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Zero-Temperature-Coefficient SAW Devices on AlN Epitaxial Films AlN外延薄膜上的零温度系数SAW器件
Pub Date : 1985-09-01 DOI: 10.1109/T-SU.1985.31647
K. Tsubouchi, Nobuo
De nouvelles technologies de couches minces sont indispensables pour integrer les dispositifs a onde acoustique de surface ayant un coefficient de variation thermique nul avec des dispositifs semiconducteurs actifs sur une meme pastille, ce qui donnerait un circuit integre a haute frequence sur support de silicium ou support de silicium sur saphir. Les couches minces de AlN ont un interet dans le domaine du GHz a cause de la vitesse de propagation elevee. Des lignes a retard a coefficient de variation thermique nul fonctionnant au-dela de 1 GHz sont fabriquees avec une combinaison AlN/saphir. Croissance cristalline; evaluation des parametres; pertes de propagation, dispersion en frequence, epaisseur de couches; coefficient de variation thermique du retard; insertion dans le circuit integre; effet de la temperature sur le correlateur d'ondes acoustiques de surface
薄层对于新技术整合了表面声波装置具有变异系数的热与半导体器件的零资产对片剂,可是这一电路中集成了高频次或硅衬底上的蓝宝石上硅衬底。薄AlN层在GHz范围内具有很高的传播速度。运行在1ghz以上的零热变化系数延迟线采用AlN/蓝宝石组合制造。晶体生长;参数评估;传播损耗、频率色散、层厚;滞后热变异系数;集成电路的插入;温度对表面声波相关器的影响
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引用次数: 390
Small-Aperture Focusing Chirp Transducers vs. Diffraction-Compensated Beam Compressors in Elastic SAW Convolvers 弹性SAW卷积器中的小孔径聚焦啁啾换能器与衍射补偿光束压缩器
Pub Date : 1985-09-01 DOI: 10.1109/T-SU.1985.31651
H. Grassl, H. Engan
Abstmct-High performance has been achieved in SAW convolvers using diffraction-corrected multistrip beam compressors. However, two different levels of metalization are required for optimum performance. A significant simplification of device fabrication was achieved with the design of convolvers using small-aperture chirp transducers, which require only one metalization layer. A design procedure is described that makes the transducers focusing to minimize diffraction loss. Experimental results are presented, which show that performance of this new design surpasses conventional designs in several respects. I. INTRODUCTION M ONOLITHIC acoustic surface wave convolvers on YZ-LiNb03 combine high-speed signal processing capability with ruggedness, small size, and relatively low cost of the device-thanks to the simplicity of its construction. However, the intrinsic nonlinearity of the substrate material polarization, which is used to generate the mixing product of the two input signals, is low and limits the efficiency of the device. High efficiency is crucial to achieve high dynamic range and economize input power. Since the introduction of beamwidth compression [l] to boost device efficiency, the elastic convolver has been developed to high performance in several laboratories [2], [3], [4] by optimization of its various components. The aim of such optimization was to increase the device efficiency by eliminating sources of loss in the acoustic path and providing good match at all electrical ports, while tailoring the device characteristics to minimize signal distortion and suppress spurious signals [5]. This means that the convolution efficiency vs. frequency should be reasonably flat and smooth in magnitude and linear in phase over the desired bandwidth. Notably reflections of acoustic waves in the device have to be suppressed to avoid selfconvolution of one input signal. The distributed output signal has to be collected from the integrating electrode in such a way as to avoid electromagnetic propagation loss or destructive interference of various signal components due to long-line effects. By these considerations one arrives at a standard design scheme as shown in Fig. 1. Interdigital transducers, which convert the input signals, typically are unapodized to avoid
