Pub Date : 2022-10-30DOI: 10.1109/SENSORS52175.2022.9967356
Behnoush Rostami, K. Najafi
We present a new fabrication technique that provides a repeatable, uniform, and time-saving method for exposing and metallizing tip electrodes in out-of-plane neural probe arrays. In order to form active electrode sites for neural recording or stimulation, the insulation layers covering the electrodes must be selectively removed. In this process, an electroplated photoresist (EP) is used to conformally coat three-dimensional (3D) insulated silicon needles, followed by exposure and development of the resist. The resist is then used as a mask layer to remove insulation layers only around the tip of the needles. EP has several advantages as a masking layer, including uniform coverage, low deposition temperature, wide thickness range, chemical stability, and easy removal. We have used this method to de-insulate the tips of 0.5-1.5 mm long, $20 mumathrm{m}$-diameter silicon needles in a 3D neural recording array. We have simulated the electroplating process on these arrays using COMSOL to determine the feasibility of the technology.
我们提出了一种新的制造技术，为面外神经探针阵列的尖端电极的暴露和金属化提供了一种可重复、均匀和节省时间的方法。为了形成用于神经记录或刺激的活性电极位点，必须选择性地去除覆盖电极的绝缘层。在这个过程中，电镀光刻胶(EP)被用于三维(3D)绝缘硅针的保形涂层，然后曝光和显影光刻胶。然后将抗蚀剂用作掩膜层，仅去除针尖周围的绝缘层。EP作为掩蔽层具有覆盖均匀、沉积温度低、厚度范围宽、化学稳定性好、易于去除等优点。我们已经使用这种方法在3D神经记录阵列中对0.5-1.5 mm长，$20 mu mathm {m}$直径的硅针的尖端进行了去绝缘处理。我们使用COMSOL模拟了这些阵列的电镀过程，以确定该技术的可行性。
{"title":"Forming Tip Electrodes on 3D Neural Probe Arrays Using Electroplated Photoresist","authors":"Behnoush Rostami, K. Najafi","doi":"10.1109/SENSORS52175.2022.9967356","DOIUrl":"https://doi.org/10.1109/SENSORS52175.2022.9967356","url":null,"abstract":"We present a new fabrication technique that provides a repeatable, uniform, and time-saving method for exposing and metallizing tip electrodes in out-of-plane neural probe arrays. In order to form active electrode sites for neural recording or stimulation, the insulation layers covering the electrodes must be selectively removed. In this process, an electroplated photoresist (EP) is used to conformally coat three-dimensional (3D) insulated silicon needles, followed by exposure and development of the resist. The resist is then used as a mask layer to remove insulation layers only around the tip of the needles. EP has several advantages as a masking layer, including uniform coverage, low deposition temperature, wide thickness range, chemical stability, and easy removal. We have used this method to de-insulate the tips of 0.5-1.5 mm long, $20 mumathrm{m}$-diameter silicon needles in a 3D neural recording array. We have simulated the electroplating process on these arrays using COMSOL to determine the feasibility of the technology.","PeriodicalId":120357,"journal":{"name":"2022 IEEE Sensors","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-10-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129646373","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2022-10-30DOI: 10.1109/SENSORS52175.2022.9967118
H. Doi, T. Horio, Bijay Parajuli, E. Shigetomi, Youichi Shinozaki, Yong-Joon Choi, T. Hattori, Kazuhiro Takahashi, T. Noda, S. Koizumi, K. Sawada
Because extracellular potassium ion $([mathbf{K}^{+}]_{mathbf{o}})$ plays an important role in the regulation of the physiological and pathophysiological activity of neurons, the imaging of $[mathbf{K}^{+}]_{mathbf{O}}$ dynamics and its spatiotemporal analysis is crucial for understanding brain function. Toward the high spatiotemporal imaging of $[mathbf{K}^{+}]_{mathbf{o}}$ dynamics in the brain, we fabricated a $23.55-mu mathrm{m}$ -pitch and $128times 128$ -pixel label-free $mathbf{K}^{+}$ image sensor, in which different thicknesses were deposited by controlling the volume of the polyvinyl chloride (PVC) membrane solution, and the detection performance was investigated. In the investigation of the characteristics of K+ measurement with sensors of different thicknesses, the sensors whose film thickness was decreased 9 $mumathrm{m}$ exhibited superior K+ sensitivity with reasonable selectivity. When acutely sliced mouse hippocampus was stimulated with glutamate on the K+ ionophore-immobilized sensor, the output signal was increased in the hippocampal CAl, CA3, and DG regions, but no signal was observed when the slice was stimulated on a sensor without K+ ionophore. Additionally, the spatiotemporal resolution of output images obtained from the $9-mu mathrm{m}$ thick sensor was higher than those from the $108-mu mathrm{m}$ thick sensor. Taken together, we succeeded in the real-time imaging of $[mathbf{K}^{+}]_{mathbf{o}}$ from the acute mouse hippocampal slices, and demonstrated for the first time that membrane thickness significantly affects the spatial resolution of $[mathbf{K}^{+}]_{mathbf{o}}$ dynamics.
