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Thermal Performance and Structural Optimization of Electric Heating Module Based on KAl(SO4)2·12H2O/Expanded Graphite Composite Phase‐Change Material 基于 KAl(SO4)2-12H2O/Expanded Graphite 复合相变材料的电加热模块的热性能与结构优化
IF 3.8 4区 工程技术 Q3 ENERGY & FUELS Pub Date : 2024-08-22 DOI: 10.1002/ente.202400707
Dongyin Niu, Tiantian Zhang, Xuedan Zhang, Yufei Tan, Lukai Zhai
Under the background of vigorously promoting clean heating, the introduction of phase‐change energy storage technology into heating systems has become a new hot issue. In this study, a novel KAl(SO4)2·12H2O/expanded graphite (EG) shape‐stabilized composite phase‐change material (PCM), with a melting temperature of 91.6 °C, latent heat of 245.7 kJ kg−1, and high heat conductivity of 2.07 W m−1 K−1, is prepared to manufacture a PCM‐based module for space heating. This phase‐change electric heating module is developed, and its heat storage and release characteristics are investigated through experimental and numerical studies. The numerical model is validated by experimental results. In view of the numerical simulation, the structure of the module is optimized and its thermal performance is studied. Based on the optimized module, a peak‐valley time‐of‐use (TOU) electric heating module is finally proposed. It is revealed that the module exhibits good thermal performance and is capable of satisfying the indoor heating demand. The effective heat storage and release duration is 8.12 and 15.34 h, which can perfectly realize the operating mode under the “peak‐valley TOU electricity” mechanism. In this study, it is demonstrated that peak–valley electric energy storage heating devices have broad prospects in building space heating and provides reference for future application.
在大力推广清洁供暖的背景下,将相变储能技术引入供暖系统已成为一个新的热点问题。本研究制备了一种新型 KAl(SO4)2-12H2O/ 膨胀石墨 (EG) 形状稳定复合相变材料 (PCM),其熔化温度为 91.6 °C,潜热为 245.7 kJ kg-1,导热系数高达 2.07 W m-1 K-1,用于制造基于 PCM 的空间加热模块。我们开发了这种相变电加热模块,并通过实验和数值研究调查了它的蓄热和放热特性。实验结果验证了数值模型。根据数值模拟结果,对模块结构进行了优化,并对其热性能进行了研究。在优化模块的基础上,最终提出了一种峰谷分时(TOU)电加热模块。结果表明,该模块具有良好的热性能,能够满足室内供暖需求。其有效蓄热和放热时间分别为 8.12 和 15.34 h,能够完美实现 "峰谷分时用电 "机制下的运行模式。本研究表明,峰谷电蓄热供暖装置在建筑空间供暖方面具有广阔的应用前景,为今后的应用提供了参考。
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引用次数: 0
Fault Diagnosis Review of Proton Exchange Membrane Fuel Cell Systems: Fault Mechanisms, Detection and Identification, and Fault Mitigation 质子交换膜燃料电池系统故障诊断综述:故障机制、检测和识别以及故障缓解
IF 3.8 4区 工程技术 Q3 ENERGY & FUELS Pub Date : 2024-08-22 DOI: 10.1002/ente.202400557
Yupeng Yuan, Xuesong Zhang, Na Li, Xuyang Zhao, Liang Tong, Chengqing Yuan, Boyang Shen, Teng Long
Proton exchange membrane fuel cell (PEMFC) has become a hotspot due to its high efficiency, compact structure, and good dynamic operation efficiency. However, problems such as poor reliability and short lifespan create bottlenecks in its large‐scale applications. There has been a large amount of research on fault diagnosis and health management techniques dedicated to addressing the lifespan issues of PEMFC systems. This article provides an in‐depth analysis on the fault mechanism of PEMFC and systematically sorts out the types, causes, and impacts of faults. On this basis, the research progress of PEMFC fault diagnosis technology is summarized, and the measurement characterization methods for fuel cell status monitoring and fault detection are summarized. The literatures of model‐based and data‐driven fault identification methods are summarized and compared. The relevant mitigation measures for PEMFC faults are discussed. Finally, based on the challenges in the current research of fault diagnosis, people mainly conduct research on fault model, online diagnostic technology, and improving diagnostic mechanisms. Overall, this article can provide useful summary and guidance for future research.
