Pub Date : 2018-07-01DOI: 10.1109/MARSS.2018.8481201
Jun Chen, J. Gel, Brandon K. Chen, Zheng Gong, Chao Zhou, Chaoyang Shi, Changhai Ru, Huayan Pu, Yan Peng, Shaorong Xie, Yu Sun
Ahstract- For imaging nano-scaled samples, atomic force microscopy (AFM) and scanning electron microscopy (SEM) represent two complementary imaging techniques. In a hybrid SEM-AFM system, a compact AFM is installed inside the high vacuum chamber of an SEM, where SEM provides largely 2D imaging and material compositions of a sample while AFM is capable of complementarily measuring 3D topography of the sample. Although SEM can achieve real-time imaging (e.g., 20 Hz), AFM scan can take minutes to generate an image, demanding strategies for speeding up AFM measurement. In existing hybrid SEM-AFM systems, SEM and AFM measurements are made independently. This paper presents, for the first time, a technique of using SEM nanoscopic imaging to guide the scan speed of AFM imaging. The dynamic variation of AFM scan speed is based on features identified in SEM imaging. Information/features are extracted from real-time SEM images and quantitated using local entropy and other metrics. The generated feature metric map is used to produce a speed map for varying AFM scan speed at each position on the sample. Experiments were conducted with a new SEM-compatible AFM instrument we recently developed, as the test bed of the SEM-guided AFM scan technique. The results for the samples measured in this work demonstrate that time savings of this technique, compared to traditional AFM scan using a constant speed, were up to 66% with equivalent imaging accuracy obtained with traditional fine scan. With the same time cost of traditional fast scan, the SEM -guided AFM scan technique had an accuracy improvement of 47%.
{"title":"Automated SEM-Guided AFM Scan with Dynamically Varied Scan Speed","authors":"Jun Chen, J. Gel, Brandon K. Chen, Zheng Gong, Chao Zhou, Chaoyang Shi, Changhai Ru, Huayan Pu, Yan Peng, Shaorong Xie, Yu Sun","doi":"10.1109/MARSS.2018.8481201","DOIUrl":"https://doi.org/10.1109/MARSS.2018.8481201","url":null,"abstract":"Ahstract- For imaging nano-scaled samples, atomic force microscopy (AFM) and scanning electron microscopy (SEM) represent two complementary imaging techniques. In a hybrid SEM-AFM system, a compact AFM is installed inside the high vacuum chamber of an SEM, where SEM provides largely 2D imaging and material compositions of a sample while AFM is capable of complementarily measuring 3D topography of the sample. Although SEM can achieve real-time imaging (e.g., 20 Hz), AFM scan can take minutes to generate an image, demanding strategies for speeding up AFM measurement. In existing hybrid SEM-AFM systems, SEM and AFM measurements are made independently. This paper presents, for the first time, a technique of using SEM nanoscopic imaging to guide the scan speed of AFM imaging. The dynamic variation of AFM scan speed is based on features identified in SEM imaging. Information/features are extracted from real-time SEM images and quantitated using local entropy and other metrics. The generated feature metric map is used to produce a speed map for varying AFM scan speed at each position on the sample. Experiments were conducted with a new SEM-compatible AFM instrument we recently developed, as the test bed of the SEM-guided AFM scan technique. The results for the samples measured in this work demonstrate that time savings of this technique, compared to traditional AFM scan using a constant speed, were up to 66% with equivalent imaging accuracy obtained with traditional fine scan. With the same time cost of traditional fast scan, the SEM -guided AFM scan technique had an accuracy improvement of 47%.","PeriodicalId":118389,"journal":{"name":"2018 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS)","volume":"36 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132671269","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-07-01DOI: 10.1109/MARSS.2018.8481227
M. Takiguchi, A. Yokoo, M. D. Birowosuto, M. Notomi
Using atomic force microscopy to control nanometer sized materials, we are able to manipulate semiconductor nanowires onto silicon based photonic crystal structures. The hybridized combination allows for the creation of nano-Iaser devices with variable utility.
