Pub Date : 2022-07-01DOI: 10.2961/jlmn.2022.01.2003
{"title":"Automatic Image Analysis for Processing Marks in Femtosecond Laser Micromachining Using Concave and Convex (unevenness) Coefficien","authors":"","doi":"10.2961/jlmn.2022.01.2003","DOIUrl":"https://doi.org/10.2961/jlmn.2022.01.2003","url":null,"abstract":"","PeriodicalId":54788,"journal":{"name":"Journal of Laser Micro Nanoengineering","volume":" ","pages":""},"PeriodicalIF":1.1,"publicationDate":"2022-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"46278417","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2022-07-01DOI: 10.2961/jlmn.2022.01.2002
{"title":"High Pore Density Polyimide Membrane Production by PS Laser Pulses","authors":"","doi":"10.2961/jlmn.2022.01.2002","DOIUrl":"https://doi.org/10.2961/jlmn.2022.01.2002","url":null,"abstract":"","PeriodicalId":54788,"journal":{"name":"Journal of Laser Micro Nanoengineering","volume":" ","pages":""},"PeriodicalIF":1.1,"publicationDate":"2022-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"41418393","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2022-07-01DOI: 10.2961/jlmn.2022.01.2006
Daniel Holder, Simon Hensel, Alexander Peter, R. Weber, T. Graf
Scaling the average power of ultrafast lasers into the kW range for high-throughput surface structuring and micromachining by the pulse energy requires an adapted processing strategy in order to minimize surface defects due to high fluences and maintain a high surface quality. One promising approach to distribute the pulse energy uniformly on the sample surface is spatial beam shaping using a spatial light modulator. The local phase was modulated by computer-generated holograms for the generation of uniform intensity distributions in the focal plane. The corresponding intensity distributions resulting from the different holograms were monitored with an on-axis camera to ensure accurate beam shapes during surface structuring and micromachining of the two materials stainless steel and cemented tungsten carbide. Uniform surface structures and flexible, dimensionally accurate cavities were machined with a shaped ultrafast laser beam and high pulse energies up to over 1 mJ on the sample surface. Various beam shapes with a cross-sectional area up to 0.42 mm² were generated on the sample surface for energy-efficient micromachining and homogenous surface structuring. The capability of high-energy pulse beam shaping was demonstrated by the fabrication of a large-area checkerboard pattern with small transition zones <10 µm between unprocessed and structured areas.
{"title":"Beam Shaping for Uniform and Energy-efficient Surface Structuring of Metals with Ultrashort Laser Pulses in the mJ Range","authors":"Daniel Holder, Simon Hensel, Alexander Peter, R. Weber, T. Graf","doi":"10.2961/jlmn.2022.01.2006","DOIUrl":"https://doi.org/10.2961/jlmn.2022.01.2006","url":null,"abstract":"Scaling the average power of ultrafast lasers into the kW range for high-throughput surface structuring and micromachining by the pulse energy requires an adapted processing strategy in order to minimize surface defects due to high fluences and maintain a high surface quality. One promising approach to distribute the pulse energy uniformly on the sample surface is spatial beam shaping using a spatial light modulator. The local phase was modulated by computer-generated holograms for the generation of uniform intensity distributions in the focal plane. The corresponding intensity distributions resulting from the different holograms were monitored with an on-axis camera to ensure accurate beam shapes during surface structuring and micromachining of the two materials stainless steel and cemented tungsten carbide. Uniform surface structures and flexible, dimensionally accurate cavities were machined with a shaped ultrafast laser beam and high pulse energies up to over 1 mJ on the sample surface. Various beam shapes with a cross-sectional area up to 0.42 mm² were generated on the sample surface for energy-efficient micromachining and homogenous surface structuring. The capability of high-energy pulse beam shaping was demonstrated by the fabrication of a large-area checkerboard pattern with small transition zones <10 µm between unprocessed and structured areas.","PeriodicalId":54788,"journal":{"name":"Journal of Laser Micro Nanoengineering","volume":" ","pages":""},"PeriodicalIF":1.1,"publicationDate":"2022-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"44938929","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2022-07-01DOI: 10.2961/jlmn.2022.01.2001
Keisuke Takabayashi, Khaidir Bin Khamaron, T. Tomita, Takashi Takahashi, Y. Kobayashi, M. Yamaguchi
In this study, the diamond-like carbon (DLC), a tetrahedral amorphous carbon sample deposited on Si, was irradiated using a picosecond laser. We evaluated the picosecond-laser-induced structural and morphological changes in DLC using micro-Raman spectroscopy via line measurements. We obtained the spatial distribution of the structure and morphology of DLC on Si by regression analysis of the Raman spectra. The photo-induced crater could be categorized into four regions: peripheral, morphological-change, structural-changes, and ablated regions. The structure and morphology of the peripheral region were similar to those of the as-received DLC. In the morphological-change region, which is inside the periphery region, the thickness of the DLC decreased without any structural changes. At the center of the crater, which is shown in black in the optical image, two regions were identified by Raman spectroscopy. On the outer side, there is a structural-change region where the graphitization of DLC materialized with a reduction in the film thickness. Inside the structural-change region, there is an ablated region where the DLC was degraded by laser ablation.
