H. Hagedorn, D. Arhilger, Jens-Peter Biethan, T. Hegemann, Martin Stapp
We discuss the coating industry needs for equipment for the past 45 Years. Recent developments for sensor application in consumer electronic products regarding direct coating of CMOS and glass wafer with interference filters are presented.
{"title":"Consumer Electronics Industry Demands on Optical Coatings and Equipment","authors":"H. Hagedorn, D. Arhilger, Jens-Peter Biethan, T. Hegemann, Martin Stapp","doi":"10.1364/OIC.2019.WB.1","DOIUrl":"https://doi.org/10.1364/OIC.2019.WB.1","url":null,"abstract":"We discuss the coating industry needs for equipment for the past 45 Years. Recent developments for sensor application in consumer electronic products regarding direct coating of CMOS and glass wafer with interference filters are presented.","PeriodicalId":119323,"journal":{"name":"Optical Interference Coatings Conference (OIC) 2019","volume":"14 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-06-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116682552","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Penghui Ma, A. Szeghalmi, U. Schulz, F. Rickelt, V. Beladiya, P. Zimmermann, Li Li
The design and fabrication results of single, low-ripples and broadband chirped mirrors with an integrated nano-porous layer using two different processes, atomic layer deposition and plasma etching, will be presented.
{"title":"Design and Fabrication of Single, Smooth and Broadband Chirped Mirrors with a Top Nano-Porous Layer","authors":"Penghui Ma, A. Szeghalmi, U. Schulz, F. Rickelt, V. Beladiya, P. Zimmermann, Li Li","doi":"10.1364/OIC.2019.THB.3","DOIUrl":"https://doi.org/10.1364/OIC.2019.THB.3","url":null,"abstract":"The design and fabrication results of single, low-ripples and broadband chirped mirrors with an integrated nano-porous layer using two different processes, atomic layer deposition and plasma etching, will be presented.","PeriodicalId":119323,"journal":{"name":"Optical Interference Coatings Conference (OIC) 2019","volume":"42 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-06-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117250423","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Xiangyu Lv, Kenji Masuyama, Y. Tsuno, Kei Yoshizawa, H. Murotani, S. Matsumoto
SiO2 optical thin films deposited by a combination coating method achieved a low refractive index and high durability.
采用复合镀膜方法制备的SiO2光学薄膜具有低折射率和高耐久性。
{"title":"Mechanical Properties of Low-Refractive-Index SiO2 Optical Films","authors":"Xiangyu Lv, Kenji Masuyama, Y. Tsuno, Kei Yoshizawa, H. Murotani, S. Matsumoto","doi":"10.1364/OIC.2019.THD.5","DOIUrl":"https://doi.org/10.1364/OIC.2019.THD.5","url":null,"abstract":"SiO2 optical thin films deposited by a combination coating method achieved a low refractive index and high durability.","PeriodicalId":119323,"journal":{"name":"Optical Interference Coatings Conference (OIC) 2019","volume":"8 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-06-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128352668","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
The patterning of optical filters to enable sensors dates back more than 50 years. Today this technology serves numerous aerospace, industrial, and consumer electronics applications. Recent developments include the commercial adoption of processes for patterning filters directly onto CMOS wafers and the expansion of applications into multispectral sensing and imaging.
{"title":"Progress in Patterned Filters for Optical Sensors","authors":"G. Ockenfuss, R. Sargent, F. V. Milligen","doi":"10.1364/OIC.2019.WA.1","DOIUrl":"https://doi.org/10.1364/OIC.2019.WA.1","url":null,"abstract":"The patterning of optical filters to enable sensors dates back more than 50 years. Today this technology serves numerous aerospace, industrial, and consumer electronics applications. Recent developments include the commercial adoption of processes for patterning filters directly onto CMOS wafers and the expansion of applications into multispectral sensing and imaging.","PeriodicalId":119323,"journal":{"name":"Optical Interference Coatings Conference (OIC) 2019","volume":"120 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-06-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122912854","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
A. Ghrib, Adrien Hérvy, F. Riguet, J. Wolfe, C. Couteret, R. Lhuillier, H. Leplan
The antireflection coating of the world’s largest fused silica lens is presented. The final coating exhibits more than 97% of averaged throughput for 300-1100nm spectral band. Coating has been performed with a qualified PVD process.
{"title":"Multi-dielectric broadband antireflection deposition on the world’s largest fused silica lens","authors":"A. Ghrib, Adrien Hérvy, F. Riguet, J. Wolfe, C. Couteret, R. Lhuillier, H. Leplan","doi":"10.1364/OIC.2019.MB.7","DOIUrl":"https://doi.org/10.1364/OIC.2019.MB.7","url":null,"abstract":"The antireflection coating of the world’s largest fused silica lens is presented. The final coating exhibits more than 97% of averaged throughput for 300-1100nm spectral band. Coating has been performed with a qualified PVD process.","PeriodicalId":119323,"journal":{"name":"Optical Interference Coatings Conference (OIC) 2019","volume":"14 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-06-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121218337","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
A. Moreau, T. Begou, F. Lemarchand, F. Lemarquis, K. Mathieu, et J. Lumeau
We perform a comparative study of the performances of thin-film bandpass filters fabricated using plasma assisted reactive magnetron sputtering and electron beam deposition. Design, fabrication and characterization of such filters are presented.
