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Transient striations in an inductively coupled plasma during E-to-H transitions 电感耦合等离子体中从 E 到 H 转变过程中的瞬态条纹
Pub Date : 2024-02-14 DOI: 10.1088/1361-6595/ad2951
Meng-Zhi Gu, Zhi-Cheng Lei, Xuan Zhang, Yi-kang Pu
Azimuthal transient striations are reported for inductively coupled Ar plasma during E-to-H transition at 200 mTorr. In this transient process, the number of striations increases with time, and striations ultimately disappear when the H mode is reached. An integrated model is developed to investigate the mechanism of this phenomenon. This integrated model incorporates a one-dimensional time-dependent fluid model with a perturbation analysis, as well as a circuit model for power coupling with the external radio-frequency driving source. Based on this integrated model, the development of striations is proposed to be a consequence of ionization instability due to the variation in the electron energy distribution function. The model results for the temporal evolution of the number of striations are in good agreement with the observed data.
报告了电感耦合氩等离子体在 200 mTorr 的 E 到 H 转变过程中的方位瞬态条纹。在这一瞬态过程中,条纹数量随时间增加,当达到 H 模式时,条纹最终消失。为了研究这一现象的机理,我们建立了一个综合模型。该综合模型包含一个带有扰动分析的一维时变流体模型,以及一个与外部射频驱动源进行功率耦合的电路模型。根据这一综合模型,提出了条纹的形成是电子能量分布函数变化导致的电离不稳定性的结果。关于条纹数量时间演变的模型结果与观测数据十分吻合。
{"title":"Transient striations in an inductively coupled plasma during E-to-H transitions","authors":"Meng-Zhi Gu, Zhi-Cheng Lei, Xuan Zhang, Yi-kang Pu","doi":"10.1088/1361-6595/ad2951","DOIUrl":"https://doi.org/10.1088/1361-6595/ad2951","url":null,"abstract":"\u0000 Azimuthal transient striations are reported for inductively coupled Ar plasma during E-to-H transition at 200 mTorr. In this transient process, the number of striations increases with time, and striations ultimately disappear when the H mode is reached. An integrated model is developed to investigate the mechanism of this phenomenon. This integrated model incorporates a one-dimensional time-dependent fluid model with a perturbation analysis, as well as a circuit model for power coupling with the external radio-frequency driving source. Based on this integrated model, the development of striations is proposed to be a consequence of ionization instability due to the variation in the electron energy distribution function. The model results for the temporal evolution of the number of striations are in good agreement with the observed data.","PeriodicalId":508056,"journal":{"name":"Plasma Sources Science and Technology","volume":"132 ","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-02-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139838169","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Transient striations in an inductively coupled plasma during E-to-H transitions 电感耦合等离子体中从 E 到 H 转变过程中的瞬态条纹
Pub Date : 2024-02-14 DOI: 10.1088/1361-6595/ad2951
Meng-Zhi Gu, Zhi-Cheng Lei, Xuan Zhang, Yi-kang Pu
Azimuthal transient striations are reported for inductively coupled Ar plasma during E-to-H transition at 200 mTorr. In this transient process, the number of striations increases with time, and striations ultimately disappear when the H mode is reached. An integrated model is developed to investigate the mechanism of this phenomenon. This integrated model incorporates a one-dimensional time-dependent fluid model with a perturbation analysis, as well as a circuit model for power coupling with the external radio-frequency driving source. Based on this integrated model, the development of striations is proposed to be a consequence of ionization instability due to the variation in the electron energy distribution function. The model results for the temporal evolution of the number of striations are in good agreement with the observed data.
