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Nanofabrication of Nanostructure Lattices: from High-Quality Large Patterns to Precise Hybrid Units 纳米结构晶格的纳米加工:从高质量的大型图案到精确的混合单元
Pub Date : 2024-07-27 DOI: 10.1088/2631-7990/ad6838
Rui Ma, Xiaodan Zhang, Duncan Sutherland, V. Bochenkov, Shikai Deng
Sub-wavelength nanostructure lattices provide versatile platforms for light control and the basis for various novel phenomena and applications in physics, material science, chemistry, biology, and energy. The thriving study of nanostructure lattices is building on the remarkable progress of nanofabrication techniques, especially for the possibility of fabricating larger-area patterns while achieving higher-quality lattices, complex shapes, and hybrid materials units. In this review, we present a comprehensive review of techniques for large-area fabrication of optical nanostructure arrays, encompassing direct writing, self-assembly, controllable growth, and nanoimprint/print methods. Furthermore, a particular focus is made on the recent improvement of unit accuracy and diversity, leading to integrated and multifunctional structures for devices and applications.
亚波长纳米结构晶格为光控制提供了多功能平台,也为物理学、材料科学、化学、生物学和能源领域的各种新现象和应用提供了基础。纳米结构晶格研究的蓬勃发展得益于纳米制造技术的显著进步,特别是可以制造出更大面积的图案,同时实现更高质量的晶格、复杂形状和混合材料单元。在这篇综述中,我们全面回顾了大面积制造光学纳米结构阵列的技术,包括直接写入、自组装、可控生长和纳米打印/印刷方法。此外,我们还特别关注了近年来单元精度和多样性的提高,从而为设备和应用提供集成的多功能结构。
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引用次数: 0
Multi-material 3D Nanoprinting for Structures to Functional Micro/nanosystems 从结构到功能性微/纳米系统的多材料三维纳米打印技术
Pub Date : 2024-07-24 DOI: 10.1088/2631-7990/ad671f
Y. Duan, Wenshuo Xie, Zhouping Yin, Y. Huang
Multi-material 3D fabrication at the nanoscale has been a long-sought goal in additive manufacturing, with great potential for the direct construction of functional micro/nanosystems rather than just arbitrary 3D structures. To achieve this goal, researchers have introduced several nanoscale 3D printing principles, explored various multi-material switching and combination strategies, and demonstrated their potential applications in 3D integrated circuits, optoelectronics, biological devices, micro/nanorobots, etc. Although some progress has been made, it is still at the primary stage and a serious breakthrough is needed to directly construct functional micro/nano systems. In this perspective, the development, current status and prospects of multi-material 3D nanoprinting are presented. We envision that this 3D printing will unlock innovative solutions and make significant contributions to various technologies and industries in the near future.
纳米级多材料三维制造一直是增材制造领域孜孜以求的目标,它具有直接构建功能性微/纳米系统而非任意三维结构的巨大潜力。为了实现这一目标,研究人员引入了多种纳米级三维打印原理,探索了各种多材料切换和组合策略,并展示了它们在三维集成电路、光电子学、生物设备、微型/纳米机器人等方面的潜在应用。虽然已经取得了一些进展,但仍处于初级阶段,直接构建功能性微/纳米系统还需要重大突破。本视角介绍了多材料三维纳米打印的发展、现状和前景。我们预计,在不久的将来,这种三维打印技术将为各种技术和行业提供创新解决方案并做出重大贡献。
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引用次数: 0
An Integrated Fuzzy Logic and Machine Learning Platform for Porosity Detection using Optical Tomography Imaging during Laser Powder Bed Fusion 利用激光粉末床融合过程中的光学断层成像检测孔隙度的模糊逻辑和机器学习集成平台
Pub Date : 2024-07-20 DOI: 10.1088/2631-7990/ad65cd
Osazee Ero, Katayoon Taherkhani, Yasmine Hemmati, E. Toyserkani
Traditional methods such as mechanical testing and X-ray computed tomography (CT), for quality assessment in laser powder-bed fusion (LPBF), a class of additive manufacturing (AM), are resource-intensive and conducted post-production. Recent advancements in in-situ monitoring, particularly using optical tomography (OT) to detect near-infrared light emissions during the process, offer an opportunity for in-situ defect detection. However, interpreting OT datasets remains challenging due to inherent process characteristics and disturbances that may obscure defect identification. This paper introduces a novel machine learning-based approach that integrates a self-organizing map (SOM), a fuzzy logic scheme, and a tailored U-Net architecture to enhance defect prediction capabilities during the LPBF process. This model not only predicts common flaws such as lack of fusion and keyhole defects through analysis of in-situ OT data but also allows quality assurance professionals to apply their expert knowledge through customizable fuzzy rules. This capability facilitates a more nuanced and interpretable model, enhancing the likelihood of accurate defect detection. The efficacy of this system has been validated through experimental analyses across various process parameters, with results validated by subsequent CT scans, exhibiting strong performance with average model scores ranging from 0.375 to 0.819 for lack of fusion defects and from 0.391 to 0.616 for intentional keyhole defects. These findings underscore the model's reliability and adaptability in predicting defects, highlighting its potential as a transformative tool for in-process quality assurance in AM. A notable benefit of this method is its adaptability, allowing the end-user to adjust the probability threshold for defect detection based on desired quality requirements and custom fuzzy rules.