{"title":"Raman Studies of Structural Changes in Diamond-like Carbon Films on Si Induced by Ultrafast Laser Ablation","authors":"Keisuke Takabayashi, Khaidir Bin Khamaron, T. Tomita, Takashi Takahashi, Y. Kobayashi, M. Yamaguchi","doi":"10.2961/jlmn.2022.01.2001","DOIUrl":"https://doi.org/10.2961/jlmn.2022.01.2001","url":null,"abstract":"In this study, the diamond-like carbon (DLC), a tetrahedral amorphous carbon sample deposited on Si, was irradiated using a picosecond laser. We evaluated the picosecond-laser-induced structural and morphological changes in DLC using micro-Raman spectroscopy via line measurements. We obtained the spatial distribution of the structure and morphology of DLC on Si by regression analysis of the Raman spectra. The photo-induced crater could be categorized into four regions: peripheral, morphological-change, structural-changes, and ablated regions. The structure and morphology of the peripheral region were similar to those of the as-received DLC. In the morphological-change region, which is inside the periphery region, the thickness of the DLC decreased without any structural changes. At the center of the crater, which is shown in black in the optical image, two regions were identified by Raman spectroscopy. On the outer side, there is a structural-change region where the graphitization of DLC materialized with a reduction in the film thickness. Inside the structural-change region, there is an ablated region where the DLC was degraded by laser ablation.","PeriodicalId":54788,"journal":{"name":"Journal of Laser Micro Nanoengineering","volume":" ","pages":""},"PeriodicalIF":1.1,"publicationDate":"2022-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"46004490","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2022-07-01DOI: 10.2961/jlmn.2022.01.2007
L. Pongratz, K. Vannahme
Direct Laser Interference Patterning (DLIP) using ultrashort pulsed laser sources is a single-step process to produce micro- and nanostructured surfaces by ablation. Spatial periods of a few micrometers are patterned using a laser scanner system with two interfering beams. In this study, the field of DLIP processing is expanded by handling spatial periods in the range of 1 µm and below. Precise periodic ablation is achieved with an optical setup tailored for a homogenous topography of spatial periods in the micro and sub-micrometer range. The lateral intensity distribution of the interference area used for ablation is shaped using beam shapers in order to achieve a homogenous intensity distribution and hence increase the homogeneity of the periodic texture in the ablated area. The shape of the interference area is formed into a square profile for the purpose of seamless stitching plenty of to be processed areas. This creates large area periodic textures with high homogeneity. Two beams with ultrashort laser pulses of 10 ps duration and a wavelength of 532 nm are used to structure line-like periodic surface textures with spatial periods of 650 nm. The beam shaping elements modify the lateral intensity distribution in the interference area and the affiliated profile. This enables precise patterning of tool steels with spatial periods in sub-micrometer range for applications in the field of life science surfaces.
{"title":"Beam Shaping the Direct Laser Interference Patterning Spot","authors":"L. Pongratz, K. Vannahme","doi":"10.2961/jlmn.2022.01.2007","DOIUrl":"https://doi.org/10.2961/jlmn.2022.01.2007","url":null,"abstract":"Direct Laser Interference Patterning (DLIP) using ultrashort pulsed laser sources is a single-step process to produce micro- and nanostructured surfaces by ablation. Spatial periods of a few micrometers are patterned using a laser scanner system with two interfering beams. In this study, the field of DLIP processing is expanded by handling spatial periods in the range of 1 µm and below. Precise periodic ablation is achieved with an optical setup tailored for a homogenous topography of spatial periods in the micro and sub-micrometer range. The lateral intensity distribution of the interference area used for ablation is shaped using beam shapers in order to achieve a homogenous intensity distribution and hence increase the homogeneity of the periodic texture in the ablated area. The shape of the interference area is formed into a square profile for the purpose of seamless stitching plenty of to be processed areas. This creates large area periodic textures with high homogeneity. Two beams with ultrashort laser pulses of 10 ps duration and a wavelength of 532 nm are used to structure line-like periodic surface textures with spatial periods of 650 nm. The beam shaping elements modify the lateral intensity distribution in the interference area and the affiliated profile. This enables precise patterning of tool steels with spatial periods in sub-micrometer range for applications in the field of life science surfaces.","PeriodicalId":54788,"journal":{"name":"Journal of Laser Micro Nanoengineering","volume":" ","pages":""},"PeriodicalIF":1.1,"publicationDate":"2022-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"43854457","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2021-12-01DOI: 10.2961/jlmn.2021.03.2009
{"title":"Influence of the Laser Beam Shape on Laser-Induced Periodic Surface Structure Formation Assisted by Surface Plasmon Polariton","authors":"","doi":"10.2961/jlmn.2021.03.2009","DOIUrl":"https://doi.org/10.2961/jlmn.2021.03.2009","url":null,"abstract":"","PeriodicalId":54788,"journal":{"name":"Journal of Laser Micro Nanoengineering","volume":" ","pages":""},"PeriodicalIF":1.1,"publicationDate":"2021-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"45306374","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2021-12-01DOI: 10.2961/jlmn.2021.03.2003
{"title":"Process Monitoring in Absorber-Free Laser Transmission Welding of Plastics by Using Deep Learning Algorithms","authors":"","doi":"10.2961/jlmn.2021.03.2003","DOIUrl":"https://doi.org/10.2961/jlmn.2021.03.2003","url":null,"abstract":"","PeriodicalId":54788,"journal":{"name":"Journal of Laser Micro Nanoengineering","volume":" ","pages":""},"PeriodicalIF":1.1,"publicationDate":"2021-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"49035042","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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