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Optical transmission of ZnO thin films ZnO薄膜的光传输特性
Pub Date : 1998-07-02 DOI: 10.1117/12.312693
I. I. Rusu, I. Bursuc, I. Vascan
ZnO films were prepared by d.c. reactive cathodic sputtering in a planar magnetron. The structural properties of d.c. planar magnetron sputtered ZnO films are studied as a function of deposition parameters: substrate type, substrate temperature, sputter gas pressure, growth rate and sputtering power. ZnO films growth has been carried out in an oxygen and argon atmosphere. In dependence on the O2 partial pressure in the argon sputtering gas there exists a narrow process window around a po/(pAr+po) ratio of 5 - 10% which yields transparent, low- resistance layers. The discharge voltage dependence on the oxygen partial pressure is a sensitive indicator for the oxidation state of the target surface and can be used for the regulation of the deposition process. Lower O2 partial pressures yield metallic-like, opaque, but highly resistant layers. Higher oxygen partial pressures lead to transparent but highly resistant ZnO layers. Layers of lowest resistivity (5 X 10-4 (Omega) cm) and highest optical transmission (90%) have a stoichiometric ratio Zn:O of 1.0 and exhibit the largest grains. These films are applied as piezoelectric transducers in micromechanical sensors and actuators.
在平面磁控管中采用直流阴极反应溅射法制备了ZnO薄膜。研究了直流平面磁控溅射ZnO薄膜的结构特性与沉积参数(衬底类型、衬底温度、溅射气体压力、生长速率和溅射功率)的关系。在氧气和氩气气氛下生长ZnO薄膜。在依赖于氩气中O2分压的情况下,在po/(pAr+po)比为5 - 10%左右存在一个狭窄的工艺窗口,从而产生透明的低电阻层。放电电压对氧分压的依赖性是靶表面氧化状态的敏感指标,可用于沉积过程的调控。较低的氧分压会产生类似金属的、不透明的、但高度耐腐蚀的层。较高的氧分压导致透明但高电阻的ZnO层。电阻率最低(5 × 10-4 (ω) cm)、透光率最高(90%)的层,其化学计量比Zn:O为1.0,晶粒最大。这些薄膜在微机械传感器和执行器中用作压电换能器。
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引用次数: 0
Microstructure of hydroxyapatite thin layers grown by pulsed laser deposition 脉冲激光沉积羟基磷灰石薄层的微观结构
Pub Date : 1998-07-02 DOI: 10.1117/12.312764
D. Craciun, V. Craciun, C. Martin, I. Mihăilescu, M. Bunescu, E. Vasile, A. Ioncea, I. Boyd
Thin films of hydroxyapatite (HAp) have been grown on Si, quartz, Ti, and Ge substrates by the pulsed laser deposition (PLD) method employing a KrF excimer laser (wavelength (lambda) equals 248 nm, pulsed duration (tau) FWHM equals 20 ns). The influence of the laser deposition parameters on the properties of the grown layers was investigated in order to optimize the Ca/P ratio and the crystalline structure. It was found that the optimum conditions for preserving the Ca/P ratio i.e. high oxygen pressures and low substrate temperatures do not coincide with those for obtaining adherent and crystalline layers i.e. low oxygen pressures and high substrate temperatures. For films deposited onto Ti substrates it was also found that high substrate temperatures promote the diffusion of Ti through the depositing film up to the surface where it gets oxidized. Further investigations are required before high quality HAp-coated Ti implants by PLD can be obtained.
