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Simulation investigation into mechanics behaviour in material removal process of ultrasonic assisted grinding of silicon carbide ceramics 碳化硅陶瓷超声辅助磨削材料去除过程力学行为模拟研究
Q3 Engineering Pub Date : 2018-09-27 DOI: 10.1504/IJAT.2018.10016145
Jianguo Cao, Yueming Liu, Nie Meng, Qinjian Zhang
Grinding force and stress in the ultrasonic assisted grinding (UAG) influence on the material removal behaviour. In this study, the simulation investigation of the material removal process, by ultrasonic assisted scratching (UAS) of silicon carbide using a single abrasive grain in UAG was conducted, to reveal the grinding force and stress variation behaviour. Conventional scratching (CS) without ultrasonic vibration was also carried out on the same condition for comparison. The results showed that: 1) the cutting forces in UAS undergo a periodic sinusoidal change, whereas those in CS are basically stabilised to a certain level after the tool cuts into the workpiece completely; 2) the stress distribution fields on the cross and top surfaces along the cutting direction become wider in UAS than in CS; 3) the kinetic energy of the grain consumed in UAS is bigger than that in CS, leading to the impact of the grain on the workpiece.
超声辅助磨削(UAG)过程中的磨削力和应力对材料去除性能的影响。在本研究中,通过超声辅助刮擦(UAS)在UAG中使用单个磨粒对碳化硅进行材料去除过程的模拟研究,揭示了磨削力和应力变化行为。在相同条件下进行无超声振动的常规刮擦(CS)进行比较。结果表明:1)UAS的切削力呈周期性正弦变化,而CS的切削力在刀具完全切入工件后基本稳定在一定水平;2)沿切割方向横向和顶面应力场在UAS中比CS中变宽;3) UAS中消耗的晶粒动能大于CS,导致晶粒对工件的冲击。
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引用次数: 0
Microcontact mechanism in silicon wafer self-rotating grinding based on force decomposition 基于力分解的硅片自旋磨削微接触机理
Q3 Engineering Pub Date : 2018-09-27 DOI: 10.1504/IJAT.2018.10016143
Q. Ren, Xin Wei
Carrying out silicon wafer self-rotating grinding using a cup-type diamond grinding wheel is a typical ultra-precision machining technique of silicon wafers. Studying the mechanism of the self-rotating grinding is the basis of the processing. The research takes the microcontact between the micro-element in the grinding wheel and the silicon wafer extracted during the steady ductile-regime grinding as the object and builds a mechanical model. On this basis, the research investigates the microscopic mechanism of the self-rotating grinding using the force decomposition method. The force decomposition in the normal direction using the Hertz theory in contact mechanics and the cavity model obtained the distributions of the load and stress on the silicon wafer in the elastic and plastic contact, as well as the corresponding stress distribution on the micro-element in the grinding wheel. The force decomposition in the tangential direction based on the microscopic friction theory yields the sliding friction. The superposition of normal and tangential forces reveals the overall distribution of microcontact stress. The analysis results are validated by comparing with corresponding experimental and simulation results.
利用杯形金刚石砂轮进行硅片自旋磨削是典型的硅片超精密加工技术。研究自旋磨削机理是加工的基础。研究以稳定延性磨削过程中砂轮内微元件与提取硅片之间的微接触为对象,建立了力学模型。在此基础上,采用力分解方法对自旋磨削的微观机理进行了研究。利用接触力学中的Hertz理论和空腔模型进行法向力分解,得到了硅片在弹塑性接触时的载荷和应力分布,以及相应的砂轮微元件上的应力分布。基于微观摩擦理论的切向力分解得到滑动摩擦。法向力和切向力的叠加揭示了微接触应力的总体分布。通过与相应的实验和仿真结果对比,验证了分析结果的正确性。
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引用次数: 0
Characterisation of microcrystalline diamonds deposited by HFCVD HFCVD沉积微晶金刚石的表征
Q3 Engineering Pub Date : 2018-09-27 DOI: 10.1504/IJAT.2018.10016144
Tao Zhang, Feng Qin, Qian Wanghuan, Lijun Zhang, F. Sun
The performances of CVD microcrystalline diamond powders by the seeding and self-nucleation method, including the particle size composition, crystal morphology, and diamond purity, are evaluated by the China industry standard of conventional diamond powders (JB/T 7990-2012). The detection results show over 80% particles grown on the seeds exhibit a cubo-octahedral with smooth surfaces and no obvious growth defects, while they can hardly meet the corresponding commercial requirements of particle size composition due to the existence of 10%-23% spontaneous particles (0.5~1.2 μm). For the powders deposited by self-nucleation method, the particle size composition agrees well with the model defined by the industry standard, and 70.5% crystals exhibit the cubo-octahedral or icosahedron morphology, as well as their surface quality are little worse than those grown on the seeds due to unwanted secondary nucleation. Besides, the two types of CVD powders have a high purity detected by micro-Raman spectroscopy.