摘要:采用衍射校正的多带波束压缩器实现了声表面波卷积器的高性能。然而,为了获得最佳性能,需要两种不同程度的金属化。利用小孔径啁啾换能器设计卷积器,实现了器件制造的显著简化,只需要一个金属化层。描述了使换能器聚焦以减小衍射损失的设计过程。实验结果表明,该设计在多个方面都优于传统设计。YZ-LiNb03上的ONOLITHIC声表面波卷积器将高速信号处理能力与坚固耐用,体积小,成本相对较低的设备相结合-这得益于其结构简单。然而,用于产生两个输入信号混合积的衬底材料极化的本征非线性较低,限制了器件的效率。高效率是实现高动态范围和节约输入功率的关键。自引入波束宽度压缩[1]以提高器件效率以来,弹性卷积器已经在几个实验室中通过优化其各个组件而发展到高性能[2],[3],[4]。这种优化的目的是通过消除声路径中的损耗源并在所有电端口提供良好的匹配来提高设备效率,同时定制设备特性以最小化信号失真并抑制杂散信号[5]。这意味着卷积效率相对于频率的幅度应该是相当平坦和平滑的,并且在期望的带宽上相位应该是线性的。值得注意的是,设备中声波的反射必须被抑制,以避免一个输入信号的自卷积。从积分电极收集分布式输出信号时,必须避免电磁传播损失或各种信号分量由于长线效应而产生的破坏性干扰。通过这些考虑,可以得出如图1所示的标准设计方案。用于转换输入信号的数字间换能器通常没有设计以避免
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引用次数: 15
Theory of the p + n Diode SAW Storage Correlator in the Flash Mode 闪存模式下p + n二极管SAW存储相关器的原理
Pub Date : 1985-09-01 DOI: 10.1109/T-SU.1985.31657
M. Nokali
Abstmct-The theory of the gap-coupled surface acoustic wave p'n diode storage correlator operated in the flash mode is presented. The circuit model used in the analysis of both the storage and the read-out processes is reviewed. The effect of the minority carrier lifetime and the voltage dependence of the diode capacitance are included for the first time in the analysis of the flash-mode writing process. A straightforward transmission line theory approach is developed to find the surface wave amplitude excited by the diode potential during the readout process. The calculated predictions of this theory are in good agreement with experimental data and tend to confirm the possibility of ohtaining efficient storage with a single write-in short pulse. HE FLASH technique was applied to the p'n diode SAW storage correlator by Gautier et al. [l], who were unable to store any signal in the diodes with one write-in short pulse when using a planar vidicon array with a long minority carrier lifetime (60 p). This negative result is explained as follows. The pulse used to charge the array has a duration of 5-10 ns. With a long minority carrier lifetime the holes injected from the p-island into the n-side do not recombine and a large number of these carriers will tend to diffuse back across the junction after the pulse is turned off. The general consensus then was that the use of diffused diode devices was limited to narrow bandwidth signal applications because of the long charging times required; i.e., that the parametric technique should be used in conjunction with diffused pn diodes. Using a V-groove mesa diode structure, Borden and Kino [2] demonstrated that p+n diodes can be charged with a single short pulse and that the charge is stored for milliseconds. They attributed their success to the fact that with such structures the minority carrier lifetime is several orders of magnitude shorter than the planar vidicon array used by other groups. However, the large magnitude of the storage time which they reported seems to contradict the obvious fact that a reduction in the minority carrier lifetime will undoubtedly reduce the storage time. Loh et al. [3], commenting on Borden and Kino's results, concluded that the deliberate introduction of asymmetric, rather than symmetric, trapping levels was responsible for their success in efficiently charging a pfn diode with a single short pulse since the presence of these
