Pub Date : 2018-07-01DOI: 10.1109/MARSS.2018.8481182
Ruoshi Zhang, Danming Wei, D. Popa
In this paper we present a new type of 3-dimensional microrobot, the Solid Articulated Four Axes Microrobot (sAFAM). This microrobot is an evolutionary improvement of a previous microrobot utilizing microassembly of out-of-plane compliant mechanical structures. The original AFAM was a microrobot driven by two coupled in-plane MEMS X-Y stages, through an epoxied cable to an out-of-plane assembled arm. In this paper, sAFAM was designed to replace the cable traction system with an unibody arm that can be assembled into the in-plane X-Y stages, which simplifies the assembly process complexity and improves the microrobot precision. The proposed structure was simulated with finite element analysis (FEA), resulting in a $22mu mtimes 47mu mtimes 18text{S}mu m$ workspace, appropriate concentration of stresses during actuation, and reduced motion coupling between the microrobot degrees of freedom. Fabrication and assembly processes are discussed and demonstrated experimentally, and results closely match simulations. sAFAM has the potential to be used as an assist $mathbf{micro}/mathbf{nano}$ manipulation tool in the scanning electron microscope (SEM) or the atomic force microscope (AFM).
本文提出了一种新型的三维微型机器人——固体铰接四轴微型机器人(sAFAM)。这种微型机器人是对先前的利用面外柔性机械结构的微装配的微型机器人的改进。最初的AFAM是一个微型机器人，由两个耦合的平面内MEMS X-Y级驱动，通过环氧化电缆连接到平面外组装臂。在本文中，sAFAM被设计成一个可以装配成平面内X-Y级的一体臂来取代电缆牵引系统，从而简化了装配过程的复杂性，提高了微型机器人的精度。采用有限元分析(FEA)对所提出的结构进行了仿真，得到了22 μ μ m × 47 μ μ m × 18 μ μ m的工作空间，在驱动过程中适当地集中了应力，减小了微机器人自由度之间的运动耦合。对制造和装配过程进行了讨论并进行了实验验证，结果与仿真结果非常吻合。sAFAM具有在扫描电子显微镜(SEM)或原子力显微镜(AFM)中用作辅助$mathbf{micro}/mathbf{nano}$操作工具的潜力。
{"title":"Design, Analysis and Fabrication of SAF AM, A 4 DOF Assembled Microrobot","authors":"Ruoshi Zhang, Danming Wei, D. Popa","doi":"10.1109/MARSS.2018.8481182","DOIUrl":"https://doi.org/10.1109/MARSS.2018.8481182","url":null,"abstract":"In this paper we present a new type of 3-dimensional microrobot, the Solid Articulated Four Axes Microrobot (sAFAM). This microrobot is an evolutionary improvement of a previous microrobot utilizing microassembly of out-of-plane compliant mechanical structures. The original AFAM was a microrobot driven by two coupled in-plane MEMS X-Y stages, through an epoxied cable to an out-of-plane assembled arm. In this paper, sAFAM was designed to replace the cable traction system with an unibody arm that can be assembled into the in-plane X-Y stages, which simplifies the assembly process complexity and improves the microrobot precision. The proposed structure was simulated with finite element analysis (FEA), resulting in a $22mu mtimes 47mu mtimes 18text{S}mu m$ workspace, appropriate concentration of stresses during actuation, and reduced motion coupling between the microrobot degrees of freedom. Fabrication and assembly processes are discussed and demonstrated experimentally, and results closely match simulations. sAFAM has the potential to be used as an assist $mathbf{micro}/mathbf{nano}$ manipulation tool in the scanning electron microscope (SEM) or the atomic force microscope (AFM).","PeriodicalId":118389,"journal":{"name":"2018 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS)","volume":"89 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121979070","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-07-01DOI: 10.1109/MARSS.2018.8481176
A. Hun, Mirte Freriks, L. Sasso, Peyman Mohajerin Esfahani, S. Hosseinnia
Ahstract- Today's mechatronics relies on conventional transducers, i.e. lumped sensors and actuators with rigid construction. Future consumer products, medical devices and manufacturing processes require sensing and actuation systems with high count and density of individual transducer units. Such systems can be addressed as distributed transducers. Building distributed sensing and actuation systems with conventional transducers is economically unaffordable, and an alternative solution is needed. In this work we propose and study a methodology to build such distributed sensor and actuator systems from soft bending smart material transducers. Individual transducer units can be separated from the planar material substrate by cutting and etching techniques, and transducer counts and densities are only limited by the available smart materials and equipment. In this study we use laser ablation techniques to separate individual transducer units from the ionic polymer-metal composite (IPMC) sheets, and produce translational actuation units on the bending material substrate. IPMCs are manufactured in-house, different bending structure geometries are studied, and four different designs of the em-scale translational platform units are realized and validated experimentally. The results demonstrate that it is possible to etch and cut a multitude of actuation units into planar bending smart material transducers, that bending actuation can be used to realize translation, and that the designs can be further miniaturized. Therefore, bending smart materials can be utilized to build monolithic distributed transducers.