传统方法,如机械测试和 X 射线计算机断层扫描(CT),用于评估激光粉末床熔融(LPBF)(增材制造(AM)的一种)的质量,是资源密集型的,并在生产后进行。最近在原位监测方面取得的进展,特别是使用光学断层扫描(OT)检测加工过程中的近红外光发射,为原位缺陷检测提供了机会。然而,由于固有的工艺特征和干扰可能会掩盖缺陷识别,因此解释 OT 数据集仍然具有挑战性。本文介绍了一种基于机器学习的新方法,该方法集成了自组织图(SOM)、模糊逻辑方案和定制的 U-Net 架构,以增强 LPBF 过程中的缺陷预测能力。该模型不仅能通过分析现场 OT 数据预测常见缺陷,如缺乏融合和锁孔缺陷,还能让质量保证专业人员通过可定制的模糊规则应用其专业知识。这一功能有助于建立一个更细致入微、更易于解释的模型,从而提高准确检测缺陷的可能性。该系统的功效已通过各种工艺参数的实验分析进行了验证,其结果也通过后续的 CT 扫描进行了验证,显示出强大的性能,模型平均得分从 0.375 到 0.819 不等,用于检测缺乏融合缺陷,从 0.391 到 0.616 不等,用于检测有意锁孔缺陷。这些发现强调了该模型在预测缺陷方面的可靠性和适应性,凸显了其作为 AM 制程中质量保证的变革性工具的潜力。该方法的一个显著优点是适应性强,允许最终用户根据所需的质量要求和自定义模糊规则调整缺陷检测的概率阈值。
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引用次数: 0
Recent advances in nature inspired triboelectric nanogenerators for self-powered systems 用于自供电系统的自然启发三电纳米发电机的最新进展
Pub Date : 2024-07-20 DOI: 10.1088/2631-7990/ad65cc
Baosen Zhang, Yunchong Jiang, Tianci Ren, Baojin Chen, Renyun Zhang, Yanchao Mao
Triboelectric nanogenerators (TENGs) stand at the forefront of energy harvesting innovation, transforming mechanical energy into electrical power through triboelectrification and electrostatic induction. This groundbreaking technology addresses the urgent need for sustainable and renewable energy solutions, opening new avenues for self-powered systems. Despite their potential, TENGs face challenges such as material optimization for enhanced triboelectric effects, scalability, and improving conversion efficiency under varied conditions. Durability and environmental stability also pose significant hurdles, necessitating further research towards more resilient systems. Nature inspired TENG designs offer promising solutions by emulating biological processes and structures, such as the energy mechanisms of plants and the textured surfaces of animal skins. This biomimetic approach has led to notable improvements in material properties, structural designs, and overall TENG performance, including enhanced energy conversion efficiency and environmental robustness. The exploration into bio-inspired TENGs has unlocked new possibilities in energy harvesting, self-powered sensing, and wearable electronics, emphasizing reduced energy consumption and increased efficiency through innovative design. This review encapsulates the challenges and advancements in nature inspired TENGs, highlighting the integration of biomimetic principles to overcome current limitations. By focusing on augmented electrical properties, biodegradability, and self-healing capabilities, nature inspired TENGs pave the way for more sustainable and versatile energy solutions.