摘要:介绍了工作在闪光模式下的间隙耦合表面声波二极管存储相关器的工作原理。回顾了用于分析存储过程和读出过程的电路模型。本文首次将少数载流子寿命和二极管电容电压依赖性的影响纳入闪存模式写入过程的分析中。提出了一种直接的传输线理论方法来求二极管电位在读出过程中激发的表面波幅度。该理论的计算预测与实验数据很好地吻合,并倾向于确认单次写入短脉冲保持高效存储的可能性。Gautier等人[1]将HE FLASH技术应用于p'n二极管SAW存储相关器,当使用具有较长少数载波寿命(60 p)的平面视屏阵列时,他们无法在一个写入短脉冲的二极管中存储任何信号。这一负面结果解释如下。用于给阵列充电的脉冲持续时间为5-10纳秒。由于少数载流子寿命长,从p岛注入到n侧的空穴不会重新组合,并且在脉冲关闭后,大量载流子将倾向于扩散回结。当时的普遍共识是,由于需要长时间充电,扩散二极管器件的使用仅限于窄带宽信号应用;也就是说,参数化技术应与扩散pn二极管结合使用。利用v型凹槽台面二极管结构,Borden和Kino[2]证明了p+n二极管可以用单个短脉冲充电,并且电荷存储时间为几毫秒。他们将他们的成功归功于这样一个事实,即在这种结构下,少数载流子寿命比其他小组使用的平面视屏阵列短几个数量级。然而,他们报告的存储时间的大幅度似乎与明显的事实相矛盾,即减少少数载流子寿命无疑会减少存储时间。Loh等人[3]评论了Borden和Kino的结果,得出结论,故意引入非对称而非对称的捕获电平是他们成功地用单个短脉冲给pfn二极管充电的原因
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引用次数: 1
Acoustoelectric Interactions in Thin-Film Semiconductors Induced by Two Contra-Directed Surface Acoustic Waves 两对向表面声波诱导的薄膜半导体声电相互作用
Pub Date : 1985-09-01 DOI: 10.1109/T-SU.1985.31648
Wen-Chung Wang, H. Schachter, B. Elasir, Z.S. Wu, S. Onishi
The nonlinear acoustoelectric interactions due to two con- tra-directed surface acoustic waves (SAW) for device geometries, consist- ing of semiconductor thin films, are analyzed in a unified and coherent manner. Main features of the nonlinear interactions to be addressed are biphased characteristics, signal enhancement, symmetry, and surface conditions. The geometries discussed are those utilizing the transverse, the normal and the tangential components of electric fields induced by two contra-directed SAW's through piezoelectric coupling. Experimental results are included. ARIOUS TYPES of acoustoelectric signal processors have been reported ( l)-(21). However, most of the structures discussed so far are with semiconductors of infinite thickness; i.e., larger than several Debye lengths. In this paper the nonlinear acoustoelectric interactions due to two contra- directed surface acoustic waves (SAW) for device geometries, particularly consisting of semiconductor thin films, are analyzed in a unified and coherent manner. Main features of the nonlinear interactions to be addressed are biphased characteristics, signal enhancement, symmetry, and surface conditions. Geometries to be discussed are those utilizing the transverse, the normal and the tangential components of electric fields induced by two contra-directed SAW's through piezoelectric coupling. Assuming that the surface acoustic waves are propagating in the z-direction, substrate surface is in the xz plane and the surface normal is in the y direction. Then, the transverse, normal, and tangential correspond to the directions of x, y, and z, respectively. In the transverse-mode operation, the nonlinear signal generation due to two contra-directed SAW's at both the sum and difference frequencies are zero in the absence of dc biasing due to the symmetry of the device
对由半导体薄膜组成的器件几何形状的两个反方向表面声波(SAW)所引起的非线性声电相互作用进行了统一连贯的分析。要处理的非线性相互作用的主要特征是双相特性、信号增强、对称性和表面条件。讨论的几何形状是利用两个反向声表面波通过压电耦合产生的电场的横向、法向和切向分量的几何形状。包括实验结果。各种类型的声电信号处理器已被报道(1)-(21)。然而,到目前为止讨论的大多数结构都是无限厚度的半导体;即,大于几个德拜长度。本文统一连贯地分析了由两个对向表面声波(SAW)引起的非线性声电相互作用,特别是由半导体薄膜组成的器件几何形状。要处理的非线性相互作用的主要特征是双相特性、信号增强、对称性和表面条件。要讨论的几何图形是利用两个反向声表面波通过压电耦合产生的电场的横向、法向和切向分量的几何图形。假设表面声波沿z方向传播,基材表面在xz平面,表面法线在y方向。然后,横线、法线和切线分别对应于x、y和z方向。在横模工作中,由于器件的对称性,在不存在直流偏置的情况下,两个反向声表面波在和频率和差频率处产生的非线性信号为零