利用KrF准分子激光器(波长(λ) = 248 nm,脉冲持续时间(tau) = 20 ns),采用脉冲激光沉积(PLD)方法在Si、石英、Ti和Ge衬底上生长了羟基磷灰石(HAp)薄膜。为了优化Ca/P比和晶体结构,研究了激光沉积参数对生长层性能的影响。研究发现,保持Ca/P比的最佳条件,即高氧压力和低底物温度,与获得粘附层和结晶层的最佳条件,即低氧压力和高底物温度并不一致。对于沉积在Ti衬底上的薄膜,也发现较高的衬底温度促进Ti通过沉积膜扩散到表面,在那里它被氧化。在通过PLD获得高质量的hap涂层Ti植入物之前,需要进一步的研究。
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引用次数: 2
Medium-power stabilized laser diode 中等功率稳定激光二极管
Pub Date : 1998-07-02 DOI: 10.1117/12.312820
E. Smeu, N. Puscas, I. Popescu, Grigore I. Suruceanu, R. Ispasoiu
Power stabilized DL's represent today convenient sources for radiometric applications, as transfer laboratory standards. Stability measurements were carried out and reported by other authors for different time intervals, but only for low optical power levels (max. 16 mW). For calibrating usual optical radiometers, such low emitted power DL's are useless. This paper reports stability measurements carried out on several collimated DL's with (lambda) around 980 nm and emitted power up to 265 mW in near-field/150 mW in far-field. Stabilities of the order 1e-4 for short-time intervals (tens of seconds) and 1e-3 for medium-time intervals (1 hour) were found for a non-thermostated structure, having the control photodiode (PD) in the same enclosure with the DL (at the rear of the structure). The corresponding stabilities for an external control PD resulted of the order 1e-5 for both short and medium time intervals. The schematic of the optical power stabilizer is presented.
功率稳定的DL代表今天的辐射测量应用的方便来源,作为转移实验室标准。其他作者对不同的时间间隔进行了稳定性测量并进行了报告,但仅适用于低光功率水平(最大。16兆瓦)。对于校准普通的光学辐射计,这种低发射功率DL是无用的。本文报道了在几个准直DL上进行的稳定性测量,(λ)约为980 nm,近场发射功率高达265 mW /远场发射功率高达150 mW。对于一个非恒温结构,其控制光电二极管(PD)位于与DL相同的外壳中(在结构的后部),其短时间间隔(数十秒)和中时间间隔(1小时)的稳定性为1e-4阶。在短、中时间间隔内,外部控制PD的相应稳定性均为1e-5阶。给出了光功率稳定器的原理图。
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引用次数: 0
Nd:YAG linear resonator using an external stimulated Brillouin scattering Q-switching mirror Nd:YAG线性谐振腔采用外受激布里渊散射调q镜
Pub Date : 1998-07-02 DOI: 10.1117/12.312798
A. Mocofanescu, V. Babin, S. Micloş, Ana-Florica Farcas
We report Q-switching of a Nd:YAG laser with a phase-conjugating mirror based on external stimulated Brillouin scattering in carbon disulfide using a linear resonator. Q-switching is provided by a nonlinear LiF:F2- crystal before the stimulated Brillouin scattering takes place. Employing proper mode selectors pulses with 6 mJ minimum energy and duration of 20 ns were generated, the beam divergence being 1.5 the diffraction limit. A new theoretical model of the Q-switching regime has been proposed and good agreement between experimental and theoretical data has been obtained.
本文报道了一种基于二硫化碳中外受激布里渊散射的相位共轭镜Nd:YAG激光器的q开关。在受激布里渊散射发生之前,非线性LiF:F2-晶体提供q开关。采用合适的模式选择器产生最小能量为6 mJ、持续时间为20 ns的脉冲,光束发散度为衍射极限的1.5倍。本文提出了一种新的q -开关状态理论模型,实验数据与理论数据吻合良好。
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引用次数: 0
Laser-based assessment of lipid peroxidation in humans 人类脂质过氧化的激光评估
Pub Date : 1998-07-02 DOI: 10.1117/12.312823
G. Giubileo
Infrared absorption spectroscopy can be performed at very high resolution by tunable diode laser (TDL) based optical systems for any gas with well resolved absorption spectra. In a double beam setup atmospheric trace gas concentration can be measured down to ppb levels. The analysis of trace gases may have useful applications in detecting chemicals in the human breath for non invasive medical diagnostic. The capability of TDL based breath analysis was well demonstrated by monitoring ammonia and methane. In the human body the formation of free radicals does induce oxidative degradation of polyunsaturated fatty acids (lipid peroxidation) which is a damage for cells and organs in the organism. Specific volatile hydrocarbons generated as end product by lipid peroxidation (LP) can be found inside circulating blood and expired breath. TDL based analysis of those specific hydrocarbons (ethane and pentane) in the expired breath can allow a non invasive assessment of the LP extent.
