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Cavity-coupled narrow bandwidth Fano resonance in dielectric metasurface 介质元表面中的腔耦合窄带宽法诺共振
Pub Date : 2023-11-28 DOI: 10.1117/12.2685341
Jiachen Yu, Qiqige Wulan, Li Xing, Zhijun Liu
Dielectric metasurfaces show great potential in light manipulation for applications such as optical filters and semiconductor metasurfaces for generating entangled photons. These applications critically rely on resonant mode properties in micro/nano-structured metasurfaces. Several modes including electric dipole (ED), magnetic dipole (MD), and quasi-bound state in the continuum resonance have been widely explored with the merits of high quality factor and narrow bandwidth. However, these reported metasurface resonances generally do not absorb light due to the transparency of dielectric materials, which limits their usage in some applications such as thermal emission and photon detection etc. In this work, we demonstrate a new class of dielectric metasurfaces, which exhibit the features of both strong light absorption and narrower bandwidth. Our fabricated metasurface consists of a Si cuboid array on top of a SiO2 spacer layer backed with a metallic Cu film. The cavity mode within the SiO2 spacer couples with electrical dipole in the Si cuboid, leading to an asymmetric narrow bandwidth Fano resonance within our metasurface structure. Our spectral measurements show that the Fano resonance occurs at the wavelength of 4.19 μm. It has a strong absorption efficiency of 65.8% and a narrow bandwidth of 32.5nm, corresponding to a quality factor as high as 112. As an example to reveal the potentials of our metasurface, the Fano resonance is applied in refractive index sensing with a sensitivity of 518.75nm/RIU and a high figure-of-merit (FoM) of 14.82 RIU-1. These results indicate that cavity-coupled dielectric metasurface presents an effective way for obtaining both strong light absorption and narrow bandwidth, opening new space for metasurface applications.
介电元表面在光操纵方面显示出巨大的应用潜力,如光学滤波器和用于产生纠缠光子的半导体元表面。这些应用主要依赖于微/纳米结构元表面的共振模式特性。包括电偶极子(ED)、磁偶极子(MD)和连续共振中的准束缚态在内的几种模式已被广泛探索,其优点是品质因数高、带宽窄。然而,由于介电材料的透明性,这些已报道的元表面共振一般不吸收光,这限制了它们在热发射和光子探测等应用中的使用。在这项工作中,我们展示了一类新的介电元表面,它同时具有强光吸收和窄带宽的特点。我们制作的元表面由一个硅立方体阵列组成,阵列位于以金属铜膜为背衬的二氧化硅间隔层之上。二氧化硅间隔层中的空腔模式与硅立方体中的电偶极子耦合,在我们的元表面结构中产生了非对称窄带宽法诺共振。我们的光谱测量结果表明,法诺共振发生在波长 4.19 μm 处。它的吸收效率高达 65.8%,带宽窄至 32.5 纳米,品质因数高达 112。作为揭示我们的元表面潜力的一个例子,法诺共振被应用于折射率传感,其灵敏度为 518.75nm/RIU,优等系数(FoM)高达 14.82RIU-1。这些结果表明,空腔耦合介质元表面是获得强光吸收和窄带宽的有效途径,为元表面的应用开辟了新的空间。
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引用次数: 0
Comparative research of mirror systems for extreme ultraviolet lithography illuminator 极紫外光刻照明器反射镜系统的比较研究
Pub Date : 2023-11-28 DOI: 10.1117/12.2686671
Shan Gao, E. Tsyganok, Galina Romanova
Illuminator is one of the important components of extreme ultraviolet lithography system. Industrial extreme ultraviolet lithography illuminator uses two compound eyes and relay system, which can realize variety of illumination modes. But the manufacture and assembly of compound eyes are difficult. Therefore, we would like to design illuminators, which use such as Offner-relay system, quad elliptical mirrors, or other mirror systems. These systems do not have more complex surfaces, easier to assembly. Analyze advantages and disadvantages of these systems, and then discuss the possibility of using these systems in industrial extreme ultraviolet lithography.
