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2002 Conference on Optoelectronic and Microelectronic Materials and Devices. COMMAD 2002. Proceedings (Cat. No.02EX601)最新文献

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Modelling of dark currents in LWIR HgCdTe photodiodes LWIR HgCdTe光电二极管暗电流的建模
T. Nguyen, C. Musca, J. Dell, J. Antoszewski, L. Faraone
HgCdTe long-wavelength infrared (LWIR) photodiodes have been successfully fabricated using plasma induced junction formation. The performance of the devices were characterised through I-V measurements and analysed by modelling the dark current mechanisms which determine the I-V characteristic. Analytical models were used and a very close fit to the measured data at 80 K was achieved. The model included the effects of diffusion, trap-assisted tunnelling, band-to-band tunnelling, generation-recombination, and surface leakage current. The dark current modelling has identified material defects and non-ideal surface passivation as the factors limiting performance in HgCdTe LWIR photodiodes fabricated using plasma induced junction formation.
利用等离子体诱导结形成技术成功制备了HgCdTe长波红外(LWIR)光电二极管。通过I-V测量来表征器件的性能,并通过对决定I-V特性的暗电流机制进行建模来分析。采用分析模型,与80k下的实测数据非常接近。该模型包括扩散效应、陷阱辅助隧穿效应、带对带隧穿效应、生成复合效应和表面漏电流效应。暗电流模型已经确定了材料缺陷和非理想表面钝化是限制使用等离子体诱导结形成的HgCdTe LWIR光电二极管性能的因素。
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引用次数: 1
Study of influence of nitrogen concentration in nitrided oxide on interface trap generation 氮化氧化物中氮浓度对界面陷阱产生影响的研究
Jiayi Huang, T.P. Chen, M. Tse
In this study, a novel technique, i.e. the direct-current current-voltage (DCIV) method is used to quantitatively examine the influence of nitrogen concentration in nitrided oxide on interface trap generation caused by DC and dynamic Fowler-Nordheim (FN) injections. For both DC and dynamic FN stresses, a power-law stress-time dependence of interface trap generation is always observed, and the increase of nitrogen concentration leads to a significant suppression of interface trap generation. For the dynamic stress, interface trap generation increases with frequency, but the interface trap generation at each frequency is reduced with a higher nitrogen concentration. A comparison of interface trap generation between DC and dynamic stresses and explanation for the difference are presented. The nitridation effect on the interface trap generation can be explained by the models based on either the rigid Si-N bonds at the interface or the nitrided oxide impediment to the damaging positive species such as H/sup +/ or holes.
在本研究中,采用一种新颖的技术,即直流-电压(DCIV)方法,定量研究了氮化氧化物中氮浓度对直流和动态Fowler-Nordheim (FN)注入引起的界面陷阱产生的影响。无论是直流应力还是动态FN应力,界面陷阱的产生都与应力时间呈幂律关系,氮浓度的增加显著抑制了界面陷阱的产生。对于动应力,界面陷阱的产生随频率的增加而增加,但各频率下界面陷阱的产生随氮浓度的增加而减少。对直流应力和动应力产生的界面陷阱进行了比较,并对差异进行了解释。氮化对界面陷阱产生的影响可以用基于界面上刚性Si-N键或氮化氧化物对H/sup +/或空穴等有害正极物质的阻碍的模型来解释。
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引用次数: 0
Atomic relocation of fast diffusers in impurity-free disordered p-type GaAs 无杂质无序p型砷化镓中快速扩散器的原子重定位
V. Coleman, P. Deenapanray, H. Tan, C. Jagadish
We have used deep level transient spectroscopy (DLTS) and capacitance-voltage (C-V) measurements to study impurity free disordering (IFD) of p-type GaAs epitaxial layers grown by metal-organic chemical vapour deposition (MOCVD). Disordering was achieved using either an SiO/sub 2/ or native oxide layer of the same thickness. Samples, including an uncapped layer for reference, were annealed at 900/spl deg/C for 30 s under an Ar ambient. Impurity-free disordering resulted in an increase in the free hole concentration, with the effect being most pronounced when using the SiO/sub 2/ capping layer. DLTS measurements revealed a corresponding increase in the concentrations of both Cu- and Zn-related deep levels in disordered epilayers. The results presented here will be discussed in terms of the atomic relocation processes that take place during the nonequilibrium injection of excess gallium vacancies into the disordered p-type epilayers.