三电纳米发电机(TENGs)站在能量采集创新的前沿,通过三电化和静电感应将机械能转化为电能。这项突破性技术满足了对可持续和可再生能源解决方案的迫切需求,为自供电系统开辟了新途径。尽管 TENGs 潜力巨大,但它也面临着各种挑战,如优化材料以增强三电效应、可扩展性以及在不同条件下提高转换效率。耐久性和环境稳定性也构成了重大障碍,需要进一步研究更具弹性的系统。受大自然启发的 TENG 设计通过模仿生物过程和结构(如植物的能量机制和动物皮肤的纹理表面),提供了前景广阔的解决方案。这种仿生方法显著改善了材料性能、结构设计和 TENG 的整体性能,包括提高了能量转换效率和环境稳健性。对生物启发腾博会登录的探索为能量收集、自供电传感和可穿戴电子产品带来了新的可能性,强调通过创新设计降低能耗和提高效率。本综述概括了受自然启发的 TENGs 所面临的挑战和取得的进步,重点介绍了如何结合仿生原理来克服当前的局限性。通过重点关注增强电性能、生物可降解性和自愈能力,受大自然启发的 TENG 为更可持续和多功能的能源解决方案铺平了道路。
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引用次数: 0
Design and Manufacturing of Soft Electronics for in situ Biochemical Sensing 原位生化传感软电子器件的设计与制造
Pub Date : 2024-07-19 DOI: 10.1088/2631-7990/ad65a0
Xing Yi, Jiaqi Wang, Jinxing Li
Soft (flexible and stretchable) biosensors have great potential in real-time and continuous health monitoring of various physiological factors, mainly due to their better conformability to soft human tissues and organs, which maximizes data fidelity and minimizes biological interference. Most of the early soft sensors focused on sensing physical signals. Recently, it is becoming a trend that novel soft sensors are developed to sense and monitor biochemical signals in situ in real biological environments, thus providing much more meaningful data for studying fundamental biology and diagnosing diverse health conditions. This is essential to decentralize the healthcare resources towards predictive medicine and better disease management. To meet the requirements of mechanical softness and complex biosensing, unconventional materials, and manufacturing process are demanded in developing biosensors. In this review, we summarize the fundamental approaches and the latest and representative design and fabrication to engineer soft electronics (flexible and stretchable) for wearable and implantable biochemical sensing. We will review the rational design and ingenious integration of stretchable materials, structures, and signal transducers in different application scenarios to fabricate high-performance soft biosensors. Focus is also given to how these novel biosensors can be integrated into diverse important physiological environments and scenarios in situ, such as sweat analysis, wound monitoring, and neurochemical sensing. We also rethink and discuss the current limitations, challenges, and prospects of soft biosensors. This review holds significant importance for researchers and engineers, as it assists in comprehending the overarching trends and pivotal issues within the realm of designing and manufacturing soft electronics for biochemical sensing.
软(柔性和可伸缩)生物传感器在对各种生理因素进行实时和连续健康监测方面具有巨大潜力,这主要是由于它们与人体软组织和器官具有更好的适配性,从而最大限度地提高了数据保真度并减少了生物干扰。早期的软传感器大多侧重于传感物理信号。最近,开发新型软传感器以感知和监测真实生物环境中的原位生化信号已成为一种趋势,从而为研究基础生物学和诊断各种健康状况提供更有意义的数据。这对于分散医疗资源,实现预测医学和更好的疾病管理至关重要。为了满足机械柔软性和复杂生物传感的要求,开发生物传感器需要非常规材料和制造工艺。在这篇综述中,我们将总结用于可穿戴和植入式生化传感的软电子器件(柔性和可拉伸)的基本方法和最新的代表性设计与制造。我们将回顾在不同应用场景中对可拉伸材料、结构和信号传感器的合理设计和巧妙整合,以制造高性能的软生物传感器。我们还将重点讨论如何将这些新型生物传感器集成到各种重要的生理环境和现场应用场景中,如汗液分析、伤口监测和神经化学传感。我们还重新思考和讨论了软生物传感器当前的局限性、挑战和前景。这篇综述对研究人员和工程师具有重要意义,因为它有助于理解设计和制造用于生化传感的软电子器件领域的总体趋势和关键问题。
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引用次数: 0
Aqueous electrolyte additives for zinc-ion batteries 锌离子电池水性电解质添加剂
Pub Date : 2024-07-19 DOI: 10.1088/2631-7990/ad65ca
Zhuoxi Wu, Zhaodong Huang, Rong Zhang, Yue Hou, Chunyi Zhi
Due to the advantages of high safety, low cost, and high volumetric specific capacity, zinc-ion batteries (ZIBs) are considered a promising candidate for next-generation energy storage devices, especially showing great potential in large-scale energy storage. Despite these advantages, ZIBs still suffer many problems, such as zinc dendrites, hydrogen evolution, zinc anode corrosion, etc., which significantly reduce the Coulombic efficiency and reversibility of zinc, and limit the long cycle lifespan, bringing much uncertainty for practical application. In recent years, electrolyte additives, as an effective technique, have been proposed by researchers to solve the above issues. This review mainly focuses on electrolyte additives and discusses different substances as electrolyte additives to alleviate the above problems by altering the original Zn2+ solvation structure, constructing a protective layer at the anode/electrolyte interface, guiding the evenly Zn2+ distribution and uniform Zn deposition, etc. Finally, on this basis, the possible research strategies, development directions of electrolyte additives in the future, and the existing problems to be solved are also discussed, and some prospects and suggestions are proposed.
