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Extreme Ultraviolet Light Source Based on Xenon Plasma: Fundamentals, Recent Results, and Prospects for Lithography 基于氙等离子体的极紫外光源:光刻的基本原理、最新成果和前景
IF 0.7 4区 地球科学 Q4 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-11-22 DOI: 10.1007/s11141-025-10430-2
I. S. Abramov, S. V. Golubev, E. D. Gospodchikov, A. G. Shalashov, A. A. Perekalov, A. N. Nechay, N. I. Chkhalo

The paper considers a laser discharge supported by an infrared laser in a jet of a heavy gas as a source of extreme ultraviolet (EUV) radiation for lithography. It is shown theoretically and demonstrated in the experiment that the region occupied by the plasma emitting in the EUV wavelength range is much larger than the laser focal spot. Expansion of the emitting plasma beyond the laser focus is explained by the photoionization of the surrounding gas and subsequent heating of electrons by the heat flux from the energy deposition region due to thermal conductivity. The possibilities of optimizing the EUV radiation source based on the discharge under consideration are studied. Limiting parameters of the xenon plasma-based EUV radiation source intended for use in the Alpha Machine project are discussed. It is planned to create a demonstration EUV lithograph within the framework of the project. It is shown that the use of a xenon jet can provide efficiency at the level of the existing commercial sources.

本文研究了在重气体射流中由红外激光器支撑的激光放电作为极紫外(EUV)光刻光源。理论和实验证明,等离子体在极紫外光波长范围内所占的区域远远大于激光焦斑。发射等离子体在激光焦点之外的膨胀是由周围气体的光电离和随后由热导率引起的能量沉积区域的热流加热电子来解释的。研究了基于所考虑的放电对极紫外光源进行优化的可能性。讨论了用于Alpha Machine项目的氙等离子体EUV辐射源的限制参数。计划在项目框架内创建一个示范EUV光刻机。结果表明,使用氙气射流可以提供现有商业来源的效率水平。
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引用次数: 0
Influence of an External Magnetic Field on Collimation of the Electrons Accelerated by a High-Intensity Femtosecond Laser Pulse 外磁场对高强度飞秒激光脉冲加速电子准直的影响
IF 0.7 4区 地球科学 Q4 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-11-22 DOI: 10.1007/s11141-025-10429-9
M. V. Sedov, S. N. Ryazantsev, I. Yu. Skobelev, S. S. Makarov

The advance in developing methods for generating super-strong magnetic fields (from several teslas to several and even tens of kiloteslas) opens up new possibilities for using them to control beams of charged particles. In this paper, we present a theoretical analysis and calculation of the influence of a super-intense external magnetic field (up to 100 kT) on the process of generating and collimating a laser plasma flow and fast electrons with energies exceeding 1 MeV, which are obtained due to the interaction of a laser pulse having the relativistic intensity and a femtosecond duration with a thin aluminum foil. The obtained analytical estimates of the electron beam collimation agree well with the results of computer calculations. Time evolution of the electron beam is also considered, and estimates of the electron charge loss over time as a function of the external magnetic field are presented.

产生超强磁场(从几特斯拉到几特斯拉,甚至几十千特斯拉)的方法取得了进展,这为利用它们来控制带电粒子束开辟了新的可能性。本文从理论上分析和计算了超强外磁场(高达100 kT)对激光等离子体流和能量超过1 MeV的快电子的产生和准直过程的影响,这些电子是由具有相对论强度和飞秒持续时间的激光脉冲与薄铝箔相互作用产生的。所得的电子束准直的解析估计与计算机计算结果吻合较好。本文还考虑了电子束的时间演化,并给出了电子电荷损失随时间随外加磁场变化的估计。
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引用次数: 0
Study of the Prospects of Application of the Electron-Cyclotron Resonance Discharge in Plasma Engines of Space Vehicles 电子回旋共振放电在航天器等离子体发动机中的应用前景研究
IF 0.7 4区 地球科学 Q4 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-11-22 DOI: 10.1007/s11141-025-10424-0
S. S. Vybin, I. S. Abramov, M. E. Viktorov, S. V. Golubev, E. D. Gospodchikov, I. V. Izotov, E. M. Kiselyova, A. V. Polyakov, V. A. Skalyga, D. M. Smagin, A. G. Shalashov

