A spectrally-extended Abeles method was used for probing ALD deposited TiO2 films on native oxide/Si, whose AFM imaged nanotopology was approximately followed. Cauchy fitting to the experimental data was possible until ~1/10 quarterwave optical thickness.
{"title":"How thin an optical coating? The case of atomic layer deposited TiO2 on native oxide/Si","authors":"M. Pereira, G. R. Toniello, K. Souza, F. Horowitz","doi":"10.1364/OIC.2019.THC.9","DOIUrl":"https://doi.org/10.1364/OIC.2019.THC.9","url":null,"abstract":"A spectrally-extended Abeles method was used for probing ALD deposited TiO2 films on native oxide/Si, whose AFM imaged nanotopology was approximately followed. Cauchy fitting to the experimental data was possible until ~1/10 quarterwave optical thickness.","PeriodicalId":119323,"journal":{"name":"Optical Interference Coatings Conference (OIC) 2019","volume":"21 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-06-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117114759","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
O. Zabeida, W. Trottier-Lapointe, Erwens Broustet, L. Martinu
SiOCHF films deposited in a standard box coater fitted with a broad beam ion source demonstrate low refractive index combined with a relatively high hardness and elastic recovery values, making them attractive for use in ophthalmic applications.
{"title":"Fluorinated Hybrid Coatings Deposited by IBACVD","authors":"O. Zabeida, W. Trottier-Lapointe, Erwens Broustet, L. Martinu","doi":"10.1364/OIC.2019.MD.5","DOIUrl":"https://doi.org/10.1364/OIC.2019.MD.5","url":null,"abstract":"SiOCHF films deposited in a standard box coater fitted with a broad beam ion source demonstrate low refractive index combined with a relatively high hardness and elastic recovery values, making them attractive for use in ophthalmic applications.","PeriodicalId":119323,"journal":{"name":"Optical Interference Coatings Conference (OIC) 2019","volume":"102 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-06-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117293065","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
B. Rubin, J. George, Sandeep Kohli, K. Godin, Riju Singhal, D. Deakins
Applications of monochromatic and broadband optical monitoring methods for deposition of different types of bandpass filters are considered. We demonstrate how optical monitoring system performance can be matched to filter specifications.
{"title":"Monochromatic and broadband optical monitoring for deposition of band pass filters","authors":"B. Rubin, J. George, Sandeep Kohli, K. Godin, Riju Singhal, D. Deakins","doi":"10.1364/OIC.2019.WA.10","DOIUrl":"https://doi.org/10.1364/OIC.2019.WA.10","url":null,"abstract":"Applications of monochromatic and broadband optical monitoring methods for deposition of different types of bandpass filters are considered. We demonstrate how optical monitoring system performance can be matched to filter specifications.","PeriodicalId":119323,"journal":{"name":"Optical Interference Coatings Conference (OIC) 2019","volume":"03 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-06-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123240389","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
T. Ma, M. Miyauchi, S. Yin, T. Matsudaira, E. Nagae
High laser-induced damage threshold of 1064nm mirror prepared by the EPD system using SiO2/Ta2O5. The LIDT value obtained 303.5J/cm2 which is 4 times better than the 70.7J/cm2 result prepared by the conventional IAD equipment.
{"title":"High Laser-Induced Damage Threshold Mirrors Prepared by EPD","authors":"T. Ma, M. Miyauchi, S. Yin, T. Matsudaira, E. Nagae","doi":"10.1364/OIC.2019.THA.4","DOIUrl":"https://doi.org/10.1364/OIC.2019.THA.4","url":null,"abstract":"High laser-induced damage threshold of 1064nm mirror prepared by the EPD system using SiO2/Ta2O5. The LIDT value obtained 303.5J/cm2 which is 4 times better than the 70.7J/cm2 result prepared by the conventional IAD equipment.","PeriodicalId":119323,"journal":{"name":"Optical Interference Coatings Conference (OIC) 2019","volume":"20 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-06-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123010021","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
The stability of protected silver mirror coatings was studied by both long-exposure and a mixed-flowing-gas test with a goal of establishing accelerated testing parameters for Ag mirrors that are operated or stored in ambient conditions.
{"title":"Correlation of long-duration and accelerated testing of protected silver mirrors","authors":"C. Chu, D. Alaan, J. Barrie, P. Fuqua","doi":"10.1364/OIC.2019.MB.5","DOIUrl":"https://doi.org/10.1364/OIC.2019.MB.5","url":null,"abstract":"The stability of protected silver mirror coatings was studied by both long-exposure and a mixed-flowing-gas test with a goal of establishing accelerated testing parameters for Ag mirrors that are operated or stored in ambient conditions.","PeriodicalId":119323,"journal":{"name":"Optical Interference Coatings Conference (OIC) 2019","volume":"6 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-06-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126173304","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Phyo Lin, J. Randi, S. DeFrances, D. Bernot, J. Talghader
SiO2 nano-columnar films were fabricated using oblique angle deposition and characterized for their optical and mechanical properties. The films showed high damage thresholds, low scattering, and an intriguing transition to low stress at lower densities.
