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Emerging trends in the chemistry of polymeric resists for extreme ultraviolet lithography 用于极紫外光刻技术的聚合物抗蚀剂化学新趋势
IF 4.1 2区 化学 Q2 POLYMER SCIENCE Pub Date : 2024-10-15 DOI: 10.1039/D4PY00957F
Jie Cen, Zhengyu Deng and Shiyong Liu

With the demand for increasingly smaller feature sizes, extreme ultraviolet (EUV) lithography has become the cutting-edge technology for fabricating highly miniaturized integrated circuits. However, the limited brightness of the EUV light source, the distinct exposure mechanism, and the high resolution required for patterns pose significant challenges for resist materials—particularly for conventional polymeric resists, which often suffer from low EUV absorption, high molecular weight, and nonhomogeneous composition. In this review, we focus on polymer resists for EUV lithography and offer our perspectives on recent exciting advances in the polymer chemistry of these resists. For example, in recent years, there has been significant progress in incorporating high EUV-absorbing moieties and photosensitizers into resists to enhance EUV absorbance and quantum efficiency. In addition, advancements have been made in developing single-component chemically amplified resists (CARs) with covalently attached photoacid generators (PAGs), as well as main-chain scission-type resists. Furthermore, the creation of precision oligomeric resists with precisely defined primary sequences and discrete molecular weights has opened new possibilities for EUV resist design. Lastly, we provide a critical outlook on the future opportunities and challenges in the development of EUV resists.

随着对特征尺寸的要求越来越小,极紫外(EUV)光刻技术已成为制造高度微型化集成电路的尖端技术。然而,极紫外光源亮度有限、曝光机制独特、图案分辨率要求高,这些都给光刻胶材料带来了巨大挑战,尤其是传统的聚合物光刻胶,它们通常具有极紫外吸收率低、分子量高、组成不均匀等问题。在本综述中,我们将重点关注用于 EUV 光刻技术的聚合物抗蚀剂,并就这些抗蚀剂的聚合物化学方面最近取得的令人振奋的进展提出我们的观点。例如,近年来在将高 EUV 吸收分子和光敏剂加入光刻胶以提高 EUV 吸收率和量子效率方面取得了重大进展。此外,在开发具有共价连接的光酸发生器(PAG)的单组分化学放大抗蚀剂(CAR)以及主链裂解型抗蚀剂方面也取得了进展。此外,具有精确定义的主序列和离散分子量的精密低聚物抗蚀剂的产生,为 EUV 抗蚀剂的设计开辟了新的可能性。最后,我们对未来开发 EUV 光刻胶的机遇和挑战进行了重要展望。
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引用次数: 0
Materials Designed to Degrade: Structure, Properties, Processing, and Performance Relationships in Polyhydroxyalkanoate Biopolymers 设计用于降解的材料:聚羟基烷酸酯生物聚合物的结构、特性、加工和性能关系
IF 4.6 2区 化学 Q2 POLYMER SCIENCE Pub Date : 2024-10-15 DOI: 10.1039/d4py00623b
Jessica Lalonde, Ghanshyam Pilania, Babetta L Marrone
Conventional plastics pose significant environmental and health risks across their life cycle, driving intense interest in sustainable alternatives. Among these, polyhydroxyalkanoates (PHAs) stand out for their biocompatibility, degradation characteristics, and diverse applications. Yet, challenges like production cost, scalability, and limited chemical variety hinder their widespread adoption, impacting material selection and design. This review examines PHA research through the lens of the classical materials tetrahedron, exploring property-structure-processing-performance (PSPP) relationships. By analyzing recent literature and addressing current limitations, we gain valuable insights into PHA development. Despite challenges, we remain optimistic about the role of PHAs in transitioning towards a circular plastic economy, emphasizing the need for further research to unlock their full potential.