报告了电感耦合氩等离子体在 200 mTorr 的 E 到 H 转变过程中的方位瞬态条纹。在这一瞬态过程中,条纹数量随时间增加,当达到 H 模式时,条纹最终消失。为了研究这一现象的机理,我们建立了一个综合模型。该综合模型包含一个带有扰动分析的一维时变流体模型,以及一个与外部射频驱动源进行功率耦合的电路模型。根据这一综合模型,提出了条纹的形成是电子能量分布函数变化导致的电离不稳定性的结果。关于条纹数量时间演变的模型结果与观测数据十分吻合。
{"title":"Transient striations in an inductively coupled plasma during E-to-H transitions","authors":"Meng-Zhi Gu, Zhi-Cheng Lei, Xuan Zhang, Yi-kang Pu","doi":"10.1088/1361-6595/ad2951","DOIUrl":"https://doi.org/10.1088/1361-6595/ad2951","url":null,"abstract":"\u0000 Azimuthal transient striations are reported for inductively coupled Ar plasma during E-to-H transition at 200 mTorr. In this transient process, the number of striations increases with time, and striations ultimately disappear when the H mode is reached. An integrated model is developed to investigate the mechanism of this phenomenon. This integrated model incorporates a one-dimensional time-dependent fluid model with a perturbation analysis, as well as a circuit model for power coupling with the external radio-frequency driving source. Based on this integrated model, the development of striations is proposed to be a consequence of ionization instability due to the variation in the electron energy distribution function. The model results for the temporal evolution of the number of striations are in good agreement with the observed data.","PeriodicalId":508056,"journal":{"name":"Plasma Sources Science and Technology","volume":"34 3","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-02-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139778414","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Experimental and 2D fluid simulation of a streamer discharge in air over a water surface 水面上空气中流线型排放的实验和二维流体模拟
Pub Date : 2024-02-12 DOI: 10.1088/1361-6595/ad286f
A. Herrmann, Joelle Margot, A. Hamdan
The high reactivity and attractive properties of streamer discharges make them useful in many applications based on plasma-surface interactions. Therefore, understanding the mechanisms governing the propagation of a streamer discharge as well as its properties is an essential task. This paper presents the development and application of a 2D fluid model to the simulation of discharges triggered at the air-water interface by a pulsed nanosecond high voltage. Experimental characterization using 1-ns-time-resolved imaging reveals rapid transitions from a homogeneous disc to a ring and finally to dots during the discharge process. The simulation enables the determination of the spatio-temporal dynamics of the E-field and electron density, highlighting that the discharge reaches the liquid surface in less than 1 ns, triggering a radial surface discharge. As the discharge propagates along/over the water surface, a sheath forms behind its head. Furthermore, the simulation elucidates the transitions from disc to ring and from ring to dots. The former transition arises from the ionization front's propagation speed, where an initial disc-like feature changes to a ring due to the decreasing E-field strength. The ring-to-dots transition results from the destabilization caused by radial electron avalanches as the discharge head reaches a radius of ~1. 5 mm. The simulation is further utilized to estimate a charge number and a charge content in the discharge head. This work contributes to a better understanding of discharge propagation in air near a dielectric surface, with the agreement between simulation and experiment validating the model in its present version.
流束放电的高反应性和吸引力特性使其在许多基于等离子体表面相互作用的应用中非常有用。因此,了解流束放电的传播机制及其特性是一项重要任务。本文介绍了二维流体模型的开发和应用,以模拟纳秒脉冲高压在空气-水界面触发的放电。利用 1-ns 时间分辨成像技术进行的实验表征显示,在放电过程中,均匀圆盘迅速转变为环状,最后转变为点状。模拟能够确定电子场和电子密度的时空动态,突出显示放电在不到 1 毫微秒的时间内到达液体表面,引发径向表面放电。当放电沿着/越过水面传播时,在其头部后面形成了一个鞘。此外,模拟还阐明了从圆盘到圆环以及从圆环到圆点的转变。前一种转变源于电离前沿的传播速度,由于电场强度的减弱,最初的圆盘状特征会转变为环状。当放电头的半径达到约 1.5 毫米时,径向电子雪崩会导致不稳定,从而产生从环形到点状的转变。利用模拟进一步估算了放电头中的电荷数和电荷含量。这项工作有助于更好地理解介质表面附近空气中的放电传播,模拟和实验之间的一致性验证了当前版本的模型。
{"title":"Experimental and 2D fluid simulation of a streamer discharge in air over a water surface","authors":"A. Herrmann, Joelle Margot, A. Hamdan","doi":"10.1088/1361-6595/ad286f","DOIUrl":"https://doi.org/10.1088/1361-6595/ad286f","url":null,"abstract":"\u0000 The high reactivity and attractive properties of streamer discharges make them useful in many applications based on plasma-surface interactions. Therefore, understanding the mechanisms governing the propagation of a streamer discharge as well as its properties is an essential task. This paper presents the development and application of a 2D fluid model to the simulation of discharges triggered at the air-water interface by a pulsed nanosecond high voltage. Experimental characterization using 1-ns-time-resolved imaging reveals rapid transitions from a homogeneous disc to a ring and finally to dots during the discharge process. The simulation enables the determination of the spatio-temporal dynamics of the E-field and electron density, highlighting that the discharge reaches the liquid surface in less than 1 ns, triggering a radial surface discharge. As the discharge propagates along/over the water surface, a sheath forms behind its head. Furthermore, the simulation elucidates the transitions from disc to ring and from ring to dots. The former transition arises from the ionization front's propagation speed, where an initial disc-like feature changes to a ring due to the decreasing E-field strength. The ring-to-dots transition results from the destabilization caused by radial electron avalanches as the discharge head reaches a radius of ~1. 5 mm. The simulation is further utilized to estimate a charge number and a charge content in the discharge head. This work contributes to a better understanding of discharge propagation in air near a dielectric surface, with the agreement between simulation and experiment validating the model in its present version.","PeriodicalId":508056,"journal":{"name":"Plasma Sources Science and Technology","volume":"76 11","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-02-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139844077","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Experimental and 2D fluid simulation of a streamer discharge in air over a water surface 水面上空气中流线型排放的实验和二维流体模拟
Pub Date : 2024-02-12 DOI: 10.1088/1361-6595/ad286f
A. Herrmann, Joelle Margot, A. Hamdan
The high reactivity and attractive properties of streamer discharges make them useful in many applications based on plasma-surface interactions. Therefore, understanding the mechanisms governing the propagation of a streamer discharge as well as its properties is an essential task. This paper presents the development and application of a 2D fluid model to the simulation of discharges triggered at the air-water interface by a pulsed nanosecond high voltage. Experimental characterization using 1-ns-time-resolved imaging reveals rapid transitions from a homogeneous disc to a ring and finally to dots during the discharge process. The simulation enables the determination of the spatio-temporal dynamics of the E-field and electron density, highlighting that the discharge reaches the liquid surface in less than 1 ns, triggering a radial surface discharge. As the discharge propagates along/over the water surface, a sheath forms behind its head. Furthermore, the simulation elucidates the transitions from disc to ring and from ring to dots. The former transition arises from the ionization front's propagation speed, where an initial disc-like feature changes to a ring due to the decreasing E-field strength. The ring-to-dots transition results from the destabilization caused by radial electron avalanches as the discharge head reaches a radius of ~1. 5 mm. The simulation is further utilized to estimate a charge number and a charge content in the discharge head. This work contributes to a better understanding of discharge propagation in air near a dielectric surface, with the agreement between simulation and experiment validating the model in its present version.