锌离子电池(ZIBs)具有安全性高、成本低、体积比容量大等优点,被认为是下一代储能设备的理想候选材料,特别是在大规模储能方面具有巨大潜力。尽管具有这些优点,锌离子电池仍然存在许多问题,如锌枝晶、氢演化、锌阳极腐蚀等,这些问题大大降低了锌的库仑效率和可逆性,限制了长循环寿命,给实际应用带来了许多不确定性。近年来,电解质添加剂作为一种有效的技术,被研究人员提出来解决上述问题。本综述主要针对电解质添加剂,讨论了不同物质作为电解质添加剂,通过改变原有的 Zn2+ 溶解结构、在阳极/电解质界面构建保护层、引导 Zn2+ 均匀分布和 Zn 均匀沉积等方法来缓解上述问题。最后,在此基础上还讨论了电解质添加剂未来可能的研究策略、发展方向以及目前需要解决的问题,并提出了一些展望和建议。
{"title":"Aqueous electrolyte additives for zinc-ion batteries","authors":"Zhuoxi Wu, Zhaodong Huang, Rong Zhang, Yue Hou, Chunyi Zhi","doi":"10.1088/2631-7990/ad65ca","DOIUrl":"https://doi.org/10.1088/2631-7990/ad65ca","url":null,"abstract":"\u0000 Due to the advantages of high safety, low cost, and high volumetric specific capacity, zinc-ion batteries (ZIBs) are considered a promising candidate for next-generation energy storage devices, especially showing great potential in large-scale energy storage. Despite these advantages, ZIBs still suffer many problems, such as zinc dendrites, hydrogen evolution, zinc anode corrosion, etc., which significantly reduce the Coulombic efficiency and reversibility of zinc, and limit the long cycle lifespan, bringing much uncertainty for practical application. In recent years, electrolyte additives, as an effective technique, have been proposed by researchers to solve the above issues. This review mainly focuses on electrolyte additives and discusses different substances as electrolyte additives to alleviate the above problems by altering the original Zn2+ solvation structure, constructing a protective layer at the anode/electrolyte interface, guiding the evenly Zn2+ distribution and uniform Zn deposition, etc. Finally, on this basis, the possible research strategies, development directions of electrolyte additives in the future, and the existing problems to be solved are also discussed, and some prospects and suggestions are proposed.","PeriodicalId":502508,"journal":{"name":"International Journal of Extreme Manufacturing","volume":" 3","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-07-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141823094","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Coaxial electrohydrodynamic printing of core-shell microfibrous scaffolds with layer-specific growth factors release for enthesis regeneration 释放特定层生长因子的核壳微纤维支架同轴流体动力打印技术用于内植物再生
Pub Date : 2024-06-13 DOI: 10.1088/2631-7990/ad5806
L. Bai, Meiguang Xu, Zijie Meng, Zhennan Qiu, Jintao Xiu, Baojun Chen, Qian Han, Qiaonan Liu, Pei He, Nuanyang Wen, Jiankang He, Jing Zhang, Zhanhai Yin
Herein, a tri-layered core-shell microfibrous scaffold with layer-specific growth factors (GFs) release is developed using coaxial electrohydrodynamic (EHD) printing for in situ cell recruitment and differentiation to facilitate gradient enthesis tissue repair. SDF-1 is loaded in the shell, while bFGF, TGF-β, and BMP-2 are loaded in the core of the EHD-printed microfibrous scaffolds in a layer-specific manner. Correspondingly, the tri-layered microfibrous scaffolds have a core-shell fiber size of 25.7 ± 5.1 μm, with a pore size sequentially increasing from 81.5 ± 4.6 μm to 173.3 ± 6.9 μm, and to 388.9 ± 6.9 μm for the tenogenic, chondrogenic, and osteogenic