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引用次数: 7
Implant-Isolated SAW Storage Correlator 植体隔离SAW存储相关器
Pub Date : 1985-09-01 DOI: 10.1109/T-SU.1985.31655
S. S. Schwartz, R. Gunshor, R. Pierret
Abstmct-The development of surface acoustic wave (SAW) convolvers and correlators is reviewed. This is followed by the introduction of a new type of monolithic metal-zinc oxide-silicon dioxide-silicon storage correlator. Fabrication and operation of the implant isolated storage correlator, which relies on ion implantation for confinement of storage regions, is detailed. A capacitance-time measurement procedure for evaluation of the charge storage capability of the device is described, and correlation output information is used to estimate the effective recombination rate of the inversion layer charges. Finally, operational characteristics are examined and the new bias stable device is shown to exhibit a 3-dB storage time in excess of 0.5 S. The cited storage time exceeds reported storage times of other structures fabricated in the ZnO-Si0,-Si layered medium configuration.
摘要综述了表面声波(SAW)卷积器和相关器的发展。接着介绍了一种新型单片金属-氧化锌-二氧化硅-硅存储相关器。详细介绍了依靠离子注入限制存储区的植入隔离存储相关器的制作和操作。描述了一种评价器件电荷存储能力的电容时间测量方法,并利用相关输出信息估计反转层电荷的有效复合率。最后,对工作特性进行了测试,表明新的偏置稳定器件具有超过0.5 s的3 db存储时间,引用的存储时间超过了在ZnO-Si0,-Si层状介质配置中制造的其他结构的存储时间。
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引用次数: 2
Principles of Strip-Coupled SAW Memory Correlators 带耦合SAW存储器相关器原理
Pub Date : 1985-09-01 DOI: 10.1109/T-SU.1985.31656
R. Wagers
Abstmcr-The correlators considered are fabricated on substrates of GaAs and do not employ overlay films. Radio frequency (RF) input to a correlator is accomplished through the use of conventional interdigital transducers. The output port of the memory correlator is composed of an interdigital structure, each tap of which connects to a GaAs Schottky diode at the edge of the acoustic beam. Resistive channel effects in side-fed Schottky diodes are analyzed and discussed. Detailed operating characteristics for the storage process and its linearity are presented. Similarly detailed analyses of the varactor properties and the correlation process are examined. First principles prediction of the correlator efficiency is shown to be within a few tenths of a dB of the experimental values. Physical bounds on the RF power requirements from the drive circuitry of the memory correlator are presented as a function of the handwidth-time (BT) product for this architecture.
考虑的相关器是在GaAs衬底上制造的,不使用覆盖膜。射频(RF)输入到相关器是通过使用传统的数字间换能器来完成的。存储相关器的输出端口由一个数字间结构组成,其每个抽头连接到声波束边缘的GaAs肖特基二极管。对侧馈肖特基二极管中的电阻通道效应进行了分析和讨论。详细介绍了存储过程的工作特性及其线性关系。同样详细分析了变容特性和相关过程。第一性原理预测的相关器效率显示在实验值的零点几个dB以内。存储相关器驱动电路的射频功率需求的物理界限是该体系结构的手宽-时间(BT)乘积的函数。
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引用次数: 4
The Use of SAW Convolvers in Spread-Spectrum and Other Signal-Processing Applications SAW卷积器在扩频和其他信号处理应用中的应用
Pub Date : 1985-09-01 DOI: 10.1109/T-SU.1985.31659
A. Chatterjee, P. Das, L. Milstein
Abstmct-The use of SAW convolvers in both communication and signal-processing applications is discussed, with special emphasis given to their role in spread spectrum communications. In particular, noise analysis of the convolver will be presented, which accounts for both external and internal sources of noise.