{"title":"Development of PVC membrane-based label-free K+ image sensor and imaging extracellular K+ dynamics in brain tissue","authors":"H. Doi, T. Horio, Bijay Parajuli, E. Shigetomi, Youichi Shinozaki, Yong-Joon Choi, T. Hattori, Kazuhiro Takahashi, T. Noda, S. Koizumi, K. Sawada","doi":"10.1109/SENSORS52175.2022.9967118","DOIUrl":"https://doi.org/10.1109/SENSORS52175.2022.9967118","url":null,"abstract":"Because extracellular potassium ion $([mathbf{K}^{+}]_{mathbf{o}})$ plays an important role in the regulation of the physiological and pathophysiological activity of neurons, the imaging of $[mathbf{K}^{+}]_{mathbf{O}}$ dynamics and its spatiotemporal analysis is crucial for understanding brain function. Toward the high spatiotemporal imaging of $[mathbf{K}^{+}]_{mathbf{o}}$ dynamics in the brain, we fabricated a $23.55-mu mathrm{m}$ -pitch and $128times 128$ -pixel label-free $mathbf{K}^{+}$ image sensor, in which different thicknesses were deposited by controlling the volume of the polyvinyl chloride (PVC) membrane solution, and the detection performance was investigated. In the investigation of the characteristics of K+ measurement with sensors of different thicknesses, the sensors whose film thickness was decreased 9 $mumathrm{m}$ exhibited superior K+ sensitivity with reasonable selectivity. When acutely sliced mouse hippocampus was stimulated with glutamate on the K+ ionophore-immobilized sensor, the output signal was increased in the hippocampal CAl, CA3, and DG regions, but no signal was observed when the slice was stimulated on a sensor without K+ ionophore. Additionally, the spatiotemporal resolution of output images obtained from the $9-mu mathrm{m}$ thick sensor was higher than those from the $108-mu mathrm{m}$ thick sensor. Taken together, we succeeded in the real-time imaging of $[mathbf{K}^{+}]_{mathbf{o}}$ from the acute mouse hippocampal slices, and demonstrated for the first time that membrane thickness significantly affects the spatial resolution of $[mathbf{K}^{+}]_{mathbf{o}}$ dynamics.","PeriodicalId":120357,"journal":{"name":"2022 IEEE Sensors","volume":"70 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-10-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131151160","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2022-10-30DOI: 10.1109/SENSORS52175.2022.9967070
Ciao-Ming Tsai, Chitsung Hong, W. Kong, Wei-Huai Chiu, Cheng-Hao Ko, W. Fang
Since the coronavirus disease 2019 occurred, the lateral flow immunoassay (LFIA) test strip has become a global testing tool for convenience and low cost. However, some studies have shown that LFIA strips perform poorly compared to other professional testing methods. This paper proposes a new method to improve the accuracy of LFIA strips using spectral signals. A spectrochip module is applied to disperse the reflected light from the LFIA strips. The obtained spectral signals will be used for supervised machine learning. After training, the trained model has 93.8% accuracy compared to the standard test. This result indicated that the evaluation method based on the spectrum of LFIA strips could enhance the detection performance.