{"title":"IPMC Kirigami: A Distributed Actuation Concept","authors":"A. Hun, Mirte Freriks, L. Sasso, Peyman Mohajerin Esfahani, S. Hosseinnia","doi":"10.1109/MARSS.2018.8481176","DOIUrl":"https://doi.org/10.1109/MARSS.2018.8481176","url":null,"abstract":"Ahstract- Today's mechatronics relies on conventional transducers, i.e. lumped sensors and actuators with rigid construction. Future consumer products, medical devices and manufacturing processes require sensing and actuation systems with high count and density of individual transducer units. Such systems can be addressed as distributed transducers. Building distributed sensing and actuation systems with conventional transducers is economically unaffordable, and an alternative solution is needed. In this work we propose and study a methodology to build such distributed sensor and actuator systems from soft bending smart material transducers. Individual transducer units can be separated from the planar material substrate by cutting and etching techniques, and transducer counts and densities are only limited by the available smart materials and equipment. In this study we use laser ablation techniques to separate individual transducer units from the ionic polymer-metal composite (IPMC) sheets, and produce translational actuation units on the bending material substrate. IPMCs are manufactured in-house, different bending structure geometries are studied, and four different designs of the em-scale translational platform units are realized and validated experimentally. The results demonstrate that it is possible to etch and cut a multitude of actuation units into planar bending smart material transducers, that bending actuation can be used to realize translation, and that the designs can be further miniaturized. Therefore, bending smart materials can be utilized to build monolithic distributed transducers.","PeriodicalId":118389,"journal":{"name":"2018 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS)","volume":"23 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122648501","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-07-01DOI: 10.1109/MARSS.2018.8481165
S. Moore, Michael G. Ruppert, Y. Yong
Ahstract- This article presents a novel cantilever design approach to place higher mode frequencies within a specific frequency band to alleviate instrumentation and Q control feasibility. This work is motivated by the emerging field of multifrequency atomic force microscopy (AFM) which involves the excitation and/or detection of several cantilever modes at once. Unlike other operating modes, multifrequency AFM allows the tracking of the sample topography on the fundamental mode while simultaneously acquiring complimentary nanomechanical information on a higher mode. However, higher modes of conventional rectangular tapping-mode cantilevers are usually in the MHz regime and therefore impose severe restrictions on the direct controllability of these modes. To overcome this limitation, an optimization technique is employed which is capable of placing the first five modes within a 200 kHz bandwidth.
