A definition for the penetration depth of the scanning re- flection acoustic microscope is given. With this definition it is possible to calculate the penetration depth of a given lens geometry for a given material. The penetration depth depends on the elastic parameters of the object, the signal-to-noise ratio, and the operation frequency of the acoustic microscope. Calculations show that for high-impedance ma- terials, the penetration depth is limited by the wavelength of the surface waves and hence by frequency. For low-impedance materials the open- ing angle of the lens can be properly selected to make the longitudinal or shear wave penetration dominant, effectively increasing the penetra- tion well above the wavelength limit of the surface wave.
{"title":"Penetration Depth of the Scanning Acoustic Microscope","authors":"Abdullah Atalar","doi":"10.1109/T-SU.1985.31583","DOIUrl":"https://doi.org/10.1109/T-SU.1985.31583","url":null,"abstract":"A definition for the penetration depth of the scanning re- flection acoustic microscope is given. With this definition it is possible to calculate the penetration depth of a given lens geometry for a given material. The penetration depth depends on the elastic parameters of the object, the signal-to-noise ratio, and the operation frequency of the acoustic microscope. Calculations show that for high-impedance ma- terials, the penetration depth is limited by the wavelength of the surface waves and hence by frequency. For low-impedance materials the open- ing angle of the lens can be properly selected to make the longitudinal or shear wave penetration dominant, effectively increasing the penetra- tion well above the wavelength limit of the surface wave.","PeriodicalId":371797,"journal":{"name":"IEEE Transactions on Sonics and Ultrasonics","volume":"11 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1985-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128417213","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Abstmcf-The scanning reflection acoustic microscope operating at 1.7 GHz is used to observe the contacts between living cells and their substrates. When the acoustic microscope lens is focused on the surface of the substrate, sites of cell-substrate attachment appear as darkened areas in the acoustic image. Quantitative analysis indicates that attachment sites have increased acoustic impedance relative to other regions within the cell. Acoustic images of moving cells show spatial and temporal changes in the impedance at the attachment site.
{"title":"Observation of Cell-Substrate Attachment with the Acoustic Microscope","authors":"J. Hildebrand","doi":"10.1109/T-SU.1985.31600","DOIUrl":"https://doi.org/10.1109/T-SU.1985.31600","url":null,"abstract":"Abstmcf-The scanning reflection acoustic microscope operating at 1.7 GHz is used to observe the contacts between living cells and their substrates. When the acoustic microscope lens is focused on the surface of the substrate, sites of cell-substrate attachment appear as darkened areas in the acoustic image. Quantitative analysis indicates that attachment sites have increased acoustic impedance relative to other regions within the cell. Acoustic images of moving cells show spatial and temporal changes in the impedance at the attachment site.","PeriodicalId":371797,"journal":{"name":"IEEE Transactions on Sonics and Ultrasonics","volume":"13 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1985-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121617951","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Abstmct-The results of a study on acoustic transmission and image contrast of a tilted plate specimen in transmission scanning acoustic microscopy (SAhI) are presented. Both the transmission angular spectra and the angular contrasts, as a function of the axial location and the tilt angle of the specimen, are analyzed using the Fourier decomposition technique. The angle-dependent transmission coefficient of a water-plate specimen-water system and acoustic resonance, as well as mode conversion (from longitudinal wave to shear wave) are included in the formulation. An excellent agreement between the theoretical predictions and the experimental results obtained with aluminum plate specimens at 150 MHz has been obtained. Acoustic imaging of tilted specimens is then treated as an application of the analysis. It is shown that transmission acoustic microscopy for an acoustically thick specimen is dominated by angular contrast rather than axial contrast as in reflection acoustic microscopy. It is found that both acoustic resonance and mode conversion in the specimen play an important role in determining the contrast of the acoustic image. However, the effect of mode conversion on the image contrast is found to be negligible for a small tilt angle in a transmission SAM that utilizes small numerical aperture lenses. It is also found that by selecting an appropriate tilt angle for a given specimen, higher transmitted acoustic power, andlor greater angular contrast can be facilitated to delineate additional details in the acoustic image.