照明器是极紫外光刻系统的重要组成部分之一。工业级极紫外光刻照明器采用两个复眼和中继系统,可实现多种照明模式。但复眼的制造和装配比较困难。因此,我们希望设计使用 Offner-relay 系统、四椭圆镜或其他镜面系统的照明器。这些系统没有更复杂的表面,更容易组装。分析这些系统的优缺点,然后讨论在工业极紫外光刻中使用这些系统的可能性。
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引用次数: 0
An on-chip atomic layer deposited waveguide amplifier with net gain at C-band 具有 C 波段净增益的片上原子层沉积波导放大器
Pub Date : 2023-11-28 DOI: 10.1117/12.2687603
Haotian Zhang, Shen-jun Zhu, Xiaoyan Zhou, Lin Zhang
Rare-earth-ion-doped materials provide many opportunities for on-chip amplifiers and light sources, which are important to silicon photonics. Here, we report an erbium-doped waveguide amplifier using atomic layer deposition. Method optimization yields erbium-doped Al2O3 films with excellent optical properties, which are showcased by the high-performance photoresist-erbium-doped Al2O3 hybrid amplifiers. We demonstrate signal enhancements (SE) of 30.4 dB and 16 dB at 1531.6 nm and 1550 nm in a 3.55-cm-long amplifier, respectively, corresponding to net gains of 8.4 dB and 5 dB. Furthermore, SE and gain increase with waveguide length under sufficient pumping, suggesting the potential for achieving greater gains for longer erbium-doped waveguide amplifiers. This work represents an important step towards high-gain rare-earth-ion-doped amplifiers and the integration of active devices on silicon platforms.
掺稀土离子材料为芯片放大器和光源提供了许多机会,这对硅光子学非常重要。在此,我们报告了一种使用原子层沉积技术的掺铒波导放大器。方法优化产生的掺铒 Al2O3 薄膜具有优异的光学特性,高性能的光致抗蚀剂-掺铒 Al2O3 混合放大器展示了这一特性。在 3.55 厘米长的放大器中,1531.6 纳米和 1550 纳米波长的信号增强(SE)分别为 30.4 分贝和 16 分贝,净增益分别为 8.4 分贝和 5 分贝。此外,在充分抽运的情况下,SE 和增益随波导长度的增加而增加,这表明更长的掺铒波导放大器有可能获得更大的增益。这项研究是向高增益掺稀土离子放大器和在硅平台上集成有源器件迈出的重要一步。
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引用次数: 0
A novel Rayleigh lidar signal denoising algorithm for far-field noise suppression and high-accuracy retrieval 用于远场噪声抑制和高精度检索的新型雷利激光雷达信号去噪算法
Pub Date : 2023-11-28 DOI: 10.1117/12.2687008
Tong Wu, Degang Xu, K. Zhong, Xianzhong Zhang, Xinqi Li, Xiaojian Zhang, Jianquan Yao
A novel signal denoising framework (EEMD-VMD-IMWOA) for Rayleigh lidar is proposed to better suppress noise in an atmospheric lidar echo signal and improve retrieval accuracy. The ensemble empirical mode decomposition (EEMD) is used to retain the intrinsic mode functions (IMFs) of signal as the low-frequency effective component. Based on the denoising ability of variational mode decomposition (VMD) under high noise signal, the IMFs with noise is further denoised by VMD to obtain high-frequency effective component, wherein the improved whale optimization algorithm (IMWOA) is used to get the optimal decomposition layer K and the quadratic penalty α of VMD. Then, the low-frequency and high-frequency effective components are reconstructed to gain denoised signal. The simulation results show that the denoising effect of EEMD-VMD-IMWOA is superior to Wavelet threshold, EEMD and VMD, especially the far-field noise interference can be suppressed. Under the condition that the temperature retrieval error is less than ± 10 K, when the integration time is only 600s, the effective retrieval altitude can reach 59.6km, which is 17.3% higher than that without denoising. Finally, the retrieval accuracy of the measured lidar signal is significantly improved by EEMD-VMD-IMWOA.