{"title":"Arbitrary Placement of AFM Cantilever Higher Eigenmodes Using Structural Optimization","authors":"S. Moore, Michael G. Ruppert, Y. Yong","doi":"10.1109/MARSS.2018.8481165","DOIUrl":"https://doi.org/10.1109/MARSS.2018.8481165","url":null,"abstract":"Ahstract- This article presents a novel cantilever design approach to place higher mode frequencies within a specific frequency band to alleviate instrumentation and Q control feasibility. This work is motivated by the emerging field of multifrequency atomic force microscopy (AFM) which involves the excitation and/or detection of several cantilever modes at once. Unlike other operating modes, multifrequency AFM allows the tracking of the sample topography on the fundamental mode while simultaneously acquiring complimentary nanomechanical information on a higher mode. However, higher modes of conventional rectangular tapping-mode cantilevers are usually in the MHz regime and therefore impose severe restrictions on the direct controllability of these modes. To overcome this limitation, an optimization technique is employed which is capable of placing the first five modes within a 200 kHz bandwidth.","PeriodicalId":118389,"journal":{"name":"2018 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS)","volume":"126 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126276373","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-07-01DOI: 10.1109/MARSS.2018.8481143
Alireza Esfandbod, H. N. Pishkenari, A. Meghdari
In this article, we propose a three-dimensional model of a low-Reynolds-number swimmer that consists of three small spheres connected to a larger sphere via three perpendicular adjustable rods which enable the micro robot to swim along arbitrary trajectories. Then we focus on dynamic modelling of the swimmer and propose a control method to control the position of the micro swimmer in a low Reynolds number flow. The control aim intended in this article is that the middle sphere to follow a desired trajectory and respective simulation results from control indicates successful accomplishment in application.
{"title":"Dynamic Modelling and Control of a Sphere-Based Micro Robot with Adjustable Arm","authors":"Alireza Esfandbod, H. N. Pishkenari, A. Meghdari","doi":"10.1109/MARSS.2018.8481143","DOIUrl":"https://doi.org/10.1109/MARSS.2018.8481143","url":null,"abstract":"In this article, we propose a three-dimensional model of a low-Reynolds-number swimmer that consists of three small spheres connected to a larger sphere via three perpendicular adjustable rods which enable the micro robot to swim along arbitrary trajectories. Then we focus on dynamic modelling of the swimmer and propose a control method to control the position of the micro swimmer in a low Reynolds number flow. The control aim intended in this article is that the middle sphere to follow a desired trajectory and respective simulation results from control indicates successful accomplishment in application.","PeriodicalId":118389,"journal":{"name":"2018 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS)","volume":"92 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122233700","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-07-01DOI: 10.1109/MARSS.2018.8481164
A. El-etriby, A. Klingner, A. Tabak, I. Khalil
In this work, we demonstrate the ability of soft microrobotic sperms to manipulate non-magnetic microbeads in two-dimensional space. First, we model the interaction between the microrobotic sperm and microbeads using the resistive-force theory (RFT). This RFT-based model enables us to predict the maximum payload a soft microrobotic sperm can manipulate at different actuation frequencies. Second, we demonstrate manipulation of the microbeads using microrobotic sperm under the influence of controlled magnetic fields. Our teleoperation manipulation trials show that the microrobotic sperm swims at an average speeds of 0.16 and 0.035 body-Iength-per-second during collision-free locomotion and manipulation, respectively. In addition, the microrobotic sperm positions 2-microbead within the vicinity of a reference position with maximum steady-state error of $55 mu text{m}$.