传统塑料在其整个生命周期中会对环境和健康造成严重危害,因此人们对可持续替代品产生了浓厚的兴趣。其中,聚羟基烷酸酯(PHAs)因其生物相容性、降解特性和多样化应用而脱颖而出。然而,生产成本、可扩展性和有限的化学种类等挑战阻碍了它们的广泛应用,影响了材料的选择和设计。本综述从经典材料四面体的视角审视 PHA 研究,探讨属性-结构-加工-性能(PSPP)关系。通过分析最新文献并探讨当前的局限性,我们获得了有关 PHA 发展的宝贵见解。尽管存在挑战,但我们对 PHA 在向循环塑料经济过渡中的作用仍持乐观态度,同时强调有必要开展进一步研究,以充分挖掘其潜力。
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引用次数: 0
Catalytic copolymerization of carbon dioxide and cyclohexene oxide by a trinuclear cyclohexane-bridged tetradentate Schiff base chromium complex† 三核环己烷桥接四价席夫碱铬络合物催化二氧化碳与环己烯氧化物的共聚作用
IF 4.1 2区 化学 Q2 POLYMER SCIENCE Pub Date : 2024-10-14 DOI: 10.1039/D4PY00956H
Jie Huang and Boxiong Shen

The development of catalytic systems is a central area of research in carbon dioxide (CO2) and epoxy copolymerization. A novel trinuclear cyclohexane-bridged tetradentate Schiff base chromium complex 1 was synthesized as a catalyst for the ring-opening copolymerization (ROCOP) of CO2 and cyclohexene oxide (CHO), resulting in the formation of poly (cyclohexene carbonate) (PCHC). The impact of polymerization temperature, CO2 pressure, reaction time, and catalyst loading on complex 1's polymerization activity was systematically investigated. It was observed that, with the addition of the co-catalyst PPNN3 (PPN = bis(triphenylphosphine)iminium), complex 1 exhibited enhanced catalytic activity for the ROCOP of CO2 and CHO under mild conditions. In contrast, the mononuclear tetradentate Schiff base chromium complex 2 system showed low activity under the same conditions. Compared to complex 2, complex 1 achieved a higher CHO conversion rate (70%) and 85% PCHC selectivity, with a turnover frequency (TOF) of 419 h−1, which is 5.3 times greater than that of complex 2. Additionally, the polymer produced by complex 1 had a molecular weight of 13 790 g mol−1, which is higher than that produced by complex 2 (8800 g mol−1) and the commercial Salen CrCl catalyst (9610 g mol−1). By varying the amounts of complex 1 and CHO, PCHC with different molecular weights (6000 g mol−1 to 14 000 g mol−1) and low dispersity can be easily obtained. Notably, the activation energy barrier for polycarbonate formation in the complex 1 system was 21.63 kJ mol−1, compared to 32.88 kJ mol−1 in the complex 2 system.

催化体系的开发是二氧化碳(CO2)与环氧树脂共聚的核心研究领域。研究人员合成了一种新型三核环己烷桥接四价席夫碱铬络合物 1,作为二氧化碳和环己烯氧化物(CHO)开环共聚(ROCOP)的催化剂,从而生成聚(环己烯碳酸酯)(PCHC)。系统研究了聚合温度、二氧化碳压力、反应时间和催化剂负载对复合物 1 聚合活性的影响。结果表明,加入助催化剂 PPNN3(PPN= 双(三苯基膦)亚胺)后,复合物 1 在温和条件下对 CO2 和 CHO 的 ROCOP 具有更强的催化活性。相比之下,单核四价席夫碱铬络合物 2 系统在相同条件下的活性较低。与络合物 2 相比,络合物 1 实现了更高的 CHO 转化率(70%)和 85% 的 PCHC 选择性,其周转频率(TOF)为 419 h-1,是络合物 2 的 5.3 倍。此外,复合物 1 生成的聚合物分子量为 13790 克/摩尔,高于复合物 2(8800 克/摩尔)和商用 Salen CrCl 催化剂(9610 克/摩尔)。通过改变复合物 1 和 CHO 的用量,可以很容易地获得不同分子量(6000 克/摩尔至 14000 克/摩尔)和低分散性的 PCHC。值得注意的是,在复合物 1 体系中形成聚碳酸酯的活化能势垒为 21.63 kJ/mol,而在复合物 2 体系中为 32.88 kJ/mol。
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引用次数: 0
Polyols from cashew nut shell liquid (CNSL): corner-stone building blocks for cutting-edge bio-based additives and polymers 腰果壳油多元醇(CNSL),尖端生物基添加剂和聚合物的基石构件
IF 4.1 2区 化学 Q2 POLYMER SCIENCE Pub Date : 2024-10-12 DOI: 10.1039/d4py00851k
Emilie Rojtman , Maxinne Denis , Camille Sirvent , Vincent Lapinte , Sylvain Caillol , Benoit Briou
Polyols are versatile molecules present in many polymer materials that are used and often essential in daily life. However, most bio-based polyols are derived from sugar or vegetable oil, and thus, their production directly competes with the food industry. In this case, CNSL is a promising non-edible renewable resource, which is directly extracted from the shell of cashew nuts. The interesting chemical structure of CNSL and its derivatives (cardanol and cardol) has led to the synthesis of original polyols with hydrophobic and internal plasticizing properties. Useful for the development of additives such as surfactants and soft polymers, CNSL polyols are progressively occupying a unique position in the polymer industry. This review focuses on the use of CNSL as a building block for various polyols. Many different chemical pathways leading to CNSL-based polyols are reviewed and evaluated. Furthermore, we focus on the use of these CNSL-based polyols as surfactants and polymer precursors and the contribution of their specific chemical structure (aromatic ring and long unsaturated alkyl chain) to the properties of the resulting polyesters or polyurethanes.