{"title":"Acoustic Transmission and Image Contrast of Tilted Plate Specimens in Transmission Acoustic Microscopy","authors":"J. Wang, C. Tsai","doi":"10.1109/T-SU.1985.31590","DOIUrl":"https://doi.org/10.1109/T-SU.1985.31590","url":null,"abstract":"Abstmct-The results of a study on acoustic transmission and image contrast of a tilted plate specimen in transmission scanning acoustic microscopy (SAhI) are presented. Both the transmission angular spectra and the angular contrasts, as a function of the axial location and the tilt angle of the specimen, are analyzed using the Fourier decomposition technique. The angle-dependent transmission coefficient of a water-plate specimen-water system and acoustic resonance, as well as mode conversion (from longitudinal wave to shear wave) are included in the formulation. An excellent agreement between the theoretical predictions and the experimental results obtained with aluminum plate specimens at 150 MHz has been obtained. Acoustic imaging of tilted specimens is then treated as an application of the analysis. It is shown that transmission acoustic microscopy for an acoustically thick specimen is dominated by angular contrast rather than axial contrast as in reflection acoustic microscopy. It is found that both acoustic resonance and mode conversion in the specimen play an important role in determining the contrast of the acoustic image. However, the effect of mode conversion on the image contrast is found to be negligible for a small tilt angle in a transmission SAM that utilizes small numerical aperture lenses. It is also found that by selecting an appropriate tilt angle for a given specimen, higher transmitted acoustic power, andlor greater angular contrast can be facilitated to delineate additional details in the acoustic image.","PeriodicalId":371797,"journal":{"name":"IEEE Transactions on Sonics and Ultrasonics","volume":"38 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1985-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124417032","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
On utilise les techniques de reconstruction tomographiques pour traiter les donnees recueillies par un microscope acoustique a laser a balayage. Avantages importants par rapport aux methodes classiques: representation aisee de la sous-surface des objets complexes, lorsque la structure consideree se situe dans divers plans bien definis. On resume les principes de la propagation type aller-et-retour associee a la reconstruction des images par ce procede de microscopie acoustique. Presentation des modifications electroniques et mecaniques necessaires pour le microscope. Formules pour determiner les limites theoriques de resolution du microscope. Resultats de simulations
{"title":"Scanning Tomographic Acoustic Microscope: A Review","authors":"Zse-Cherng Lin, Hua Lee, G. Wade","doi":"10.1109/T-SU.1985.31584","DOIUrl":"https://doi.org/10.1109/T-SU.1985.31584","url":null,"abstract":"On utilise les techniques de reconstruction tomographiques pour traiter les donnees recueillies par un microscope acoustique a laser a balayage. Avantages importants par rapport aux methodes classiques: representation aisee de la sous-surface des objets complexes, lorsque la structure consideree se situe dans divers plans bien definis. On resume les principes de la propagation type aller-et-retour associee a la reconstruction des images par ce procede de microscopie acoustique. Presentation des modifications electroniques et mecaniques necessaires pour le microscope. Formules pour determiner les limites theoriques de resolution du microscope. Resultats de simulations","PeriodicalId":371797,"journal":{"name":"IEEE Transactions on Sonics and Ultrasonics","volume":"68 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1985-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115412440","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Abstmt-Methods of measuring the acoustic properties of solids using acoustic beams in a liquid generated by interdigital transducers (IDT) are described. An IDT can radiate acoustic waves into a liquid in oblique directions with respect to the substrate, and the wave fronts can be arbitrarily controlled by designing the IDT shape. When the acoustic beam is incident on the solid sample-water interface near the Rayleigh angle, the reflection field is equal to the superposed fields of the specular reflection and the reradiation from the leaky surface acoustic wave (SAW) excited on the sample. One normal IDT pair on a piezoelectric substrate is used to measure the acoustic properties of a solid sample. The velocity and the attenuation of the leaky SAW on the sample can be obtained by measuring the trailing field due to the reradiation. A new method for focusing the beam from an IDT and mapping a leaky SAW velocity on a solid sample surface is shown. An interdigital electrode is divided into several sections, each of which is positioned to form a one-dimensional Fresnelphase-plate interdigital transducer (FPP IDT) on a piezoelectric substrate. It has been found that the FPP IDT generates a converging beam onto a focal plane, and the present system is suitable for measuring the two-dimensional variation of the leaky SAW phase velocity on a sample surface. T
{"title":"Measurement and Mapping of Elastic Anisotropy of Solids Using a Leaky SAW Excited by an Interdigital Transducer","authors":"T. Nomura, S. Shiokawa, T. Moriizumi","doi":"10.1109/T-SU.1985.31589","DOIUrl":"https://doi.org/10.1109/T-SU.1985.31589","url":null,"abstract":"Abstmt-Methods of measuring the acoustic properties of solids using acoustic beams in a liquid generated by interdigital transducers (IDT) are described. An IDT can radiate acoustic waves into a liquid in oblique directions with respect to the substrate, and the wave fronts can be arbitrarily controlled by designing the IDT shape. When the acoustic beam is incident on the solid sample-water interface near the Rayleigh angle, the reflection field is equal to the superposed fields of the specular reflection and the reradiation from the leaky surface acoustic wave (SAW) excited on the sample. One normal IDT pair on a piezoelectric substrate is used to measure the acoustic properties of a solid sample. The velocity and the attenuation of the leaky SAW on the sample can be obtained by measuring the trailing field due to the reradiation. A new method for focusing the beam from an IDT and mapping a leaky SAW velocity on a solid sample surface is shown. An interdigital electrode is divided into several sections, each of which is positioned to form a one-dimensional Fresnelphase-plate interdigital transducer (FPP IDT) on a piezoelectric substrate. It has been found that the FPP IDT generates a converging beam onto a focal plane, and the present system is suitable for measuring the two-dimensional variation of the leaky SAW phase velocity on a sample surface. T","PeriodicalId":371797,"journal":{"name":"IEEE Transactions on Sonics and Ultrasonics","volume":"163 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1985-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125919983","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Abstmct-The thermal waves that are generated in connection with the photoacoustic and photothermal effect can be used to probe microscopic features of various solid-state samples. Even relatively low frequency thermal waves can be useful for nondestructive testing.