We study the possibilities of developing electrodeless plasma jet engines on the basis of an electron cyclotron resonance (ECR) discharge. The efficiency of using the working substance in the engine is achieved by increasing the speed of its outflow, which is determined by the maximum electron energy achievable in the ECR discharge. The work involved the measurement of the energy distribution function of the electrons emitted from a discharge maintained in a simple magnetic trap by high-power microwave radiation in the continuous-wave regime. A discharge combustion mode is discovered, which realizes a nonequilibrium electron energy distribution function characterized by the presence of a clearly expressed hot fraction with a characteristic energy of more than 100 keV.

在电子回旋共振(ECR)放电的基础上,研究了发展无极等离子体喷气发动机的可能性。在发动机中使用工作物质的效率是通过增加其流出速度来实现的,这是由ECR放电中可实现的最大电子能量决定的。这项工作涉及测量连续波状态下高功率微波辐射在简单磁阱中保持的放电所发射的电子的能量分布函数。发现了一种放电燃烧模式,该模式实现了一个非平衡电子能量分布函数,其特征是存在一个特征能量大于100 keV的清晰表达的热分数。
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引用次数: 0
Peculiarities of Phase Transformations During Microwave Reactive Sintering of Ce:YAG–Al2O3 Composites 微波反应烧结Ce: YAG-Al2O3复合材料相变特性研究
IF 0.7 4区 地球科学 Q4 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-11-22 DOI: 10.1007/s11141-025-10423-1
S. V. Egorov, A. G. Eremeev, K. I. Rybakov, A. A. Sorokin, V. V. Kholoptsev, S. S.Balabanov, T. O. Evstropov

Using the method of microwave reactive sintering, we obtained Ce:YAG–Al2O3 ceramic composite samples with a density of about 95% of the theoretical value and exhibiting luminescent properties. It was established that during the microwave heating, the temperatures of phase transformations in both the Y–Al–O system and aluminum oxide decrease by 250–400°C (depending on the intensity of the microwave electromagnetic field in the sample) compared to conventional furnace heating. This indicates a significant effect of the microwave electromagnetic field on diffusion transport and nucleation processes in the solid-state chemical reactions leading to the formation of yttrium–aluminum garnet.

采用微波反应烧结的方法,得到了Ce: YAG-Al2O3陶瓷复合材料样品,其密度约为理论值的95%,且具有发光性能。结果表明,在微波加热过程中,Y-Al-O体系和氧化铝的相变温度比常规炉加热降低了250 ~ 400℃(取决于样品中微波电磁场的强度)。这表明微波电磁场对形成钇铝石榴石的固态化学反应中的扩散、输运和成核过程有显著的影响。
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引用次数: 0
Wideband Gyrotron-Type Devices with a Zigzag Quasioptical Transmission Line 带之字形准光传输线的宽带陀螺型器件
IF 0.7 4区 地球科学 Q4 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-11-22 DOI: 10.1007/s11141-025-10422-2
A. A. Bogdashov, I. G. Gachev, M. Yu. Glyavin, G. G. Denisov, M. V. Kamensky, S. Yu. Kornishin, K. A. Leshcheva, E. M. Novak, A. V. Savilov, S. V. Samsonov, E. M. Tai

We present the results of the initial stage of studying the gyrotron-type devices with a novel electrodynamic system in the form of a zigzag quasioptical transmission line. The basic concept of the considered modification was proposed for the first time in 2018, particular versions of such devices with calculation results were described in a publication of 2021, and the first successful experiments were carried out and reported in early 2024. The electrodynamic system under discussion consists of mirrors that direct a quasioptical Gaussian beam along a zigzag trajectory in such a way that it periodically intersects the electron beam at the right angle. At the points of these intersections, electron-wave interaction occurs at a frequency close to the cyclotron frequency of electrons having initial transverse velocities. The work treats the features of such devices and the results of their theoretical analysis in detail and presents the results of the first experiments.