流束放电的高反应性和吸引力特性使其在许多基于等离子体表面相互作用的应用中非常有用。因此,了解流束放电的传播机制及其特性是一项重要任务。本文介绍了二维流体模型的开发和应用,以模拟纳秒脉冲高压在空气-水界面触发的放电。利用 1-ns 时间分辨成像技术进行的实验表征显示,在放电过程中,均匀圆盘迅速转变为环状,最后转变为点状。模拟能够确定电子场和电子密度的时空动态,突出显示放电在不到 1 毫微秒的时间内到达液体表面,引发径向表面放电。当放电沿着/越过水面传播时,在其头部后面形成了一个鞘。此外,模拟还阐明了从圆盘到圆环以及从圆环到圆点的转变。前一种转变源于电离前沿的传播速度,由于电场强度的减弱,最初的圆盘状特征会转变为环状。当放电头的半径达到约 1.5 毫米时,径向电子雪崩会导致不稳定,从而产生从环形到点状的转变。利用模拟进一步估算了放电头中的电荷数和电荷含量。这项工作有助于更好地理解介质表面附近空气中的放电传播,模拟和实验之间的一致性验证了当前版本的模型。
{"title":"Experimental and 2D fluid simulation of a streamer discharge in air over a water surface","authors":"A. Herrmann, Joelle Margot, A. Hamdan","doi":"10.1088/1361-6595/ad286f","DOIUrl":"https://doi.org/10.1088/1361-6595/ad286f","url":null,"abstract":"\u0000 The high reactivity and attractive properties of streamer discharges make them useful in many applications based on plasma-surface interactions. Therefore, understanding the mechanisms governing the propagation of a streamer discharge as well as its properties is an essential task. This paper presents the development and application of a 2D fluid model to the simulation of discharges triggered at the air-water interface by a pulsed nanosecond high voltage. Experimental characterization using 1-ns-time-resolved imaging reveals rapid transitions from a homogeneous disc to a ring and finally to dots during the discharge process. The simulation enables the determination of the spatio-temporal dynamics of the E-field and electron density, highlighting that the discharge reaches the liquid surface in less than 1 ns, triggering a radial surface discharge. As the discharge propagates along/over the water surface, a sheath forms behind its head. Furthermore, the simulation elucidates the transitions from disc to ring and from ring to dots. The former transition arises from the ionization front's propagation speed, where an initial disc-like feature changes to a ring due to the decreasing E-field strength. The ring-to-dots transition results from the destabilization caused by radial electron avalanches as the discharge head reaches a radius of ~1. 5 mm. The simulation is further utilized to estimate a charge number and a charge content in the discharge head. This work contributes to a better understanding of discharge propagation in air near a dielectric surface, with the agreement between simulation and experiment validating the model in its present version.","PeriodicalId":508056,"journal":{"name":"Plasma Sources Science and Technology","volume":"49 24","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-02-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139783936","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A harmonic method for measuring electron temperature and ion density using an asymmetric double probe 利用不对称双探针测量电子温度和离子密度的谐波法
Pub Date : 2024-02-12 DOI: 10.1088/1361-6595/ad286d
Hyundong Eo, Sung Joon Park, Ju Ho Kim, Chin-Wook Chung
The harmonic method using a symmetric double probe was developed for measuring electron temperature and ion density (Meas. Sci. Technol. 23 085001). When an alternating voltage is applied to the symmetric double probe where the two areas of the collector for current collection are equal, the fundamental frequency current and third harmonic currents are generated. The electron temperature and ion density are obtained by measuring the fundamental frequency current and the third harmonic current. However, it is observed that the third harmonic current can rapidly decrease to the level of base noise when the ratio of the applied voltage to the electron temperature decreases. Therefore, it is necessary to increase the harmonic currents generated to improve measurement accuracy for electron temperature and ion density. In this paper, a harmonic method using an asymmetric double probe with different collection areas is proposed to measure electron temperature and ion density. By using the double probe with different collector area, the fundamental frequency current and the second harmonic current are generated. In the proposed method, the electron temperature and ion density are obtained by measuring the fundamental frequency current and the second harmonic current. It is found that the accuracy of the electron temperature can be improved by measuring the second harmonic rather than measuring the third harmonic current. For quantitative comparison, the electron temperature and ion density obtained by the proposed method were compared with the electron temperature and electron density obtained by the measurement electron energy probability function, which showed good agreement between them in argon plasma at various conditions. In addition, it was experimentally verified that the electron temperature can be accurately measured even when the chamber is electrically insulated, and a dielectric layer is deposited on the collectors of the double probe, such as in the plasma process.