{"title":"Detection of Antibodies for COVID-19 from Reflectance Spectrum Using Supervised Machine Learning","authors":"Ciao-Ming Tsai, Chitsung Hong, W. Kong, Wei-Huai Chiu, Cheng-Hao Ko, W. Fang","doi":"10.1109/SENSORS52175.2022.9967070","DOIUrl":"https://doi.org/10.1109/SENSORS52175.2022.9967070","url":null,"abstract":"Since the coronavirus disease 2019 occurred, the lateral flow immunoassay (LFIA) test strip has become a global testing tool for convenience and low cost. However, some studies have shown that LFIA strips perform poorly compared to other professional testing methods. This paper proposes a new method to improve the accuracy of LFIA strips using spectral signals. A spectrochip module is applied to disperse the reflected light from the LFIA strips. The obtained spectral signals will be used for supervised machine learning. After training, the trained model has 93.8% accuracy compared to the standard test. This result indicated that the evaluation method based on the spectrum of LFIA strips could enhance the detection performance.","PeriodicalId":120357,"journal":{"name":"2022 IEEE Sensors","volume":"2016 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-10-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125646825","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2022-10-30DOI: 10.1109/SENSORS52175.2022.9967151
Ryotaro Kawahara, T. Kawamoto
We propose an electric-leakage detection system for remote monitoring of street fixtures, such as streetlights. The electric-leakage phenomena caused by the aging of underground power lines can be hazardous. Since various street fixtures are installed at a wide variety of locations, there is a need for a detection system that is easy to install and applicable to multiple fixtures. The proposed system consists of a non-contact electric-field sensor and method of calculating the electric-leakage voltage. The sensor measures the degree of the object voltage without any Ohmic contact by measuring the electric-field strength radiated from the fixture, making the sensor easy to install. However, even fixtures in the same hazardous will radiate different electric-fields since their structures differ. The finite element method simulation is conducted to determine the conversion factor related to the structure of a fixture. A streetlight, which is particularly prone to leakage, was modeled as a cylindrical metal pole, then the conversion factor was calculated with respect to the radius and height of the sensor. From a pseudo-electric-leakage detection experiment using prototypes of the sensor, a linear response of 93% accuracy was obtained for an applied voltage of 0-10 V.
{"title":"Electric-Leakage Detection System based on Non-contact Electric-field Sensor for Remote Street Fixture Monitoring","authors":"Ryotaro Kawahara, T. Kawamoto","doi":"10.1109/SENSORS52175.2022.9967151","DOIUrl":"https://doi.org/10.1109/SENSORS52175.2022.9967151","url":null,"abstract":"We propose an electric-leakage detection system for remote monitoring of street fixtures, such as streetlights. The electric-leakage phenomena caused by the aging of underground power lines can be hazardous. Since various street fixtures are installed at a wide variety of locations, there is a need for a detection system that is easy to install and applicable to multiple fixtures. The proposed system consists of a non-contact electric-field sensor and method of calculating the electric-leakage voltage. The sensor measures the degree of the object voltage without any Ohmic contact by measuring the electric-field strength radiated from the fixture, making the sensor easy to install. However, even fixtures in the same hazardous will radiate different electric-fields since their structures differ. The finite element method simulation is conducted to determine the conversion factor related to the structure of a fixture. A streetlight, which is particularly prone to leakage, was modeled as a cylindrical metal pole, then the conversion factor was calculated with respect to the radius and height of the sensor. From a pseudo-electric-leakage detection experiment using prototypes of the sensor, a linear response of 93% accuracy was obtained for an applied voltage of 0-10 V.","PeriodicalId":120357,"journal":{"name":"2022 IEEE Sensors","volume":"9 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-10-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126394276","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2022-10-30DOI: 10.1109/SENSORS52175.2022.9967143
Kazutaka Sato, Shuichi Morizane, Atsushi Takenaka, M. Ueki, T. Matsunaga, Sang-seok Lee
The purpose of this study is to realize the grasp force measurement of forceps for minimally invasive surgical robots. The minimally invasive surgical robots currently in widespread use limit the direct sensation of the surgeon, and require a high level of control skills and proficiency to use. To solve those problems, the grasping force sensing of the robotic forceps is needed. However, considering the practical aspects such as miniaturization and productivity, it is not easy to attach the conventional force sensor to the robotic forceps. In this study, we propose a novel grasping force sensing method using optical interference between ultra-thin optical fibers. We demonstrate the working principle of the grasp sensor through the sensor fabrication and evaluation.