多元醇是一种多功能分子,存在于许多聚合物材料中,通常是我们日常生活中不可或缺的物质。生物基多元醇大部分来自糖或植物油,与食品工业直接竞争。腰果酚是一种很有前景的非食用可再生资源,它直接从腰果壳中提取。腰果酚及其衍生物(卡尔德酚、卡尔德醇)的化学结构十分有趣,因此可以合成具有疏水和内部塑化特性的原始多元醇。腰果酚及其衍生物(棉子醇、棉子酚)的化学结构十分有趣,可用于合成具有疏水和内增塑特性的原始多元醇,可用于开发添加剂(如表面活性剂)或软聚合物,腰果酚多元醇正逐步在聚合物行业占据一席之地。因此,本综述将重点介绍作为各种多元醇基本成分的氯化萘磺酸。本综述将评述并批评导致以氯化萘磺酸为基础的多元醇的多种不同化学途径。此外,还将重点介绍这些以氯化萘磺酸为基础的多元醇作为表面活性剂和聚合物前体的用途,以及其特定化学结构(芳香环、长不饱和烷基链)对所生产的聚酯或聚氨酯性能的影响。
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引用次数: 0
Acid-labile and non-degradable cross-linked star polymer model networks by aqueous polymerization for in situ encapsulation and release† 通过水性聚合实现原位封装和释放的耐酸和不可降解交联星形聚合物模型网络
IF 4.1 2区 化学 Q2 POLYMER SCIENCE Pub Date : 2024-10-12 DOI: 10.1039/d3py00677h
Gavin Irvine , Stuart Herron , Daniel W. Lester , Efrosyni Themistou
Biocompatible, acid-labile cross-linked star polymer model networks (CSPMNs) have great potential for use in drug delivery. However, a primary complication of this research stems from the prevalence of their synthesis to take place in organic solvents. Herein, to minimize CSPMN potential cytotoxicity, aqueous reversible addition–fragmentation chain transfer polymerization is employed for their synthesis. Initially, “arm-first” star polymers were synthesized in water using a poly[oligo(ethylene glycol) methyl ether methacrylate] (POEGMA) homopolymer and a non-degradable ethylene glycol dimethacrylate or acid-labile diacetal-based bis[(2-methacryloyloxy)ethoxymethyl] ether cross-linker. Subsequently, OEGMA addition resulted in the preparation of “in–out” star polymers (with higher molecular weights) followed by cross-linker addition to form CSPMNs. Rhodamine B dye encapsulation was performed during CSPMN synthesis and its release was observed under biologically relevant conditions. Having shown the effective breakdown of the diacetal-based CSPMNs, their potential for use in drug delivery in low pH environments (i.e. cancerous tumors) is expected to be high.
