Pub Date : 1989-02-20DOI: 10.1109/MEMSYS.1989.77953
Stephen C. Jacobsen, Richard H. Price, J. E. Wood, T. Rytting, M. Rafaelof
A variety of micromotor concepts has been evaluated, with the wobble motor (WM) approach being one of those selected for extensive study. Various WM configurations have been analytically evaluated using finite-element methods and closed-form solutions. Important performance characteristics have been estimated such as stall torque and free speed, and alternate strategies for motor control have been examined. Five motor configurations and a variety of silicon-based and non-silicon-based fabrication techniques have been examined in detail. In exploratory exercises, motors have been fabricated using direct mechanical assembly, electro-discharge machining (EDM), cylindrical photolithographic etching, and coextrusion of metal and plastic. The EDM approach was selected as the motor alternative which could function as an experimental testbed. Fifteen EDM WMs have been constructed and utilized for experimental purposes. Experiments aimed at generating simple preliminary data have been conducted, and results compare reasonably to analytical studies.<>
{"title":"The wobble motor: an electrostatic, planetary-armature, microactuator","authors":"Stephen C. Jacobsen, Richard H. Price, J. E. Wood, T. Rytting, M. Rafaelof","doi":"10.1109/MEMSYS.1989.77953","DOIUrl":"https://doi.org/10.1109/MEMSYS.1989.77953","url":null,"abstract":"A variety of micromotor concepts has been evaluated, with the wobble motor (WM) approach being one of those selected for extensive study. Various WM configurations have been analytically evaluated using finite-element methods and closed-form solutions. Important performance characteristics have been estimated such as stall torque and free speed, and alternate strategies for motor control have been examined. Five motor configurations and a variety of silicon-based and non-silicon-based fabrication techniques have been examined in detail. In exploratory exercises, motors have been fabricated using direct mechanical assembly, electro-discharge machining (EDM), cylindrical photolithographic etching, and coextrusion of metal and plastic. The EDM approach was selected as the motor alternative which could function as an experimental testbed. Fifteen EDM WMs have been constructed and utilized for experimental purposes. Experiments aimed at generating simple preliminary data have been conducted, and results compare reasonably to analytical studies.<<ETX>>","PeriodicalId":369505,"journal":{"name":"IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots'","volume":"36 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1989-02-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124995237","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1989-02-20DOI: 10.1109/MEMSYS.1989.77981
O. Tabata, K. Kawahata, S. Sugiyama, I. Igarashi
The internal stress and Young's modulus of thin films are determined by measuring the deflection versus pressure of the rectangular membranes of materials. In order to reduce the measurement error for the Young's modulus due to an unknown Poisson's ratio, a 2 mm*8 mm rectangular membrane is adopted. Measurements are made by using a computerized measurement system. Low-pressure chemical-vapor-deposited (LPCVD) silicon nitride films are characterized and found to have an internal stress of 1.0 GPa and a Young's modulus of 290 GPa. By using this composite membrane technique, an LPCVD polysilicon film and a plasma-CVD silicon nitride film are characterized. The internal stress and Young's modulus were found to be -0.18 GPa and 160 GPa for the LPCVD polysilicon film and 0.11 GPa and 210 GPa for the plasma-CVD silicon nitride film.<>
{"title":"Mechanical property measurements of thin films using load-deflection of composite rectangular membrane","authors":"O. Tabata, K. Kawahata, S. Sugiyama, I. Igarashi","doi":"10.1109/MEMSYS.1989.77981","DOIUrl":"https://doi.org/10.1109/MEMSYS.1989.77981","url":null,"abstract":"The internal stress and Young's modulus of thin films are determined by measuring the deflection versus pressure of the rectangular membranes of materials. In order to reduce the measurement error for the Young's modulus due to an unknown Poisson's ratio, a 2 mm*8 mm rectangular membrane is adopted. Measurements are made by using a computerized measurement system. Low-pressure chemical-vapor-deposited (LPCVD) silicon nitride films are characterized and found to have an internal stress of 1.0 GPa and a Young's modulus of 290 GPa. By using this composite membrane technique, an LPCVD polysilicon film and a plasma-CVD silicon nitride film are characterized. The internal stress and Young's modulus were found to be -0.18 GPa and 160 GPa for the LPCVD polysilicon film and 0.11 GPa and 210 GPa for the plasma-CVD silicon nitride film.<<ETX>>","PeriodicalId":369505,"journal":{"name":"IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots'","volume":"20 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1989-02-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121665511","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1989-02-20DOI: 10.1109/MEMSYS.1989.77974
