Penghui Ma, A. Szeghalmi, U. Schulz, F. Rickelt, V. Beladiya, P. Zimmermann, Li Li
The design and fabrication results of single, low-ripples and broadband chirped mirrors with an integrated nano-porous layer using two different processes, atomic layer deposition and plasma etching, will be presented.
{"title":"Design and Fabrication of Single, Smooth and Broadband Chirped Mirrors with a Top Nano-Porous Layer","authors":"Penghui Ma, A. Szeghalmi, U. Schulz, F. Rickelt, V. Beladiya, P. Zimmermann, Li Li","doi":"10.1364/OIC.2019.THB.3","DOIUrl":"https://doi.org/10.1364/OIC.2019.THB.3","url":null,"abstract":"The design and fabrication results of single, low-ripples and broadband chirped mirrors with an integrated nano-porous layer using two different processes, atomic layer deposition and plasma etching, will be presented.","PeriodicalId":119323,"journal":{"name":"Optical Interference Coatings Conference (OIC) 2019","volume":"42 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-06-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117250423","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Phyo Lin, J. Randi, S. DeFrances, D. Bernot, J. Talghader
SiO2 nano-columnar films were fabricated using oblique angle deposition and characterized for their optical and mechanical properties. The films showed high damage thresholds, low scattering, and an intriguing transition to low stress at lower densities.
{"title":"High Power Properties of Low Density Nano-columnar SiO2 Films for All-Silica Mirrors","authors":"Phyo Lin, J. Randi, S. DeFrances, D. Bernot, J. Talghader","doi":"10.1364/OIC.2019.TD.3","DOIUrl":"https://doi.org/10.1364/OIC.2019.TD.3","url":null,"abstract":"SiO2 nano-columnar films were fabricated using oblique angle deposition and characterized for their optical and mechanical properties. The films showed high damage thresholds, low scattering, and an intriguing transition to low stress at lower densities.","PeriodicalId":119323,"journal":{"name":"Optical Interference Coatings Conference (OIC) 2019","volume":"183 5 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-06-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116424626","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
H. Hagedorn, D. Arhilger, Jens-Peter Biethan, T. Hegemann, Martin Stapp
We discuss the coating industry needs for equipment for the past 45 Years. Recent developments for sensor application in consumer electronic products regarding direct coating of CMOS and glass wafer with interference filters are presented.
{"title":"Consumer Electronics Industry Demands on Optical Coatings and Equipment","authors":"H. Hagedorn, D. Arhilger, Jens-Peter Biethan, T. Hegemann, Martin Stapp","doi":"10.1364/OIC.2019.WB.1","DOIUrl":"https://doi.org/10.1364/OIC.2019.WB.1","url":null,"abstract":"We discuss the coating industry needs for equipment for the past 45 Years. Recent developments for sensor application in consumer electronic products regarding direct coating of CMOS and glass wafer with interference filters are presented.","PeriodicalId":119323,"journal":{"name":"Optical Interference Coatings Conference (OIC) 2019","volume":"14 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-06-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116682552","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Quentin Ailloud, M. Zerrad, A. Moreau, J. Lumeau, C. Amra
We show how to control the wavelength variations of the polarization degree of a beam reflected by specific thin film depolarizers. The design, manufacturing and characterization of the depolarizing device is detailed.
{"title":"Optical coatings for a spectrally controlled depolarization","authors":"Quentin Ailloud, M. Zerrad, A. Moreau, J. Lumeau, C. Amra","doi":"10.1364/OIC.2019.MA.5","DOIUrl":"https://doi.org/10.1364/OIC.2019.MA.5","url":null,"abstract":"We show how to control the wavelength variations of the polarization degree of a beam reflected by specific thin film depolarizers. The design, manufacturing and characterization of the depolarizing device is detailed.","PeriodicalId":119323,"journal":{"name":"Optical Interference Coatings Conference (OIC) 2019","volume":"29 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-06-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115048442","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
B. Rubin, J. George, Sandeep Kohli, K. Godin, Riju Singhal, D. Deakins
Applications of monochromatic and broadband optical monitoring methods for deposition of different types of bandpass filters are considered. We demonstrate how optical monitoring system performance can be matched to filter specifications.
{"title":"Monochromatic and broadband optical monitoring for deposition of band pass filters","authors":"B. Rubin, J. George, Sandeep Kohli, K. Godin, Riju Singhal, D. Deakins","doi":"10.1364/OIC.2019.WA.10","DOIUrl":"https://doi.org/10.1364/OIC.2019.WA.10","url":null,"abstract":"Applications of monochromatic and broadband optical monitoring methods for deposition of different types of bandpass filters are considered. We demonstrate how optical monitoring system performance can be matched to filter specifications.","PeriodicalId":119323,"journal":{"name":"Optical Interference Coatings Conference (OIC) 2019","volume":"03 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-06-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123240389","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Xiangyu Lv, Kenji Masuyama, Y. Tsuno, Kei Yoshizawa, H. Murotani, S. Matsumoto
SiO2 optical thin films deposited by a combination coating method achieved a low refractive index and high durability.