具有生物相容性的酸性交联星形聚合物模型网络(CSPMNs)在药物输送方面具有巨大的应用潜力。然而,这项研究的一个主要难题是,它们的合成普遍需要在有机溶剂中进行。在此,为了将 CSPMN 潜在的细胞毒性降至最低,我们采用了水性可逆加成-碎片链转移聚合法进行合成。首先,使用聚[低聚(乙二醇)甲基醚甲基丙烯酸酯](POEGMA)均聚物和不可降解的乙二醇二甲基丙烯酸酯或基于酸性二缩醛的双[(2-甲基丙烯酰氧基)乙氧基甲基]醚交联剂在水中合成 "先臂 "星型聚合物。随后,加入 OEGMA,制备出 "内-外 "星形聚合物(分子量较高),再加入交联剂,形成 CSPMN。在 CSPMN 合成过程中对罗丹明 B 染料进行了封装,并在生物相关条件下观察到其释放。由于二缩醛基 CSPMNs 能有效分解,因此有望在低 pH 值环境(如癌症肿瘤)中用于药物输送。
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引用次数: 0
Rapid formation of antifouling coatings via cation–π interactions† 通过阳离子-π相互作用快速形成防污涂层
IF 4.1 2区 化学 Q2 POLYMER SCIENCE Pub Date : 2024-10-12 DOI: 10.1039/d4py00859f
Zhicheng Huang , Kaijie Zhao , Shaoyin Wei , Yingxin Hao , Qina Yu , Jingcheng Hao , Jiwei Cui , Peiyu Zhang
To decrease the adhesion of proteins, bacteria, and cells and increase the usage duration of implants, minimizing biofouling is crucial in medical industries. Traditionally, antifouling coatings are covalently bonded to substrates, a process that can be time-consuming or substrate-dependent. In this study, we synthesized both block and random copolymers using poly(ethylene glycol) methyl ether methacrylate (PEGMA) and methacryloxyethyltrimethyl ammonium chloride (METAC) through reversible addition–fragmentation chain transfer (RAFT) polymerization. These copolymers can be adsorbed onto metal-phenolic network (MPN)-modified substrates based on cation–π interactions, rapidly forming antifouling coatings in about 6 min. Due to the wide surface modification ability of MPNs, the antifouling coatings could form on various substrates. The antifouling coatings can effectively resist the adhesion of proteins, cells, and bacteria. Moreover, block copolymers exhibited superior antifouling abilities compared to random copolymers. Notably, the antifouling performance of copolymers can be promoted by increasing the amount of PEGMA and METAC. The advantage of the reported method is the rapid preparation of antifouling coatings on various substrates. In addition, the study provides an insight into the factors influencing the strength of cation–π interactions.
为了减少蛋白质、细菌和细胞的粘附性并延长植入物的使用时间,最大限度地减少生物污染在医疗行业中至关重要。传统上,防污涂层是通过共价键连接到基底上的,这一过程可能很耗时,也可能与基底有关。在本研究中,我们利用聚乙二醇甲基醚甲基丙烯酸酯(PEGMA)和甲基丙烯酰氧乙基三甲基氯化铵(METAC)通过可逆加成-断裂链转移(RAFT)聚合反应合成了嵌段和无规共聚物。这些共聚物可吸附在基于阳离子-π相互作用的金属-酚醛网络(MPN)改性基底上,在约 6 分钟内迅速形成防污涂层。由于 MPN 具有广泛的表面改性能力,因此可在各种基底上形成防污涂层。防污涂层能有效抵抗蛋白质、细胞和细菌的附着。此外,与无规共聚物相比,嵌段共聚物的防污能力更强。值得注意的是,通过增加 PEGMA 和 METAC 的用量可以提高共聚物的防污性能。所报告方法的优点是可以在各种基底上快速制备防污涂层。此外,该研究还有助于深入了解影响阳离子-π相互作用强度的因素。
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引用次数: 0
Effect of interfacial local conformation of polymer chains on adhesion strength† 聚合物链的界面局部构象对粘合强度的影响
IF 4.1 2区 化学 Q2 POLYMER SCIENCE Pub Date : 2024-10-12 DOI: 10.1039/d4py00951g
Tatsuki Abe , Satoru Yamamoto , Keiji Tanaka
The aggregation states of polymer chains at solid interfaces are strongly related to their adhesion properties. In this study, we focused on sum-frequency generation (SFG) vibrational spectroscopy, which offers the best depth resolution at the sub-nanometer level among available techniques, and explored its potential as an imaging method. A poly(methyl methacrylate) (PMMA) thin film with a line-and-space pattern was prepared on a quartz substrate. Imaging of the interfacial line-and-space structure in the film was successfully achieved based on SFG signals arising from ester methyl groups as well as carbonyl groups. Once SFG imaging was established, it was applied to blend films of polystyrene (PS) and PMMA with different compositions on the quartz substrate, enabling the direct and non-destructive observation of wetting layers and phase-separated structures buried at the substrate interface for the first time. The interfacial adhesion strength between the blend films and the quartz substrate, evaluated using the surface and interfacial cutting analysis system, showed a clear correlation with the interfacial structure of the blend. This study, which enables the analysis of the relationship between the local orientation of polymer chains at the interface and adhesion strength, is expected to contribute greatly to the design of next-generation adhesives and adhesion technologies.