W. Benecke, W. Riethmuller
Microactuators for electromechanical signal conversion are described. Basic elements of the transducer are a bimorph structure and an integrated heat source. Due to the differences of the coefficients of thermal expansion, a temperature-controlled deformation of the the bimorph structure occurs. Bulk and surface micromachining techniques can be used to achieve an object displacement perpendicular to or within the substrate plane. The main advantages of this class of actuators are simple fabrication processes and operation at standard IC (integrated circuit) voltage levels, allowing further system integration. The conversion characteristics are described, and the application of these transducers for microvalves, optical components, manipulators, and motors is discussed.<>
{"title":"Applications of silicon microactuators based on bimorph structures","authors":"W. Benecke, W. Riethmuller","doi":"10.1109/MEMSYS.1989.77974","DOIUrl":"https://doi.org/10.1109/MEMSYS.1989.77974","url":null,"abstract":"Microactuators for electromechanical signal conversion are described. Basic elements of the transducer are a bimorph structure and an integrated heat source. Due to the differences of the coefficients of thermal expansion, a temperature-controlled deformation of the the bimorph structure occurs. Bulk and surface micromachining techniques can be used to achieve an object displacement perpendicular to or within the substrate plane. The main advantages of this class of actuators are simple fabrication processes and operation at standard IC (integrated circuit) voltage levels, allowing further system integration. The conversion characteristics are described, and the application of these transducers for microvalves, optical components, manipulators, and motors is discussed.<<ETX>>","PeriodicalId":369505,"journal":{"name":"IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots'","volume":"32 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1989-02-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131505375","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1989-02-20DOI: 10.1109/MEMSYS.1989.77954
J. Harley, H. Bau, J. Zemel, V. Dominko
Experiments on flow in micron- and submicron-size channels were conducted. The long-term objectives of the study were to investigate: (1) the length scales at which continuum assumptions break down; (2) whether the Navier-Stokes (N-S) equations adequately model the fluid flow in these very small scales or whether should they be modified and, if so, how; (3) whether phenomena which typically are ignored at large scales become important at small scales; and (4) whether transition to turbulence is affected by the small size of the channels. The test structure consisted of a single channel etched in silicon using planar photolithographic micromachining techniques. Tentative results are reported. It is observed that, in channels with relatively large cross-sections, the fluid roughly behaves in accordance with predictions based on the N-S equations. In smaller-size channels there are large deviations between experimental observations and N-S predictions.<>
{"title":"Fluid flow in micron and submicron size channels","authors":"J. Harley, H. Bau, J. Zemel, V. Dominko","doi":"10.1109/MEMSYS.1989.77954","DOIUrl":"https://doi.org/10.1109/MEMSYS.1989.77954","url":null,"abstract":"Experiments on flow in micron- and submicron-size channels were conducted. The long-term objectives of the study were to investigate: (1) the length scales at which continuum assumptions break down; (2) whether the Navier-Stokes (N-S) equations adequately model the fluid flow in these very small scales or whether should they be modified and, if so, how; (3) whether phenomena which typically are ignored at large scales become important at small scales; and (4) whether transition to turbulence is affected by the small size of the channels. The test structure consisted of a single channel etched in silicon using planar photolithographic micromachining techniques. Tentative results are reported. It is observed that, in channels with relatively large cross-sections, the fluid roughly behaves in accordance with predictions based on the N-S equations. In smaller-size channels there are large deviations between experimental observations and N-S predictions.<<ETX>>","PeriodicalId":369505,"journal":{"name":"IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots'","volume":"114 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1989-02-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132878690","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1989-02-20DOI: 10.1109/MEMSYS.1989.77952