质子交换膜燃料电池(PEMFC)因其效率高、结构紧凑、动态运行效率好而成为热点。然而,可靠性差、寿命短等问题成为其大规模应用的瓶颈。针对 PEMFC 系统的寿命问题,已有大量关于故障诊断和健康管理技术的研究。本文深入分析了 PEMFC 的故障机理,系统梳理了故障的类型、原因和影响。在此基础上,总结了 PEMFC 故障诊断技术的研究进展,并归纳了燃料电池状态监测和故障检测的测量表征方法。总结并比较了基于模型和数据驱动的故障识别方法。讨论了 PEMFC 故障的相关缓解措施。最后,针对目前故障诊断研究中存在的挑战,主要从故障模型、在线诊断技术、改进诊断机制等方面进行了研究。总之,本文可以为今后的研究提供有益的总结和指导。
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引用次数: 0
Renewable Ammonia for Global Energy Transition 可再生氨促进全球能源转型
IF 3.8 4区 工程技术 Q3 ENERGY & FUELS Pub Date : 2024-08-22 DOI: 10.1002/ente.202400841
Angela Kruth, Stefan Käding, Jens Wartmann
As the global energy transition takes shape, ammonia has emerged as an up‐and‐coming zero‐carbon solution for the global hydrogen economy. This article highlights the favorable properties of ammonia that makes it a reliable and economic work horse ‐ overcoming many technological hurdles that still exist for hydrogen. The future role of ammonia as renewable fuel for shipping, heavy‐duty land‐based transport, power generation, and status of technology is highlighted. Finally, market projections and cost competitiveness are discussed for ammonia as an export vector for global hydrogen.
随着全球能源转型的形成,氨已成为全球氢经济中一种新兴的零碳解决方案。本文重点介绍了氨的有利特性,这些特性使氨成为一种可靠而经济的工作燃料,克服了氢仍然存在的许多技术障碍。文章重点介绍了氨作为可再生燃料在航运、陆上重型运输、发电领域的未来作用以及技术现状。最后,讨论了氨作为全球氢气出口媒介的市场预测和成本竞争力。
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引用次数: 0
Flexible Nanocarbon Electrodes for Holistically Engineered Solar Cell and Battery Integrated Piezoresistive Sensor 用于集成太阳能电池和电池的整体工程压阻传感器的柔性纳米碳电极
IF 3.8 4区 工程技术 Q3 ENERGY & FUELS Pub Date : 2024-08-22 DOI: 10.1002/ente.202400991
Brindha Ramasubramanian, Vundrala Sumedha Reddy, Zhen Ye, Goh Wei Peng, Yang Le, Seeram Ramakrishna, Vijila Chellappan
Herein, a sustainable graphitic carbon derived from waste polystyrene plastics (PS‐G) has been developed and a proof of concept for the integration of organic solar cells, Al‐ion batteries, and piezoresistive sensors based on PS‐G electrodes has been provided. First, a flexible organic solar cell (OSC) with the PS‐G interfacial layer between the photoactive material and the Al metal has enhanced charge extraction mobility with a power conversion efficiency (PCE) of 3.5%. A new range of possibilities in metal:semiconductor:carbon:metal contact and interfacial tuning in OSCs are made possible by the fact that pure PS‐G without Al can successfully extract electrons with a PCE of 0.89%. Second, when used as the cathode in an Al–carbon battery, PS‐G demonstrates a specific capacity of 148 mAh g−1 at 50 mA g−1. At different current densities, PS‐G cathodes demonstrate high cycling stability (with 65% capacity retention over 100 cycles). Finally, the best of the fabricated OSCs and the Al–carbon batteries are then combined with a piezoresistive sensor that includes an active PS‐G electrode. The battery‐powered sensor has a resistance of 40–45 × 104 Ω while the solar‐powered sensor has a resistance of 32–35 × 104 Ω, when subjected to mechanical stimuli, with a tensile strength of 20 N.