本文介绍了采用之字形准光传输线形式的新型电动力系统的回旋管型器件的初步研究结果。2018年首次提出了所考虑的修改的基本概念,在2021年的一份出版物中描述了这种装置的特定版本和计算结果,并在2024年初进行了第一次成功的实验并报告。所讨论的电动力系统由反射镜组成,这些反射镜引导准光学高斯光束沿之形轨迹,使其周期性地以直角与电子束相交。在这些交叉点上,电子-波相互作用发生的频率接近具有初始横向速度的电子的回旋频率。本文详细论述了这种装置的特点及其理论分析的结果,并给出了第一次实验的结果。
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引用次数: 0
Laboratory Study of Rayleigh–Taylor Instability in a Laser Plasma Interacting with an External Magnetic Field 外磁场作用下激光等离子体瑞利-泰勒不稳定性的实验室研究
IF 0.7 4区 地球科学 Q4 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-11-22 DOI: 10.1007/s11141-025-10433-z
R. S. Zemskov, K. F. Burdonov, A. A. Kuzmin, I. A. Shaikin, V. N. Ginzburg, I. V. Yakovlev, A. A. Kochetkov, S. E. Perevalov, A. V. Kotov, A. A. Soloviev, A. A. Shaykin, M. V. Starodubtsev, E. A. Khazanov

We present the results of an experimental study of instability developing in high-speed (speed v ∼ 500 km/s) plasma flows propagating in an external magnetic field with induction about 14 T. High-speed plasma flows were created as a result of irradiation of the Teflon target by nanosecond pumping laser pulses of the PEARL laser facility. It has been demonstrated that at the stage of plasma confinement by a magnetic field, a Rayleigh–Taylor instability develops in the form of flutes on the surface of the plasma cavity. Instability is observed when the plasma spreads both along and across an external uniform magnetic field and rapidly passes into the nonlinear phase, which allows the plasma to penetrate into the magnetic field region.

本文介绍了在约14 t的感应磁场中传播的高速(速度v ~ 500 km/s)等离子体流中不稳定性发展的实验研究结果。高速等离子体流是由PEARL激光设备的纳秒抽运激光脉冲照射聚四氟乙烯靶产生的。研究表明,在等离子体被磁场约束的阶段,在等离子体腔表面以凹槽的形式发展出瑞利-泰勒不稳定性。当等离子体沿着和穿过外部均匀磁场并迅速进入非线性相位时,观察到不稳定性,这使得等离子体能够穿透磁场区域。
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引用次数: 0
Retrieval of the Wavefront of a Laser Beam Via the Analysis of the in-Focus and Out-of-Focus Intensity Distributions with a Convolutional Neural Network 用卷积神经网络分析聚焦和离焦强度分布反演激光束波前
IF 0.7 4区 地球科学 Q4 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-11-22 DOI: 10.1007/s11141-025-10431-1
A. V. Kotov, Yu. A. Rodimkov, I. B. Meyerov, V. D. Volokitin, S. E. Perevalov, K. F. Burdonov, R. S. Zemskov, A. Soloviev

We propose a convolutional neural network–based algorithm for retrieving the wavefront shape of a beam using in-focus and out-of-focus intensity distributions. The neural network is trained on numerically generated data. In numerical experiments, the trained model enabled wavefront shape reconstruction with a relative error below 20% for root-mean-square (rms) wavefront distortion in the range of (0.05–0.25)λ, where λ is the radiation wavelength. In a physical experiment conducted on the PEARL laser facility, for a beam with an 18 cm aperture, equal to one-quarter of the focal length, the relative error was approximately 40% for rms wavefront distortion of 0.4λ.

