Salmonella compared to that of the non-porous chip. Porous silicon-based biosensor was fabricated and functionalized to successfully detect Salmonella.","PeriodicalId":369277,"journal":{"name":"Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498)","volume":"64 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132277865","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2003-10-22DOI: 10.1109/ICSENS.2003.1279070
F. Lu, H. Lee, S.P. Lim
Multi-channel Quartz Crystal Microbalance (MQCM) devices have many promising potential applications as sensors in biological engineering. In this work, a finite element modeling of the Multi-channel QCM is constructed using ANSYS. The coupling interference between two adjacent QCMs will affect a MQCM in measuring the surface loading quantitatively. For reduction of the interference, grooves are created between the QCMs. The thickness shearing mode vibration is found to be trapped by the grooves. The effects of the groove on the frequency interference are studied.
{"title":"Finite element modeling and analysis of multi-channel quartz crystal microbalance","authors":"F. Lu, H. Lee, S.P. Lim","doi":"10.1109/ICSENS.2003.1279070","DOIUrl":"https://doi.org/10.1109/ICSENS.2003.1279070","url":null,"abstract":"Multi-channel Quartz Crystal Microbalance (MQCM) devices have many promising potential applications as sensors in biological engineering. In this work, a finite element modeling of the Multi-channel QCM is constructed using ANSYS. The coupling interference between two adjacent QCMs will affect a MQCM in measuring the surface loading quantitatively. For reduction of the interference, grooves are created between the QCMs. The thickness shearing mode vibration is found to be trapped by the grooves. The effects of the groove on the frequency interference are studied.","PeriodicalId":369277,"journal":{"name":"Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129590397","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2003-10-22DOI: 10.1109/ICSENS.2003.1279081
Zhouping Wang, G. Luo, S. Xiao
A novel interface architecture was constructed by a large aggregated pore of carbon nanotube (CNT) captured cyclodextrin (CD) with a small cavity. The isomer recognition ability of various cyclodextrin-incorporated carbon nanotube electrodes (CD-CNT/E) were firstly investigated and characterized systematically by differential pulse voltammetry experiments. Due to the functionalization of CNT with CD, modified electrodes exhibited perfect electrocatalytic response and enhanced recognition ability towards neutral nitrophenol (NP) isomers. The results indicated that /spl alpha/-CD-CNT/E had the best response to p-NP, /spl gamma/-CD-CNT/E did best for o- N P and HP-/spl beta/-CD-CNT/E showed excellent response to m- and p-NP, which originate from the porous structure of aggregated CNT, size selective effect and steric hindrance effect of substituent of CD. The electronic properties of CNT coupled with the specific recognition properties would indeed make for an ideal sensor.
{"title":"Functionalization of cyclodextrins-incorporated carbon nanotube electrodes for neutral nitrophenol recognition","authors":"Zhouping Wang, G. Luo, S. Xiao","doi":"10.1109/ICSENS.2003.1279081","DOIUrl":"https://doi.org/10.1109/ICSENS.2003.1279081","url":null,"abstract":"A novel interface architecture was constructed by a large aggregated pore of carbon nanotube (CNT) captured cyclodextrin (CD) with a small cavity. The isomer recognition ability of various cyclodextrin-incorporated carbon nanotube electrodes (CD-CNT/E) were firstly investigated and characterized systematically by differential pulse voltammetry experiments. Due to the functionalization of CNT with CD, modified electrodes exhibited perfect electrocatalytic response and enhanced recognition ability towards neutral nitrophenol (NP) isomers. The results indicated that /spl alpha/-CD-CNT/E had the best response to p-NP, /spl gamma/-CD-CNT/E did best for o- N P and HP-/spl beta/-CD-CNT/E showed excellent response to m- and p-NP, which originate from the porous structure of aggregated CNT, size selective effect and steric hindrance effect of substituent of CD. The electronic properties of CNT coupled with the specific recognition properties would indeed make for an ideal sensor.","PeriodicalId":369277,"journal":{"name":"Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498)","volume":"40 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133289059","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2003-10-22DOI: 10.1109/ICSENS.2003.1278943
G. Basilio-Sánchez, J. Hernández-Cordero
We present a fiber optic sensor with enhanced sensitivity to changes in circular birefringence. The sensor is based on the combination of a Malus and a Fabry-Perot interferometer, and allows for the sensitive detection of changes in the polarization of the guided beam due to torsion applied to the fiber. The basic idea behind this optical arrangement, known as the Mauls Fabry-Perot (MFP) interferometer (Vallet et al., 1999), is to enhance the sensitivity for the measurement of intra-cavity anisotropies due to multiple passes of the beam through the sensing area. Theoretical analysis based on Jones calculus for a fiber optic MFP interferometer (FOMFPI) shows that it is possible to measure variations in circular birefringence of the fiber upon registering changes in the transmission through this arrangement. Experimental results with a hybrid MFP arrangement of bulk optical components and optical fibers show that, compared to single-pass polarimeters measurements, an enhancement in sensitivity is effectively achieved.