聚合物链在固体界面的聚集状态与其粘附特性密切相关。在本研究中,我们重点研究了总频发生(SFG)振动光谱法,在现有技术中,它能提供亚纳米级的最佳深度分辨率,并探索了其作为成像方法的潜力。在石英基底上制备了具有线-空图案的聚甲基丙烯酸甲酯(PMMA)薄膜。根据酯甲基和羰基产生的 SFG 信号,成功实现了对薄膜界面线-空结构的成像。建立 SFG 成像后,将其应用于石英基底上不同成分的 PMMA 和聚苯乙烯(PS)混合薄膜,首次实现了对基底界面上埋藏的润湿层和相分离结构的直接无损观察。利用表面和界面切割分析系统对混合薄膜与石英基底之间的界面粘附强度进行了评估,结果表明混合薄膜与基底界面结构之间存在明显的相关性。这项研究能够分析聚合物链在界面上的局部取向与粘附强度之间的关系,有望为下一代粘合剂和粘附技术的设计做出巨大贡献。
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引用次数: 0
Bio-photo-Fenton-like RAFT polymerization under blue light† 蓝光下的生物光-Fenton 类 RAFT 聚合作用
IF 4.1 2区 化学 Q2 POLYMER SCIENCE Pub Date : 2024-10-12 DOI: 10.1039/d4py00593g
James L. Grace , Greg G. Qiao
In this manuscript, we report a natural photoinitiation system for polymer synthesis by employing a combination of riboflavin 5′-monophosphate sodium salt (vitamin B2) and hydrogen peroxide, and later a glucose/glucose oxidase system, for conducting reversible addition–fragmentation chain transfer (RAFT) polymerization. Under blue LED irradiation (λ = 451 nm), the bioactive form of riboflavin, flavin mononucleotide (FMN), in the presence of hydrogen peroxide was able to initiate the controlled RAFT polymerization of N,N-dimethylacrylamide. The resulting polymer was found to also possess excellent chain fidelity after chain extension via characterization by GPC. The photopolymerization was found to reach a higher conversion in the presence of hydrogen peroxide than without. This feature was exploited by using a glucose/glucose oxidase mixture to produce hydrogen peroxide in situ during the photopolymerization while additionally introducing oxygen tolerance into the system. These results suggest the excellent potential for this mild and oxygen tolerant bio-photo-Fenton photoinitiation system to be applied.
在这篇手稿中,我们报告了一种用于聚合物合成的天然光引发系统,该系统采用核黄素 5'- 磷酸单钠盐(维生素 B2)和过氧化氢的组合以及后来的葡萄糖/葡萄糖氧化酶系统,用于进行可逆加成-断裂链转移(RAFT)聚合。在蓝光 LED 的照射下(λ = 451 纳米),核黄素的生物活性形式--黄素单核苷酸(FMN)在过氧化氢的存在下能够启动 N,N-二甲基丙烯酰胺的受控 RAFT 聚合。通过 GPC 表征发现,由此产生的聚合物在链延伸后也具有极佳的链保真度。在有过氧化氢存在的情况下,光聚合的转化率比没有过氧化氢的情况下高。利用这一特点,我们使用葡萄糖/葡萄糖氧化酶混合物在光聚合过程中就地产生过氧化氢,同时还为系统引入了耐氧性。这些结果表明,这种温和、耐氧的生物-光-芬顿光引发系统具有极大的应用潜力。
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引用次数: 0
Expanding the poly(2-oxazoline) block copolymer possibilities through nitroxide mediated polymerisation† 通过氮氧化物介导聚合拓展聚(2-噁唑啉)嵌段共聚物的可能性
IF 4.1 2区 化学 Q2 POLYMER SCIENCE Pub Date : 2024-10-12 DOI: 10.1039/d4py00887a
James Lefley , C. Remzi Becer
In recent years, poly(2-oxazoline)s (POx) have become a sought-after biomaterial to replace PEG. However, access to POx based block copolymers is rather limited and their combination with controlled radical polymerization (CRP) techniques is required. Herein, we report the combination of cationic ring opening polymerization (CROP) and nitroxide mediated radical polymerization (NMP) to enable block copolymerization of poly(2-oxazoline)s with styrenics, acrylics, 1,3-dienes, and acrylamides as the second block. A well-defined poly(2-ethyl-2-oxazoline) macroinitiator has been prepared via CROP and in situ termination via the carboxylic acid functional group of BlocBuilder alkoxyamine has been achieved with a functionalization efficiency of 78%. Four different monomers in each class have been copolymerized via NMP and gel permeation chromatography analysis allowed us to identify the suitable set of comonomers to be utilized in block copolymerization with POx in an efficient, facile, metal- and sulfur-free polymerization environment.