采用复合镀膜方法制备的SiO2光学薄膜具有低折射率和高耐久性。
{"title":"Mechanical Properties of Low-Refractive-Index SiO2 Optical Films","authors":"Xiangyu Lv, Kenji Masuyama, Y. Tsuno, Kei Yoshizawa, H. Murotani, S. Matsumoto","doi":"10.1364/OIC.2019.THD.5","DOIUrl":"https://doi.org/10.1364/OIC.2019.THD.5","url":null,"abstract":"SiO2 optical thin films deposited by a combination coating method achieved a low refractive index and high durability.","PeriodicalId":119323,"journal":{"name":"Optical Interference Coatings Conference (OIC) 2019","volume":"8 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-06-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128352668","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
A spectrally-extended Abeles method was used for probing ALD deposited TiO2 films on native oxide/Si, whose AFM imaged nanotopology was approximately followed. Cauchy fitting to the experimental data was possible until ~1/10 quarterwave optical thickness.
{"title":"How thin an optical coating? The case of atomic layer deposited TiO2 on native oxide/Si","authors":"M. Pereira, G. R. Toniello, K. Souza, F. Horowitz","doi":"10.1364/OIC.2019.THC.9","DOIUrl":"https://doi.org/10.1364/OIC.2019.THC.9","url":null,"abstract":"A spectrally-extended Abeles method was used for probing ALD deposited TiO2 films on native oxide/Si, whose AFM imaged nanotopology was approximately followed. Cauchy fitting to the experimental data was possible until ~1/10 quarterwave optical thickness.","PeriodicalId":119323,"journal":{"name":"Optical Interference Coatings Conference (OIC) 2019","volume":"21 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-06-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117114759","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Xiaochuan Ji, Jinlong Zhang, Xinbin Cheng, Zhanshan Wang, I. Matvienko, T. Isaev, A. Tikhonravov
The paper investigates production of the multiband filter by broadband monitoring. A special 4-line filter was designed and the simulation demonstrated the layer thickness errors self-compensation effect that was quite significant.
{"title":"The Error Self-Compensation Effect in the Broadband Monitoring of Multiband Filters","authors":"Xiaochuan Ji, Jinlong Zhang, Xinbin Cheng, Zhanshan Wang, I. Matvienko, T. Isaev, A. Tikhonravov","doi":"10.1364/OIC.2019.WA.8","DOIUrl":"https://doi.org/10.1364/OIC.2019.WA.8","url":null,"abstract":"The paper investigates production of the multiband filter by broadband monitoring. A special 4-line filter was designed and the simulation demonstrated the layer thickness errors self-compensation effect that was quite significant.","PeriodicalId":119323,"journal":{"name":"Optical Interference Coatings Conference (OIC) 2019","volume":"98 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-06-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126088108","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
The stability of protected silver mirror coatings was studied by both long-exposure and a mixed-flowing-gas test with a goal of establishing accelerated testing parameters for Ag mirrors that are operated or stored in ambient conditions.
{"title":"Correlation of long-duration and accelerated testing of protected silver mirrors","authors":"C. Chu, D. Alaan, J. Barrie, P. Fuqua","doi":"10.1364/OIC.2019.MB.5","DOIUrl":"https://doi.org/10.1364/OIC.2019.MB.5","url":null,"abstract":"The stability of protected silver mirror coatings was studied by both long-exposure and a mixed-flowing-gas test with a goal of establishing accelerated testing parameters for Ag mirrors that are operated or stored in ambient conditions.","PeriodicalId":119323,"journal":{"name":"Optical Interference Coatings Conference (OIC) 2019","volume":"6 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-06-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126173304","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
The central wavelengths of narrowband thin-film filters shift when illuminated at oblique incidence. We discuss new analytical results for focused light from the aperture of a lens. The results are also applicable to tilted apertures.
{"title":"Focused light on thin-films revisited: analytical results for parallel and tilted apertures","authors":"T. Goossens, C. Hoof","doi":"10.1364/OIC.2019.TC.8","DOIUrl":"https://doi.org/10.1364/OIC.2019.TC.8","url":null,"abstract":"The central wavelengths of narrowband thin-film filters shift when illuminated at oblique incidence. We discuss new analytical results for focused light from the aperture of a lens. The results are also applicable to tilted apertures.","PeriodicalId":119323,"journal":{"name":"Optical Interference Coatings Conference (OIC) 2019","volume":"14 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-06-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127342864","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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