我们提出了一种光纤传感器，提高了对圆双折射变化的灵敏度。该传感器基于Malus和Fabry-Perot干涉仪的组合，可以灵敏地检测由于施加在光纤上的扭转而导致的引导光束偏振的变化。这种被称为Mauls Fabry-Perot (MFP)干涉仪(Vallet et al.， 1999)的光学布置背后的基本思想是，由于光束多次通过传感区域，因此可以提高测量腔内各向异性的灵敏度。基于琼斯演算的光纤MFP干涉仪(FOMFPI)的理论分析表明，通过这种排列记录传输变化，可以测量光纤圆双折射的变化。实验结果表明，与单次偏振光计测量相比，采用块光学元件和光纤的混合MFP排列可以有效地提高灵敏度。
{"title":"Enhancement in sensitivity for fiber optic torsion sensors","authors":"G. Basilio-Sánchez, J. Hernández-Cordero","doi":"10.1109/ICSENS.2003.1278943","DOIUrl":"https://doi.org/10.1109/ICSENS.2003.1278943","url":null,"abstract":"We present a fiber optic sensor with enhanced sensitivity to changes in circular birefringence. The sensor is based on the combination of a Malus and a Fabry-Perot interferometer, and allows for the sensitive detection of changes in the polarization of the guided beam due to torsion applied to the fiber. The basic idea behind this optical arrangement, known as the Mauls Fabry-Perot (MFP) interferometer (Vallet et al., 1999), is to enhance the sensitivity for the measurement of intra-cavity anisotropies due to multiple passes of the beam through the sensing area. Theoretical analysis based on Jones calculus for a fiber optic MFP interferometer (FOMFPI) shows that it is possible to measure variations in circular birefringence of the fiber upon registering changes in the transmission through this arrangement. Experimental results with a hybrid MFP arrangement of bulk optical components and optical fibers show that, compared to single-pass polarimeters measurements, an enhancement in sensitivity is effectively achieved.","PeriodicalId":369277,"journal":{"name":"Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498)","volume":"2 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114462356","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2003-10-22DOI: 10.1109/ICSENS.2003.1279117
E. Comini, G. Sberveglieri, M. Ferroni, S. Polizzi, V. Guidi, G. Martinelli
Thin films with variable concentrations of niobium and titanium mixed oxides have been achieved by reactive sputtering process and p-type sensing layers have been achieved. Structural and morphological studies have been carried out by means of SEM, TEM and AFM in order to understand the measurement of sensing performance. The films proved sensitive to ethanol and carbon monoxide. It was also shown that annealing temperature and niobium content strongly influence the gas response of the films leading from n-type response typical of TiO/sub 2/ and the most of metal oxide sensors to p-type response and this peculiarity is crucial for the discrimination of different gases.