{"title":"Use of Thermal Waves for Microscopic NDT Purposes","authors":"J. Jaarinen, R. Rajala, T. Tiusanen, M. Luukkala","doi":"10.1109/T-SU.1985.31605","DOIUrl":"https://doi.org/10.1109/T-SU.1985.31605","url":null,"abstract":"Abstmct-The thermal waves that are generated in connection with the photoacoustic and photothermal effect can be used to probe microscopic features of various solid-state samples. Even relatively low frequency thermal waves can be useful for nondestructive testing.","PeriodicalId":371797,"journal":{"name":"IEEE Transactions on Sonics and Ultrasonics","volume":"5 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1985-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125454846","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Abstmt-Some recent work on imaging using a 900 MHz scanning acoustic microscope is described. Examples are given of applications in microelectronics, on semiconductor devices and materials, and on other research topics. The practical problems of material-topography ambiguity are discussed in relation to V(z) curves, and fringe patterns parallel to surface discontinuities are considered. An assessment is presented of the likely future requirements for acoustic microscopy in electronics research, with reference to operating frequency, lenses, and future electronic developments.
{"title":"Scanning Acoustic Microscopy in Electronics Research","authors":"A.J. Miller","doi":"10.1109/T-SU.1985.31598","DOIUrl":"https://doi.org/10.1109/T-SU.1985.31598","url":null,"abstract":"Abstmt-Some recent work on imaging using a 900 MHz scanning acoustic microscope is described. Examples are given of applications in microelectronics, on semiconductor devices and materials, and on other research topics. The practical problems of material-topography ambiguity are discussed in relation to V(z) curves, and fringe patterns parallel to surface discontinuities are considered. An assessment is presented of the likely future requirements for acoustic microscopy in electronics research, with reference to operating frequency, lenses, and future electronic developments.","PeriodicalId":371797,"journal":{"name":"IEEE Transactions on Sonics and Ultrasonics","volume":"43 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1985-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116071449","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Abstmct-The measurement and the use of phase in acoustic microscopy are discussed. It is demonstrated that in many applications phase can be used to provide sensitivity and information unparalleled by amplitude-only measurement methods. A technique capable of highaccuracy measurement of the phase of short RF acoustic pulses is described. The power of this phase measurement technique is illustrated in a number of applications. Surface material property measurements such as the Rayleigh-wave velocity and the inversion of the complex V(z) to obtain the reflectance function of a liquid-solid interface are considered. Surface topography mapping based on phase measurement is examined. A Fourier transform approach for precision determination of linewidths comparable to the resolution spot size is also presented.
