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Calibrating On-Wafer Probes to the Probe Tips 校准晶圆上探针到探针尖端
Pub Date : 1992-12-01 DOI: 10.1109/ARFTG.1992.327008
Dylan F. Williams, R. Marks
This paper investigates the accuracy of on-wafer scattering-parameter calibrations at the probe tips. Data show the extent to which certain probe-tip calibrations are consistent with one another and applicable to the characterization of devices or circuits fabricated on different wafers or embedded in different transmission-line media. Calibrations to the probe tips are especially well suited to lower-frequency microwave measurements. Further results demonstrate conditions under which probe-tip calibrations fail.
本文研究了探针端片上散射参数校准的精度。数据显示某些探针尖校准彼此一致的程度,并适用于在不同晶圆上制造或嵌入不同传输在线介质中的器件或电路的表征。探针尖端的校准特别适合于低频微波测量。进一步的结果证明了探针尖端校准失败的条件。
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引用次数: 41
Frequency and Time Domain Characterization of High-Speed Digital Circuit Interconnects in a Multilayer Printed Circuit Board 多层印刷电路板中高速数字电路互连的频域和时域特性
Pub Date : 1992-12-01 DOI: 10.1109/ARFTG.1992.327006
A. Agrawal
The digital interconnects are characterized in frequency domain by measuring the scattering matrices using network analyser. These scattering matrices are used to find frequency dependent resistance, inductance, capacitance, and conductance of the coupled transmission lines. In time domain, the lossy transmission line parameters are used to simulate the transient response to analyse the skin-effect and dielectric loss effect on the signal propagation and cross-talk.
利用网络分析仪测量数字互连的散射矩阵,对数字互连进行频域表征。这些散射矩阵用于计算耦合传输线的频率相关电阻、电感、电容和电导。在时域上,采用有耗传输线参数模拟瞬态响应,分析了集肤效应和介电损耗对信号传播和串扰的影响。
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引用次数: 1
Using Microwave Coupled Resonator Filters to Characterize Thick Film Interconnects for Highfrequency Signal Propagation 用微波耦合谐振器滤波器表征高频信号传播的厚膜互连
Pub Date : 1992-12-01 DOI: 10.1109/ARFTG.1992.327002
R. Grzybowski, D. B. Jensen, M. Gilden, R. J. Bacher
All interconnect mediums are expected to conduct signals with a minimum amount of corruption. This is particularly important when the signals contain high frequency fundamental or harmonic information. For microwave applications or very densely packed circuit modules, thin film conductors are typically the interconnect medium of choice. Alternatively, thick film interconnects have served well for many applications. The question this work seeks to answer is this. With the improved thick film material sets and 300 to 400 mesh screen printing procedures available today, at approximately what frequency or conditions should the thick filmhhin film tradeoff decision be reconsidered? This question is especially poignant for applications in which circuit packing density is not the main driver. Stated another way, to what frequency regime do the imperfections in the interconnect pattern profile introduced by the screen printing operation, or material properties intrinsic to the thick film pastes, make thick film passive structures and interconnects inferior to thin film counterparts?
所有互连介质都应以最小的损坏量传导信号。当信号包含高频基频或谐波信息时,这一点尤为重要。对于微波应用或非常密集的电路模块,薄膜导体通常是选择的互连介质。另外,厚膜互连已经很好地服务于许多应用。这项工作试图回答的问题是这样的。随着改进的厚膜材料集和300到400目丝网印刷程序今天可用,在大约什么频率或条件下,厚膜和薄膜权衡的决定应该重新考虑?对于电路封装密度不是主要驱动因素的应用,这个问题尤其尖锐。换句话说,在什么样的频率范围内,由丝网印刷操作引入的互连模式的缺陷,或厚膜浆料固有的材料特性,使厚膜无源结构和互连不如薄膜对应物?
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引用次数: 0
T/R Modules for Automated Assembly and Test Using Flip Chip and LTCC Packaging 用于倒装芯片和LTCC封装的自动组装和测试的T/R模块
Pub Date : 1992-12-01 DOI: 10.1109/ARFTG.1992.327000
David K. Sakamoto
This paper discusses the use of Low Temperature Cofired Ceramic (LTCC) packages and flip chip MMICs designed for automated assembly and test in T/R module applications. The reduction of the number of components, elimination of assembly steps, and the automated assembly and test of T/R modules that is thus achieved is also discussed. The use of multi-layer LTCC allows dense packaging. DC lines can be routed on multiple layers, and different types of RF configurations ¿ microstrip, stripline, and coplanar waveguide (CPW) ¿ can be realized on the same substrate. RF cross-overs with high isolation between lines can be achieved by means of buried transmission lines and ground planes. The substrate can be fabricated to be used in a conventional metal housing, or the substrate can be fabricated to function as both the substrate and housing at the same time. With the latter method, walls are built up using the ceramic tape. These walls can also contain circuitry, allowing for higher packaging density. Flipped GaAs chips utilizing CPW structures eliminate costly backside processing of MMIC wafers. Flip chips used in T/R modules are thicker than conventional chips, 25 mils vs. 4 mils, thus providing a much more robust chip for handling by high speed automated assembly equipment. The use of flip chips simplifies the assembly procedure by eliminating wire bonds, since the solder attachment of the flip chip to the substrate serves as both die attach and interconnect.
