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2002 Conference on Optoelectronic and Microelectronic Materials and Devices. COMMAD 2002. Proceedings (Cat. No.02EX601)最新文献

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Analysis of GaN/AlN buffer layers grown on sapphire substrates via statistical diffraction theory 蓝宝石衬底上生长GaN/AlN缓冲层的统计衍射分析
GaInN layers are often grown on a sapphire substrate, with a low-temperature-deposited AlN layer and a thick GaN buffer layer. High-resolution X-ray diffraction experiments were conducted on BL20-B at the Photon Factory (Tsukuba, Japan), to investigate the structural quality of the AlN and GaN layers. Reciprocal space mapping was used to study samples ar each stage of the growth process and for various layer thicknesses. Two analysis techniques were compared. The first utilised broadening of reflections in reciprocal space, and the second was based on statistical diffraction theory (SDT). Both techniques yield information about the mosaic-blocks and layer thicknesses: however, simulations based on SDT give information on strain and tilt distribution within the AlN layer, evident in off centre, non-symmetric, peaks. This suggests a possible mechanism by which AlN buffer layers can be exploited to improve device characteristics. Our work also demonstrates the efficacy of SDT for the analysis of these structures.
GaInN层通常生长在蓝宝石衬底上,具有低温沉积的AlN层和厚的GaN缓冲层。在光子工厂(Tsukuba, Japan)对BL20-B进行了高分辨率x射线衍射实验,研究了AlN和GaN层的结构质量。利用互反空间映射来研究生长过程的每个阶段和不同层厚度的样品。比较了两种分析方法。第一个是利用倒易空间反射的展宽,第二个是基于统计衍射理论(SDT)。这两种技术都能得到关于镶嵌块和层厚度的信息:然而,基于SDT的模拟给出了AlN层内应变和倾斜分布的信息,在偏离中心、不对称的峰中很明显。这提示了一种可能的机制,通过这种机制可以利用AlN缓冲层来改善器件特性。我们的工作也证明了SDT对这些结构分析的有效性。
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引用次数: 0
Optical transitions from SiO/sub 2//crystalline Si/SiO/sub 2/ quantum wells SiO/sub 2//晶体Si/SiO/sub 2/量子阱的光学跃迁
Crystalline silicon single quantum wells were fabricated by high temperature thermal oxidation of ELTRAN silicon-on-insulator (SOI) wafers. The Si layer thickness enclosed by thermal SiO/sub 2/ ranges from 1.1 to 4.3 nm, measured by high resolution transmission electron microscopy (HRTEM). Si thickness dependent luminescence in SiO/sub 2//Si/SiO/sub 2/ quantum wells was observed for the samples with 1.1 nm to 2.7 nm thick Si. Luminescent peak energy varies from 730 nm to 920 nm without interface-mediated luminescence.
采用高温热氧化法对ELTRAN绝缘体上硅(SOI)晶圆制备了晶体硅单量子阱。通过高分辨率透射电镜(HRTEM)测量了热SiO/ sub2 /包裹的Si层厚度在1.1 ~ 4.3 nm之间。在Si厚度为1.1 nm ~ 2.7 nm的样品中,观察到SiO/sub //Si/SiO/sub /量子阱中Si厚度随Si厚度的变化而发光。无界面介导发光时,发光峰值能量在730 ~ 920 nm之间。
{"title":"Optical transitions from SiO/sub 2//crystalline Si/SiO/sub 2/ quantum wells","authors":"E. Cho, P. Reece, M. Green, R. Corkish, M. Gal","doi":"10.1109/COMMAD.2002.1237244","DOIUrl":"https://doi.org/10.1109/COMMAD.2002.1237244","url":null,"abstract":"Crystalline silicon single quantum wells were fabricated by high temperature thermal oxidation of ELTRAN silicon-on-insulator (SOI) wafers. The Si layer thickness enclosed by thermal SiO/sub 2/ ranges from 1.1 to 4.3 nm, measured by high resolution transmission electron microscopy (HRTEM). Si thickness dependent luminescence in SiO/sub 2//Si/SiO/sub 2/ quantum wells was observed