根据中国常规金刚石粉体工业标准(JB/T7990-2012),对采用晶种和自成核方法制备的CVD微晶金刚石粉体的粒度组成、晶体形态和金刚石纯度等性能进行了评价。检测结果表明,种子上生长的80%以上的颗粒呈立方八面体,表面光滑,没有明显的生长缺陷,而由于存在10%-23%的自发颗粒(0.5~1.2μm),它们很难满足相应的商业粒度组成要求。对于通过自成核法沉积的粉末,颗粒尺寸组成与行业标准定义的模型非常一致,70.5%的晶体表现出立方八面体或二十面体的形态,并且由于不希望的二次成核,它们的表面质量比在种子上生长的晶体差一些。此外,通过显微拉曼光谱检测,这两种类型的CVD粉末具有高纯度。
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引用次数: 1
Experimental study on the characteristics of high speed cylindrical plunge grinding for annealed bearing steel 100Cr6 轴承钢100Cr6退火后高速内插磨削特性的实验研究
Q3 Engineering Pub Date : 2018-09-27 DOI: 10.1504/IJAT.2019.10016147
Wei Liu, Z. Deng, Zhouqiang Xiao
The bearing steel such as 100Cr6 offers many desirable characteristics for industrial use in terms of its excellent qualities of high hardness, high wear resistance and high contact fatigue strength. For the usage in the bearing, cylindrical grinding should be adopted to machine 100Cr6. In order to ensure processing quality and processing efficiency, it is necessary to carry out high speed grinding. Therefore, the orthogonal experiments of high speed cylindrical plunge grinding (HSCPG) were carried out on the annealed 100Cr6 with a ceramic bonded cubic boron nitride (cBN) grinding wheel, to study the effects of grinding wheel speed, workpiece speed and grinding depth on the grinding force, grinding temperature, surface roughness, surface morphology, surface hardening and deteriorative layer. The study demonstrates that a larger material removal rate and a better surface integrity can be achieved simultaneously by a large grinding wheel speed, a moderate workpiece speed and grinding depth.
100Cr6等轴承钢具有高硬度、高耐磨性和高接触疲劳强度的优良品质,为工业用途提供了许多理想的特性。在轴承中使用,应采用外圆磨削加工100Cr6。为了保证加工质量和加工效率,有必要进行高速磨削。为此,采用陶瓷结合体立方氮化硼(cBN)砂轮对退火后的100Cr6进行高速外圆切入磨削(HSCPG)正交试验,研究砂轮转速、工件转速和磨削深度对磨削力、磨削温度、表面粗糙度、表面形貌、表面硬化和变质层的影响。研究表明,较大的砂轮转速、适当的工件转速和磨削深度可以同时获得较大的材料去除率和较好的表面完整性。
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引用次数: 2
An experimental study for evaluating speed parameters on surface roughness of LS-WEDT and its application in fabricating microelectrodes LS-WEDT表面粗糙度速度参数的实验研究及其在微电极制作中的应用
Q3 Engineering Pub Date : 2018-09-27 DOI: 10.1504/IJAT.2018.10016142
Y. Gong, Yao Sun, Xiaoteng Ma
The demand for microelectrodes has greatly increased when the micromachining techniques have become a hot issue in modern industry. The non-contact of EDM process makes it have the unique superiority in fabricating microelectrodes. Therefore, this paper proposed a low speed wire electrical discharge turning (LS-WEDT) method to fabricate microelectrodes. Firstly, the influence of speed parameters including the rotated speed (Vn), feeding speed (Vs) and wire speed (Vw) involved in LS-WEDT are discussed. More importantly, the microelectrode made of CuW70 material with diameter of 58 μm is firstly and successfully fabricated by LS-WEDT. Furthermore, the scanning electron microscope observations disclosed that the microelectrode has good surface quality and high machining precision without ridges and bending. Besides, many small micro-voids with the diameter less than 1 μm can be observed on the microelectrode surface. Finally, the energy dispersive spectrograph analysis suggested the presence of foreign elements including zinc and oxygen on the microelectrode surface machined by LS-WEDT.
