杨晓伟 YANG Xiaowei, 袁纬方 YUAN Weifang, 李同辉 LI Tonghui, 李玉 LI Yu, 董晓雯 DONG Xiaowen, 刘凯 LIU Kai, 黄永清 HUANG Yongqing, 段晓峰 DUAN Xiaofeng
{"title":"高速光探测器的集成微透镜结构设计与制备","authors":"杨晓伟 YANG Xiaowei, 袁纬方 YUAN Weifang, 李同辉 LI Tonghui, 李玉 LI Yu, 董晓雯 DONG Xiaowen, 刘凯 LIU Kai, 黄永清 HUANG Yongqing, 段晓峰 DUAN Xiaofeng","doi":"10.3788/gzxb20235208.0823001","DOIUrl":"https://doi.org/10.3788/gzxb20235208.0823001","url":null,"abstract":"高速光探测器以获得更高的3 dB带宽为目标,减小器件台面面积能够使结电容降低从而提高带宽,但同时也增大了系统中的光耦合损耗。针对该问题,在高速光探测器衬底背面单片集成微透镜结构是一种有效的解决方案,该结构可通过补偿对准偏差来提高器件的光耦合效率。设计了一种面向数据中心应用的,与1.31 μm光探测器芯片单片集成的InP基微透镜结构;通过热熔法制作微透镜胶型,并利用电感耦合等离子体刻蚀实现微透镜胶型转移,电感耦合等离子体刻蚀过程选择SiCl4和Ar作为刻蚀气体以保证实验的安全性;制备了一种直径90.3 μm、冠高18.5 μm、表面形貌光滑的InP基微透镜结构。单片集成微透镜的PIN光探测器在1.31 μm波长处,入射光偏离主光轴3°的情况下,光探测器的响应度仅下降4%。","PeriodicalId":7111,"journal":{"name":"光子学报","volume":"80 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"135156081","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0