红外吸收光谱可调二极管激光(TDL)为基础的光学系统可以在非常高的分辨率进行任何气体具有良好的分辨吸收光谱。在双光束装置中,大气痕量气体浓度可以测量到ppb级。微量气体的分析在检测人体呼吸中的化学物质以进行非侵入性医学诊断方面可能具有有用的应用。通过监测氨和甲烷,很好地证明了基于TDL的呼吸分析的能力。在人体中,自由基的形成确实会引起多不饱和脂肪酸的氧化降解(脂质过氧化),这对生物体的细胞和器官是一种损害。脂质过氧化(LP)作为最终产物产生的特定挥发性碳氢化合物可以在循环血液和呼气中找到。基于TDL对呼出气体中特定碳氢化合物(乙烷和戊烷)的分析可以对LP程度进行非侵入性评估。
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引用次数: 7
Infrared photochemistry of trichloroethylene in the presence of oxygen 三氯乙烯在氧气存在下的红外光化学反应
Pub Date : 1998-07-02 DOI: 10.1117/12.312814
C. Ungureanu, M. Ungureanu
Trichloroethylene with added molecular oxygen was photolyzed with a TEA CO2 laser radiation, at v4 (933 cm-1) fundamental vibrational band for C2HCl3 and at v3 (1020 cm-1) fundamental vibrational band for C2DCl3. The stable final products in the infrared multiphoton dissociation of trichloroethylene were determined by mass spectrometry in the 0.5 - 10 Torr pressure range of the gas. After the photodissociation process, the following final products appeared: HCl (or DCl), C2Cl2, C2Cl4, C2Cl4O, CO, Co2 and C2O3. Experimental measurements were also performed to obtain information about the dependence of the specific dissociation rate versus laser pulse energy, for both isotopic species of trichloroethylene.
加入分子氧的三氯乙烯在TEA CO2激光辐射下光解,C2HCl3在v4 (933 cm-1)基振带,C2DCl3在v3 (1020 cm-1)基振带。采用质谱法测定了三氯乙烯红外多光子解离反应在0.5 ~ 10 Torr压力范围内的稳定终产物。经过光解过程,最终产物有:HCl(或DCl)、C2Cl2、C2Cl4、c2cl40、CO、Co2和C2O3。实验测量也进行了获取信息的特定离解率与激光脉冲能量的依赖,为三氯乙烯的两个同位素种。
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引用次数: 0
Output beam characteristics of a Nd:YVO4 miniature laser Nd:YVO4微型激光器的输出光束特性
Pub Date : 1998-07-02 DOI: 10.1117/12.312776
N. Pavel, T. Taira, M. Furuhata, Takao Kobayashi
The output beam characteristics of a CW diode end-pumped miniature Nd:YVO4 laser (1.1 at.%, 1 X 3 X 3 mm3) operating in fundamental and SHG regime are presented. Using M2 factor to describe the multimode pump beam's propagation from the broad-emission-area diode-laser the coupling optics was designed to obtain a high value for the mode-matching efficiency. A maximum slope efficiency of (eta) s equals 58.6%, with (eta) 0 equals 53.8% optically efficiency at maximum pump power, characterized a laser resonator of 50 mm length in transversal TEM00 mode. In the SHG experiments using a KTP crystal a maximum power of 100 mW was reach in a circular laser beam of 4.2 mrad half-angle divergence.
研究了连续波二极管端泵浦微型Nd:YVO4激光器(1.1 at)的输出光束特性。%, 1 X 3 X 3 mm3)在基本和SHG状态下工作。利用M2因子描述宽发射区二极管激光器的多模泵浦光束的传输,设计了耦合光学器件,以获得较高的模式匹配效率。在横向TEM00模式下,50 mm长激光谐振腔的最大斜率效率为(eta) s = 58.6%,最大泵浦功率下的最大斜率效率为(eta) 0 = 53.8%。在使用KTP晶体的SHG实验中,在4.2 mrad半角发散的圆形激光束中达到了100 mW的最大功率。
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引用次数: 1
Rotation-invariant pattern recognition using circular harmonics and synthetic discriminant functions 基于循环谐波和综合判别函数的旋转不变模式识别
Pub Date : 1998-07-02 DOI: 10.1117/12.312785
D. Cojoc
The use of circular harmonics to design correlation filters represents one of the most powerful approach in one-target recognition with in-plane rotation invariance. Recognition of more than one target can be achieved, on the other hand, using synthetic discriminant functions. In this paper we describe how can be combined these two techniques to design a filter which ensures rotation invariant recognition of multiple targets in parallel. The usefulness of the filter is demonstrated, for the case of two targets, by experimental results obtained from computer simulations.