for the samples with 1.1 nm to 2.7 nm thick Si. Luminescent peak energy varies from 730 nm to 920 nm without interface-mediated luminescence.","PeriodicalId":129668,"journal":{"name":"2002 Conference on Optoelectronic and Microelectronic Materials and Devices. COMMAD 2002. Proceedings (Cat. No.02EX601)","volume":"39 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2002-12-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127730361","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
On the InP/InGaAs double heterojunction bipolar transistor (DHBT) with emitter tunneling barrier and composite collector structure 具有发射极隧道势垒和复合集电极结构的InP/InGaAs双异质结双极晶体管(DHBT
An InP/InGaAs double heterojunction bipolar transistor (DHBT) with an undoped emitter tunneling barrier and composite collector structure is fabricated and studied. Due to the mass filtering effect for holes, a thin InP tunneling barrier can be used to replace the wide-gap emitter. Experimentally, an appropriate tunneling barrier thickness of 150 /spl Aring/ is employed to achieve good I-V characteristics. In addition, InGaAsP compositionally step-graded layers are introduced between the p/sup +/-InGaAs base and n/sup -/-InP collector. By modulating the bandgap energy of InGaAsP, the large base-collector (B-C) potential spike can be divided into several small spikes with lower barrier height. The 4000 /spl Aring/ InP collectors with InP/InGaAsP/InGaAs step-graded junction achieve high breakdown voltages of 14.6 V. A small offset voltage of 80 mV and a small saturation voltage of 1.8 V at the collector current level of 5 mA are obtained. Prior to the current gain fall-off caused by the self-heating effect, the step-graded DHBT has the current gain as high as 118 H at I/sub C/ = 30 mA and V/sub CE/ = 3V.
制备并研究了具有无掺杂发射极隧道势垒和复合集电极结构的InP/InGaAs双异质结双极晶体管(DHBT)。由于空穴的质量滤波效应,可以用薄的InP隧穿势垒代替宽隙发射极。实验结果表明,适当的隧道势垒厚度为150 /spl /,可以获得良好的I-V特性。此外,在p/sup +/- ingaas基极和n/sup -/- inp集电极之间引入了InGaAsP成分阶跃渐变层。通过调制InGaAsP的带隙能量,可以将大碱基集电极(B-C)电位尖峰划分为几个势垒高度较低的小尖峰。采用InP/InGaAsP/InGaAs阶跃渐变结的4000 /spl Aring/ InP集电极可实现14.6 V的高击穿电压。在集电极电流为5 mA时,得到了80mv的小偏置电压和1.8 V的小饱和电压。在自热效应导致电流增益下降之前,在I/sub C/ = 30 mA, V/sub CE/ = 3V时,阶跃渐变DHBT的电流增益高达118 H。
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引用次数: 1
Metallo-organic decomposition derived Sr/sub 0.95/Ca/sub 0.05/ZrO/sub 3/ oxide thin films on Pt/Ti/SiO/sub 2//Si substrate 金属有机分解在Pt/Ti/SiO/sub 2/ Si衬底上衍生出Sr/sub 0.95/Ca/sub 0.05/ZrO/sub 3/氧化物薄膜
Dielectric thin films of strontium zirconate doped with 5 mol% calcium were prepared on Pt/Ti/SiO/sub 2//Si substrate by the metallo-organic decomposition (MOD) wet chemical technology followed by annealing at different temperatures in flowing oxygen atmosphere. Those prepared Sr/sub 0.95/Ca/sub 0.05/ZrO/sub 3/ thin films were investigated using differential thermal analysis (DTA) and thermogravimetric analysis (TGA), X-ray diffraction (XRD), UV optical reflection spectroscopic measurement, and sweeping frequency dependence of the dielectric constants and losses to study their structural development, optical band gaps, and dielectric properties. The study is aimed at seeking a possibility for an application in the area of high-K dielectrics.