在此,我们开发了一种从废弃聚苯乙烯塑料(PS-G)中提取的可持续石墨碳,并提供了基于 PS-G 电极的有机太阳能电池、铝离子电池和压阻传感器集成的概念验证。首先,在光活性材料和铝金属之间使用 PS-G 界面层的柔性有机太阳能电池(OSC)提高了电荷提取流动性,功率转换效率(PCE)达到 3.5%。不含铝的纯 PS-G 可成功萃取电子,其 PCE 为 0.89%,这为 OSC 中的金属:半导体:碳:金属接触和界面调整提供了新的可能性。其次,在铝碳电池中用作阴极时,PS-G 在 50 mA g-1 电流下的比容量为 148 mAh g-1。在不同的电流密度下,PS-G 阴极表现出很高的循环稳定性(100 次循环后容量保持率为 65%)。最后,制备出的最佳 OSC 和铝碳电池与包含有源 PS-G 电极的压阻传感器相结合。电池供电传感器的电阻为 40-45 × 104 Ω,而太阳能供电传感器的电阻为 32-35 × 104 Ω,当受到机械刺激时,抗拉强度为 20 N。
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引用次数: 0
Recent Advances in Biomass‐Derived Carbon‐Based Nanostructures for Electrocatalytic Reduction Reactions: Properties–Performance Correlations 用于电催化还原反应的生物质衍生碳基纳米结构的最新进展:性质与性能的关系
IF 3.8 4区 工程技术 Q3 ENERGY & FUELS Pub Date : 2024-08-22 DOI: 10.1002/ente.202400882
Rajini Murugesan, Manova Santhosh Yesupatham, Nithish Agamendran, Karthikeyan Sekar, Clament Sagaya Selvam Neethinathan, Arthanareeswari Maruthapillai
Developing affordable and high‐performance catalysts for water electrolyzers and fuel cell devices is an emerging field of research aiming for their feasible implementation and thus addressing sustainable global energy demands. Accordingly, several catalytic systems have been developed for anodic oxidation reactions and cathodic reduction reactions. Specifically, more research attention has been focused on viable catalyst synthesis processes including design, choice of precursors, reaction conditions, and regulation steps for achieving desirable properties and performances. Intriguingly, biomass has been demonstrated as a promising precursor for the potential design of different carbon‐based catalysts for electrocatalytic oxidation/reduction reactions. In this review, the recent developments in using biomass precursors to derive different nanostructures are systematically discussed. The biomass‐derived catalysts especially applied for reduction reactions (hydrogen evolution and oxygen reduction reactions) are summarized, and the impact of various catalysts’ engineering routes (incorporation of metals and nonmetals into the carbon structures) on the resulting structure–performance relationship is critically discussed. Further, this review highlights the performance of various biomass‐derived catalysts toward electrocatalytic reduction reactions that unveil the catalyst's intrinsic features such as selectivity, activity, and durability. The summarized results and the critical discussion will facilitate screening of the best biomass precursor, identifying suitable regulation strategies for accomplishing desirable properties, and thus advancing the next‐generation catalysts’ developments. Further, the significance, challenges, and perspectives on biomass‐derived catalysts for electrocatalysis are comprehensively discussed.
为水电解槽和燃料电池装置开发经济实惠的高性能催化剂是一个新兴的研究领域,其目的是可行地实施这些催化剂,从而满足可持续的全球能源需求。因此,针对阳极氧化反应和阴极还原反应开发了多种催化系统。具体而言,更多的研究重点是可行的催化剂合成工艺,包括设计、前体选择、反应条件和调节步骤,以实现理想的特性和性能。令人感兴趣的是,生物质已被证明是一种前景广阔的前体,可用于设计不同的碳基催化剂,用于电催化氧化/还原反应。在这篇综述中,系统地讨论了利用生物质前驱体生成不同纳米结构的最新进展。综述了特别适用于还原反应(氢进化和氧还原反应)的生物质衍生催化剂,并认真讨论了各种催化剂工程路线(在碳结构中加入金属和非金属)对所产生的结构-性能关系的影响。此外,本综述还重点介绍了各种生物质衍生催化剂在电催化还原反应中的性能,揭示了催化剂的内在特点,如选择性、活性和耐久性。总结结果和重要讨论将有助于筛选最佳生物质前体,确定实现理想特性的合适调节策略,从而推动下一代催化剂的开发。此外,还全面讨论了电催化生物质衍生催化剂的意义、挑战和前景。
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引用次数: 0
A Shared Anode Flow Field for Direct Methanol Fuel Cell with Enhanced Performance and Decreased Volume 用于直接甲醇燃料电池的共用阳极流场,可提高性能并减少体积
IF 3.8 4区 工程技术 Q3 ENERGY & FUELS Pub Date : 2024-08-22 DOI: 10.1002/ente.202401075
Yang Liu, Haibo Gan, Bin Qin, Hai Sun, Gongquan Sun
Low‐volume power density remains a significant barrier to the portable application of direct methanol fuel cell (DMFC). Herein, a shared anode flow field (SAFF) structure is introduced in an active DMFC to reduce stack volume and improve discharge performance. The differences in discharge performance between the bi‐cell with SAFF and the bi‐cell with traditional anode flow field (TAFF), coupled with the effect of operating conditions on performance, are investigated by polarization curve, electrochemical impedance spectra, and voltage versus time curves. The results show that the SAFF structure enhances anode mass transfer, resulting in an improvement in peak power density and voltage stability of the bi‐cell compared to the TAFF structure. In addition, the bi‐cell with SAFF achieves its highest peak power density at a lower methanol concentration, alleviating the methanol crossover caused by high concentration. The SAFF structure is an attractive choice for DMFC portable applications.