本文讨论了低温共烧陶瓷(LTCC)封装和倒装芯片mmic设计用于自动化组装和测试在T/R模块应用。本文还讨论了减少组件数量、消除装配步骤以及实现T/R模块的自动化装配和测试。多层LTCC的使用允许密集封装。直流线路可以在多层上布线,并且可以在同一衬底上实现不同类型的射频配置-微带,带状线和共面波导(CPW) -。线路间高隔离的射频交叉可以通过埋设传输线和地平面来实现。基板可以被制造成用于传统的金属外壳,或者基板可以被制造成同时作为基板和外壳。用后一种方法,墙壁是用陶瓷胶带建立起来的。这些壁也可以包含电路,允许更高的封装密度。利用CPW结构的翻转GaAs芯片消除了MMIC晶圆昂贵的背面加工。T/R模块中使用的倒装芯片比传统芯片更厚,25密尔比4密尔,因此为高速自动化装配设备提供了更坚固的芯片。倒装芯片的使用通过消除线键来简化组装过程,因为倒装芯片与基板的焊料连接既充当芯片连接又充当互连。
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引用次数: 1
Measurements of Dynamic Current in Switching CMOS Buffer 开关CMOS缓冲器中动态电流的测量
Pub Date : 1992-12-01 DOI: 10.1109/ARFTG.1992.326986
Oystein Pedersen, B. Flaten
As the speed and complexity of digital systems increase, the performance of the power system becomes more important. Due to switching in digital circuits, the power system will also contain high frequency current components. This high frequency currents introduces noise in the system and the result is reduced noise margins [1,2]. For CMOS circuits the trend is towards lower voltages and the noise in the system becomes more critical. For a designer, the goal is to design the power system in such a way that the noise from the switching circuits is reduced to a minimum [3]. To meet this goal, the designer need to know the behavior of the IC during switching; i.e. the current transients in power pins. There are two main problems: (1 ) the power system must supply the IC with the current needed. (2) the current transient in one IC should not influence the power to another IC. This paper focus on the current in ICs, and presents a method for measuring the transient current in power pins in digital circuits.
随着数字系统运行速度和复杂性的提高,电力系统的性能变得越来越重要。由于数字电路中的开关,电力系统也将包含高频电流元件。这种高频电流在系统中引入噪声,其结果是噪声裕度降低[1,2]。对于CMOS电路,趋势是向低电压和系统中的噪声变得更加关键。对于设计人员来说,目标是设计电源系统,使开关电路的噪声降低到最小。为了实现这一目标,设计人员需要了解IC在开关过程中的行为;即电源引脚中的瞬时电流。主要有两个问题:(1)电源系统必须为集成电路提供所需的电流。(2)一个集成电路中的暂态电流不应影响到另一个集成电路的功率。本文重点研究了集成电路中的电流,提出了一种测量数字电路中电源引脚暂态电流的方法。
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引用次数: 0
Planar Resistors for Probe Station Calibration 探头站标定用平面电阻器
Pub Date : 1992-12-01 DOI: 10.1109/ARFTG.1992.326993
D. Walker, D.F. Williams, J. M. Morgan
This paper investigates the effects of variations in sheet resistance, geometry, distance from the probe tip, and fabrication processes on the impedance of planar nickel-chromium resistors. Resistor reactance is a strong function of film resistance, but depends only weakly on geometry and distance from the probe tip. Photoresist contamination in the resistive film induces more complicated impedance behavior, even at low frequencies. The impact on circuit design and time- and frequency-domain calibrations is considered in light of these results.
本文研究了平面镍铬电阻器的片阻、几何形状、与探针尖端的距离以及制作工艺对电阻阻抗的影响。电阻器的电抗是薄膜电阻的一个重要函数,但对几何形状和到探针尖端的距离的影响很小。光刻胶污染在电阻膜诱发更复杂的阻抗行为,即使在低频率。根据这些结果考虑了对电路设计和时频域校准的影响。
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引用次数: 30
Characterizing Blind Mate Connectors 盲配连接器的特性
Pub Date : 1992-12-01 DOI: 10.1109/ARFTG.1992.327009
B. Oldfield
Blind Mate Microwave connectors allow the possibility of assembling microwave subsystems like LEGGOS. There are many versions of blind mate connectors on the market with little or no standardization. Blind mate connectors are mostly ignored by the connector standards committees. This paper will propose a method of characterizing blind mate connectors and present data on three types of blind mates to 60 Ghz.