{"title":"An Optical Grasping Force Sensor for Minimally Invasive Surgical Robotic Forceps","authors":"Kazutaka Sato, Shuichi Morizane, Atsushi Takenaka, M. Ueki, T. Matsunaga, Sang-seok Lee","doi":"10.1109/SENSORS52175.2022.9967143","DOIUrl":"https://doi.org/10.1109/SENSORS52175.2022.9967143","url":null,"abstract":"The purpose of this study is to realize the grasp force measurement of forceps for minimally invasive surgical robots. The minimally invasive surgical robots currently in widespread use limit the direct sensation of the surgeon, and require a high level of control skills and proficiency to use. To solve those problems, the grasping force sensing of the robotic forceps is needed. However, considering the practical aspects such as miniaturization and productivity, it is not easy to attach the conventional force sensor to the robotic forceps. In this study, we propose a novel grasping force sensing method using optical interference between ultra-thin optical fibers. We demonstrate the working principle of the grasp sensor through the sensor fabrication and evaluation.","PeriodicalId":120357,"journal":{"name":"2022 IEEE Sensors","volume":"36 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-10-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126652848","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2022-10-30DOI: 10.1109/SENSORS52175.2022.9967280
H. Emani, V. Palaniappan, D. Maddipatla, B. Bazuin, Qingliu Wu, M. Atashbar
A flexible anode was developed with 2D material MXenes (Ti3C2Tx) which gained attention recently as energy storage materials. MXenes were synthesized using Lewis acidic etching process from MAX phase powder (Ti3SiC2) and molten salts such as copper chloride (CuCl2), sodium chloride (NaCl) and potassium chloride (KCl). The synthesized MXenes when used as anode material were able to deliver a specific capacity close to 300 mAh/g at 0.1C. Laser patterning was added to the fabrication process to introduce secondary pore networks (SPN's) with pore diameter of $61 mumathrm{m}$ and edge-to-edge distance of $67 mumathrm{m}$ into the electrode. Electrochemical performance was evaluated for bar-coated, and laser patterned electrodes inside a CR 2032 half coin-cell with ethylene carbonate and diethyl carbonate (EC: DEC) in 50/50 (v/v) mixed in 1.0M lithium hexafluorophosphate (LiPF6) as electrolyte. Cells with laser patterning showed superior performance at high C-rates such as 2C and 4C with specific capacities of 229 mAh/g and 202 mAh/g.
{"title":"Novel Laser Patterned MXene Based Anodes For High Capacity Fast Charging Li-Ion Batteries","authors":"H. Emani, V. Palaniappan, D. Maddipatla, B. Bazuin, Qingliu Wu, M. Atashbar","doi":"10.1109/SENSORS52175.2022.9967280","DOIUrl":"https://doi.org/10.1109/SENSORS52175.2022.9967280","url":null,"abstract":"A flexible anode was developed with 2D material MXenes (Ti3C2Tx) which gained attention recently as energy storage materials. MXenes were synthesized using Lewis acidic etching process from MAX phase powder (Ti3SiC2) and molten salts such as copper chloride (CuCl2), sodium chloride (NaCl) and potassium chloride (KCl). The synthesized MXenes when used as anode material were able to deliver a specific capacity close to 300 mAh/g at 0.1C. Laser patterning was added to the fabrication process to introduce secondary pore networks (SPN's) with pore diameter of $61 mumathrm{m}$ and edge-to-edge distance of $67 mumathrm{m}$ into the electrode. Electrochemical performance was evaluated for bar-coated, and laser patterned electrodes inside a CR 2032 half coin-cell with ethylene carbonate and diethyl carbonate (EC: DEC) in 50/50 (v/v) mixed in 1.0M lithium hexafluorophosphate (LiPF6) as electrolyte. Cells with laser patterning showed superior performance at high C-rates such as 2C and 4C with specific capacities of 229 mAh/g and 202 mAh/g.","PeriodicalId":120357,"journal":{"name":"2022 IEEE Sensors","volume":"33 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-10-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125839385","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2022-10-30DOI: 10.1109/SENSORS52175.2022.9967200
Visva Moorthy, P. Kassanos, E. Burdet, E. Yeatman
The rapidly growing field of stretchable sensors has recently produced a myriad of sensing devices. However, these are often realized using expensive materials and complex manufacturing techniques. This work demonstrates stretchable stencil printed strain sensors, fabricated using either graphite or carbon black as a conductive filler in a polydimethylsiloxane (PDMS) matrix, that was also used as the device substrate. The strain sensors demonstrated highly linear responses and sensitivities (R2 = 0.95 and R2 = 0.98, and gauge factors of 2.77 and 1.50, respectively) that are comparable to other published sensors manufactured using similar or more complex processes.