我们利用深能级瞬态光谱(dlt)和电容电压(C-V)测量研究了金属有机化学气相沉积(MOCVD)生长的p型GaAs外延层的无杂质无序性(IFD)。使用相同厚度的SiO/ sub2 /或天然氧化物层实现无序化。样品(包括供参考的未封盖层)在氩气环境下900/spl℃退火30 s。无杂质无序导致自由孔浓度增加,当使用SiO/ sub2 /封盖层时效果最为明显。DLTS测量显示,在无序脱毛者中,Cu和zn相关深层水平的浓度相应增加。本文给出的结果将根据原子重新定位过程进行讨论,原子重新定位过程发生在非平衡注入过量镓空位到无序p型薄膜中。
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引用次数: 0
Thick-film doped-oxide deposition processes for applications in planar lightwave circuit fabrication 厚膜掺杂氧化物沉积工艺在平面光波电路制造中的应用
S. Lee, G. Ditmer, N. Singh, C. Hodson, A. Goodyear, M. Cooke
Plasma enhanced chemical vapour deposition (PECVD) was used in the development of silica layers for use in planar lightwave circuit fabrication. These high-rate (>200 nm/min) processes are tailored specifically for the thick-film (5/spl sim/15 /spl mu/m) films required for these applications A GeH/sub 4/ addition to the process was used to deposit the core layer, controlling the core-clad refractive index (RI) difference in the range of 0.2%-1.65%. Undoped SiO/sub 2/ and Ge-doped SiO/sub 2/ films up to 10 /spl mu/m have been deposited on to 4" Si <100> wafers. The 'as deposited' and 'annealed' film properties: film uniformity, RI, RI uniformity and stress have been compared. The upper cladding layer in an optical planar waveguide is typically formed using boron and phosphorus doped films (BPSG) which provides the necessary reflow characteristics. Refractive index uniformity of /spl plusmn/0.0003 across 4" silicon wafers was achieved on all films after annealing. The core layer was shown to be capable of producing optical losses of <0.1 dB/cm when processed into a waveguide.
采用等离子体增强化学气相沉积(PECVD)技术制备了用于平面光波电路制造的二氧化硅层。这些高速率(>200 nm/min)工艺是专门为这些应用所需的厚膜(5/spl sim/15 /spl mu/m)薄膜定制的。在该工艺中添加GeH/sub / 4来沉积芯层,将芯包层折射率(RI)差控制在0.2%-1.65%的范围内。未掺杂的SiO/ sub2 /和掺锗的SiO/ sub2 /薄膜高达10 /spl mu/m。比较了“沉积”和“退火”薄膜的性能:薄膜均匀性、RI、RI均匀性和应力。光学平面波导的上层包层通常采用硼磷掺杂薄膜(BPSG)形成,该薄膜提供了必要的回流特性。退火后,所有薄膜在4英寸硅片上的折射率均匀性达到/spl plusmn/0.0003。当加工成波导时,核心层能够产生<0.1 dB/cm的光损耗。
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引用次数: 1
Recombination via discrete defect levels with application to semiconductor material characterisation 通过离散缺陷水平重组与半导体材料表征的应用
D. Debuf, R. Corkish
Semiconductor material characterization in terms of defect parameters is presently evaluated experimentally by applying the Shockley-Read-Hall (SRH) recombination time constant expression. A recent analytic solution to the SRH rate equations extended to differential rate equations for two multiple defect level systems, yields a solution derived without an approximation. In terms of material characterisation, this exact solution is shown to provide detailed information on multiple level depths in contrast to the existing theory, which relies on one dominant single level. Furthermore, for semiconductor samples known to be predominantly doped with one defect species, it is shown theoretically that the dominant decay is influenced by the other defect species present in the semiconductor sample.
目前,利用Shockley-Read-Hall (SRH)复合时间常数表达式对半导体材料的缺陷参数特性进行了实验评价。最近对SRH速率方程的解析解扩展到两个多缺陷水平系统的微分速率方程,得到了一个没有近似的解。在材料表征方面,与现有理论相比,这种精确的解决方案可以提供多个层次深度的详细信息,而现有理论依赖于一个主要的单一层次。此外,对于已知主要掺杂一种缺陷的半导体样品,理论上表明,主要衰减受到半导体样品中存在的其他缺陷的影响。
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引用次数: 0
Minimisation of P surface segregation during epitaxial silicon growth for the fabrication of a silicon-based quantum computer 硅基量子计算机外延硅生长过程中P表面偏析的最小化
L. Oberbeck, N. Curson, T. Hallam, M. Simmons, K. Goh, S. R. Schofield, F. Rueß, R. G. Clark
To optimise the fabrication process for a silicon based quantum computer the surface segregation/diffusion of phosphorus atoms in silicon is investigated on an atomic scale using scanning tunnelling microscopy (STM) after epitaxial silicon growth at 255 /spl deg/C and room temperature, respectively. The phosphorus atom in the Si(001) surface forms a silicon-phosphorus heterodimer identified as a bright zigzag feature in filled state STM images. Sample annealing, used to reduce the surface roughness and the defect density after silicon growth is shown to increase the density of phosphorus atoms at the surface. However, the density of phosphorus atoms can be limited to a few percent of the initial density if the phosphorus atoms are encapsulated in silicon at room temperature.