利用圆谐波设计相关滤波器是平面内旋转不变性单目标识别中最有效的方法之一。另一方面,使用综合判别函数可以实现对多个目标的识别。在本文中,我们描述了如何将这两种技术结合起来设计一种滤波器,以确保并行多目标的旋转不变性识别。通过计算机仿真得到的实验结果,证明了该滤波器在双目标情况下的有效性。
{"title":"Rotation-invariant pattern recognition using circular harmonics and synthetic discriminant functions","authors":"D. Cojoc","doi":"10.1117/12.312785","DOIUrl":"https://doi.org/10.1117/12.312785","url":null,"abstract":"The use of circular harmonics to design correlation filters represents one of the most powerful approach in one-target recognition with in-plane rotation invariance. Recognition of more than one target can be achieved, on the other hand, using synthetic discriminant functions. In this paper we describe how can be combined these two techniques to design a filter which ensures rotation invariant recognition of multiple targets in parallel. The usefulness of the filter is demonstrated, for the case of two targets, by experimental results obtained from computer simulations.","PeriodicalId":383583,"journal":{"name":"ROMOPTO International Conference on Micro- to Nano- Photonics III","volume":"23 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1998-07-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116264691","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Polarizing interference coatings made with anisotropic thin films 各向异性薄膜偏振干涉涂层
Pub Date : 1998-07-02 DOI: 10.1117/12.312722
F. Flory, C. Defay
It is now well known that the microstructure of materials in thin film form can be slightly different from that of corresponding bulk materials. Conventional evaporation using a heated crucible or an electron beam gun generally leads to a lacunar structure in columns. Some consequences of this microstructure on the optical properties of the films are well-known. The refractive indices are slightly smaller than that of the bulk material; water adsorption-desorption in the voids leads to variations of the spectral reflection and transmission of the coatings. But apart from these disadvantages, the columnar structure can present advantages because it also induces anisotropy of refractive index. When deposited with an ion beam assistance the microstructure of the material is modify and so is its anisotropy. The anisotropy can then be controlled through the ion energy, making it possible to construct multilayer filters combining both isotropic films and anisotropic films. This opens the way for the making of components acting on the polarization state of light. Results of calculation for different components are presented. Planar non absorbing monochromatic polarizers or polarization rotators can be made in this way. The difficulty in controlling the deposition comes from the fact that the anisotropic layers must be deposited on non rotating substrates. This problem is discussed and examples of measured optical properties of multilayer filters will be given.
现在众所周知,薄膜形式的材料的微观结构可能与相应的块状材料略有不同。使用加热坩埚或电子束枪的传统蒸发通常会导致柱中的腔隙结构。这种微观结构对薄膜光学性能的影响是众所周知的。折射率略小于块状材料的折射率;水在孔隙中的吸附-解吸导致涂层光谱反射和透射的变化。但除了这些缺点之外,柱状结构也有其优点,因为它也会引起折射率的各向异性。当用离子束辅助沉积时,材料的微观结构被改变,其各向异性也被改变。然后可以通过离子能量来控制各向异性,从而可以构建各向同性膜和各向异性膜相结合的多层滤波器。这为制造作用于光的偏振态的元件开辟了道路。给出了不同构件的计算结果。平面非吸收单色偏振器或偏振旋转器可以用这种方法制成。控制沉积的困难在于各向异性层必须沉积在非旋转基底上。讨论了这一问题,并给出了多层滤光片光学特性的测量实例。
{"title":"Polarizing interference coatings made with anisotropic thin films","authors":"F. Flory, C. Defay","doi":"10.1117/12.312722","DOIUrl":"https://doi.org/10.1117/12.312722","url":null,"abstract":"It is now well known that the microstructure of materials in thin film form can be slightly different from that of corresponding bulk materials. Conventional evaporation using a heated crucible or an electron beam gun generally leads to a lacunar structure in columns. Some consequences of this microstructure on the optical properties of the films are well-known. The refractive indices are slightly smaller than that of the bulk material; water adsorption-desorption in the voids leads to variations of the spectral reflection and transmission of the coatings. But apart from these disadvantages, the columnar structure can present advantages because it also induces anisotropy of refractive index. When deposited with an ion beam assistance the microstructure of the material is modify and so is its anisotropy. The anisotropy can then be controlled through the ion energy, making it possible to construct multilayer filters combining both isotropic films and anisotropic films. This opens the way for the making of components acting on the polarization state of light. Results of calculation for different components are presented. Planar non absorbing monochromatic polarizers or polarization rotators can be made in this way. The difficulty in controlling the deposition comes from the fact that the anisotropic layers must be deposited on non rotating substrates. This problem is discussed and examples of measured optical properties of multilayer filters will be given.","PeriodicalId":383583,"journal":{"name":"ROMOPTO International Conference on Micro- to Nano- Photonics III","volume":"26 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1998-07-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114777353","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Novel approaches in morphological correlations 形态学关联的新方法