W. Trimmer, R. Jebens
An operational harmonic electrostatic motor is described. A cylindrical rotor is placed inside a hollow cylindrical hole of slightly larger diameter. Electrodes on the circumference of the hole electrostatically attract the rotor and cause it to roll inside the stator. The harmonic motion of the rotor produces a gear reduction between the electrical drive frequency and the shaft rotation rate. This motor design has the advantage of increasing the torque of the motor. This motor has several other advantages. First, it uses the clamping force, normally larger than the tangential force used by most electrostatic motor designs, to generate the motion. Second, the sliding friction between the rotor and stator, a source of hindrance for most micro electrostatic motors, helps be keeping the rotor and stator from slipping. Third, this motor uses rolling surfaces that dissipate less energy in fiction than sliding surfaces.<>
{"title":"An operational harmonic electrostatic motor","authors":"W. Trimmer, R. Jebens","doi":"10.1109/MEMSYS.1989.77952","DOIUrl":"https://doi.org/10.1109/MEMSYS.1989.77952","url":null,"abstract":"An operational harmonic electrostatic motor is described. A cylindrical rotor is placed inside a hollow cylindrical hole of slightly larger diameter. Electrodes on the circumference of the hole electrostatically attract the rotor and cause it to roll inside the stator. The harmonic motion of the rotor produces a gear reduction between the electrical drive frequency and the shaft rotation rate. This motor design has the advantage of increasing the torque of the motor. This motor has several other advantages. First, it uses the clamping force, normally larger than the tangential force used by most electrostatic motor designs, to generate the motion. Second, the sliding friction between the rotor and stator, a source of hindrance for most micro electrostatic motors, helps be keeping the rotor and stator from slipping. Third, this motor uses rolling surfaces that dissipate less energy in fiction than sliding surfaces.<<ETX>>","PeriodicalId":369505,"journal":{"name":"IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots'","volume":"32 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1989-02-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133747221","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1989-02-20DOI: 10.1109/MEMSYS.1989.77950
Yu-Chong Tai, L. Fan, Richard S. Muller
Micromotors having rotors with diameters between 60 and 120 mu m have been fabricated and driven electrostatically to continuous rotation. These motors were built using processes derived from IC (integrated circuit) microcircuit fabrication techniques. Initial tests on the motors show that friction plays a dominant role in their dynamic behavior. Observed rotational speeds have thus far been limited to several hundred r.p.m., which is a small fraction of what would be achievable if only natural frequency were to limit the response. Experimental starting voltages are at least an order of magnitude larger than had been expected (60 V at minimum and above 100 V for some structures). Observations of asynchronous as well as synchronous rotation between the driving fields and the rotors can be explained in terms of the torque/rotor-angle characteristics for the motors.<>
{"title":"IC-processed micro-motors: design, technology, and testing","authors":"Yu-Chong Tai, L. Fan, Richard S. Muller","doi":"10.1109/MEMSYS.1989.77950","DOIUrl":"https://doi.org/10.1109/MEMSYS.1989.77950","url":null,"abstract":"Micromotors having rotors with diameters between 60 and 120 mu m have been fabricated and driven electrostatically to continuous rotation. These motors were built using processes derived from IC (integrated circuit) microcircuit fabrication techniques. Initial tests on the motors show that friction plays a dominant role in their dynamic behavior. Observed rotational speeds have thus far been limited to several hundred r.p.m., which is a small fraction of what would be achievable if only natural frequency were to limit the response. Experimental starting voltages are at least an order of magnitude larger than had been expected (60 V at minimum and above 100 V for some structures). Observations of asynchronous as well as synchronous rotation between the driving fields and the rotors can be explained in terms of the torque/rotor-angle characteristics for the motors.<<ETX>>","PeriodicalId":369505,"journal":{"name":"IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots'","volume":"8 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1989-02-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128236505","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1989-02-20DOI: 10.1109/MEMSYS.1989.77971