{"title":"Movable Nanowire Laser on Silicon Photonic Crystal Using Atomic Force Microscopy","authors":"M. Takiguchi, A. Yokoo, M. D. Birowosuto, M. Notomi","doi":"10.1109/MARSS.2018.8481227","DOIUrl":"https://doi.org/10.1109/MARSS.2018.8481227","url":null,"abstract":"Using atomic force microscopy to control nanometer sized materials, we are able to manipulate semiconductor nanowires onto silicon based photonic crystal structures. The hybridized combination allows for the creation of nano-Iaser devices with variable utility.","PeriodicalId":118389,"journal":{"name":"2018 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS)","volume":"79 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133768330","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-07-01DOI: 10.1109/marss.2018.8481191
N. Jiao, S. Tung, G. Gu, E. Choi, Byungjeon Kang, L. Masson, P. Lambert
Locomotion of Microstructures Driven by Algae cells.
藻类细胞驱动的微结构运动。
{"title":"Table of contents - full papers","authors":"N. Jiao, S. Tung, G. Gu, E. Choi, Byungjeon Kang, L. Masson, P. Lambert","doi":"10.1109/marss.2018.8481191","DOIUrl":"https://doi.org/10.1109/marss.2018.8481191","url":null,"abstract":"Locomotion of Microstructures Driven by Algae cells.","PeriodicalId":118389,"journal":{"name":"2018 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS)","volume":"52 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129423655","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-07-01DOI: 10.1109/MARSS.2018.8481220
Ujjal Dey, C. Jacob, Supriti Sen, C. S. Kumar, Meher Wan
Manipulation in micro or nanoscale with robotic manipulators under observation of electron microscopes is a widely used strategy for fabrication of nanodevices and nanoscale material property characterization. These types of manipulation systems can handle the relatively larger scale of objects. However, the complexity of manipulation increases highly for 3D manipulation. Since the manipulation system consists of multiple components including manipulator, microscope, and also some end-effector tools, a proper offline visualization of the system is necessary for operation. Therefore, we propose a web-based virtual interface between the user and the actual manipulator operated under digital microscope initially. It gives the operator 3D positional feedback from the virtual model by mapping data read during remote operation. The same interface is used for remote operation of the manipulator within the SEM chamber and a manipulation task is performed.
{"title":"A Virtual Feedback Assistance System for Remote Operation of a 3DOF Micromanipulator in Micro-Nanorobotic Manipulation","authors":"Ujjal Dey, C. Jacob, Supriti Sen, C. S. Kumar, Meher Wan","doi":"10.1109/MARSS.2018.8481220","DOIUrl":"https://doi.org/10.1109/MARSS.2018.8481220","url":null,"abstract":"Manipulation in micro or nanoscale with robotic manipulators under observation of electron microscopes is a widely used strategy for fabrication of nanodevices and nanoscale material property characterization. These types of manipulation systems can handle the relatively larger scale of objects. However, the complexity of manipulation increases highly for 3D manipulation. Since the manipulation system consists of multiple components including manipulator, microscope, and also some end-effector tools, a proper offline visualization of the system is necessary for operation. Therefore, we propose a web-based virtual interface between the user and the actual manipulator operated under digital microscope initially. It gives the operator 3D positional feedback from the virtual model by mapping data read during remote operation. The same interface is used for remote operation of the manipulator within the SEM chamber and a manipulation task is performed.","PeriodicalId":118389,"journal":{"name":"2018 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS)","volume":"40 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126860139","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-07-01DOI: 10.1109/MARSS.2018.8481148
M. Wieghaus, O. Haenssler, S. Fatikow
Scanning Microwave Microscopy (SMM) is a tool with high potential to analyze and characterize nanomaterials. A disadvantage of this technique is the scanning speed when using a Vector Network Analyzer (VNA) compared to other Scanning Probe Microscopy methods that already have fast approaches. With this paper we present a method to speed up the SMM scan without changing the components of the measurement setup. All of this is done by software, the proposed method undersamples the device under test and calculates the missing pixels afterwards with different inpainting methods. This is achieved through a custom made electronics board which can generate arbitrary trajectories and a robotic software framework, which provides the algorithms for controlling and reconstructing the measured data.