当微加工技术成为现代工业的热点问题时,对微电极的需求大大增加。电火花加工工艺的非接触性使其在微电极制造方面具有独特的优势。因此,本文提出了一种制作微电极的低速线放电车削(LS-WEDT)方法。首先,讨论了LS-WEDT中涉及的转速(Vn)、进给速度(Vs)和线速(Vw)等速度参数的影响。更重要的是,首次用LS-WEDT成功地制备了直径为58μm的CuW70材料微电极。此外,扫描电子显微镜观察表明,该微电极具有良好的表面质量和高的加工精度,没有隆起和弯曲。此外,在微电极表面可以观察到许多直径小于1μm的微小空隙。最后,能谱仪分析表明,LS-WEDT加工的微电极表面存在锌和氧等杂质元素。
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引用次数: 0
Effect of small quantity lubrication on grindability of hardened AISI 4340 steel 少量润滑对硬化AISI 4340钢可磨性的影响
Q3 Engineering Pub Date : 2018-08-22 DOI: 10.1504/IJAT.2018.10015268
Sirsendu Mahata, J. Roy, A. Samanta, B. Mandal, Santanu Das
The process of grinding is normally associated with generation of considerable amount of heat. To reduce thermal damages, grinding zone is often flooded with liquid coolant, most of which is wasted and may cause severe environmental pollution. In the present work, grindability of hardened AISI 4340 steel is assessed at various infeeds, using an eco-friendly vegetable oil applied by small quantity lubrication (SQL) technique, so as to reduce the quantity of coolant. At the same infeed, grinding is also performed by applying a uniform layer of semi-solid lubricant (grease) on the work surface. Comparison is made between the two methods in terms of force, surface roughness, specific grinding energy and observed chip forms. Results prove that SQL technique using vegetable oil is better than grease as a lubricant in terms of force requirement, while surface quality shows improvement with grease layer lapped on the work surface than with SQL technique.
磨削过程通常会产生大量的热量。为了减少热损伤,研磨区经常充满液体冷却剂,其中大部分被浪费,并可能造成严重的环境污染。在本工作中,使用少量润滑(SQL)技术应用的环保植物油,评估了硬化AISI 4340钢在各种进给条件下的可磨性,以减少冷却剂的数量。在同一进料时,还通过在工作表面上均匀涂抹一层半固体润滑剂(油脂)来进行研磨。从力、表面粗糙度、比磨削能和观察到的切屑形式等方面对两种方法进行了比较。结果表明,在受力要求方面,使用植物油的SQL技术优于油脂作为润滑剂,而在工作表面重叠油脂层的表面质量比SQL技术有所改善。
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引用次数: 0
Chemical catalysts of Fenton reaction for single-crystal SiC based on nanoindentation 基于纳米压痕的单晶SiC Fenton反应化学催化剂
Q3 Engineering Pub Date : 2018-08-22 DOI: 10.1504/IJAT.2018.10015292
Liang Huazhuo, Jiabin Lu, Q. Yan, Taowen Song
Aiming at production of single-crystal SiC for chemical mechanical polishing, Fenton reaction, and catalytic efficiency of FeSO4, Fe2(SO4)3, FeO, Fe3O4, and Fe2O3 were studied. The mechanical properties are obtained by nanoindentation experiments. Different catalysts can promote Fenton reaction, and all reaction layers formed with the same chemical composition, atomic structure, and hardness at 1.5 GPa. When Fe3O4 was used as catalyst in Fenton reaction, the effect was optimal because its hardness and modulus remained low. After 2 min, the thickness of reaction layer had reached 200 nm, which can fully meet requirements of CMP. Fenton reaction depends on ability of catalyst to ionise Fe2+. The higher concentration of Fe2+, the higher concentration of OH, and the faster reaction rate of SiC surface material.