I. Hunter, S. Lafontaine, Poul M. F. Nielsen, P. Hunter, J. Hollerbach
A high-performance parallel-drive microrobot has been developed for manipulation, surgery, and dynamic mechanical testing of single living muscle cells. The microrobot has two limbs which more in overlapping spherical workspaces of 1 mm diameter with minimum open-loop and closed-loop movements of 1 nm and 10 nm, respectively. Under nonlinear model-based control the limbs can move at up to 2 m/s relative to each other. Ferroelectric polymer microgrippers have been fabricated to facilitate cell manipulation. The microrobot has a three-dimensional laser vision system with a resolution of 50 to 100 nm. Volume images containing magnitude, phase, polarization, and spectral information can be acquired. The microrobot incorporates facilities to keep single living cells alive for long periods. A macro version of the microrobot has been built to allow force-reflecting teleoperation of the microrobot. The tele-microrobot system constitutes a mechanical microscope in which microscopic objects can be felt. The macro-interface also enables the operator to feel mechanical continuum models. A parallel computation and control computer has been designed to meet the substantial numerical requirements of the tele-microrobot system.<>
{"title":"A tele-microrobot for manipulation and dynamic mechanical testing of single living cells","authors":"I. Hunter, S. Lafontaine, Poul M. F. Nielsen, P. Hunter, J. Hollerbach","doi":"10.1109/MEMSYS.1989.77971","DOIUrl":"https://doi.org/10.1109/MEMSYS.1989.77971","url":null,"abstract":"A high-performance parallel-drive microrobot has been developed for manipulation, surgery, and dynamic mechanical testing of single living muscle cells. The microrobot has two limbs which more in overlapping spherical workspaces of 1 mm diameter with minimum open-loop and closed-loop movements of 1 nm and 10 nm, respectively. Under nonlinear model-based control the limbs can move at up to 2 m/s relative to each other. Ferroelectric polymer microgrippers have been fabricated to facilitate cell manipulation. The microrobot has a three-dimensional laser vision system with a resolution of 50 to 100 nm. Volume images containing magnitude, phase, polarization, and spectral information can be acquired. The microrobot incorporates facilities to keep single living cells alive for long periods. A macro version of the microrobot has been built to allow force-reflecting teleoperation of the microrobot. The tele-microrobot system constitutes a mechanical microscope in which microscopic objects can be felt. The macro-interface also enables the operator to feel mechanical continuum models. A parallel computation and control computer has been designed to meet the substantial numerical requirements of the tele-microrobot system.<<ETX>>","PeriodicalId":369505,"journal":{"name":"IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots'","volume":"77 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1989-02-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134153654","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1989-02-20DOI: 10.1109/MEMSYS.1989.77956
R. Jebens, W. Trimmer, J. Walker
Two microactuators to align fiber optics are described. One, an actuator using a thin strand of shape memory alloy, is used to align an input fiber with one of two output fibers. This component is useful for switching fiber-optic signals. The second is an electrostatic actuator capable of switching optical fibers and making fine adjustments to correct for misalignments. Single-point diamond machining (and associated molding technology) has been shown to be a viable alternative to etching Vee grooves in silicon for holding and aligning fibers.<>
{"title":"Micro actuators for aligning optical fibers","authors":"R. Jebens, W. Trimmer, J. Walker","doi":"10.1109/MEMSYS.1989.77956","DOIUrl":"https://doi.org/10.1109/MEMSYS.1989.77956","url":null,"abstract":"Two microactuators to align fiber optics are described. One, an actuator using a thin strand of shape memory alloy, is used to align an input fiber with one of two output fibers. This component is useful for switching fiber-optic signals. The second is an electrostatic actuator capable of switching optical fibers and making fine adjustments to correct for misalignments. Single-point diamond machining (and associated molding technology) has been shown to be a viable alternative to etching Vee grooves in silicon for holding and aligning fibers.<<ETX>>","PeriodicalId":369505,"journal":{"name":"IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots'","volume":"52 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1989-02-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122752112","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1989-02-20DOI: 10.1109/MEMSYS.1989.77970