instructive layers. A rapid release of embedded GFs is observed within the first 2 days, followed by a faster release of SDF-1 and a slightly slower release of differentiation GFs for approximately four weeks. The coaxial EHD-printed microfibrous scaffolds significantly promote stem cell recruitment and direct their differentiation toward tenocyte, chondrocyte, and osteocyte phenotype in vitro. When implanted in vivo, the tri-layered core-shell microfibrous scaffolds rapidly restored the biomechanical functions and promoted enthesis tissue regeneration with native-like bone-to-tendon gradients. Our findings suggest that the microfibrous scaffolds with layer-specific GFs release may offer a promising clinical solution for enthesis regeneration.
本文利用同轴电流体动力(EHD)打印技术开发了一种可释放特定层生长因子(GFs)的三层核壳微纤维支架,用于原位细胞募集和分化,以促进梯度骨内组织修复。SDF-1负载在外壳中,而bFGF、TGF-β和BMP-2则以特定层的方式负载在EHD打印微纤维支架的核心中。相应地,三层微纤维支架的核壳纤维尺寸为 25.7 ± 5.1 μm,孔径依次从 81.5 ± 4.6 μm 增大到 173.3 ± 6.9 μm,韧性层、软骨层和成骨指导层的孔径则增大到 388.9 ± 6.9 μm。嵌入的 GFs 在头两天内迅速释放,随后 SDF-1 的释放速度加快,分化 GFs 的释放速度稍慢,持续约四周。同轴环氧乙烷打印微纤维支架能显著促进干细胞的募集,并在体外引导干细胞向腱鞘细胞、软骨细胞和骨细胞表型分化。在体内植入时,三层核壳微纤维支架能迅速恢复生物力学功能,并以类似原生骨-肌腱梯度的方式促进假体组织再生。我们的研究结果表明,具有层特异性 GFs 释放功能的微纤维支架可为内植物组织再生提供一种前景广阔的临床解决方案。
{"title":"Coaxial electrohydrodynamic printing of core-shell microfibrous scaffolds with layer-specific growth factors release for enthesis regeneration","authors":"L. Bai, Meiguang Xu, Zijie Meng, Zhennan Qiu, Jintao Xiu, Baojun Chen, Qian Han, Qiaonan Liu, Pei He, Nuanyang Wen, Jiankang He, Jing Zhang, Zhanhai Yin","doi":"10.1088/2631-7990/ad5806","DOIUrl":"https://doi.org/10.1088/2631-7990/ad5806","url":null,"abstract":"\u0000 Herein, a tri-layered core-shell microfibrous scaffold with layer-specific growth factors (GFs) release is developed using coaxial electrohydrodynamic (EHD) printing for in situ cell recruitment and differentiation to facilitate gradient enthesis tissue repair. SDF-1 is loaded in the shell, while bFGF, TGF-β, and BMP-2 are loaded in the core of the EHD-printed microfibrous scaffolds in a layer-specific manner. Correspondingly, the tri-layered microfibrous scaffolds have a core-shell fiber size of 25.7 ± 5.1 μm, with a pore size sequentially increasing from 81.5 ± 4.6 μm to 173.3 ± 6.9 μm, and to 388.9 ± 6.9 μm for the tenogenic, chondrogenic, and osteogenic instructive layers. A rapid release of embedded GFs is observed within the first 2 days, followed by a faster release of SDF-1 and a slightly slower release of differentiation GFs for approximately four weeks. The coaxial EHD-printed microfibrous scaffolds significantly promote stem cell recruitment and direct their differentiation toward tenocyte, chondrocyte, and osteocyte phenotype in vitro. When implanted in vivo, the tri-layered core-shell microfibrous scaffolds rapidly restored the biomechanical functions and promoted enthesis tissue regeneration with native-like bone-to-tendon gradients. Our findings suggest that the microfibrous scaffolds with layer-specific GFs release may offer a promising clinical solution for enthesis regeneration.","PeriodicalId":502508,"journal":{"name":"International Journal of Extreme Manufacturing","volume":"55 4","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-06-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141348230","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Non-contact intelligent sensor for recognizing transparent and naked-eye indistinguishable materials based on ferroelectric BiFeO3 thin films 基于铁电 BiFeO3 薄膜的非接触式智能传感器,用于识别透明和肉眼无法分辨的材料
