Analysis of the in situ reflectance spectra during sputtering of gold allows for the characterization of different growth regimes throughout the deposition. The validity of this method is assessed and discussed.
{"title":"Optimizing the Deposition of Sputtered Gold Island Films with Time Derivative Surface Reflectance","authors":"A. Riera, B. Baloukas, O. Zabeida, L. Martinu","doi":"10.1364/OIC.2019.TA.9","DOIUrl":"https://doi.org/10.1364/OIC.2019.TA.9","url":null,"abstract":"Analysis of the in situ reflectance spectra during sputtering of gold allows for the characterization of different growth regimes throughout the deposition. The validity of this method is assessed and discussed.","PeriodicalId":119323,"journal":{"name":"Optical Interference Coatings Conference (OIC) 2019","volume":"15 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-06-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130352253","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
F. Delmotte, C. Burcklen, E. Meltchakov, R. Soufli, J. Rebellato, A. Jérôme, S. Rossi
We present recent advances in the development of Chromium-based interference coatings in the EUV/soft x-ray range. We achieved breakthroughs in coating efficiency by using advanced concepts including 3-material multilayers and interface engineering.
{"title":"Recent advances in Cr-based interference coatings for EUV and soft x-ray optics","authors":"F. Delmotte, C. Burcklen, E. Meltchakov, R. Soufli, J. Rebellato, A. Jérôme, S. Rossi","doi":"10.1364/OIC.2019.FB.1","DOIUrl":"https://doi.org/10.1364/OIC.2019.FB.1","url":null,"abstract":"We present recent advances in the development of Chromium-based interference coatings in the EUV/soft x-ray range. We achieved breakthroughs in coating efficiency by using advanced concepts including 3-material multilayers and interface engineering.","PeriodicalId":119323,"journal":{"name":"Optical Interference Coatings Conference (OIC) 2019","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-06-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130584844","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
SALSA instrument allows an ultimate metrology of transmittance, reflectance and scattering functions of high performance optical coatings in the visible & near infrared range. Accuracy of measurements emphasizes an excellent agreement with the models.
{"title":"Characterization of transmittance, reflectance, and optical scattering of high-performance interference filters in the visible and near-infrared spectral regions","authors":"M. Zerrad, M. Lequime, C. Amra","doi":"10.1364/OIC.2019.THD.1","DOIUrl":"https://doi.org/10.1364/OIC.2019.THD.1","url":null,"abstract":"SALSA instrument allows an ultimate metrology of transmittance, reflectance and scattering functions of high performance optical coatings in the visible & near infrared range. Accuracy of measurements emphasizes an excellent agreement with the models.","PeriodicalId":119323,"journal":{"name":"Optical Interference Coatings Conference (OIC) 2019","volume":"28 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-06-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131019431","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Equipping a magnetron sputter deposition system with an additional plasma source allows to improve surface roughness and film stress independent of the sputter parameters. This will be shown at the example of a HfO2/SiO2 UV mirror and of hydrogenated amorphous silicon.
{"title":"Improving film stress and surface roughness by using a plasma source in magnetron sputtering","authors":"S. S. Thöny, S. Gees, E. Schüngel","doi":"10.1364/OIC.2019.WC.4","DOIUrl":"https://doi.org/10.1364/OIC.2019.WC.4","url":null,"abstract":"Equipping a magnetron sputter deposition system with an additional plasma source allows to improve surface roughness and film stress independent of the sputter parameters. This will be shown at the example of a HfO2/SiO2 UV mirror and of hydrogenated amorphous silicon.","PeriodicalId":119323,"journal":{"name":"Optical Interference Coatings Conference (OIC) 2019","volume":"215 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-06-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123250575","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
New deep search needle optimization, gradual evolution, and design cleaner methods are proposed. Novel methods have an outstanding performance and allow obtaining solutions of the most challenging design problems from scratch.
{"title":"Design of Multilayer Coatings Using Deep Search Methods","authors":"M. Trubetskov","doi":"10.1364/OIC.2019.TC.2","DOIUrl":"https://doi.org/10.1364/OIC.2019.TC.2","url":null,"abstract":"New deep search needle optimization, gradual evolution, and design cleaner methods are proposed. Novel methods have an outstanding performance and allow obtaining solutions of the most challenging design problems from scratch.","PeriodicalId":119323,"journal":{"name":"Optical Interference Coatings Conference (OIC) 2019","volume":"82 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-06-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123800004","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
On reactive magnetron sputtering, we developed swinging rotation motion. It improves uniformities of thickness and incident angles of particles. The uniformities and the area size are easily adjustable with the range of the swinging motion.