针对化学机械抛光单晶SiC的生产,研究了FeSO4、Fe2(SO4)3、FeO、Fe3O4和Fe2O3的Fenton反应及其催化效率。通过纳米压痕实验获得了力学性能。不同的催化剂可以促进芬顿反应,并且在1.5GPa下形成具有相同化学组成、原子结构和硬度的所有反应层。在Fenton反应中使用Fe3O4作为催化剂时,由于其硬度和模量较低,效果最佳。2min后,反应层厚度达到200nm,完全可以满足CMP的要求。芬顿反应取决于催化剂电离Fe2+的能力。Fe2+的浓度越高,OH的浓度就越高,SiC表面材料的反应速率就越快。
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引用次数: 0
Experimental study on abrasive water jet machining of AA5083 in a range of thicknesses 磨料水射流加工AA5083不同厚度的试验研究
Q3 Engineering Pub Date : 2018-08-22 DOI: 10.1504/IJAT.2018.10015291
G. Selvakumar, S. Prakash, N. Lenin
The objective of this study is to present the optimal machining parameters for abrasive water jet machining (AWJM) of Aluminium alloy 5083 (AA5083) by employing artificial neural networks (ANN) modelling for various material thicknesses. Al 5083 alloy finds vast applications in ship building, rail cars, and vehicle bodies and exclusively for cryogenic applications. The experimental work was carried out by using Taguchi L18 orthogonal array to study the influence of the process parameters such as jet diameter, stand-off distance and abrasive flow rate for various ranges of thicknesses over the process yields namely material removal rate (mrr), surface roughness and taper error. Technological table for optimal machining of AA5083 alloy in AWJM was reported for ready to use in industry.
本研究的目的是利用人工神经网络(ANN)对不同材料厚度进行建模,给出磨料水射流加工5083铝合金(AA5083)的最佳加工参数。al5083合金广泛应用于船舶制造,轨道车辆和车辆车身,并专门用于低温应用。实验采用田口L18正交阵列,研究了不同厚度范围内射流直径、间隙距离和磨料流量等工艺参数对材料去除率、表面粗糙度和锥度误差等工艺产量的影响。报道了在AWJM中优化加工AA5083合金的工艺表,准备在工业上应用。
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引用次数: 14
Study on the segmentation of abrasive grains in diamond tools 金刚石工具磨粒切分的研究
Q3 Engineering Pub Date : 2018-08-22 DOI: 10.1504/IJAT.2018.10015277
Yanfen Lin, C. Fang
Segmentation of abrasive images of diamond tools is the most important part of computer vision, which is the basis for detecting the state of diamond tools, such as the characteristics of diamond number, distribution, size and state. As diamond images have rich irregular background textures and reflective features, it is a major challenge to detect and segment these diamond images. The present work demonstrates an invalid edge elimination method for such images to segment and mat the diamond grains, which mainly consists of histogram, edge detection, and morphology. Based on the method, the part of diamond in the original images can be accurately and effectively segmented and matted. Then, the method is also used to segment and mat the diamond grains in other images of different diamond tools, and it also has a good segmenting and matting effect. Finally, the segmented and extracted diamond grains are used to analyse the diamond number, density and its wear state, the result indicates that the proposed method can be used in diamond tool detection.
金刚石工具磨料图像的分割是计算机视觉中最重要的部分,是检测金刚石工具状态的基础,如金刚石数量、分布、尺寸和状态的特征。由于钻石图像具有丰富的不规则背景纹理和反射特征,检测和分割这些钻石图像是一个重大挑战。目前的工作证明了一种无效的边缘消除方法,该方法主要包括直方图、边缘检测和形态学。基于该方法,可以准确有效地对原始图像中的钻石部分进行分割和叠加。然后,该方法还用于对不同金刚石工具的其他图像中的金刚石颗粒进行分割和消光,具有良好的分割和消光效果。最后,利用分割和提取的金刚石颗粒对金刚石的数量、密度及其磨损状态进行了分析,结果表明该方法可用于金刚石刀具的检测。
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引用次数: 2
Experimental study on surface generation in optical glass with fluid jet polishing process 光学玻璃射流抛光工艺表面生成的实验研究
Q3 Engineering Pub Date : 2018-08-22 DOI: 10.1504/IJAT.2018.10015439
K. Anbarasu, L. Vijayaraghavan, N. Arunachalam
Fluid jet polishing process is an inexpensive technique and capable to produce ultra-smooth surface. In fluid jet polishing process, the surface generation mainly depends upon the size and type of the abrasive particle, the jet pressure, the exposure time, the impact angle, etc. In this work, experimental investigation were carried out to study the influence of different slurry exposure time on surface roughness of optical glass with varying jet pressure, particle diameter and type of particle at 30° impact angle. The surface roughness measurement and surface morphology characterisation were done to understand the surface changes.
射流抛光技术是一种成本低廉且能产生超光滑表面的技术。在流体射流抛光过程中,表面的生成主要取决于磨料颗粒的大小和类型、射流压力、曝光时间、冲击角度等。在30°冲击角下,采用不同的喷射压力、颗粒直径和颗粒类型,对不同浆液曝光时间对光学玻璃表面粗糙度的影响进行了实验研究。通过表面粗糙度测量和表面形貌表征来了解表面变化。
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引用次数: 2
期刊
International Journal of Abrasive Technology
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