A. Flynn, R. Brooks, W.M. Wells, D. Barrett
The authors describe an exercise of building a complete robot system, aimed at being as small as possible, but using off-the-shelf components exclusively. The result is an autonomous one (almost) cubic inch robot which incorporates sensing. actuation, onboard computation, and onboard power supplies. Nicknamed Squirt this robot acts as a bug hiding in dark corners and venturing out in the direction of last-heard noises, only moving after the noises are long gone.<>
{"title":"The world's largest one cubic inch robot","authors":"A. Flynn, R. Brooks, W.M. Wells, D. Barrett","doi":"10.1109/MEMSYS.1989.77970","DOIUrl":"https://doi.org/10.1109/MEMSYS.1989.77970","url":null,"abstract":"The authors describe an exercise of building a complete robot system, aimed at being as small as possible, but using off-the-shelf components exclusively. The result is an autonomous one (almost) cubic inch robot which incorporates sensing. actuation, onboard computation, and onboard power supplies. Nicknamed Squirt this robot acts as a bug hiding in dark corners and venturing out in the direction of last-heard noises, only moving after the noises are long gone.<<ETX>>","PeriodicalId":369505,"journal":{"name":"IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots'","volume":"36 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1989-02-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114054283","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1988-09-30DOI: 10.1109/MEMSYS.1989.77977
R.S. Hijab, R. Muller
The authors describe techniques that result in low-strain materials and that reduce the effects of residual strain in microdiaphragms, which are used in capacitive-readout sensors. Square polysilicon grilles and perforated diaphragms made from both single and double polysilicon layers and from single-crystal silicon, with aspect ratios (side/thickness) of up to 1000 and very low compressive strain (about 6*10/sup -5/), have been fabricated. Strain reduction is achieved by combining thermal annealing with one of two mechanical design techniques. The first technique makes use of a series of cantilever beams to support the diaphragms. In a second procedure, corrugated surfaces, in thinned membranes of single-crystal silicon are formed. The corrugations result from the use of boron doping and anisotropic silicon etching. In both of these techniques to produce low-strain diaphragms, an etched cavity is purposely formed in the substrate crystal below them. Only one-sided processing of wafers is used, thus aiding reproducibility and providing ease of compatibility with a metal-oxide-semiconductor process. A fast etching sacrificial-support layer (phosphorus-doped chemical-vapor-deposited oxide) is used.<>
{"title":"Residual strain effects on large aspect ratio micro-diaphragms (capacitance transducer)","authors":"R.S. Hijab, R. Muller","doi":"10.1109/MEMSYS.1989.77977","DOIUrl":"https://doi.org/10.1109/MEMSYS.1989.77977","url":null,"abstract":"The authors describe techniques that result in low-strain materials and that reduce the effects of residual strain in microdiaphragms, which are used in capacitive-readout sensors. Square polysilicon grilles and perforated diaphragms made from both single and double polysilicon layers and from single-crystal silicon, with aspect ratios (side/thickness) of up to 1000 and very low compressive strain (about 6*10/sup -5/), have been fabricated. Strain reduction is achieved by combining thermal annealing with one of two mechanical design techniques. The first technique makes use of a series of cantilever beams to support the diaphragms. In a second procedure, corrugated surfaces, in thinned membranes of single-crystal silicon are formed. The corrugations result from the use of boron doping and anisotropic silicon etching. In both of these techniques to produce low-strain diaphragms, an etched cavity is purposely formed in the substrate crystal below them. Only one-sided processing of wafers is used, thus aiding reproducibility and providing ease of compatibility with a metal-oxide-semiconductor process. A fast etching sacrificial-support layer (phosphorus-doped chemical-vapor-deposited oxide) is used.<<ETX>>","PeriodicalId":369505,"journal":{"name":"IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots'","volume":"40 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1988-09-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116021350","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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