低体积功率密度仍然是直接甲醇燃料电池(DMFC)便携式应用的一大障碍。本文在有源 DMFC 中引入了共享阳极流场(SAFF)结构,以减少堆栈体积并提高放电性能。通过极化曲线、电化学阻抗谱和电压与时间曲线,研究了采用 SAFF 结构的双电池与采用传统阳极流场(TAFF)结构的双电池在放电性能上的差异,以及工作条件对性能的影响。结果表明,与 TAFF 结构相比,SAFF 结构增强了阳极传质,从而提高了双电池的峰值功率密度和电压稳定性。此外,采用 SAFF 结构的双电池在甲醇浓度较低时也能达到最高的峰值功率密度,从而缓解了高浓度甲醇造成的甲醇交叉现象。对于 DMFC 便携式应用而言,SAFF 结构是一种极具吸引力的选择。
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引用次数: 0
Investigating Long‐Term Durability of Nanofillers (TiO2) Embedded Organic Eutectic Phase Change Composites 纳米填料(TiO2)嵌入式有机共晶相变复合材料的长期耐久性研究
IF 3.8 4区 工程技术 Q3 ENERGY & FUELS Pub Date : 2024-08-13 DOI: 10.1002/ente.202400335
Jeeja Jacob, John Paul, Jeyraj Selvaraj, Nasrudin Abd Rahim, Adarsh Kumar Pandey, Muhammad Shakeel Ahmad, Kumaran Kadirgama
Phase Change Materials (PCMs) are generally considered as a potential candidate for thermal energy storage (TES) as they possess excellent latent heat. TES system's thermal management potential is greatly hampered due to the degraded thermal conductivity of PCMs. The present study explores the long‐term durability (potential degradation) of eutectic phase change composite loaded with TiO2 nanoparticles. The synthesized nano‐enhanced eutectic phase change composite (NePCC) logged a maximal thermal conductivity of 0.6 W/mK with 0.5% nanofillers. Accelerated thermal cycling was performed on the NePCC with 0.5% TiO2 nanoparticles (M2). The long‐term reliability of the NePCC (M2) was confirmed through a comprehensive morphological and thermophysical analysis after 4000 melt‐freeze cycles. The nano‐enhanced eutectic phase change material showed excellent thermal stability up to 100 °C even after 4000 thermal cycles, indicating its long‐term application prospects. Fourier Transform Infrared (FTIR) results of the thermally cycled sample (M2) proved the chemical stability of the NePCC. A negligible variation was found in latent heat and phase transition temperature values (for M2) after 4000 thermal cycles. Thermophysical characterization of the thermal cycled NePCC (M2) proves the thermal stability of the synthesized NePCC (M2), which is adequate for its usage in medium‐temperature TES systems.