为测量电子温度和离子密度,开发了使用对称双探针的谐波法(Meas.)当对对称双探针施加交流电压时,集电极的两个集电区面积相等,此时会产生基频电流和三次谐波电流。通过测量基频电流和三次谐波电流,可以获得电子温度和离子密度。然而,我们发现,当外加电压与电子温度的比值降低时,三次谐波电流会迅速降低到基底噪声的水平。因此,有必要增加产生的谐波电流,以提高电子温度和离子密度的测量精度。本文提出了一种使用具有不同收集区域的非对称双探针来测量电子温度和离子密度的谐波方法。通过使用具有不同收集面积的双探针,可以产生基频电流和二次谐波电流。在所提出的方法中,电子温度和离子密度是通过测量基频电流和二次谐波电流得到的。研究发现,通过测量二次谐波电流而不是三次谐波电流可以提高电子温度的精确度。为了进行定量比较,将所提出方法得到的电子温度和离子密度与通过测量电子能量概率函数得到的电子温度和电子密度进行了比较,结果表明二者在氩等离子体的不同条件下具有良好的一致性。此外,实验还验证了在等离子体过程中,即使腔室是电绝缘的,并且在双探针的集电体上沉积了电介质层,也能精确测量电子温度。
{"title":"A harmonic method for measuring electron temperature and ion density using an asymmetric double probe","authors":"Hyundong Eo, Sung Joon Park, Ju Ho Kim, Chin-Wook Chung","doi":"10.1088/1361-6595/ad286d","DOIUrl":"https://doi.org/10.1088/1361-6595/ad286d","url":null,"abstract":"\u0000 The harmonic method using a symmetric double probe was developed for measuring electron temperature and ion density (Meas. Sci. Technol. 23 085001). When an alternating voltage is applied to the symmetric double probe where the two areas of the collector for current collection are equal, the fundamental frequency current and third harmonic currents are generated. The electron temperature and ion density are obtained by measuring the fundamental frequency current and the third harmonic current. However, it is observed that the third harmonic current can rapidly decrease to the level of base noise when the ratio of the applied voltage to the electron temperature decreases. Therefore, it is necessary to increase the harmonic currents generated to improve measurement accuracy for electron temperature and ion density. In this paper, a harmonic method using an asymmetric double probe with different collection areas is proposed to measure electron temperature and ion density. By using the double probe with different collector area, the fundamental frequency current and the second harmonic current are generated. In the proposed method, the electron temperature and ion density are obtained by measuring the fundamental frequency current and the second harmonic current. It is found that the accuracy of the electron temperature can be improved by measuring the second harmonic rather than measuring the third harmonic current. For quantitative comparison, the electron temperature and ion density obtained by the proposed method were compared with the electron temperature and electron density obtained by the measurement electron energy probability function, which showed good agreement between them in argon plasma at various conditions. In addition, it was experimentally verified that the electron temperature can be accurately measured even when the chamber is electrically insulated, and a dielectric layer is deposited on the collectors of the double probe, such as in the plasma process.","PeriodicalId":508056,"journal":{"name":"Plasma Sources Science and Technology","volume":"68 4","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-02-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139844425","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Diagnostics and characterization of a novel multi gas layer RF atmospheric pressure plasma jet for polymer processing 用于聚合物加工的新型多气层射频常压等离子射流的诊断和表征
Pub Date : 2024-02-12 DOI: 10.1088/1361-6595/ad286e
Mehrnoush Narimisa, Yuliia Onyshchenko, Ivana Sremački, A. Nikiforov, R. Morent, N. De Geyter
The quest to employ cold plasma sources at atmospheric pressure in polymer processing has emerged as a potent driving force behind their development. Atmospheric pressure operation of plasma jets provides potential cost reductions as well as easier handling and maintenance. In addition, their unique advantage of remote operation allows the substrate to be placed outside the source boundaries. This latter feature makes it easier to process complex three-dimensional objects and to integrate plasma jets into existing production lines. Although conventional atmospheric pressure plasma jet (APPJ) sources have undergone significant advancements in their design and construction, they have reached their technical and technological thresholds in several domains, thereby also impeding further enhancements in material processing applications. To cope with this issue, this work introduces a promising APPJ (named MPPJ3) working in a three co-axial gas layer geometry, incorporating the capability of aerosol and shield gas introduction leading to a configuration rich in reactive plasma species with controllable size and suitable temperature for polymer processing. A parametric study on the novel MPPJ3 device is carried out and plasma characteristics, such as reactive plasma species and temperatures, are determined by means of optical emission spectroscopy (OES), laser scattering, and infrared (IR) camera imaging whereas the fluid dynamics are analyzed using computational fluid dynamics (CFD) and Schlieren imaging. The obtained promising results clearly show the flexibility and adaptability of the MPPJ3 device for polymer processing applications.