为了优化硅基量子计算机的制造工艺,利用扫描隧道显微镜(STM)在原子尺度上研究了在255 /spl℃和室温下外延硅生长后硅中磷原子的表面偏析/扩散。硅(001)表面的磷原子形成硅-磷异二聚体,在填充态STM图像中被识别为明亮的锯齿状特征。样品退火,用于降低表面粗糙度和硅生长后的缺陷密度,显示出增加表面磷原子的密度。然而,如果在室温下将磷原子封装在硅中,则磷原子的密度可以限制在初始密度的百分之几。
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引用次数: 0
Improving silicon light emitting devices using Kirchhoff's law 利用基尔霍夫定律改进硅发光器件
T. Trupke, J. Zhao, A. Wang, M. Green
An analytical relation between the internal- and the external luminescence quantum efficiency of textured silicon wafers is derived using a generalisation of Kirchhoff s law. We show that only a fraction of one third of internally generated photons can escape a textured 450 /spl mu/m thick silicon wafer even under the idealising assumption of negligible free carrier absorption, the major fraction of photons being reabsorbed by band-band-transitions. Surprisingly high external luminescence quantum efficiencies up to 0.6% at room temperature of silicon light emitting diodes have been published recently. From our theoretical model we can conclude that further significant improvements of the external luminescence quantum efficiency of silicon devices can be achieved by optimising the thickness of the devices, the texturing and the passivation of the surfaces texturing.
推广基尔霍夫定律,导出了织构硅片内外发光量子效率之间的解析关系。我们表明,即使在自由载流子吸收可以忽略不计的理想假设下,内部产生的光子中只有三分之一的光子可以逃离有纹理的450 /spl mu/m厚的硅片,光子的主要部分被带-带跃迁重新吸收。在室温下,硅发光二极管的外发光量子效率高达0.6%。从我们的理论模型中我们可以得出结论,通过优化器件的厚度、纹理和表面纹理的钝化,可以进一步显著提高硅器件的外发光量子效率。
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引用次数: 3
Growth of Al/sub x/Ga/sub 1-x/N by plasma assisted MOCVD 等离子体辅助MOCVD生长Al/sub x/Ga/sub 1-x/N
P. Arifin, Sugianto, E. Suprianto, N. Wendri, H. Sutanto, M. Budiman, M. Barmawi
Thin films Al/sub x/Ga/sub 1-x/N were grown on (0001) sapphire substrates by plasma assisted metal-organic chemical vapor deposition (PA-MOCVD). Plasma-cracked N/sub 2/, trimethylaluminum (TMAl) and trimethylgallium (TMGa) were used as nitrogen, aluminum and gallium sources, respectively. The results of energy dispersive X-ray (EDX) measurements performed at room temperature yielded the linear dependence of molar fraction of Al (x) on molar fraction of vapor phase of TMAl/(TMAl + TMGa). The dependence of the band gap energy on the molar fraction of Al (x) showed quadratic expression, E/sub g/ (x) = 3.35 + 1.55x + 1.3x/sup 2/ eV. Al/sub x/Ga/sub 1-x/N layers with x < 0.34 show n-type conduction with room temperature mobilities in the range of 5 to 10 cm/sup 2//V/spl middot/s, and electron concentrations of 9.0 /spl times/ 10/sup 16/ to 1.4 /spl times/ 10/sup 19/cm/sup -3/.