相变材料(PCM)具有极佳的潜热,因此被普遍认为是热能储存(TES)的潜在候选材料。由于 PCM 的导热性能退化,TES 系统的热管理潜力受到了极大影响。本研究探讨了负载有 TiO2 纳米颗粒的共晶相变复合材料的长期耐久性(潜在降解)。合成的纳米增强共晶相变复合材料(NePCC)的最大热导率为 0.6 W/mK,纳米填料含量为 0.5%。对含有 0.5% TiO2 纳米颗粒(M2)的 NePCC 进行了加速热循环试验。经过 4000 次熔融-冷冻循环后,通过全面的形态和热物理分析,确认了 NePCC (M2) 的长期可靠性。该纳米增强共晶相变材料在经过 4000 次热循环后仍表现出卓越的热稳定性,最高温度可达 100 °C,这表明其具有长期应用前景。热循环样品(M2)的傅立叶变换红外光谱(FTIR)结果证明了 NePCC 的化学稳定性。经过 4000 次热循环后,潜热和相变温度值(M2)的变化可以忽略不计。热循环 NePCC(M2)的热物理特性证明了合成 NePCC(M2)的热稳定性,足以将其用于中温 TES 系统。
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引用次数: 0
Comparative Performance of Aqueous and Ionic Liquid-Based Gel Electrolytes in Co(OH)2/rGO-Based Supercapacitor 水基和离子液体基凝胶电解质在基于 Co(OH)2/rGO 的超级电容器中的性能比较
IF 3.6 4区 工程技术 Q3 ENERGY & FUELS Pub Date : 2024-08-10 DOI: 10.1002/ente.202400995
Prasad Eknath Lokhande, Vishal Kadam, Chaitali Jagtap, Dadaso D Mohite, Rednam Udayabhaskar, Perarasu V. Thangavelu, Saif M.H. Qaid,  Anil Kumar

Supercapacitors are known for their highpower density and excellent cycling stability, but their practicality is often hindered by limited energy density and a narrow potential window. Herein, the energy density can be enhanced by modifying the electrode material and the potential window can be expanded through the use of ionic liquid (IL) electrolytes. In the present study, Co(OH)2/reduced graphene oxide (rGO) (Co-G) nanocomposite electrodes was synthesized using a simple hydrothermal method while IL-based electrolyte was used as an electrolyte for supercapacitor device fabrication. Morphological analysis reveals a porous honeycomb-like nanostructure with a vertical orientation on the rGO sheet. Electrochemical analysis of the samples is conducted to assess electrode performance, with the Co-G electrode achieving a capacitance of 2156 F g−1 at 1 A g−1. This electrode exhibits lower electrochemical resistance than pure Co(OH)2. The synthesized material's practicality evaluated in an asymmetric device Co-G/C//AC/C using ionic gel and aqueous gel-based electrolytes. IL-based gel electrolyte device demonstrated superior performance, delivering an energy density of 130 Wh kg−1 and a power density of 3860 W kg−1, maintaining 91% capacitance after 5000 charge–discharge cycles, and outperforming the KOH/PVA gel-based device, highlighting the advantages of ionic gel electrolytes.

超级电容器以其高功率密度和出色的循环稳定性而著称,但其实用性往往受到能量密度有限和电位窗口狭窄的阻碍。因此,可以通过改变电极材料来提高能量密度,并通过使用离子液体(IL)电解质来扩大电位窗口。本研究采用简单的水热法合成了 Co(OH)2/还原氧化石墨烯(rGO)(Co-G)纳米复合电极,并使用离子液体电解质作为电解液制造超级电容器装置。形态学分析表明,在 rGO 片材上形成了多孔的蜂窝状纳米结构,并具有垂直取向。对样品进行电化学分析以评估电极性能,Co-G 电极在 1 A g-1 电流条件下的电容为 2156 F g-1。该电极的电化学电阻低于纯 Co(OH)2。在使用离子凝胶和水凝胶电解质的不对称装置 Co-G/C//AC/C 中,对合成材料的实用性进行了评估。基于离子凝胶的凝胶电解质装置性能优越,能量密度为 130 Wh kg-1,功率密度为 3860 W kg-1,在 5000 次充放电循环后仍能保持 91% 的电容,优于基于 KOH/PVA 凝胶的装置,凸显了离子凝胶电解质的优势。
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引用次数: 0
Electrical Performance Measurement of Electrical Thermoelectric Generator by Simulating Space Cooling Conditions in Terrestrial Laboratory 通过在地面实验室模拟空间冷却条件测量电气热电发生器的电气性能
IF 3.6 4区 工程技术 Q3 ENERGY & FUELS Pub Date : 2024-08-09 DOI: 10.1002/ente.202400273
Xuejian Wang, Hu He, Yurou Sang, Lu Han, Jialin Gu, Congshuai Cao

Predicting the electrical performance and temperature field of radioisotope thermoelectric generator (RTG) is crucial and essential before they are used in space, a common application scenario. However, building a laboratory to recreate a space environment is expensive and time-consuming. It is also unrealistic to deploy temperature measurement probes in various components of the RTG. This article aims to establish an approach which combines finite element method (FEM) and experimental measurements in the terrestrial laboratory to solve the problem more effectively: first, using FEM to calculate the temperature distribution of RTG operating in the space; second, realizing the similar temperature distribution of self-assembly RTG prototype (electrical thermoelectric generator [ETG]) in the terrestrial laboratory by air cooling. The subsequent measurements of electrical performance indicate that the ETG exhibits a maximum power output of 43.41 W and a maximum thermoelectric conversion efficiency of 5.788% in the simulated space environment, aligning well with the values obtained from FEM. This research has the potential to serve as a method for forecasting the performance of RTG in a terrestrial laboratory.