{"title":"Precise Phase Measurements with the Acoustic Microscope","authors":"K. Liang, S. Bennett, B. Khuri-Yakub, G. Kino","doi":"10.1109/T-SU.1985.31593","DOIUrl":"https://doi.org/10.1109/T-SU.1985.31593","url":null,"abstract":"Abstmct-The measurement and the use of phase in acoustic microscopy are discussed. It is demonstrated that in many applications phase can be used to provide sensitivity and information unparalleled by amplitude-only measurement methods. A technique capable of highaccuracy measurement of the phase of short RF acoustic pulses is described. The power of this phase measurement technique is illustrated in a number of applications. Surface material property measurements such as the Rayleigh-wave velocity and the inversion of the complex V(z) to obtain the reflectance function of a liquid-solid interface are considered. Surface topography mapping based on phase measurement is examined. A Fourier transform approach for precision determination of linewidths comparable to the resolution spot size is also presented.","PeriodicalId":371797,"journal":{"name":"IEEE Transactions on Sonics and Ultrasonics","volume":"24 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1985-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116704434","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
On propose une nouvelle methode de caracterisation tres precise des materiaux. On mesure les caracteristiques de propagation des ondes de fuite a la limite entre l'eau et l'echantillon; la vitesse de phase et l'attenuation sont determinees a travers des mesures de la courbe V(z). On presente une methode d'analyse spectrale pour obtenir les proprietes acoustiques a partir des courbes V(z). Description des mesures effectuees en utilisant des materiaux isotropes ou anisotropes pour lesquels les vitesses s'etendent de 2000 a 11000 m/s. On examine tous les modes d'ondes de fuite impliques dans les phenomenes d'interferences dans les courbes V(z). Resultats experimentaux confirmant les resultats theoriques. Application a l'analyse de la structure des materiaux polycristallins
{"title":"Material Characterization by Line-Focus-Beam Acoustic Microscope","authors":"J. Kushibiki, N. Chubachi","doi":"10.1109/T-SU.1985.31586","DOIUrl":"https://doi.org/10.1109/T-SU.1985.31586","url":null,"abstract":"On propose une nouvelle methode de caracterisation tres precise des materiaux. On mesure les caracteristiques de propagation des ondes de fuite a la limite entre l'eau et l'echantillon; la vitesse de phase et l'attenuation sont determinees a travers des mesures de la courbe V(z). On presente une methode d'analyse spectrale pour obtenir les proprietes acoustiques a partir des courbes V(z). Description des mesures effectuees en utilisant des materiaux isotropes ou anisotropes pour lesquels les vitesses s'etendent de 2000 a 11000 m/s. On examine tous les modes d'ondes de fuite impliques dans les phenomenes d'interferences dans les courbes V(z). Resultats experimentaux confirmant les resultats theoriques. Application a l'analyse de la structure des materiaux polycristallins","PeriodicalId":371797,"journal":{"name":"IEEE Transactions on Sonics and Ultrasonics","volume":"141 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1985-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133810048","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
N.M.R. Weaver, M. Somekh, A. Briggs, S. Peck, C. Ilett
A range of reflection acoustic micrographs that demon- strate how different contrast mechanisms can lead to images useful in materials science are discussed. The most important class of mecha- mism affecting contrast involves disturbance of the leaky Rayleigh wave propagating along the surface of the specimen. Pictures of very fine cracks (considerably smaller than the acoustic wavelength) and regions of plastic deformation can be obtained using this mechanism. The abil- ity of the scanning acoustic microscope (SAM) to image plastic defor- mation is a particularly important application to materials science be- cause there are serious limitations to existing techniques. Useful images may also be obtained in situations where Rayleigh-wave excitation does not predominate; in such cases interference between hulk waves can be responsible for the contrast observed. The conditions necessary for the production of various types of image are discussed, in terms of the elastic properties of and the boundary conditions close to the feature of interest.
{"title":"Applications of the Scanning Reflection Acoustic Microscope to the Study of Materials Science","authors":"N.M.R. Weaver, M. Somekh, A. Briggs, S. Peck, C. Ilett","doi":"10.1109/T-SU.1985.31596","DOIUrl":"https://doi.org/10.1109/T-SU.1985.31596","url":null,"abstract":"A range of reflection acoustic micrographs that demon- strate how different contrast mechanisms can lead to images useful in materials science are discussed. The most important class of mecha- mism affecting contrast involves disturbance of the leaky Rayleigh wave propagating along the surface of the specimen. Pictures of very fine cracks (considerably smaller than the acoustic wavelength) and regions of plastic deformation can be obtained using this mechanism. The abil- ity of the scanning acoustic microscope (SAM) to image plastic defor- mation is a particularly important application to materials science be- cause there are serious limitations to existing techniques. Useful images may also be obtained in situations where Rayleigh-wave excitation does not predominate; in such cases interference between hulk waves can be responsible for the contrast observed. The conditions necessary for the production of various types of image are discussed, in terms of the elastic properties of and the boundary conditions close to the feature of interest.","PeriodicalId":371797,"journal":{"name":"IEEE Transactions on Sonics and Ultrasonics","volume":"253 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1985-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117305270","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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