我们提出了一种基于卷积神经网络的算法,用于使用聚焦和非聚焦强度分布检索光束的波前形状。神经网络是在数值生成的数据上进行训练的。在数值实验中,训练后的模型在(0.05 ~ 0.25)λ (λ为辐射波长)范围内实现了波前形状重建,相对误差低于20%。在PEARL激光设备上进行的物理实验中,对于孔径为18 cm、焦距为1 / 4的光束,当波前畸变均方根值为0.4λ时,相对误差约为40%。
{"title":"Retrieval of the Wavefront of a Laser Beam Via the Analysis of the in-Focus and Out-of-Focus Intensity Distributions with a Convolutional Neural Network","authors":"A. V. Kotov,&nbsp;Yu. A. Rodimkov,&nbsp;I. B. Meyerov,&nbsp;V. D. Volokitin,&nbsp;S. E. Perevalov,&nbsp;K. F. Burdonov,&nbsp;R. S. Zemskov,&nbsp;A. Soloviev","doi":"10.1007/s11141-025-10431-1","DOIUrl":"10.1007/s11141-025-10431-1","url":null,"abstract":"<p>We propose a convolutional neural network–based algorithm for retrieving the wavefront shape of a beam using in-focus and out-of-focus intensity distributions. The neural network is trained on numerically generated data. In numerical experiments, the trained model enabled wavefront shape reconstruction with a relative error below 20% for root-mean-square (rms) wavefront distortion in the range of (0.05–0.25)λ, where λ is the radiation wavelength. In a physical experiment conducted on the PEARL laser facility, for a beam with an 18 cm aperture, equal to one-quarter of the focal length, the relative error was approximately 40% for rms wavefront distortion of 0.4λ.</p>","PeriodicalId":748,"journal":{"name":"Radiophysics and Quantum Electronics","volume":"67 11-12","pages":"914 - 919"},"PeriodicalIF":0.7,"publicationDate":"2025-11-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145665946","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"地球科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Terahertz Radiation in a Parallel Metal Plate Waveguide Partially Filled with a Nonlinear Optical Crystal 部分填充非线性光学晶体的平行金属板波导中的太赫兹辐射
IF 0.7 4区 地球科学 Q4 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-11-22 DOI: 10.1007/s11141-025-10421-3
A. S. Nikoghosyan, V. R. Tadevosyan

The problem of generating single-mode terahertz pulsed radiation via optical rectification of a femtosecond laser pulse (Ti:Sapphire) in a nonlinear crystal partially filling a parallel-plate waveguide is addressed. A numerical analysis of the mode composition and terahertz pulse transmission in this structure is performed. It is demonstrated that single-mode coupling between the linearly polarized optical excitation pulse focused on the LiNbO3 crystal and the terahertz pulse can be achieved in a broad spectral range of 0.1–2.5 THz. The study shows that efficient generation and single-mode transmission of the terahertz pulse with minimum attenuation can be achieved by optimally selecting the sizes and permittivity of the nonlinear crystal, along with the waveguide sizes. The results are compared with both experimental and numerical data for a rectangular metal waveguide partially filled with an optically nonlinear crystal.

研究了飞秒激光脉冲(Ti:Sapphire)在部分填充平行板波导的非线性晶体中通过光学整流产生单模太赫兹脉冲辐射的问题。对该结构的模式组成和太赫兹脉冲传输进行了数值分析。结果表明,聚焦在LiNbO3晶体上的线偏振光激发脉冲与太赫兹脉冲在0.1 ~ 2.5太赫兹的宽光谱范围内可以实现单模耦合。研究表明,通过优化非线性晶体的尺寸、介电常数和波导尺寸,可以实现太赫兹脉冲的高效产生和单模传输,且衰减最小。结果与部分填充非线性晶体的矩形金属波导的实验和数值数据进行了比较。
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引用次数: 0
Using a Combined Resonator Based on Three-Dimensional and One-Dimensional Bragg Mirrors to Produce High-Power Coherent Radiation in a Planar Free-Electron Maser 利用三维和一维布拉格反射镜组合谐振腔在平面自由电子脉泽中产生高功率相干辐射
IF 0.7 4区 地球科学 Q4 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-11-22 DOI: 10.1007/s11141-025-10427-x
N. Yu. Peskov, E. D. Egorova, N. S. Ginzburg, A. S. Sergeev, A. V. Arzhannikov, S. L. Sinitsky