摘要:讨论了声波卷积器在通信和信号处理中的应用,特别强调了它们在扩频通信中的作用。特别是,将介绍卷积器的噪声分析,它考虑了外部和内部噪声源。
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引用次数: 12
Applications of SAW Convolvers to Spread-Spectrum Communication and Wideband Radar 声波卷积器在扩频通信和宽带雷达中的应用
Pub Date : 1985-09-01 DOI: 10.1109/T-SU.1985.31660
Iwen Yao, J. Cafarella
Surface acoustic wave (SAW) convolvers and support circuitry have been developed to provide matched filtering of wideband waveforms having lime-bandwidth products exceeding IO3 and continu- ously changing spreading codes for both spread-spectrum communication and wideband radar applications. For spread-spectrum Communication, additional signal processing techniques have been developed to provide correlation of waveforms having time-bandwidth products of IO6 or more with a search window of microseconds for a 100-MHz signal as well as to perform antimultipath processing for data demodulation and for ranging. For wideband radar, high-speed optoelectronic track-and-hold circuits for range gating as well as buffering and charge-coupled-device matrix- matrix-product chips for Doppler processing are being incorporated along with a SAW convolver to provide 0.75-m range resolution and 32 Doppler bins for each of 1280 range bins.
表面声波(SAW)卷积器和支持电路已经开发出来,可以为扩频通信和宽带雷达应用提供匹配的宽带波形滤波,其带宽乘积超过IO3,并且可以连续变化扩展码。对于扩频通信,已经开发了额外的信号处理技术,以提供具有时间带宽乘积为IO6或更多的波形与100 mhz信号的微秒搜索窗口的相关性,以及执行数据解调和测距的反多径处理。对于宽带雷达,用于距离门控的高速光电跟踪和保持电路以及用于多普勒处理的缓冲和电荷耦合器件矩阵-矩阵积芯片正在与SAW卷积器结合使用,以提供0.75 m的距离分辨率和1280个距离箱中的每个32个多普勒箱。
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引用次数: 10
Special Issue on SAW Convolvers and Correlators SAW卷积器和相关器特刊
Pub Date : 1985-09-01 DOI: 10.1109/T-SU.1985.31644
Wen‐Chung Wang
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引用次数: 9
An Application of SAW Convolvers to Spread-Spectrum Transmission of Packet Voice 声波卷积器在分组语音扩频传输中的应用
Pub Date : 1985-09-01 DOI: 10.1109/T-SU.1985.31661
M. Kowatsch, J. Lafferl, A. Ersoy
Abstmcl-A spread-spectrum system for the transmission of packet voice is presented. A continuously variable slope delta (CVSD) modulator is used to encode speech signals at 16 kilobits per second (kbps). The resulting binary data stream is transmitted in bursts containing 1024 message bits. The bit rate within a burst is 84 kbps, with binary code shift keying (CSK) being employed for data representation. The spreading modulation is direct-sequence (DS) with a code rate of 21.4 MHz. The receiver signal processing is based on the application of SAW elastic convolvers to programmable matched filtering of the continuously changing code patterns. Synchronization is accomplished with the aid of an eleven-hit preamble preceding each data packet. Experimental results on the performance of the spread spectrum modem are presented and compared with theory.
提出了一种用于分组语音传输的扩频系统。连续可变斜率增量(CVSD)调制器用于编码语音信号在16千比特每秒(kbps)。所产生的二进制数据流以包含1024消息位的爆发方式传输。突发内的比特率为84 kbps,采用二进制码移位键控(CSK)进行数据表示。扩频调制采用直接序列(DS)调制,码率为21.4 MHz。接收机信号处理是基于SAW弹性卷积对连续变化的码型进行可编程匹配滤波。同步是借助于在每个数据包之前有11个命中的序言来完成的。给出了扩频调制解调器性能的实验结果,并与理论进行了比较。
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引用次数: 3
期刊
IEEE Transactions on Sonics and Ultrasonics
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