采用金属有机分解(MOD)湿化学技术,在Pt/Ti/SiO/sub 2/ Si衬底上制备了掺杂5mol %钙的锆酸锶介电薄膜,并在流动氧气氛中进行不同温度退火。采用差热分析(DTA)、热重分析(TGA)、x射线衍射(XRD)、紫外反射光谱测量以及介电常数和损耗的扫描频率依赖关系对制备的Sr/sub 0.95/Ca/sub 0.05/ZrO/sub 3/薄膜进行了研究,研究了薄膜的结构发育、光学带隙和介电性能。该研究旨在寻求在高k介电体领域应用的可能性。
{"title":"Metallo-organic decomposition derived Sr/sub 0.95/Ca/sub 0.05/ZrO/sub 3/ oxide thin films on Pt/Ti/SiO/sub 2//Si substrate","authors":"Changhong Chen, Weiguang Zhu, T. Yu, Xiaofeng Chen, Yuekang Lu, R. Krishnan","doi":"10.1109/COMMAD.2002.1237219","DOIUrl":"https://doi.org/10.1109/COMMAD.2002.1237219","url":null,"abstract":"Dielectric thin films of strontium zirconate doped with 5 mol% calcium were prepared on Pt/Ti/SiO/sub 2//Si substrate by the metallo-organic decomposition (MOD) wet chemical technology followed by annealing at different temperatures in flowing oxygen atmosphere. Those prepared Sr/sub 0.95/Ca/sub 0.05/ZrO/sub 3/ thin films were investigated using differential thermal analysis (DTA) and thermogravimetric analysis (TGA), X-ray diffraction (XRD), UV optical reflection spectroscopic measurement, and sweeping frequency dependence of the dielectric constants and losses to study their structural development, optical band gaps, and dielectric properties. The study is aimed at seeking a possibility for an application in the area of high-K dielectrics.","PeriodicalId":129668,"journal":{"name":"2002 Conference on Optoelectronic and Microelectronic Materials and Devices. COMMAD 2002. Proceedings (Cat. No.02EX601)","volume":"9 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2002-12-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115514971","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
On the n/sup +/-InGaAs/n-GaAs composite doped channel heterostructure field-effect transistor (CDC-HFET) n/sup +/-InGaAs/n- gaas复合掺杂沟道异质结构场效应晶体管(cdc - het)
An interesting n/sup +/-InGaAs/n-GaAs composite doped channel heterostructure field-effect transistor (CDC-HFET) is fabricated and studied. In the n/sup +/-InGaAs/n-GaAs CDC structure, the narrow InGaAs layer is used to introduce the channel quantization effect. Thus, the effective energy-gap of InGaAs channel can be increased. In addition, the n-GaAs channel can improve the operation capability under higher electric field. Therefore, the impact ionization effect can be avoided. Experimentally, the studied device shows good DC and microwave dc performances with flat and wide operation regime.
制备并研究了一种n/sup +/-InGaAs/n- gaas复合掺杂沟道异质结构场效应晶体管(cdfet)。在n/sup +/-InGaAs/n- gaas CDC结构中,采用窄InGaAs层引入通道量化效应。从而增加了InGaAs通道的有效能隙。此外,n-GaAs通道可以提高在高电场下的工作能力。因此,可以避免冲击电离效应。实验结果表明,该器件具有良好的直流电和微波直流电性能,工作范围平坦、宽。
{"title":"On the n/sup +/-InGaAs/n-GaAs composite doped channel heterostructure field-effect transistor (CDC-HFET)","authors":"H. Chuang, K.W. Lin, C. Chen, J.Y. Chen, C. Kao, W. Liu","doi":"10.1109/COMMAD.2002.1237265","DOIUrl":"https://doi.org/10.1109/COMMAD.2002.1237265","url":null,"abstract":"An interesting n/sup +/-InGaAs/n-GaAs composite doped channel heterostructure field-effect transistor (CDC-HFET) is fabricated and studied. In the n/sup +/-InGaAs/n-GaAs CDC structure, the narrow InGaAs layer is used to introduce the channel quantization effect. Thus, the effective energy-gap of InGaAs channel can be increased. In addition, the n-GaAs channel can improve the operation capability under higher electric field. Therefore, the impact ionization effect can be avoided. Experimentally, the studied device shows good DC and microwave dc performances with flat and wide operation regime.","PeriodicalId":129668,"journal":{"name":"2002 Conference on Optoelectronic and Microelectronic Materials and Devices. COMMAD 2002. Proceedings (Cat. No.02EX601)","volume":"42 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2002-12-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116090229","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Growth of InGaAs quantum dots by metal organic chemical vapour deposition 金属有机化学气相沉积法生长InGaAs量子点
In/sub 0.5/Ga/sub 0.5/As quantum dots have been grown by metal-organic chemical vapour deposition (MOCVD). The size and density of these dots are strongly affected by the growth parameters. The growth rate and V/III affect the density of the dots. Growth interrupts without AsH/sub 3/ are found to cause a bimodal distribution in the dots, however a small amount of AsH/sub 3/ during the interrupt can suppress the formation of larger dots. A thin layer of GaP below the In/sub 0.5/Ga/sub 0.5/As quantum dots changes the formation of the dots. The dots are smaller in width and height. The luminescence from these dots is blueshifted due to interdiffusion between the dots and the GaP buffer layer.