采用等离子体辅助金属有机化学气相沉积(PA-MOCVD)技术在(0001)蓝宝石衬底上生长了Al/sub x/Ga/sub 1-x/N薄膜。以等离子体裂解的N/sub 2/、三甲基铝(TMAl)和三甲基镓(TMGa)分别作为氮源、铝源和镓源。在室温下进行的能量色散x射线(EDX)测量结果表明,Al (x)的摩尔分数与TMAl/(TMAl + TMGa)气相的摩尔分数呈线性关系。带隙能与Al摩尔分数(x)的关系呈二次表达式,E/sub g/ (x) = 3.35 + 1.55x + 1.3x/sup 2/ eV。x < 0.34的Al/sub x/Ga/sub 1-x/N层表现为N型导电,室温迁移率在5 ~ 10 cm/sup 2//V/spl middot/s范围内,电子浓度为9.0 /spl倍/ 10/sup 16/ ~ 1.4 /spl倍/ 10/sup 19/cm/sup -3/。
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引用次数: 0
Longitudinal mode behavior of a lateral-junction edge-emitting laser diode 侧结边发射激光二极管的纵模特性
J.M. Zanardi Ocampo, P. Vaccaro, S. Saravanan, K. Kubota, T. Aida
Optoelectronic devices based on lateral junctions are particularly interesting because carriers are injected perpendicular to both the optical cavity and the direction of quantum confinement (i.e. the epitaxial growth direction). An edge-emitting InGaAs/GaAs laser diode with a lateral p-n junction was fabricated by MBE on a patterned GaAs (311)A substrate. The injection current dependence of the multimode emission was studied. Experimental results revealed a gain spectrum that favors long-wavelength modes as injection current increases.
基于侧结的光电器件特别有趣,因为载流子注入垂直于光腔和量子约束方向(即外延生长方向)。在GaAs (311) a图片化衬底上,利用MBE技术制备了具有侧向p-n结的InGaAs/GaAs边缘发射激光二极管。研究了注入电流对多模发射的依赖性。实验结果表明,随着注入电流的增加,增益谱有利于长波模式。
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引用次数: 0
Thermal and electrical characteristics of a multilayer thermionic device 多层热电子器件的热学和电学特性
B. Lough, S. P. Lee, Z. Dou, R. Lewis, C. Zhang
We report our recent experimental and numerical investigation into the thermal and electrical transport in GaAs-AlGaAs semiconductor multilayer structures. Electrical and thermal conduction measurements were performed on multilayer structures to determine the temperature gradient across the sample. AuGe was used for top contact metallisation, and an InGa eutectic for bottom substrate contact. Metallisation contacts were also grown directly onto the substrate in order to compare results with and without the device included. By using a variable load resistor connected in series with the device, we can accurately determine the current-voltage characteristics of the device. Thus the power input can be obtained. The temperature distribution on the top and bottom substrate was measured with micro thermocouples. Since the cooling device is grown on an n-type semiconductor substrate the effects of joule heating in the substrate had to be considered. Treating the substrate as bulk material and calculating joule heating showed that this effect is negligible. Comparing experimental measurements of the device and of the substrate alone support this. The experimental I-V characteristics of the device differ significantly in shape from theoretical I-V characteristics. This may be due to that fact that space-charge effects are not included in the currently accepted model (Richardson's equation). Due to the small size of the devices and therefore very large electric fields, this effect may be important. Work is currently being carried out to modify the model. The devices studied so far have been made from undoped GaAs-AI/sub 0.07/Ga/sub 0.03/As heterostructures. For large cooling power it is a requirement that the conduction band of the layers be close to the Fermi level.
我们报告了我们最近对GaAs-AlGaAs半导体多层结构中的热电输运的实验和数值研究。在多层结构上进行电导和热传导测量,以确定样品的温度梯度。顶部触点金属化使用了AuGe,底部触点金属化使用了InGa共晶。金属化触点也直接生长在基板上,以便比较有和没有包含设备的结果。通过与器件串联的可变负载电阻,我们可以准确地确定器件的电流-电压特性。这样就可以得到输入的功率。用微热电偶测量了衬底和顶部的温度分布。由于冷却装置生长在n型半导体衬底上,因此必须考虑衬底中焦耳加热的影响。将衬底作为块状材料并计算焦耳热表明,这种影响可以忽略不计。比较器件和衬底单独的实验测量结果支持这一点。该器件的实验I-V特性与理论I-V特性在形状上有显著差异。这可能是由于目前公认的模型(理查森方程)中没有包括空间电荷效应。由于器件尺寸小,因此电场非常大,因此这种效应可能很重要。目前正在进行修改该模型的工作。目前所研究的器件均由未掺杂的GaAs-AI/sub 0.07/Ga/sub 0.03/As异质结构制成。对于大的冷却功率,要求层的导带接近费米能级。
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引用次数: 1
期刊
2002 Conference on Optoelectronic and Microelectronic Materials and Devices. COMMAD 2002. Proceedings (Cat. No.02EX601)
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