在聚合物加工过程中使用常压冷等离子源的需求已成为其发展的强大动力。等离子喷射器的常压操作具有降低成本的潜力,并且更易于处理和维护。此外,其远程操作的独特优势还允许将基材置于源边界之外。后一个特点使得加工复杂的三维物体和将等离子喷射器集成到现有生产线中变得更加容易。虽然传统的常压等离子体射流(APPJ)源在设计和构造方面取得了重大进步,但在多个领域已经达到了技术和工艺门槛,因此也阻碍了材料加工应用的进一步提升。为了解决这个问题,这项研究引入了一种前景广阔的 APPJ(命名为 MPPJ3),这种 APPJ 采用三同轴气体层几何结构,具有引入气溶胶和保护气体的能力,从而形成了一种富含活性等离子体物种、尺寸可控、温度适合聚合物加工的配置。对新型 MPPJ3 设备进行了参数研究,并通过光学发射光谱(OES)、激光散射和红外(IR)相机成像确定了反应等离子体种类和温度等等等离子体特性,同时使用计算流体动力学(CFD)和 Schlieren 成像分析了流体动力学。所获得的良好结果清楚地表明了 MPPJ3 设备在聚合物加工应用中的灵活性和适应性。
{"title":"Diagnostics and characterization of a novel multi gas layer RF atmospheric pressure plasma jet for polymer processing","authors":"Mehrnoush Narimisa, Yuliia Onyshchenko, Ivana Sremački, A. Nikiforov, R. Morent, N. De Geyter","doi":"10.1088/1361-6595/ad286e","DOIUrl":"https://doi.org/10.1088/1361-6595/ad286e","url":null,"abstract":"\u0000 The quest to employ cold plasma sources at atmospheric pressure in polymer processing has emerged as a potent driving force behind their development. Atmospheric pressure operation of plasma jets provides potential cost reductions as well as easier handling and maintenance. In addition, their unique advantage of remote operation allows the substrate to be placed outside the source boundaries. This latter feature makes it easier to process complex three-dimensional objects and to integrate plasma jets into existing production lines. Although conventional atmospheric pressure plasma jet (APPJ) sources have undergone significant advancements in their design and construction, they have reached their technical and technological thresholds in several domains, thereby also impeding further enhancements in material processing applications. To cope with this issue, this work introduces a promising APPJ (named MPPJ3) working in a three co-axial gas layer geometry, incorporating the capability of aerosol and shield gas introduction leading to a configuration rich in reactive plasma species with controllable size and suitable temperature for polymer processing. A parametric study on the novel MPPJ3 device is carried out and plasma characteristics, such as reactive plasma species and temperatures, are determined by means of optical emission spectroscopy (OES), laser scattering, and infrared (IR) camera imaging whereas the fluid dynamics are analyzed using computational fluid dynamics (CFD) and Schlieren imaging. The obtained promising results clearly show the flexibility and adaptability of the MPPJ3 device for polymer processing applications.","PeriodicalId":508056,"journal":{"name":"Plasma Sources Science and Technology","volume":"329 ","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-02-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139842900","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A harmonic method for measuring electron temperature and ion density using an asymmetric double probe 利用不对称双探针测量电子温度和离子密度的谐波法
Pub Date : 2024-02-12 DOI: 10.1088/1361-6595/ad286d
Hyundong Eo, Sung Joon Park, Ju Ho Kim, Chin-Wook Chung
The harmonic method using a symmetric double probe was developed for measuring electron temperature and ion density (Meas. Sci. Technol. 23 085001). When an alternating voltage is applied to the symmetric double probe where the two areas of the collector for current collection are equal, the fundamental frequency current and third harmonic currents are generated. The electron temperature and ion density are obtained by measuring the fundamental frequency current and the third harmonic current. However, it is observed that the third harmonic current can rapidly decrease to the level of base noise when the ratio of the applied voltage to the electron temperature decreases. Therefore, it is necessary to increase the harmonic currents generated to improve measurement accuracy for electron temperature and ion density. In this paper, a harmonic method using an asymmetric double probe with different collection areas is proposed to measure electron temperature and ion density. By using the double probe with different collector area, the fundamental frequency current and the second harmonic current are generated. In the proposed method, the electron temperature and ion density are obtained by measuring the fundamental frequency current and the second harmonic current. It is found that the accuracy of the electron temperature can be improved by measuring the second harmonic rather than measuring the third harmonic current. For quantitative comparison, the electron temperature and ion density obtained by the proposed method were compared with the electron temperature and electron density obtained by the measurement electron energy probability function, which showed good agreement between them in argon plasma at various conditions. In addition, it was experimentally verified that the electron temperature can be accurately measured even when the chamber is electrically insulated, and a dielectric layer is deposited on the collectors of the double probe, such as in the plasma process.