采用金属有机化学气相沉积(MOCVD)技术制备了In/sub 0.5/Ga/sub 0.5/As量子点。这些点的大小和密度受到生长参数的强烈影响。生长速率和V/III影响点的密度。发现没有AsH/sub - 3/的生长中断会导致点中的双峰分布,但是在中断期间少量的AsH/sub - 3/可以抑制更大点的形成。在In/sub 0.5/Ga/sub 0.5/As量子点下方的薄层GaP改变了量子点的形成。这些点在宽度和高度上都较小。由于点和GaP缓冲层之间的相互扩散,这些点发出的光发生蓝移。
{"title":"Growth of InGaAs quantum dots by metal organic chemical vapour deposition","authors":"P. Lever, H. Tan, C. Jagadish","doi":"10.1109/COMMAD.2002.1237252","DOIUrl":"https://doi.org/10.1109/COMMAD.2002.1237252","url":null,"abstract":"In/sub 0.5/Ga/sub 0.5/As quantum dots have been grown by metal-organic chemical vapour deposition (MOCVD). The size and density of these dots are strongly affected by the growth parameters. The growth rate and V/III affect the density of the dots. Growth interrupts without AsH/sub 3/ are found to cause a bimodal distribution in the dots, however a small amount of AsH/sub 3/ during the interrupt can suppress the formation of larger dots. A thin layer of GaP below the In/sub 0.5/Ga/sub 0.5/As quantum dots changes the formation of the dots. The dots are smaller in width and height. The luminescence from these dots is blueshifted due to interdiffusion between the dots and the GaP buffer layer.","PeriodicalId":129668,"journal":{"name":"2002 Conference on Optoelectronic and Microelectronic Materials and Devices. COMMAD 2002. Proceedings (Cat. No.02EX601)","volume":"57 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2002-12-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114706369","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Self-organized GaN nanotips for cold cathode application 用于冷阴极的自组织GaN纳米尖
We investigated self-organized GaN nanotips for the cold cathode application, which was fabricated by reactive ion etching (RIE). The density of the nanotips fabricated by RIE was approximately 2 /spl times/ 10 cm/sup -2/. Its height was approximately 200 nm. It is observed that the distribution of the nanotips fabricated on epitaxial lateral over growth (ELO) GaN is uniform in spite of window and mask region on ELO GaN surface. This fact supports that the formation mechanism of nanotips is attributed to a masking effect of nanometer-scale SiO/sub 2/ masks not to the threading dislocations in the GaN layer. Field emission from the GaN nanotips was observed. The current I was 1 /spl mu/A at 900 V. The field enhancement factor /spl beta/d, which is related to the top structure of the emitter and is the product of the field conversion factor /spl beta/ and the sample-anode gap d, was estimated to be 460 from the Fowler-Nordheim (F-N) plot.