Pub Date : 1998-07-02 DOI: 10.1117/12.312784
D. Mendlovic, A. Shemer, Z. Zalevsky, E. Marom, G. Shabtay
Morphological correlation is a novel method for obtaining high discrimination ability in pattern recognition applications. It provides also important abilities for image compression and image analysis. The concept is based on slicing the input image and the reference filter into many binary slices, e.g. 255, and correlating them. The morphological correlation is defined as the summation of these correlations. The morphological correlation is characterized by a sharp correlation peak narrower than that exhibited by matched filter. The disadvantages are the requirements of performing many correlations and its very high sensitivity to noise added to the reference image. In this presentation we suggest two methods to solve both drawbacks. First, instead of 255 correlations we suggest to utilize only 8, by representing the grey level of each pixel by its 8 bit binary representation. Then, 8 binary masks are constructed according to the binary representation. In order to address the problem of severe sensitivity to noise, we suggest to sum the 255 correlations of the morphology slices while each slice is multiplied by a weighting factor which equals the correlation peak of that specific slice with noise divided by its correlation peak value when no noise is added. The solutions suggested here were examined by computer simulations demonstrating considerable improvements in the performance of the morphological correlator.
在模式识别中,形态相关是一种获得高分辨能力的新方法。它还为图像压缩和图像分析提供了重要的功能。这个概念是基于将输入图像和参考滤波器切片成许多二进制片,例如255,并将它们关联起来。形态相关性被定义为这些相关性的总和。形态学相关的特征是一个明显的相关峰,比匹配滤波器的相关峰窄。缺点是需要执行许多相关,并且对添加到参考图像中的噪声非常敏感。在这篇演讲中,我们提出了两种方法来解决这两个缺点。首先,我们建议只使用8个相关性,而不是255个相关性,通过用8位二进制表示每个像素的灰度级别。然后,根据二进制表示构造了8个二进制掩码。为了解决对噪声严重敏感的问题,我们建议将形态学切片的255个相关性求和,并将每个切片乘以一个加权因子,该加权因子等于该特定切片与噪声的相关峰值除以无噪声时的相关峰值。本文提出的解决方案通过计算机模拟进行了检验,表明形态学相关器的性能有了相当大的改善。
{"title":"Novel approaches in morphological correlations","authors":"D. Mendlovic, A. Shemer, Z. Zalevsky, E. Marom, G. Shabtay","doi":"10.1117/12.312784","DOIUrl":"https://doi.org/10.1117/12.312784","url":null,"abstract":"Morphological correlation is a novel method for obtaining high discrimination ability in pattern recognition applications. It provides also important abilities for image compression and image analysis. The concept is based on slicing the input image and the reference filter into many binary slices, e.g. 255, and correlating them. The morphological correlation is defined as the summation of these correlations. The morphological correlation is characterized by a sharp correlation peak narrower than that exhibited by matched filter. The disadvantages are the requirements of performing many correlations and its very high sensitivity to noise added to the reference image. In this presentation we suggest two methods to solve both drawbacks. First, instead of 255 correlations we suggest to utilize only 8, by representing the grey level of each pixel by its 8 bit binary representation. Then, 8 binary masks are constructed according to the binary representation. In order to address the problem of severe sensitivity to noise, we suggest to sum the 255 correlations of the morphology slices while each slice is multiplied by a weighting factor which equals the correlation peak of that specific slice with noise divided by its correlation peak value when no noise is added. The solutions suggested here were examined by computer simulations demonstrating considerable improvements in the performance of the morphological correlator.","PeriodicalId":383583,"journal":{"name":"ROMOPTO International Conference on Micro- to Nano- Photonics III","volume":"11 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1998-07-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127465361","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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ROMOPTO International Conference on Micro- to Nano- Photonics III
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