为测量电子温度和离子密度,开发了使用对称双探针的谐波法(Meas.)当对对称双探针施加交流电压时,集电极的两个集电区面积相等,此时会产生基频电流和三次谐波电流。通过测量基频电流和三次谐波电流,可以获得电子温度和离子密度。然而,我们发现,当外加电压与电子温度的比值降低时,三次谐波电流会迅速降低到基底噪声的水平。因此,有必要增加产生的谐波电流,以提高电子温度和离子密度的测量精度。本文提出了一种使用具有不同收集区域的非对称双探针来测量电子温度和离子密度的谐波方法。通过使用具有不同收集面积的双探针,可以产生基频电流和二次谐波电流。在所提出的方法中,电子温度和离子密度是通过测量基频电流和二次谐波电流得到的。研究发现,通过测量二次谐波电流而不是三次谐波电流可以提高电子温度的精确度。为了进行定量比较,将所提出方法得到的电子温度和离子密度与通过测量电子能量概率函数得到的电子温度和电子密度进行了比较,结果表明二者在氩等离子体的不同条件下具有良好的一致性。此外,实验还验证了在等离子体过程中,即使腔室是电绝缘的,并且在双探针的集电体上沉积了电介质层,也能精确测量电子温度。
{"title":"A harmonic method for measuring electron temperature and ion density using an asymmetric double probe","authors":"Hyundong Eo, Sung Joon Park, Ju Ho Kim, Chin-Wook Chung","doi":"10.1088/1361-6595/ad286d","DOIUrl":"https://doi.org/10.1088/1361-6595/ad286d","url":null,"abstract":"\u0000 The harmonic method using a symmetric double probe was developed for measuring electron temperature and ion density (Meas. Sci. Technol. 23 085001). When an alternating voltage is applied to the symmetric double probe where the two areas of the collector for current collection are equal, the fundamental frequency current and third harmonic currents are generated. The electron temperature and ion density are obtained by measuring the fundamental frequency current and the third harmonic current. However, it is observed that the third harmonic current can rapidly decrease to the level of base noise when the ratio of the applied voltage to the electron temperature decreases. Therefore, it is necessary to increase the harmonic currents generated to improve measurement accuracy for electron temperature and ion density. In this paper, a harmonic method using an asymmetric double probe with different collection areas is proposed to measure electron temperature and ion density. By using the double probe with different collector area, the fundamental frequency current and the second harmonic current are generated. In the proposed method, the electron temperature and ion density are obtained by measuring the fundamental frequency current and the second harmonic current. It is found that the accuracy of the electron temperature can be improved by measuring the second harmonic rather than measuring the third harmonic current. For quantitative comparison, the electron temperature and ion density obtained by the proposed method were compared with the electron temperature and electron density obtained by the measurement electron energy probability function, which showed good agreement between them in argon plasma at various conditions. In addition, it was experimentally verified that the electron temperature can be accurately measured even when the chamber is electrically insulated, and a dielectric layer is deposited on the collectors of the double probe, such as in the plasma process.","PeriodicalId":508056,"journal":{"name":"Plasma Sources Science and Technology","volume":"07 3","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-02-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139784295","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Diagnostics and characterization of a novel multi gas layer RF atmospheric pressure plasma jet for polymer processing 用于聚合物加工的新型多气层射频常压等离子射流的诊断和表征
Pub Date : 2024-02-12 DOI: 10.1088/1361-6595/ad286e
Mehrnoush Narimisa, Yuliia Onyshchenko, Ivana Sremački, A. Nikiforov, R. Morent, N. De Geyter
The quest to employ cold plasma sources at atmospheric pressure in polymer processing has emerged as a potent driving force behind their development. Atmospheric pressure operation of plasma jets provides potential cost reductions as well as easier handling and maintenance. In addition, their unique advantage of remote operation allows the substrate to be placed outside the source boundaries. This latter feature makes it easier to process complex three-dimensional objects and to integrate plasma jets into existing production lines. Although conventional atmospheric pressure plasma jet (APPJ) sources have undergone significant advancements in their design and construction, they have reached their technical and technological thresholds in several domains, thereby also impeding further enhancements in material processing applications. To cope with this issue, this work introduces a promising APPJ (named MPPJ3) working in a three co-axial gas layer geometry, incorporating the capability of aerosol and shield gas introduction leading to a configuration rich in reactive plasma species with controllable size and suitable temperature for polymer processing. A parametric study on the novel MPPJ3 device is carried out and plasma characteristics, such as reactive plasma species and temperatures, are determined by means of optical emission spectroscopy (OES), laser scattering, and infrared (IR) camera imaging whereas the fluid dynamics are analyzed using computational fluid dynamics (CFD) and Schlieren imaging. The obtained promising results clearly show the flexibility and adaptability of the MPPJ3 device for polymer processing applications.