近年来,聚(2-噁唑啉)(POx)已成为一种可替代 PEG 的生物材料。然而,基于 POx 的嵌段共聚物的获取途径相当有限,需要将其与受控自由基聚合(CRP)技术相结合。在此,我们报告了阳离子开环聚合(CROP)与硝基氧化物介导自由基聚合(NMP)的结合,以实现聚(2-噁唑啉)与苯乙烯、丙烯酸、1,3-二烯和丙烯酰胺作为第二嵌段的嵌段共聚。通过 CROP 法制备出了定义明确的聚(2-乙基-2-噁唑啉)大引发剂,并通过 BlocBuilder 烷氧基胺的羧酸官能团实现了原位终止,官能化效率高达 78%。通过 NMP 和凝胶渗透色谱分析,我们确定了在高效、简便、不含金属和硫的聚合环境中与 POx 进行嵌段共聚的合适共聚单体。
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引用次数: 0
Simple oxime functionalized fluorene polymers for organic solar cells† 用于有机太阳能电池的简单肟功能化芴聚合物
IF 4.1 2区 化学 Q2 POLYMER SCIENCE Pub Date : 2024-10-12 DOI: 10.1039/d4py00919c
Abdullah Adewale Adeoba , Xiangyu Shen , Fuzhen Bi , Jianan Niu , Mingxin Sun , Shuguang Wen , Xichang Bao
Conjugated polymers with simple chemical structures are attractive for the design of high efficiency, wide bandgap (WBG) donor materials used in non-fullerene organic solar cells. Fluorene is one of the most common structures in organic opto-electronic materials. It is herein used, for the first time, functionalized with the oxime group to construct the acceptor unit of D–A polymer donors with a BDT donor unit. The polymers, PBFO-H and PBFO-F, had low-lying HOMOs with a wide bandgap of 2.08 eV and are soluble in chloroform for easy processing. Organic solar cells were constructed using the polymers and a non-fullerene Y6 acceptor. The fluorinated polymer (PBFO-F) had better photovoltaic properties over the non-fluorinated polymer overall, with JSC, VOC, and FF values of 23.17 mA cm−2, 0.84 V, and 55.2%, respectively, and a high PCE of 10.71%. These results demonstrate that fluorene is promising in constructing acceptor units for D–A wide bandgap polymers.
化学结构简单的共轭聚合物对于设计用于非富勒烯有机太阳能电池的高效宽带隙(WBG)给体材料具有吸引力。芴是有机光电材料中最常见的结构之一。在此,我们首次用肟基团官能化了的芴来构建具有 BDT 供体单元的 D-A 聚合物供体的受体单元。PBFO-H 和 PBFO-F 聚合物的 HOMO 值较低,具有 2.08 eV 的宽带隙,可溶于氯仿,易于加工。利用这些聚合物和非富勒烯 Y6 受体构建了有机太阳能电池。含氟聚合物(PBFO-F)的光电性能总体上优于非含氟聚合物,其 Jsc、Voc 和 FF 值分别为 23.17 mA/cm2、0.84 V 和 55.2 %,PCE 高达 10.71 %。这些结果表明,芴有望构建 D-A 宽带隙聚合物的受体单元。
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引用次数: 0
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Polymer Chemistry
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