{"title":"Improvement of uniformities of thickness and incident angles of particles by swinging rotation motion on reactive sputtering deposition","authors":"M. Akiba","doi":"10.1364/OIC.2019.WD.4","DOIUrl":"https://doi.org/10.1364/OIC.2019.WD.4","url":null,"abstract":"On reactive magnetron sputtering, we developed swinging rotation motion. It improves uniformities of thickness and incident angles of particles. The uniformities and the area size are easily adjustable with the range of the swinging motion.","PeriodicalId":119323,"journal":{"name":"Optical Interference Coatings Conference (OIC) 2019","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-06-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116289481","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Jinyan Wang, Jinlong Zhang, Hongfei Jiao, Cheng Xinbin, Wang Zhanshan
The Al mirror protected with a fluoride film was produced, and the effect of the annealing to the reflectance was investigated. It showed the reflectance >85% in the wavelength of 121.6nm has been achieved.
{"title":"The reflectance of the Al+MgF2 film in the Far-Ultraviolet","authors":"Jinyan Wang, Jinlong Zhang, Hongfei Jiao, Cheng Xinbin, Wang Zhanshan","doi":"10.1364/OIC.2019.FB.3","DOIUrl":"https://doi.org/10.1364/OIC.2019.FB.3","url":null,"abstract":"The Al mirror protected with a fluoride film was produced, and the effect of the annealing to the reflectance was investigated. It showed the reflectance >85% in the wavelength of 121.6nm has been achieved.","PeriodicalId":119323,"journal":{"name":"Optical Interference Coatings Conference (OIC) 2019","volume":"140 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-06-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116479340","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
A. Sytchkova, B. Baloukas, O. Zabeida, A. Piegari, J. Klemberg-Sapieha, M. Grilli, L. Martinu
The residual stress compensation of Si/SiO2 narrow-band filters for the mid-infrared range, composed of a combination of a Fabry-Perot and a blocking filter, is studied.
研究了由法布里-珀罗滤波器和阻塞滤波器组成的中红外Si/SiO2窄带滤波器的残余应力补偿。
{"title":"Mechanical and thermal properties of Si/SiO2 narrow-band mid-infrared filters for space applications","authors":"A. Sytchkova, B. Baloukas, O. Zabeida, A. Piegari, J. Klemberg-Sapieha, M. Grilli, L. Martinu","doi":"10.1364/OIC.2019.WB.3","DOIUrl":"https://doi.org/10.1364/OIC.2019.WB.3","url":null,"abstract":"The residual stress compensation of Si/SiO2 narrow-band filters for the mid-infrared range, composed of a combination of a Fabry-Perot and a blocking filter, is studied.","PeriodicalId":119323,"journal":{"name":"Optical Interference Coatings Conference (OIC) 2019","volume":"2014 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-06-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114771367","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Duan Weibo, Liu Baojian, Li Daqi, Yu Deming, Liu Dingquan
The effect of space atomic oxygen on the polarization contrast of polarization modulated mirrors is investigated with different experimental doses. The results are important to the long-term space engineering application of polarization modulated mirrors.
{"title":"Study on the Polarization Contrast of Polarization Modulated Mirror Affected by Simulated Space Atomic Oxygen","authors":"Duan Weibo, Liu Baojian, Li Daqi, Yu Deming, Liu Dingquan","doi":"10.1364/OIC.2019.MA.4","DOIUrl":"https://doi.org/10.1364/OIC.2019.MA.4","url":null,"abstract":"The effect of space atomic oxygen on the polarization contrast of polarization modulated mirrors is investigated with different experimental doses. The results are important to the long-term space engineering application of polarization modulated mirrors.","PeriodicalId":119323,"journal":{"name":"Optical Interference Coatings Conference (OIC) 2019","volume":"18 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-06-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125276700","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Plasma Assisted Pulsed DC Magnetron Sputtering (PAPMS) results in low loss, high performance optical coatings. Multi-layers using metals and metal-oxides demonstrate that this technology is suitable for volume production of complex high quality coatings.
{"title":"Volume Production of High Quality Optical Coatings by Plasma Assisted DC-Magnetron Sputtering (PAPMS)","authors":"R. Faber, R. Meagher","doi":"10.1364/OIC.2019.WB.6","DOIUrl":"https://doi.org/10.1364/OIC.2019.WB.6","url":null,"abstract":"Plasma Assisted Pulsed DC Magnetron Sputtering (PAPMS) results in low loss, high performance optical coatings. Multi-layers using metals and metal-oxides demonstrate that this technology is suitable for volume production of complex high quality coatings.","PeriodicalId":119323,"journal":{"name":"Optical Interference Coatings Conference (OIC) 2019","volume":"78 5 Pt 1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-06-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115045388","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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