盲配微波连接器允许像乐高积木一样组装微波子系统。市场上有许多版本的盲配连接器,很少或没有标准化。盲配连接器通常被连接器标准委员会所忽视。本文将提出一种表征盲配对连接器的方法,并提供三种60 Ghz盲配对的数据。
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引用次数: 0
Coplanar Versus Microstrip Measurements of Millimetre-Wave Devices 毫米波器件的共面与微带测量
Pub Date : 1992-12-01 DOI: 10.1109/ARFTG.1992.326996
P. Walters, R. Pollard, J. Richardson, P. Gamand, P. Suchet
The purpose of this paper is to identify the differences between millimetre-wave small-signal scattering parameter device measurements on-wafer in coplanar and microstrip test formats. Calibration in coplanar and microstrip is examined to determine the measurement reference planes and possible calibration problems in the millimetre-wave frequency range. Different device model reference planes are considered.
本文的目的是识别毫米波小信号散射参数器件在晶圆上测量的共面和微带测试格式的区别。研究了共面和微带的校准,确定了毫米波频率范围内的测量参考面和可能存在的校准问题。考虑了不同的器件模型参考平面。
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引用次数: 1
Measuring Package and Interconnect Model Parameters Using Distributed Impedance 使用分布阻抗测量封装和互连模型参数
Pub Date : 1992-12-01 DOI: 10.1109/ARFTG.1992.327003
B. Janko, Pete Decher
The method developed here employs time domain reflectometry (TDR) techniques to measure model parameters of a lead in an interconnect or a package. TDR techniques have been broadly used in testing interconnect networks, since reflected waveforms provide excellent visualization of the signal path and waveform features can be readily associated with physical features of the device. What has not been widely appreciated is that quantitative values of network model parameters can be as easily extracted with TDR, in a manner that can make lumped model generation for an interconnect an easy job. The technique described here will be usefbl when a device already exists, for model pnmmeter geiieration from measurements, or, in cases where theoretical models also exist, for model parameter venficatioii. Although it can be used for a large variety of distributed impedance function carries the information about the local inductance and capacitance of the lead. Thus, lumped element LCZ models can be derived knowing this function. All the necessary calculations can easily be performed in time domain, thus avoiding artifacts that can arise with time-frequency domain transformations.
该方法采用时域反射法(TDR)测量互连或封装中引线的模型参数。TDR技术已广泛用于互连网络测试,因为反射波形提供了信号路径的良好可视化,并且波形特征可以很容易地与器件的物理特征相关联。没有被广泛认识到的是,网络模型参数的定量值可以很容易地用TDR提取,这种方式可以使互连的集总模型生成变得容易。当设备已经存在时,此处描述的技术将用于从测量中生成模型尺寸,或者在理论模型也存在的情况下,用于模型参数验证。虽然它可以用于各种各样的分布阻抗函数,但它携带着引线的局部电感和电容的信息。因此,知道这个函数就可以得到集总元素LCZ模型。所有必要的计算都可以很容易地在时域中执行,从而避免了时频域变换可能产生的伪影。
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引用次数: 7
Save The "Thru" in the A.N.A. Calibration 保存“通过”在A.N.A.校准
Pub Date : 1992-12-01 DOI: 10.1109/ARFTG.1992.327007
A. Ferrero, U. Pisani, F. Sanpietro
The conventional network analyzer (NWA) two-port calibration procedures require a standard thru line to be connected between the ports. Unfortunately in many applications, for example when measuring MMIC or on-wafer devices with not aligned ports, a custom thru line must be used. The procedure here applied overcomes the difficulty due to the poor knowledge of this thru element since it is based on a generic reciprocal unknown two port structure, provided that its S21 phase shift is roughly known. Some experimental comparisons with other well sound calibration techniques will be here presented where different reciprocal two-port structures were used as unknown thru.
传统的网络分析仪(NWA)双端口校准程序需要在端口之间连接标准直通线。不幸的是,在许多应用中,例如当测量端口未对齐的MMIC或晶圆上器件时,必须使用自定义直通线。这里应用的程序克服了由于对该贯穿元件知之甚少而造成的困难,因为它是基于一般的互易未知的两端口结构,只要它的S21相移大致已知。这里将介绍一些与其他井声校准技术的实验比较,其中使用不同的倒数双端口结构作为未知通道。
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引用次数: 5
期刊
40th ARFTG Conference Digest
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