{"title":"Improving Acquisition Time in Scanning Microwave Microscopy by Undersampling the Scan Area","authors":"M. Wieghaus, O. Haenssler, S. Fatikow","doi":"10.1109/MARSS.2018.8481148","DOIUrl":"https://doi.org/10.1109/MARSS.2018.8481148","url":null,"abstract":"Scanning Microwave Microscopy (SMM) is a tool with high potential to analyze and characterize nanomaterials. A disadvantage of this technique is the scanning speed when using a Vector Network Analyzer (VNA) compared to other Scanning Probe Microscopy methods that already have fast approaches. With this paper we present a method to speed up the SMM scan without changing the components of the measurement setup. All of this is done by software, the proposed method undersamples the device under test and calculates the missing pixels afterwards with different inpainting methods. This is achieved through a custom made electronics board which can generate arbitrary trajectories and a robotic software framework, which provides the algorithms for controlling and reconstructing the measured data.","PeriodicalId":118389,"journal":{"name":"2018 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126889242","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-07-01DOI: 10.1109/MARSS.2018.8481173
A. Orlov, S. A. Zybtsev, Peter V. Lcga, V. Pokrovskii, A. Frolov, V. Koledov
Samples of the composite nanotweezers with shape memory effect were prepared and tested. Proposed design of the nanotweezers made it possible to manipulate individual NbS3whiskers in the scanning electron microscopy. To study the transport properties of the charge density wave (CDW), from the array of NbS3filaments, structurally perfect crystals of tens of nanometers in width were chosen and transferred to a substrate with electrical conductors without introducing additional structural defects. On the fixed crystals of different length and width, the voltage-current (IV) curves were measured with an external high-frequency electromagnetic field. The manifestation of the Shapiro steps on IV curves is indicative of the high quality of the samples made with the help of the proposed nanotweezers with shape memory effect (SME).
{"title":"Composite Nanotools with Shape Memory Effect for Nanostructures Assembly","authors":"A. Orlov, S. A. Zybtsev, Peter V. Lcga, V. Pokrovskii, A. Frolov, V. Koledov","doi":"10.1109/MARSS.2018.8481173","DOIUrl":"https://doi.org/10.1109/MARSS.2018.8481173","url":null,"abstract":"Samples of the composite nanotweezers with shape memory effect were prepared and tested. Proposed design of the nanotweezers made it possible to manipulate individual NbS3whiskers in the scanning electron microscopy. To study the transport properties of the charge density wave (CDW), from the array of NbS3filaments, structurally perfect crystals of tens of nanometers in width were chosen and transferred to a substrate with electrical conductors without introducing additional structural defects. On the fixed crystals of different length and width, the voltage-current (IV) curves were measured with an external high-frequency electromagnetic field. The manifestation of the Shapiro steps on IV curves is indicative of the high quality of the samples made with the help of the proposed nanotweezers with shape memory effect (SME).","PeriodicalId":118389,"journal":{"name":"2018 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS)","volume":"79 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123177968","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-07-01DOI: 10.1109/marss.2018.8481171
International conference on manipulation, automation and robotics at small scales.
小型操作、自动化和机器人国际会议。
{"title":"Proceedings of MARSS 2018","authors":"","doi":"10.1109/marss.2018.8481171","DOIUrl":"https://doi.org/10.1109/marss.2018.8481171","url":null,"abstract":"International conference on manipulation, automation and robotics at small scales.","PeriodicalId":118389,"journal":{"name":"2018 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS)","volume":"416 3","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"120939618","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-07-01DOI: 10.1109/MARSS.2018.8481151
Fan Wang, Minghui Nan, Sunghoon Cho, Chang-sei Kim, Jong-Oh Park, Eunpyo Choi
Bioinspired soft actuators have received burgeoning interest because of their applications in future electronic devices including soft robots, soft haptic devices, human-friendly flexible wearable devices, and biomedical robots. Here, a biofriendly soft actuator was newly designed based on core-shell-structured bacterial cellulose membrane, which was fabricated by homogeneously depositing polypyrrole nanoparticles on the surface of TEMPO-Oxidized bacterial cellulose (TOBC) nanofibers via a chemical polymerization method. The proposed soft actuator under both harmonic and step electrical inputs showed relatively large bending mechanical deformation, fast response time, and good long-term durability in air condition, which was due to the enhanced electrochemical properties of TOBC-Polypyrrole membrane, resulting from its highly porous structure and high conductivity. Therefore, the designed TOBC-Polypyrrole actuator can be a strong candidate for bioinspired actuating devices such as, soft and wearable electronics, and active biomedical devices.