在聚合物加工过程中使用常压冷等离子源的需求已成为其发展的强大动力。等离子喷射器的常压操作具有降低成本的潜力,并且更易于处理和维护。此外,其远程操作的独特优势还允许将基材置于源边界之外。后一个特点使得加工复杂的三维物体和将等离子喷射器集成到现有生产线中变得更加容易。虽然传统的常压等离子体射流(APPJ)源在设计和构造方面取得了重大进步,但在多个领域已经达到了技术和工艺门槛,因此也阻碍了材料加工应用的进一步提升。为了解决这个问题,这项研究引入了一种前景广阔的 APPJ(命名为 MPPJ3),这种 APPJ 采用三同轴气体层几何结构,具有引入气溶胶和保护气体的能力,从而形成了一种富含活性等离子体物种、尺寸可控、温度适合聚合物加工的配置。对新型 MPPJ3 设备进行了参数研究,并通过光学发射光谱(OES)、激光散射和红外(IR)相机成像确定了反应等离子体种类和温度等等等离子体特性,同时使用计算流体动力学(CFD)和 Schlieren 成像分析了流体动力学。所获得的良好结果清楚地表明了 MPPJ3 设备在聚合物加工应用中的灵活性和适应性。
{"title":"Diagnostics and characterization of a novel multi gas layer RF atmospheric pressure plasma jet for polymer processing","authors":"Mehrnoush Narimisa, Yuliia Onyshchenko, Ivana Sremački, A. Nikiforov, R. Morent, N. De Geyter","doi":"10.1088/1361-6595/ad286e","DOIUrl":"https://doi.org/10.1088/1361-6595/ad286e","url":null,"abstract":"\u0000 The quest to employ cold plasma sources at atmospheric pressure in polymer processing has emerged as a potent driving force behind their development. Atmospheric pressure operation of plasma jets provides potential cost reductions as well as easier handling and maintenance. In addition, their unique advantage of remote operation allows the substrate to be placed outside the source boundaries. This latter feature makes it easier to process complex three-dimensional objects and to integrate plasma jets into existing production lines. Although conventional atmospheric pressure plasma jet (APPJ) sources have undergone significant advancements in their design and construction, they have reached their technical and technological thresholds in several domains, thereby also impeding further enhancements in material processing applications. To cope with this issue, this work introduces a promising APPJ (named MPPJ3) working in a three co-axial gas layer geometry, incorporating the capability of aerosol and shield gas introduction leading to a configuration rich in reactive plasma species with controllable size and suitable temperature for polymer processing. A parametric study on the novel MPPJ3 device is carried out and plasma characteristics, such as reactive plasma species and temperatures, are determined by means of optical emission spectroscopy (OES), laser scattering, and infrared (IR) camera imaging whereas the fluid dynamics are analyzed using computational fluid dynamics (CFD) and Schlieren imaging. The obtained promising results clearly show the flexibility and adaptability of the MPPJ3 device for polymer processing applications.","PeriodicalId":508056,"journal":{"name":"Plasma Sources Science and Technology","volume":"6 21","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-02-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139783093","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Electrical characterization and imaging of discharge morphology in a small-scale packed bed dielectric barrier discharge 小规模填料床介质势垒放电中放电形态的电学表征和成像
Pub Date : 2024-02-09 DOI: 10.1088/1361-6595/ad27ed
Rezvan Hosseini Rad, Volker Brüser, Ronny Brandenburg
Packed bed dielectric barrier discharges exhibit an improved energy efficiency and selectivity in nonthermal plasma based gas conversion. They enable the direct interaction between plasma and catalyst. In this contribution a compact coaxial DBD reactor enabling the end-on imaging of the discharge with and without packed beds is constructed and studied. The discharge morphology is correlated with electrical measurements such as V-Q plots. The studies are performed for different packed bed materials, binary gas compositions of argon and carbon dioxide, voltage amplitudes, average powers, and pressures. The analysis points outs the role of parasitic capacitances and parasitic discharges as often overlooked aspects. The introduction of the packed bed material into the coaxial barrier discharge arrangement increases the total capacitance, but the barrier of the outer glass tube mostly determines the maximum effective dielectric capacitance. The choice of the packed bed material determines the voltage threshold and the average discharge power. The investigations leads to a revision of the equivalent circuit for packed bed barrier discharge reactors, which also accounts the properties of different filling materials.