Pub Date : 2024-06-12 DOI: 10.1088/2631-7990/ad57a0
Shengjie Yin, Hongyu Li, Weiqi Qian, Md Al Mahadi Hasan, Ya Yang
At present, the research on ferroelectric photovoltaic materials mainly focuses on photoelectric detection. In the context of the rapid development of the Internet of Things, it is particularly important to use smaller thin-film devices as sensors. In this work, an indium tin oxide/ bismuth ferrite/ lanthanum nickelate device has been fabricated on an F-doped tin oxide glass substrate using the sol-gel method. The sensor can continuously output photoelectric signals with little environmental impact. Compared to other types of sensors, this photoelectric sensor has an ultra-low response time of 1.25 ms and ultra-high sensitivity. In this work, a material recognition system based on a bismuth ferrite sensor is developed. It can effectively identify eight kinds of materials that are difficult for human eyes to distinguish. This provides new ideas and methods for developing the Internet of Things in material identification.
目前,铁电光电材料的研究主要集中在光电检测方面。在物联网快速发展的背景下,使用更小的薄膜器件作为传感器显得尤为重要。在这项工作中,利用溶胶-凝胶法在掺杂 F 的氧化锡玻璃衬底上制造了氧化铟锡/铁氧体铋/镍酸镧器件。该传感器可连续输出光电信号,对环境影响很小。与其他类型的传感器相比,这种光电传感器具有 1.25 毫秒的超低响应时间和超高灵敏度。本研究开发了一种基于铋铁氧体传感器的材料识别系统。它能有效识别人眼难以分辨的八种材料。这为在材料识别领域发展物联网提供了新的思路和方法。
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引用次数: 0
Remote Plasma Enhanced Cyclic Etching of a Cyclosiloxane Polymer Thin Film 环硅氧烷聚合物薄膜的远程等离子体增强循环蚀刻技术
Pub Date : 2024-06-12 DOI: 10.1088/2631-7990/ad57a1
Xianglin Wang, Xinyu Luo, Weiwei Du, Yuanhao Shen, Xiaocheng Huang, Zheng Yang, Junjie Zhao
The continuous evolution of chip manufacturing demands the development of materials with ultra-low dielectric constants. With advantageous dielectric and mechanical properties, initiated chemical vapor deposited (iCVD) poly(1,3,5-trimethyl-1,3,5-trivinyl cyclotrisiloxane) (pV3D3) emerges as a promising candidate. However, previous works have not explored etching for this cyclosiloxane polymer thin film, which is indispensable for potential applications to the back-end-of-line fabrication. Here, we developed an etching process utilizing O2/Ar remote plasma for cyclic removal of iCVD pV3D3 thin film at sub-nanometer scale. We employed in-situ quartz crystal microbalance to investigate the process parameters including the plasma power, plasma duration, and O2 flow rate. X-ray photoelectron spectroscopy and cross-sectional microscopy reveal the formation of an oxidized skin layer during the etching process. This skin layer further substantiates an etching mechanism driven by surface oxidation and sputtering. Additionally, this oxidized skin layer leads to improved elastic modulus and hardness, and acts as a barrier layer for protecting the bottom cyclosiloxane polymer from further oxidation.