预测放射性同位素热电发生器(RTG)的电气性能和温度场是将其用于太空(一种常见的应用场景)之前的关键和必要条件。然而,建造一个重现太空环境的实验室既昂贵又耗时。在 RTG 的各个组件中部署温度测量探头也不现实。本文旨在建立一种结合有限元法(FEM)和地面实验室实验测量的方法,以更有效地解决这一问题:首先,利用有限元法计算 RTG 在太空中运行的温度分布;其次,在地面实验室通过空气冷却实现自组装 RTG 原型(电热电发生器 [ETG])的类似温度分布。随后的电性能测量结果表明,ETG 在模拟空间环境中的最大输出功率为 43.41 W,最大热电转换效率为 5.788%,与有限元计算得出的数值非常吻合。这项研究有望成为预测地面实验室 RTG 性能的一种方法。
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引用次数: 0
Improving the Optical Properties of SiNx:H Thin Film by Optimizing NH3:SiH4 Gas Ratio Using Plasma-Enhanced Chemical Vapor Deposition 利用等离子体增强化学气相沉积优化 NH3:SiH4 气体比例以改善 SiNx:H 薄膜的光学特性
IF 3.6 4区 工程技术 Q3 ENERGY & FUELS Pub Date : 2024-08-09 DOI: 10.1002/ente.202401037
Alamgeer, Hasnain Yousuf, Muhammad Quddamah Khokhar, Jaljalalul Abedin Jony, Rafi ur Rahman, Syed Azkar-ul Hassan, Youngkuk Kim, Duy Phong Pham, Sangheon Park, Junsin Yi

In this article, we enhance the optical properties of hydrogenated silicon nitride (SiNx:H) thin film by optimization of deposition conditions using plasma-enhanced chemical vapor deposition (PECVD). Specifically, the impact of varying NH3:SiH4 gas ratios (GRs) on the optical and structural properties of the SiNx:H film has been investigated. A ratio of 1.2 results in an optimal refractive index of 2.05, a thickness of 75.60 nm, and a deposition rate of 1.01 nm s−1, achieving the highest optical transmittance of 92.63% at 350 °C. Lower ratios, such as 0.5, produce higher refractive indices up to 2.43 but with reduced transmittance and thinner films (53.67 nm at 84.43% transmittance). The bandgap of GR 1.2 at 350 °C is also calculated as 3.23 eV using Tauc's plot. Fourier transform infrared spectroscopy analysis shows significant variations in SiH hydrogen bonding configurations at different temperatures, affecting SiH and SiNH bond densities. These are crucial for understanding the films’ electronic and optical behaviors, with the highest hydrogen content for SiH noted at 3.30 × 1022 cm−3 at 350 °C. This research provides a detailed understanding of how precise control over GRs during PECVD can fine-tune SiNx film properties, offering guidelines for producing high-quality SiNx:H layer.

本文利用等离子体增强化学气相沉积(PECVD)技术,通过优化沉积条件来提高氢化氮化硅(SiNx:H)薄膜的光学特性。具体来说,我们研究了不同的 NH3:SiH4 气体比 (GRs) 对 SiNx:H 薄膜光学和结构特性的影响。1.2 的气体比可获得 2.05 的最佳折射率、75.60 nm 的厚度和 1.01 nm s-1 的沉积速率,在 350 °C 时可获得 92.63% 的最高光学透过率。更低的比率(如 0.5)可产生更高的折射率,最高可达 2.43,但透射率会降低,薄膜也会变薄(53.67 nm,透射率为 84.43%)。根据陶克曲线图,还可以计算出 350 °C 时 GR 1.2 的带隙为 3.23 eV。傅立叶变换红外光谱分析显示,在不同温度下,SiH 氢键构型会发生显著变化,从而影响 SiH 和 SiNH 键密度。这些对于理解薄膜的电子和光学行为至关重要,在 350 °C 时,SiH 的氢含量最高,达到 3.30 × 1022 cm-3。这项研究详细揭示了在 PECVD 过程中精确控制 GRs 如何微调 SiNx 薄膜特性,为生产高质量的 SiNx:H 层提供了指导。
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引用次数: 0
期刊
Energy technology
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