在基于非热等离子体的气体转换中,填料床介质阻挡层放电具有更高的能效和选择性。它们能够实现等离子体与催化剂之间的直接相互作用。本文构建并研究了一个紧凑的同轴 DBD 反应器,该反应器可对有填料床和无填料床的放电进行端对成像。放电形态与 V-Q 图等电学测量结果相关联。研究针对不同的填料床材料、氩气和二氧化碳的二元气体成分、电压振幅、平均功率和压力进行。分析指出,寄生电容和寄生放电的作用往往被忽视。在同轴阻隔放电布置中引入填料床材料会增加总电容,但外部玻璃管的阻隔主要决定了最大有效介质电容。填料床材料的选择决定了电压阈值和平均放电功率。研究结果修正了填料床阻挡放电反应器的等效电路,同时也考虑到了不同填充材料的特性。
{"title":"Electrical characterization and imaging of discharge morphology in a small-scale packed bed dielectric barrier discharge","authors":"Rezvan Hosseini Rad, Volker Brüser, Ronny Brandenburg","doi":"10.1088/1361-6595/ad27ed","DOIUrl":"https://doi.org/10.1088/1361-6595/ad27ed","url":null,"abstract":"\u0000 Packed bed dielectric barrier discharges exhibit an improved energy efficiency and selectivity in nonthermal plasma based gas conversion. They enable the direct interaction between plasma and catalyst. In this contribution a compact coaxial DBD reactor enabling the end-on imaging of the discharge with and without packed beds is constructed and studied. The discharge morphology is correlated with electrical measurements such as V-Q plots. The studies are performed for different packed bed materials, binary gas compositions of argon and carbon dioxide, voltage amplitudes, average powers, and pressures. The analysis points outs the role of parasitic capacitances and parasitic discharges as often overlooked aspects. The introduction of the packed bed material into the coaxial barrier discharge arrangement increases the total capacitance, but the barrier of the outer glass tube mostly determines the maximum effective dielectric capacitance. The choice of the packed bed material determines the voltage threshold and the average discharge power. The investigations leads to a revision of the equivalent circuit for packed bed barrier discharge reactors, which also accounts the properties of different filling materials.","PeriodicalId":508056,"journal":{"name":"Plasma Sources Science and Technology","volume":"308 4","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-02-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139848535","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Fine structure resolved excitation cross sections of singly ionized Ga for the modeling and diagnostics of Ga plasmas 用于镓等离子体建模和诊断的单电离镓的精细结构解析激发截面
Pub Date : 2024-02-09 DOI: 10.1088/1361-6595/ad27ec
Indhu Suresh, Priti Priti, R. Srivastava, R. Gangwar
Calculation of electron impact excitation cross sections for singly charged Ga ions plays a crucial role in plasma modeling, facilitating the comprehension of plasma behavior, characteristics, and dynamics in diverse domains, such as astrophysics, fusion research, the semiconductor industry, etc. In the available literature, there is a notable scarcity of, or even a complete absence of, these cross sections. Hence, in the present work, electron impact excitation cross sections are calculated for the transitions from the fine structure resolved energy levels of the configurations 4s2 and 4s4p to the fine structure resolved energy levels of the configurations 4s4p, 4s5s, 4p2 and 4s4d of the singly charged Ga ion (Ga+) using the relativistic distorted wave approximation theory with the target states represented by multi configurational Dirac Fock wavefunctions. The cross sections are calculated for projectile electron energy varying from threshold to 500 eV. Furthermore, the electron impact excitation rate coefficients for all the transitions under investigation are also calculated for electron temperatures ranging from 0.5 to 5 eV. In addition, analytic fitting of the rate coefficients is also performed, providing a practical resource for directly utilizing in plasma modeling applications.
计算单带电镓离子的电子碰撞激发截面在等离子体建模中起着至关重要的作用,有助于理解天体物理学、核聚变研究、半导体工业等不同领域的等离子体行为、特征和动力学。在现有的文献中,这些横截面明显很少,甚至完全没有。因此,在本研究中,我们利用相对论扭曲波近似理论计算了单电荷镓离子(Ga+)从4s2和4s4p构型的精细结构分辨能级到4s4p、4s5s、4p2和4s4d构型的精细结构分辨能级的电子碰撞激发截面,目标态由多构型狄拉克-福克波函数表示。计算了从阈值到 500 eV 的射弹电子能量的截面。此外,还计算了电子温度在 0.5 至 5 eV 之间时所有研究转变的电子撞击激发率系数。此外,还对速率系数进行了分析拟合,为直接用于等离子体建模应用提供了实用资源。
{"title":"Fine structure resolved excitation cross sections of singly ionized Ga for the modeling and diagnostics of Ga plasmas","authors":"Indhu Suresh, Priti Priti, R. Srivastava, R. Gangwar","doi":"10.1088/1361-6595/ad27ec","DOIUrl":"https://doi.org/10.1088/1361-6595/ad27ec","url":null,"abstract":"\u0000 Calculation of electron impact excitation cross sections for singly charged Ga ions plays a crucial role in plasma modeling, facilitating the comprehension of plasma behavior, characteristics, and dynamics in diverse domains, such as astrophysics, fusion research, the semiconductor industry, etc. In the available literature, there is a notable scarcity of, or even a complete absence of, these cross sections. Hence, in the present work, electron impact excitation cross sections are calculated for the transitions from the fine structure resolved energy levels of the configurations 4s2 and 4s4p to the fine structure resolved energy levels of the configurations 4s4p, 4s5s, 4p2 and 4s4d of the singly charged Ga ion (Ga+) using the relativistic distorted wave approximation theory with the target states represented by multi configurational Dirac Fock wavefunctions. The cross sections are calculated for projectile electron energy varying from threshold to 500 eV. Furthermore, the electron impact excitation rate coefficients for all the transitions under investigation are also calculated for electron temperatures ranging from 0.5 to 5 eV. In addition, analytic fitting of the rate coefficients is also performed, providing a practical resource for directly utilizing in plasma modeling applications.","PeriodicalId":508056,"journal":{"name":"Plasma Sources Science and Technology","volume":"19 6","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-02-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139850026","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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Plasma Sources Science and Technology
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