研究了用反应离子刻蚀法(RIE)制备冷阴极用自组织GaN纳米尖。采用RIE法制备的纳米针尖密度约为2/ sp1倍/ 10 cm/sup -2/。它的高度约为200nm。结果表明,尽管ELO GaN表面存在窗口区和掩膜区,但在ELO GaN表面制备的纳米针尖是均匀分布的。这一事实支持纳米针尖的形成机制归因于纳米SiO/sub 2/掩膜的掩蔽效应,而不是GaN层中的螺纹位错。观察了氮化镓纳米尖端的场发射。电流I在900v时为1 /spl mu/A。场增强因子/spl β /d与发射极顶部结构有关,是场转换因子/spl β / /与样品-阳极间隙d的乘积,根据Fowler-Nordheim (F-N)图估计为460。
{"title":"Self-organized GaN nanotips for cold cathode application","authors":"Y. Terada, H. Yoshida, H. Miyake, K. Hiramatsu","doi":"10.1109/COMMAD.2002.1237203","DOIUrl":"https://doi.org/10.1109/COMMAD.2002.1237203","url":null,"abstract":"We investigated self-organized GaN nanotips for the cold cathode application, which was fabricated by reactive ion etching (RIE). The density of the nanotips fabricated by RIE was approximately 2 /spl times/ 10 cm/sup -2/. Its height was approximately 200 nm. It is observed that the distribution of the nanotips fabricated on epitaxial lateral over growth (ELO) GaN is uniform in spite of window and mask region on ELO GaN surface. This fact supports that the formation mechanism of nanotips is attributed to a masking effect of nanometer-scale SiO/sub 2/ masks not to the threading dislocations in the GaN layer. Field emission from the GaN nanotips was observed. The current I was 1 /spl mu/A at 900 V. The field enhancement factor /spl beta/d, which is related to the top structure of the emitter and is the product of the field conversion factor /spl beta/ and the sample-anode gap d, was estimated to be 460 from the Fowler-Nordheim (F-N) plot.","PeriodicalId":129668,"journal":{"name":"2002 Conference on Optoelectronic and Microelectronic Materials and Devices. COMMAD 2002. Proceedings (Cat. No.02EX601)","volume":"16 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2002-12-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122019611","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
The current-voltage characteristics of weakly coupled /spl delta/-doped GaAs/Al/sub x/Ga/sub 1-x/As superlattices 弱耦合/spl δ /掺杂GaAs/Al/sub -x/ Ga/sub - 1-x/As超晶格的电流电压特性
The /spl delta/-doped GaAs/Al/sub x/Ga/sub 1-x/As superlattice samples are grown by molecular beam epitaxy. The current- voltage, l(V). characteristics of the samples are measured at 1.5 K. The I(V) curves show the current-plateaus corresponding to the formation of the low- and high-electric field domains due to the ground state resonance and the first excited state to ground state resonance, respectively, in the quantum well. In addition to the typical sawtooth-like current branches, a new small current peak is observed accompanying each sawtooth-like current branch in our samples. Possible origins of the additional peaks are discussed in terms of cross-domain boundary tunneling and phonon emissions.
采用分子束外延法制备了/spl δ /掺杂GaAs/Al/sub -x/ Ga/sub - 1-x/As超晶格样品。电流-电压,l(V)。在1.5 K下测量样品的特性。I(V)曲线分别显示了量子阱中基态共振和第一激发态到基态共振所形成的低电场域和高电场域对应的电流平台。除了典型的锯齿状电流分支外,在我们的样本中,每个锯齿状电流分支都观察到一个新的小电流峰值。从跨域边界隧穿和声子发射的角度讨论了附加峰的可能来源。
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引用次数: 0
Au/n-GaN Schottky diode grown on Si(111) by plasma assisted MOCVD 等离子体辅助MOCVD在Si(111)上生长Au/n-GaN肖特基二极管
Most of the growth of GaN epilayers by MOCVD method reported to date was carried out at growth temperature above 1000/spl deg/C on sapphire substrates. We have successfully grown GaN by plasma assisted MOCVD (PA-MOCVD) method at temperature between 560/spl deg/C to 650/spl deg/C. In this paper we report an attempt to fabricate Au/n-GaN Schottky diode grown on Si(111) by PA-MOCVD method. The GaN films were grown at temperatures of 625/spl deg/C and 650/spl deg/C using trimethylgallium (TMGa) and nitrogen plasma. The diode is a concentric type using aluminum as ohmic contact and gold as Schottky contact. Electrical characterizations were performed by I-V and C-V measurements. The barrier heights determined from I-V measurements are 0.44 eV and 0.49 eV, for Schottky diodes grown at 625/spl deg/C and 650/spl deg/C, respectively. The ideality factors are 4.5 and 5.6 indicate that tunneling as the main mechanism of electron transport through the barrier. This mechanism is typical for moderately to highly doped semiconductor, as confirmed from C-V measurement.