{"title":"Stencil Printing of Low-Cost Carbon-Based Stretchable Strain Sensors","authors":"Visva Moorthy, P. Kassanos, E. Burdet, E. Yeatman","doi":"10.1109/SENSORS52175.2022.9967200","DOIUrl":"https://doi.org/10.1109/SENSORS52175.2022.9967200","url":null,"abstract":"The rapidly growing field of stretchable sensors has recently produced a myriad of sensing devices. However, these are often realized using expensive materials and complex manufacturing techniques. This work demonstrates stretchable stencil printed strain sensors, fabricated using either graphite or carbon black as a conductive filler in a polydimethylsiloxane (PDMS) matrix, that was also used as the device substrate. The strain sensors demonstrated highly linear responses and sensitivities (R2 = 0.95 and R2 = 0.98, and gauge factors of 2.77 and 1.50, respectively) that are comparable to other published sensors manufactured using similar or more complex processes.","PeriodicalId":120357,"journal":{"name":"2022 IEEE Sensors","volume":"30 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-10-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126699687","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2022-10-30DOI: 10.1109/SENSORS52175.2022.9967109
Mizuki Odaira, Yukihiro Tatsumi, Kensuke Murakami, Ken Ogasahara, Satoshi Shimizu, Yong-Joon Choi, Kazuhiro Takahashi, T. Noda, K. Sawada
In this study, we propose a pressure-ion image sensor that can simultaneously measure pressure and ion distribution with a patterned piezoelectric film on a pH image sensor. By patterning using photolithography and lift-off, a structure with alternating pressure and pH sensing areas was achieved, and the fabricated pressure-ion image sensor successfully visualized pH and pressure distribution simultaneously.
{"title":"Fabrication of Multimodal Image Sensor Capable of Simultaneous Measurement of Pressure and pH","authors":"Mizuki Odaira, Yukihiro Tatsumi, Kensuke Murakami, Ken Ogasahara, Satoshi Shimizu, Yong-Joon Choi, Kazuhiro Takahashi, T. Noda, K. Sawada","doi":"10.1109/SENSORS52175.2022.9967109","DOIUrl":"https://doi.org/10.1109/SENSORS52175.2022.9967109","url":null,"abstract":"In this study, we propose a pressure-ion image sensor that can simultaneously measure pressure and ion distribution with a patterned piezoelectric film on a pH image sensor. By patterning using photolithography and lift-off, a structure with alternating pressure and pH sensing areas was achieved, and the fabricated pressure-ion image sensor successfully visualized pH and pressure distribution simultaneously.","PeriodicalId":120357,"journal":{"name":"2022 IEEE Sensors","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-10-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121166433","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2022-10-30DOI: 10.1109/SENSORS52175.2022.9967303
Muhammad Izzudin Ahmad Asri, Mohammed Nazibul Hasan, Y. M. Yunos, Marwan Nafea, Mohamed Sultan Mohamed Ali
Surface acoustic wave (SAW) gas sensors with a nanostructured material-based sensing layer are highly desirable in microelectromechanical systems (MEMS) gas sensors to achieve improved sensitivity, time response, and recovery time. Herein, a novel SAW gas sensor with a nanostructured silicon (Si)-based sensing layer was developed. Finite element analysis was employed to determine the dimensions of the sensing material. Moreover, a SAW sensor with a four-pair input/output aluminium interdigital transducer (IDT) was fabricated and tested with carbon dioxide gas (CO2), with a concentration in the range of 500–2000 ppm. The results reveal that an Si nanostructure produces better sensitivity, and faster response and recovery time, compared to a layered Si-based SAW sensor. At 2000 ppm, a frequency shift of 4.62 kHz was recorded, while the time response and recovery time of 31 s and 40.5 s was reported, respectively. The proposed Si nanostructure as the sensing layer for the SAW gas sensor demonstrated significant performance with higher sensitivity than previously reported devices, and has the potential to act as a next generation MEMS SAW gas sensor.