在这项工作中，我们展示了软微型机器人精子在二维空间中操纵非磁性微珠的能力。首先，我们使用阻力理论(RFT)来模拟微型机器人精子和微珠之间的相互作用。这种基于rft的模型使我们能够预测软体微型机器人精子在不同驱动频率下可以操纵的最大有效载荷。其次，我们演示了在受控磁场的影响下使用微型机器人精子操纵微珠。我们的远程操作操作试验表明，在无碰撞的运动和操作中，微型精子的平均游泳速度分别为0.16和0.035体长/秒。此外，微机器人精子将2个微珠定位在参考位置附近，最大稳态误差为$55 mu text{m}$。
{"title":"Manipulation of Non-Magnetic Microbeads Using Soft Microrobotic Sperm","authors":"A. El-etriby, A. Klingner, A. Tabak, I. Khalil","doi":"10.1109/MARSS.2018.8481164","DOIUrl":"https://doi.org/10.1109/MARSS.2018.8481164","url":null,"abstract":"In this work, we demonstrate the ability of soft microrobotic sperms to manipulate non-magnetic microbeads in two-dimensional space. First, we model the interaction between the microrobotic sperm and microbeads using the resistive-force theory (RFT). This RFT-based model enables us to predict the maximum payload a soft microrobotic sperm can manipulate at different actuation frequencies. Second, we demonstrate manipulation of the microbeads using microrobotic sperm under the influence of controlled magnetic fields. Our teleoperation manipulation trials show that the microrobotic sperm swims at an average speeds of 0.16 and 0.035 body-Iength-per-second during collision-free locomotion and manipulation, respectively. In addition, the microrobotic sperm positions 2-microbead within the vicinity of a reference position with maximum steady-state error of $55 mu text{m}$.","PeriodicalId":118389,"journal":{"name":"2018 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS)","volume":"5 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132319216","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-07-01DOI: 10.1109/MARSS.2018.8481145
M. Cavaiani, S. Dehaeck, Y. Vitry, P. Lambert
Ahstract- This paper presents a capillary gripper able to pick and place sub-millimetric 1005 SMD components. It is manufactured by combining stereolithography for millimetric parts and two-photon lithography for smaller details. It is found that the similarity of resists used for both printers allows a good adherence between components. This combination allows innovative technical solutions for the capillary gripper design, such as a series of pillars of different lengths providing a novel release mechanism.
{"title":"Multi-Scale 3D Printed Capillary Gripper","authors":"M. Cavaiani, S. Dehaeck, Y. Vitry, P. Lambert","doi":"10.1109/MARSS.2018.8481145","DOIUrl":"https://doi.org/10.1109/MARSS.2018.8481145","url":null,"abstract":"Ahstract- This paper presents a capillary gripper able to pick and place sub-millimetric 1005 SMD components. It is manufactured by combining stereolithography for millimetric parts and two-photon lithography for smaller details. It is found that the similarity of resists used for both printers allows a good adherence between components. This combination allows innovative technical solutions for the capillary gripper design, such as a series of pillars of different lengths providing a novel release mechanism.","PeriodicalId":118389,"journal":{"name":"2018 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS)","volume":"54 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116456598","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-07-01DOI: 10.1109/MARSS.2018.8481186
Y. Haddab, Guillaume Aiche, Hussein Hussein, Mouna Ben Salem, P. Lutz, L. Rubbert, P. Renaud
The use of mechanical bistable structures in the design of microrobots and mesorobots has many advantages especially for flexible robotic structures. However, depending on the fabrication technology used, the adequacy of theoretical and experimental mechanical behaviors can vary widely. In this paper, we present the manufacturing results of bistable structures made with two extensively used contemporary technologies: MEMS and FDM additive manufacturing. Key issues of these fabrication technologies are discussed in the context of microrobotics and mesorobotics applications.
{"title":"Mechanical Bistable Structures for Microrobotics and Mesorobotics from Microfabrication to Additive Manufacturing","authors":"Y. Haddab, Guillaume Aiche, Hussein Hussein, Mouna Ben Salem, P. Lutz, L. Rubbert, P. Renaud","doi":"10.1109/MARSS.2018.8481186","DOIUrl":"https://doi.org/10.1109/MARSS.2018.8481186","url":null,"abstract":"The use of mechanical bistable structures in the design of microrobots and mesorobots has many advantages especially for flexible robotic structures. However, depending on the fabrication technology used, the adequacy of theoretical and experimental mechanical behaviors can vary widely. In this paper, we present the manufacturing results of bistable structures made with two extensively used contemporary technologies: MEMS and FDM additive manufacturing. Key issues of these fabrication technologies are discussed in the context of microrobotics and mesorobotics applications.","PeriodicalId":118389,"journal":{"name":"2018 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS)","volume":"251 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116760691","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
A novel design concept for buckling-induced mechanical metamaterials for energy dissipation is presented. A topology optimization formulation is proposed, where the force-displacement curves of the unit cells of the metamaterials are tailored to maximize the buckling-induced dissipated energy in a mass constraint. A two-phase algorithm is proposed to find the optimized result from a uniform initial guess. The optimized design has a larger amount of buckling-induced dissipated energy than the structural prototypes based on the designers' intuition.