芯片制造技术的不断发展要求开发具有超低介电常数的材料。引发化学气相沉积(iCVD)聚(1,3,5-三甲基-1,3,5-三乙烯基环三硅氧烷)(pV3D3)具有良好的介电性能和机械性能,是一种很有前途的候选材料。然而,以前的研究还没有探索过这种环硅氧烷聚合物薄膜的蚀刻工艺,而蚀刻工艺对于后端制造的潜在应用是不可或缺的。在此,我们开发了一种蚀刻工艺,利用 O2/Ar 远程等离子体在亚纳米尺度上循环去除 iCVD pV3D3 薄膜。我们采用原位石英晶体微天平研究了包括等离子体功率、等离子体持续时间和氧气流速在内的工艺参数。X 射线光电子能谱和横截面显微镜揭示了蚀刻过程中氧化表皮层的形成。该表皮层进一步证实了由表面氧化和溅射驱动的蚀刻机制。此外,氧化表皮层还提高了弹性模量和硬度,并作为阻挡层保护底部环硅氧烷聚合物免受进一步氧化。
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引用次数: 0
An overview of additively manufactured metal matrix composites: preparation, performance, and challenge 快速成型金属基复合材料概述:制备、性能和挑战
Pub Date : 2024-06-05 DOI: 10.1088/2631-7990/ad54a4
Liang-Yu Chen, P. Qin, Lina Zhang, Lai-Chang Zhang
Metal matrix composites (MMCs) are frequently employed in various advanced industries due to their high modulus and strength, favorable wear and corrosion resistance, and other good properties at elevated temperatures. In recent decades, additive manufacturing (AM) technology has garnered attention as a potential way for fabricating MMCs. This article provides a comprehensive review of recent endeavors and progress in additive manufacturing of MMCs, encompassing available AM technologies, types of reinforcements, feedstock preparation, synthesis principles during the AM process, typical AM-produced MMCs, strengthening mechanisms, challenges and future interests. Compared to conventionally manufactured MMCs, AM-produced MMCs exhibit more uniformly distributed reinforcements and refined microstructure, resulting in comparable or even better mechanical properties. In addition, AM technology can produce bulk MMCs with significantly low porosity and fabricate geometrically complex MMC components and MMC lattice structures. As reviewed, many AM-produced MMCs, such as Al matrix composites, Ti matrix composites, Nickel matrix composites, Fe matrix composites, etc., have been successfully produced. The types and contents of reinforcements strongly influence the properties of AM-produced MMCs, the choice of AM technology, and the applied processing parameters. In these MMCs, four primary strengthening mechanisms have been identified: Hall-Petch strengthening, dislocation strengthening, load transfer strengthening, and Orowan strengthening. AM technologies offer advantages that enhance the properties of MMCs when compared with traditional fabrication methods. Despite the advantages above, further challenges of AM-produced MMCs are still faced, such as new methods and new technologies for investigating AM-produced MMCs, the intrinsic nature of MMCs coupled with AM technologies, and challenges in the AM processes. Therefore, the article concludes by discussing the challenges and future interests of additive manufacturing of MMCs.
金属基复合材料(MMC)具有高模量、高强度、良好的耐磨性和耐腐蚀性,以及在高温下的其他良好性能,因此经常被用于各种先进的工业领域。近几十年来,增材制造(AM)技术作为一种制造 MMC 的潜在方法备受关注。本文全面综述了最近在增材制造 MMC 方面的努力和进展,包括现有的增材制造技术、增强材料类型、原料制备、增材制造过程中的合成原理、典型的增材制造 MMC、增强机制、挑战和未来发展方向。与传统制造的 MMC 相比,AM 生产的 MMC 具有分布更均匀的增强材料和更精细的微观结构,因而具有相当甚至更好的机械性能。此外,AM 技术还能生产出孔隙率极低的块状 MMC,并能制造出几何形状复杂的 MMC 部件和 MMC 晶格结构。综上所述,许多 AM 生产的 MMC(如铝基复合材料、钛基复合材料、镍基复合材料、铁基复合材料等)都已成功生产。增强材料的类型和含量对 AM 生产的 MMC 的性能、AM 技术的选择和应用的加工参数有很大影响。在这些 MMC 中,已确定了四种主要的强化机制:霍尔-佩奇强化、位错强化、载荷传递强化和奥罗万强化。与传统制造方法相比,AM 技术具有增强 MMC 特性的优势。尽管有上述优势,AM 生产的 MMC 仍面临更多挑战,如研究 AM 生产的 MMC 的新方法和新技术、MMC 与 AM 技术结合的内在性质以及 AM 过程中的挑战。因此,文章最后讨论了增材制造 MMCs 所面临的挑战和未来的发展方向。
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引用次数: 0
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International Journal of Extreme Manufacturing
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