{"title":"Silicon Nanostructure based Surface Acoustic Wave Gas Sensor","authors":"Muhammad Izzudin Ahmad Asri, Mohammed Nazibul Hasan, Y. M. Yunos, Marwan Nafea, Mohamed Sultan Mohamed Ali","doi":"10.1109/SENSORS52175.2022.9967303","DOIUrl":"https://doi.org/10.1109/SENSORS52175.2022.9967303","url":null,"abstract":"Surface acoustic wave (SAW) gas sensors with a nanostructured material-based sensing layer are highly desirable in microelectromechanical systems (MEMS) gas sensors to achieve improved sensitivity, time response, and recovery time. Herein, a novel SAW gas sensor with a nanostructured silicon (Si)-based sensing layer was developed. Finite element analysis was employed to determine the dimensions of the sensing material. Moreover, a SAW sensor with a four-pair input/output aluminium interdigital transducer (IDT) was fabricated and tested with carbon dioxide gas (CO2), with a concentration in the range of 500–2000 ppm. The results reveal that an Si nanostructure produces better sensitivity, and faster response and recovery time, compared to a layered Si-based SAW sensor. At 2000 ppm, a frequency shift of 4.62 kHz was recorded, while the time response and recovery time of 31 s and 40.5 s was reported, respectively. The proposed Si nanostructure as the sensing layer for the SAW gas sensor demonstrated significant performance with higher sensitivity than previously reported devices, and has the potential to act as a next generation MEMS SAW gas sensor.","PeriodicalId":120357,"journal":{"name":"2022 IEEE Sensors","volume":"100 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-10-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127114425","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2022-10-30DOI: 10.1109/SENSORS52175.2022.9967157
Gianmarco Gabrieli, Michal Muszynski, P. Ruch
A proof-of-concept system comprising a miniaturized sensor array, feature extraction and machine learning pipeline was evaluated for the direct quantification of the concentrations of three major cations, Ca2+, Mg2+, and Na+, in drinking water. Feature importance methods were applied to discover dependencies between the transient potentiometric responses of sensing materials and the cation concentrations. The proposed framework supports design of cross-sensitive sensor arrays to accelerate water testing, providing a complementary approach to traditional chemical analysis for monitoring water quality.
{"title":"Feature importance methods unveiling the cross-sensitive response of an integrated sensor array to quantify major cations in drinking water","authors":"Gianmarco Gabrieli, Michal Muszynski, P. Ruch","doi":"10.1109/SENSORS52175.2022.9967157","DOIUrl":"https://doi.org/10.1109/SENSORS52175.2022.9967157","url":null,"abstract":"A proof-of-concept system comprising a miniaturized sensor array, feature extraction and machine learning pipeline was evaluated for the direct quantification of the concentrations of three major cations, Ca2+, Mg2+, and Na+, in drinking water. Feature importance methods were applied to discover dependencies between the transient potentiometric responses of sensing materials and the cation concentrations. The proposed framework supports design of cross-sensitive sensor arrays to accelerate water testing, providing a complementary approach to traditional chemical analysis for monitoring water quality.","PeriodicalId":120357,"journal":{"name":"2022 IEEE Sensors","volume":"17 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-10-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129219735","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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