{"title":"Topology Optimization of Metamaterials for Energy Dissipation","authors":"Qi Chen, Xianmin Zhang, Benliang Zhu, Hongchuan Zhang, Rixin Wang, Yanfeng Shi, Ling Xiong","doi":"10.1109/MARSS.2018.8481152","DOIUrl":"https://doi.org/10.1109/MARSS.2018.8481152","url":null,"abstract":"A novel design concept for buckling-induced mechanical metamaterials for energy dissipation is presented. A topology optimization formulation is proposed, where the force-displacement curves of the unit cells of the metamaterials are tailored to maximize the buckling-induced dissipated energy in a mass constraint. A two-phase algorithm is proposed to find the optimized result from a uniform initial guess. The optimized design has a larger amount of buckling-induced dissipated energy than the structural prototypes based on the designers' intuition.","PeriodicalId":118389,"journal":{"name":"2018 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS)","volume":"3 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130075927","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-07-01DOI: 10.1109/marss.2018.8481169
Byungjeon, Chang-Sei, Ja-young, 14, Kinnaert
Ahmad, Belal.
艾哈迈德，贝拉勒
{"title":"Author index - full papers","authors":"Byungjeon, Chang-Sei, Ja-young, 14, Kinnaert","doi":"10.1109/marss.2018.8481169","DOIUrl":"https://doi.org/10.1109/marss.2018.8481169","url":null,"abstract":"Ahmad, Belal.","PeriodicalId":118389,"journal":{"name":"2018 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS)","volume":"6 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128383636","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
The self-propulsion ability and transfering continuous surrounding chemical fuels into mechanical movement, makes chemical microbots be a promising autonomous device in environmental and biomedical engineering. At present, chemical propulsion principle and motion model have been well studied. To realize more sophisticated function, more interest are being focused on complex 3D design in microbots. Here, we demonstrate a 3D chemically catalytic microbot with effective driving and reliable magnetic-response ability. The standing microstructure is fabricated by 3D micro-printing and covered by Ni and Pt layer in sputtering deposition process. The coating Pt layer provides the unidirectional catalytic propelled power. Under external magnetics field, the microbots' moving direction could be changed easily. The speed of the 3D microbots can reach 450J.1m/s in hydrogen peroxide solution of 30% concentration. The chemical microbots prepared by 3D micro-printing technique pave a way for the future complex 3D microbots.
{"title":"Chemically Self-Propelled 3D-Printed Microbots","authors":"Dengfeng Li, Yanting Liu, Yuanyuan Yang, Yajing Shen","doi":"10.1109/MARSS.2018.8481228","DOIUrl":"https://doi.org/10.1109/MARSS.2018.8481228","url":null,"abstract":"The self-propulsion ability and transfering continuous surrounding chemical fuels into mechanical movement, makes chemical microbots be a promising autonomous device in environmental and biomedical engineering. At present, chemical propulsion principle and motion model have been well studied. To realize more sophisticated function, more interest are being focused on complex 3D design in microbots. Here, we demonstrate a 3D chemically catalytic microbot with effective driving and reliable magnetic-response ability. The standing microstructure is fabricated by 3D micro-printing and covered by Ni and Pt layer in sputtering deposition process. The coating Pt layer provides the unidirectional catalytic propelled power. Under external magnetics field, the microbots' moving direction could be changed easily. The speed of the 3D microbots can reach 450J.1m/s in hydrogen peroxide solution of 30% concentration. The chemical microbots prepared by 3D micro-printing technique pave a way for the future complex 3D microbots.","PeriodicalId":118389,"journal":{"name":"2018 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS)","volume":"154 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122922855","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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