We propose to use a combined two-mirror resonator based on the three-dimensional (3D) and onedimensional (1D) Bragg reflectors in order to achieve a multi-gigawatt level of microwave power in free-electron masers (FEMs) having the planar geometry. The possibility of creating a FEM of this type in the W band on the basis of the U-2 accelerator, which forms a sheet electron beam with a cross section of 1×140 cm, is studied within the framework of the quasioptical model. It is shown that in the proposed scheme, the input Bragg 3D reflector implementing the mechanism of the three-dimensional distributed feedback allows one to ensure the synchronization of radiation along both transverse coordinates at the cross-sectional sizes of the system from tens to hundreds of wavelengths, while a small reflection from the output conventional 1D Bragg reflector is sufficient to complete the feedback loop and provide the single-mode generation regime with a high efficiency and a low ohmic-loss level. At the optimal parameters, the possibility is demonstrated of obtaining a stable narrow-band generation regime in the developed FEM with an electron efficiency of about 18–20% and a record-breaking output radiation power of up to 20 GW.

我们建议使用基于三维(3D)和一维(1D)布拉格反射器的组合双镜谐振器,以便在具有平面几何形状的自由电子脉泽(fem)中实现数千兆瓦级的微波功率。在准光学模型的框架内,研究了在U-2加速器的基础上,在W波段形成横截面为1×140 cm的片状电子束的可能性。结果表明,在该方案中,输入布拉格三维反射器实现了三维分布反馈机制,可以保证在系统的横截面尺寸从几十到几百波长处沿两个横向坐标的辐射同步;而输出的传统一维布拉格反射器的小反射足以完成反馈回路,并提供高效率和低欧姆损耗的单模产生机制。在最佳参数下,所开发的FEM有可能获得稳定的窄带产生状态,电子效率约为18-20%,输出辐射功率高达20 GW。
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引用次数: 0
Transfer of Angular Orbital Momentum of a Structured Laser Pulse to an Ensemble of Charged Particles 结构激光脉冲向带电粒子系综的角轨道动量转移
IF 0.7 4区 地球科学 Q4 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-11-22 DOI: 10.1007/s11141-025-10419-x
E. O. Dmitriev, Ph. A. Korneev

The structure of a laser pulse may significantly affect the dynamics of particles interacting with it. In the case of a rarefied plasma, single-particle approach to the problem is a good approximation. This paper considers the problem of absorption of the orbital angular momentum by a single particle in a focused structured pulse. Within the framework of the developed theoretical model, which includes the solution of the Maxwell equations with required accuracy and a high-order perturbation theory, the motion of electrons is considered in a number of important cases. Analytical results are compared with the data of numerical simulation. It is demonstrated that the angular dependence in the structure of the laser pulse plays a fundamental role in the absorption of the orbital angular momentum of a wave by an ensemble of charged particles.

激光脉冲的结构可以显著地影响与之相互作用的粒子的动力学。在稀薄等离子体的情况下,单粒子方法是一个很好的近似。本文研究了聚焦结构脉冲中单个粒子对轨道角动量的吸收问题。在发展的理论模型的框架内,它包括麦克斯韦方程的解与要求的精度和高阶摄动理论,电子的运动在许多重要的情况下被考虑。分析结果与数值模拟数据进行了比较。证明了激光脉冲结构中的角依赖性在带电粒子系综吸收波的轨道角动量中起着重要作用。
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引用次数: 0
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Radiophysics and Quantum Electronics
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