{"title":"High Power Properties of Low Density Nano-columnar SiO2 Films for All-Silica Mirrors","authors":"Phyo Lin, J. Randi, S. DeFrances, D. Bernot, J. Talghader","doi":"10.1364/OIC.2019.TD.3","DOIUrl":"https://doi.org/10.1364/OIC.2019.TD.3","url":null,"abstract":"SiO2 nano-columnar films were fabricated using oblique angle deposition and characterized for their optical and mechanical properties. The films showed high damage thresholds, low scattering, and an intriguing transition to low stress at lower densities.","PeriodicalId":119323,"journal":{"name":"Optical Interference Coatings Conference (OIC) 2019","volume":"183 5 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-06-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116424626","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
M. Jupé, T. Willemsen, Hao Liu, M. Steinecke, L. Jensen, D. Ristau
The application of novel quantized nanolaminates delivers more flexible application and allows to optimize the properties. In the paper, the manufacturing of nanolaminates using different deposition techniques and material combinations are discussed.
{"title":"Manufacturing of Quantized Nanolaminates","authors":"M. Jupé, T. Willemsen, Hao Liu, M. Steinecke, L. Jensen, D. Ristau","doi":"10.1364/OIC.2019.TB.4","DOIUrl":"https://doi.org/10.1364/OIC.2019.TB.4","url":null,"abstract":"The application of novel quantized nanolaminates delivers more flexible application and allows to optimize the properties. In the paper, the manufacturing of nanolaminates using different deposition techniques and material combinations are discussed.","PeriodicalId":119323,"journal":{"name":"Optical Interference Coatings Conference (OIC) 2019","volume":"3 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-06-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125712577","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Xiaochuan Ji, Jinlong Zhang, Xinbin Cheng, Zhanshan Wang, I. Matvienko, T. Isaev, A. Tikhonravov
The paper investigates production of the multiband filter by broadband monitoring. A special 4-line filter was designed and the simulation demonstrated the layer thickness errors self-compensation effect that was quite significant.
{"title":"The Error Self-Compensation Effect in the Broadband Monitoring of Multiband Filters","authors":"Xiaochuan Ji, Jinlong Zhang, Xinbin Cheng, Zhanshan Wang, I. Matvienko, T. Isaev, A. Tikhonravov","doi":"10.1364/OIC.2019.WA.8","DOIUrl":"https://doi.org/10.1364/OIC.2019.WA.8","url":null,"abstract":"The paper investigates production of the multiband filter by broadband monitoring. A special 4-line filter was designed and the simulation demonstrated the layer thickness errors self-compensation effect that was quite significant.","PeriodicalId":119323,"journal":{"name":"Optical Interference Coatings Conference (OIC) 2019","volume":"98 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-06-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126088108","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
E. Randel, A. Davenport, A. Markosyan, R. Bassiri, M. Fejer, C. Menoni
Ion beam sputtered films typically have high compressive stress. By using high energy primary ions to sputter a SiO2 target and high energy ions from an assist source with an O2 plasma the compressive stress of SiO2 can be significantly reduced down to 62MPa.
{"title":"Ultra-low Stress SiO2 Ion Beam Deposition Coatings","authors":"E. Randel, A. Davenport, A. Markosyan, R. Bassiri, M. Fejer, C. Menoni","doi":"10.1364/OIC.2019.WC.5","DOIUrl":"https://doi.org/10.1364/OIC.2019.WC.5","url":null,"abstract":"Ion beam sputtered films typically have high compressive stress. By using high energy primary ions to sputter a SiO2 target and high energy ions from an assist source with an O2 plasma the compressive stress of SiO2 can be significantly reduced down to 62MPa.","PeriodicalId":119323,"journal":{"name":"Optical Interference Coatings Conference (OIC) 2019","volume":"26 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-06-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124317192","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
The central wavelengths of narrowband thin-film filters shift when illuminated at oblique incidence. We discuss new analytical results for focused light from the aperture of a lens. The results are also applicable to tilted apertures.
{"title":"Focused light on thin-films revisited: analytical results for parallel and tilted apertures","authors":"T. Goossens, C. Hoof","doi":"10.1364/OIC.2019.TC.8","DOIUrl":"https://doi.org/10.1364/OIC.2019.TC.8","url":null,"abstract":"The central wavelengths of narrowband thin-film filters shift when illuminated at oblique incidence. We discuss new analytical results for focused light from the aperture of a lens. The results are also applicable to tilted apertures.","PeriodicalId":119323,"journal":{"name":"Optical Interference Coatings Conference (OIC) 2019","volume":"14 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-06-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127342864","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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