{"title":"Comparative study of bandpass filters manufactured by different deposition technologies","authors":"A. Moreau, T. Begou, F. Lemarchand, F. Lemarquis, K. Mathieu, et J. Lumeau","doi":"10.1364/OIC.2019.WB.7","DOIUrl":"https://doi.org/10.1364/OIC.2019.WB.7","url":null,"abstract":"We perform a comparative study of the performances of thin-film bandpass filters fabricated using plasma assisted reactive magnetron sputtering and electron beam deposition. Design, fabrication and characterization of such filters are presented.","PeriodicalId":119323,"journal":{"name":"Optical Interference Coatings Conference (OIC) 2019","volume":"38 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-06-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128455578","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Various optical filter applications each demand specific device performance. With the quest for better design optimization, the 1D-FDTD method was utilized to model optical filters. The model was verified and found to give accurate results.
{"title":"Numerical Modeling of Visible Electromagnetic Wave through Optical Filters using One-dimensional Finite-difference Time-domain (1D-FDTD) Method","authors":"Remalyn V. Fajardo, R. Sarmiento","doi":"10.1364/OIC.2019.TD.7","DOIUrl":"https://doi.org/10.1364/OIC.2019.TD.7","url":null,"abstract":"Various optical filter applications each demand specific device performance. With the quest for better design optimization, the 1D-FDTD method was utilized to model optical filters. The model was verified and found to give accurate results.","PeriodicalId":119323,"journal":{"name":"Optical Interference Coatings Conference (OIC) 2019","volume":"64 2 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-06-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116316624","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
M. Fazio, Lilly Quintana Barrera, A. Markosyan, R. Bassiri, M. Fejer, Carmen S. Menoniz
We present characterization of tantala films mixed with titania or scandia grown by reactive biased target deposition. The introduction of a dopant significantly affected the optical properties of the films and the crystallization temperature.
{"title":"Growth and characterization of mixed Ta2O5 thin films by reactive biased target deposition","authors":"M. Fazio, Lilly Quintana Barrera, A. Markosyan, R. Bassiri, M. Fejer, Carmen S. Menoniz","doi":"10.1364/OIC.2019.FA.5","DOIUrl":"https://doi.org/10.1364/OIC.2019.FA.5","url":null,"abstract":"We present characterization of tantala films mixed with titania or scandia grown by reactive biased target deposition. The introduction of a dopant significantly affected the optical properties of the films and the crystallization temperature.","PeriodicalId":119323,"journal":{"name":"Optical Interference Coatings Conference (OIC) 2019","volume":"22 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-06-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126146093","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
D. Gloess, U. Hartung, A. Drescher, P. Frach, H. Bartzsch
The upscaling of highly productive inline magnetron sputtering for precision optics and application examples like 1D and 2D lateral thickness gradients as well as laser mirrors will be presented.
将介绍用于精密光学的高效在线磁控溅射的升级和应用示例，如1D和2D横向厚度梯度以及激光反射镜。
{"title":"Freeform and Laser Optical Coatings by Inline Magnetron Sputtering","authors":"D. Gloess, U. Hartung, A. Drescher, P. Frach, H. Bartzsch","doi":"10.1364/OIC.2019.WB.2","DOIUrl":"https://doi.org/10.1364/OIC.2019.WB.2","url":null,"abstract":"The upscaling of highly productive inline magnetron sputtering for precision optics and application examples like 1D and 2D lateral thickness gradients as well as laser mirrors will be presented.","PeriodicalId":119323,"journal":{"name":"Optical Interference Coatings Conference (OIC) 2019","volume":"72 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-06-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127135886","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Thermochromic vanadium dioxide loaded into a polymer opal photonic crystal is studied through optical simulations. The possibility of using this material as flexible transparent energy efficient smart material is explored.
{"title":"VO2-polymer nanostructured coatings for smart windows: a numerical study","authors":"C. Péralle, R. Charrière, J. Faucheu","doi":"10.1364/OIC.2019.MC.6","DOIUrl":"https://doi.org/10.1364/OIC.2019.MC.6","url":null,"abstract":"Thermochromic vanadium dioxide loaded into a polymer opal photonic crystal is studied through optical simulations. The possibility of using this material as flexible transparent energy efficient smart material is explored.","PeriodicalId":119323,"journal":{"name":"Optical Interference Coatings Conference (OIC) 2019","volume":"26 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-06-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127286639","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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