{"title":"Bioinspired Ionic Soft Actuator Based on Core-Shell-Structured Bacterial Cellulose Membrane","authors":"Fan Wang, Minghui Nan, Sunghoon Cho, Chang-sei Kim, Jong-Oh Park, Eunpyo Choi","doi":"10.1109/MARSS.2018.8481151","DOIUrl":"https://doi.org/10.1109/MARSS.2018.8481151","url":null,"abstract":"Bioinspired soft actuators have received burgeoning interest because of their applications in future electronic devices including soft robots, soft haptic devices, human-friendly flexible wearable devices, and biomedical robots. Here, a biofriendly soft actuator was newly designed based on core-shell-structured bacterial cellulose membrane, which was fabricated by homogeneously depositing polypyrrole nanoparticles on the surface of TEMPO-Oxidized bacterial cellulose (TOBC) nanofibers via a chemical polymerization method. The proposed soft actuator under both harmonic and step electrical inputs showed relatively large bending mechanical deformation, fast response time, and good long-term durability in air condition, which was due to the enhanced electrochemical properties of TOBC-Polypyrrole membrane, resulting from its highly porous structure and high conductivity. Therefore, the designed TOBC-Polypyrrole actuator can be a strong candidate for bioinspired actuating devices such as, soft and wearable electronics, and active biomedical devices.","PeriodicalId":118389,"journal":{"name":"2018 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS)","volume":"45 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132279383","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-07-01DOI: 10.1109/marss.2018.8481226
{"title":"[Copyright notice]","authors":"","doi":"10.1109/marss.2018.8481226","DOIUrl":"https://doi.org/10.1109/marss.2018.8481226","url":null,"abstract":"","PeriodicalId":118389,"journal":{"name":"2018 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130355584","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-07-01DOI: 10.1109/MARSS.2018.8481198
S. Pulnev, A. Chikiryaka, V. Nikolaev, A. Priadko
We report on further progress in design of miniature robots based on shape memory actuators. The distinguishing feature of the proposed design is the use of actuators based on single crystal shape memory alloy. Such actuators demonstrate record parameters for robotic applications due to anisotropy and low density of lattice defects. In contrast to actuators based on polycrystalline Ti-Ni alloy, Cu-Al-Ni single crystals exhibit a complete recovery of shape memory strain during cyclic operation and a wide operating temperature range. We developed a mathematical model of a linear actuator with a flexural force element based on Cu-Al-Ni shape memory crystals and present a design of robot using these actuators for object manipulation.
{"title":"Miniature Robot with Actuators Based on CU-AL-NI Shape Memory Single Crystals","authors":"S. Pulnev, A. Chikiryaka, V. Nikolaev, A. Priadko","doi":"10.1109/MARSS.2018.8481198","DOIUrl":"https://doi.org/10.1109/MARSS.2018.8481198","url":null,"abstract":"We report on further progress in design of miniature robots based on shape memory actuators. The distinguishing feature of the proposed design is the use of actuators based on single crystal shape memory alloy. Such actuators demonstrate record parameters for robotic applications due to anisotropy and low density of lattice defects. In contrast to actuators based on polycrystalline Ti-Ni alloy, Cu-Al-Ni single crystals exhibit a complete recovery of shape memory strain during cyclic operation and a wide operating temperature range. We developed a mathematical model of a linear actuator with a flexural force element based on Cu-Al-Ni shape memory crystals and present a design of robot using these actuators for object manipulation.","PeriodicalId":118389,"journal":{"name":"2018 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS)","volume":"55 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122126256","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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