{"title":"Novel p-type gas sensing thin film based on Nb-Ti-O mixed oxides","authors":"E. Comini, G. Sberveglieri, M. Ferroni, S. Polizzi, V. Guidi, G. Martinelli","doi":"10.1109/ICSENS.2003.1279117","DOIUrl":"https://doi.org/10.1109/ICSENS.2003.1279117","url":null,"abstract":"Thin films with variable concentrations of niobium and titanium mixed oxides have been achieved by reactive sputtering process and p-type sensing layers have been achieved. Structural and morphological studies have been carried out by means of SEM, TEM and AFM in order to understand the measurement of sensing performance. The films proved sensitive to ethanol and carbon monoxide. It was also shown that annealing temperature and niobium content strongly influence the gas response of the films leading from n-type response typical of TiO/sub 2/ and the most of metal oxide sensors to p-type response and this peculiarity is crucial for the discrimination of different gases.","PeriodicalId":369277,"journal":{"name":"Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498)","volume":"39 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114468460","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2003-10-22DOI: 10.1109/ICSENS.2003.1279156
Y. Hu, O. Tan, W. Cao, W. Zhu
SrTiO/sub 3/ oxygen sensor were fabricated from synthesized SrTiO/sub 3/ and commercial SrTiO/sub 3/ using high-energy ball milling and the thick-film screen-printing techniques. The particle sizes, microstructural properties and oxygen sensing properties of the synthesized nano-structured SrTiO/sub 3/ oxygen sensor were characterized using X-ray diffraction (XRD) and gas sensing measurements. Experimental results showed that particle size of the powders were milled down to be around 20 nm. The effect of different annealing temperatures (400, 500, 600, 700 and 800/spl deg/C) on the gas sensing properties of the synthesized SrTiO/sub 3/ sensor to 20% oxygen was characterized. The commercial SrTiO/sub 3/ (with milling 0 hours and 120 hours) devices, annealed at 400/spl deg/C, were used as reference. The optimal relative resistance (R/sub nitrogen//P/sub oxygen/) value of 6.35 is obtained for the synthesized SrTiO/sub 3/ sample annealed at 400/spl deg/C and operating at 40/spl deg/C. This operating temperature is much lower than that of the normal low temperature metal oxide semiconducting oxygen gas sensors(300-500/spl deg/C) and SrTiO/sub 3/ oxygen gas sensors (>700/spl deg/C). The response and recovery times are 1.6 minutes and 5 minutes respectively. This is considered fast for near-room temperature operated sensor device. The detected range is 1-20% oxygen. This is a very wide range possible for a single type of sensor material.
{"title":"Fabrication & characterization of SrTiO/sub 3/ oxygen sensor operating at very low temperature","authors":"Y. Hu, O. Tan, W. Cao, W. Zhu","doi":"10.1109/ICSENS.2003.1279156","DOIUrl":"https://doi.org/10.1109/ICSENS.2003.1279156","url":null,"abstract":"SrTiO/sub 3/ oxygen sensor were fabricated from synthesized SrTiO/sub 3/ and commercial SrTiO/sub 3/ using high-energy ball milling and the thick-film screen-printing techniques. The particle sizes, microstructural properties and oxygen sensing properties of the synthesized nano-structured SrTiO/sub 3/ oxygen sensor were characterized using X-ray diffraction (XRD) and gas sensing measurements. Experimental results showed that particle size of the powders were milled down to be around 20 nm. The effect of different annealing temperatures (400, 500, 600, 700 and 800/spl deg/C) on the gas sensing properties of the synthesized SrTiO/sub 3/ sensor to 20% oxygen was characterized. The commercial SrTiO/sub 3/ (with milling 0 hours and 120 hours) devices, annealed at 400/spl deg/C, were used as reference. The optimal relative resistance (R/sub nitrogen//P/sub oxygen/) value of 6.35 is obtained for the synthesized SrTiO/sub 3/ sample annealed at 400/spl deg/C and operating at 40/spl deg/C. This operating temperature is much lower than that of the normal low temperature metal oxide semiconducting oxygen gas sensors(300-500/spl deg/C) and SrTiO/sub 3/ oxygen gas sensors (>700/spl deg/C). The response and recovery times are 1.6 minutes and 5 minutes respectively. This is considered fast for near-room temperature operated sensor device. The detected range is 1-20% oxygen. This is a very wide range possible for a single type of sensor material.","PeriodicalId":369277,"journal":{"name":"Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498)","volume":"16 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114639468","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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