迄今为止报道的大多数用MOCVD法生长GaN薄膜都是在蓝宝石衬底上生长温度高于1000/spl℃的条件下进行的。我们成功地用等离子体辅助MOCVD (PA-MOCVD)方法在560 ~ 650℃的温度下生长GaN。本文报道了用PA-MOCVD法制备在Si(111)上生长的Au/n-GaN肖特基二极管。采用三甲基镓(TMGa)和氮等离子体在625和650℃的温度下生长GaN膜。该二极管为同心型,采用铝为欧姆触点,金为肖特基触点。电特性通过I-V和C-V测量进行。在625/spl度/C和650/spl度/C生长的肖特基二极管,从I-V测量得到的势垒高度分别为0.44 eV和0.49 eV。理想因子分别为4.5和5.6,表明隧穿是电子通过势垒的主要机制。这种机制是典型的中至高掺杂半导体,从C-V测量证实。
{"title":"Au/n-GaN Schottky diode grown on Si(111) by plasma assisted MOCVD","authors":"M. Budiman, H. Sutanto, N. Wendri, E. Supriyanto, Sugianto, P. Arifin, M. Barmawi","doi":"10.1109/COMMAD.2002.1237200","DOIUrl":"https://doi.org/10.1109/COMMAD.2002.1237200","url":null,"abstract":"Most of the growth of GaN epilayers by MOCVD method reported to date was carried out at growth temperature above 1000/spl deg/C on sapphire substrates. We have successfully grown GaN by plasma assisted MOCVD (PA-MOCVD) method at temperature between 560/spl deg/C to 650/spl deg/C. In this paper we report an attempt to fabricate Au/n-GaN Schottky diode grown on Si(111) by PA-MOCVD method. The GaN films were grown at temperatures of 625/spl deg/C and 650/spl deg/C using trimethylgallium (TMGa) and nitrogen plasma. The diode is a concentric type using aluminum as ohmic contact and gold as Schottky contact. Electrical characterizations were performed by I-V and C-V measurements. The barrier heights determined from I-V measurements are 0.44 eV and 0.49 eV, for Schottky diodes grown at 625/spl deg/C and 650/spl deg/C, respectively. The ideality factors are 4.5 and 5.6 indicate that tunneling as the main mechanism of electron transport through the barrier. This mechanism is typical for moderately to highly doped semiconductor, as confirmed from C-V measurement.","PeriodicalId":129668,"journal":{"name":"2002 Conference on Optoelectronic and Microelectronic Materials and Devices. COMMAD 2002. Proceedings (Cat. No.02EX601)","volume":"19 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2002-12-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125205635","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Up-conversion by using /spl Gamma/-X-/spl Gamma/ carrier transport in asymmetric double quantum well systems 非对称双量子阱系统中/spl伽玛/- x -/spl伽玛/载流子输运的上转换
We demonstrate up-converted light emission from an asymmetric double quantum well (QW). Carriers in the wide QW, which are photogenerated by a long wavelength light, are transferred and collected into the adjacent narrow quantum well by using /spl Gamma/-X-/spl Gamma/ electron transfer and simultaneous hole tunneling, thus generating short wavelength light emission.
我们证明了非对称双量子阱(QW)的上转换光发射。宽量子阱中由长波光产生的载流子,通过/spl伽玛/- x -/spl伽玛/电子转移和同步空穴隧穿将载流子转移和收集到相邻的窄量子阱中,从而产生短波长的光发射。
{"title":"Up-conversion by using /spl Gamma/-X-/spl Gamma/ carrier transport in asymmetric double quantum well systems","authors":"M. Sato, Y. Hirose, C. Domoto, T. Aida, M. Hosoda","doi":"10.1109/COMMAD.2002.1237247","DOIUrl":"https://doi.org/10.1109/COMMAD.2002.1237247","url":null,"abstract":"We demonstrate up-converted light emission from an asymmetric double quantum well (QW). Carriers in the wide QW, which are photogenerated by a long wavelength light, are transferred and collected into the adjacent narrow quantum well by using /spl Gamma/-X-/spl Gamma/ electron transfer and simultaneous hole tunneling, thus generating short wavelength light emission.","PeriodicalId":129668,"journal":{"name":"2002 Conference on Optoelectronic and Microelectronic Materials and Devices. COMMAD 2002. Proceedings (Cat. No.02EX601)","volume":"81 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2002-12-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122957213","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
期刊
2002 Conference on Optoelectronic and Microelectronic Materials and Devices. COMMAD 2002. Proceedings (Cat. No.02EX601)
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