为更好地抑制大气激光雷达回波信号中的噪声并提高检索精度,提出了一种新颖的雷利激光雷达信号去噪框架(EEMD-VMD-IMWOA)。利用集合经验模态分解(EEMD)保留信号的固有模态函数(IMF)作为低频有效成分。基于变异模态分解(VMD)在高噪声信号下的去噪能力,利用 VMD 进一步去噪,得到高频有效分量,并利用改进的鲸鱼优化算法(IMWOA)得到最佳分解层 K 和 VMD 的二次惩罚α。然后,对低频和高频有效成分进行重构,以获得去噪信号。仿真结果表明,EEMD-VMD-IMWOA 的去噪效果优于小波阈值、EEMD 和 VMD,尤其能抑制远场噪声干扰。在温度检索误差小于±10 K的条件下,当积分时间仅为 600s 时,有效检索高度可达 59.6km,比未去噪时提高了 17.3%。最后,EEMD-VMD-IMWOA 显著提高了激光雷达测量信号的检索精度。
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引用次数: 0
SERS mapping of Mycobacterium tuberculosis single-cell with different drug resistance 具有不同抗药性的结核分枝杆菌单细胞 SERS 图谱
Pub Date : 2023-11-28 DOI: 10.1117/12.2688992
Andrey Y. Zyubin, Anastasia Lavrova, Ilia Samusev
The drug resistance of Mycobacterium tuberculosis (MbT) remains a serious challenge to global public health as extensively drug resistant tuberculosis usually leads to a lethal outcome. In the case of diseases with resistant strains, it is extremely important to identify a specific strain as soon as possible in order to start an adequate therapy. We continue investigation of deactivated M. tuberculosis strains of the Beijing family by Raman spectroscopy method. Strains under the study had different drug sensitivity: sensitive, multi and extensively drug resistant. Samples were investigated by Surface-Enhanced Raman spectroscopy using 785 nm diode pumped laser excitation source in fingerprint region. As a result, both glutathione bands and DNA methylation using 5-methylcytosine spectral biomarkers has been investigated. These differences distinguish between drug-sensitive and drug-resistant strains and also between strains. We suppose that the obtained results can be useful for new fast diagnostic tools development for determining various MbT strains in clinical medical practice.
结核分枝杆菌(MbT)的耐药性仍然是全球公共卫生面临的严峻挑战,因为广泛耐药的结核病通常会导致死亡。在出现耐药菌株的情况下,尽快确定特定菌株以开始适当的治疗极为重要。我们继续利用拉曼光谱法研究北京家族的失活结核杆菌菌株。研究中的菌株对不同药物具有不同的敏感性:敏感菌株、多重耐药菌株和广泛耐药菌株。样品采用表面增强拉曼光谱,使用 785 nm 的二极管泵浦激光激发光源,在指纹区进行研究。因此,利用 5-甲基胞嘧啶光谱生物标记物对谷胱甘肽带和 DNA 甲基化进行了研究。这些差异区分了药物敏感菌株和耐药菌株,也区分了不同的菌株。我们认为,所获得的结果将有助于开发新的快速诊断工具,以便在临床医疗实践中确定各种 MbT 菌株。
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引用次数: 0
A photonic approach to generate arbitrary chirp microwave waveforms using a direct modulated laser source 利用直接调制激光源生成任意啁啾微波波形的光子方法
Pub Date : 2023-11-28 DOI: 10.1117/12.2687616
Md. Danish Nadeem, Chandan Kumar, S. Raghuwanshi, Rajnish Raj, Ritesh Kumar, Santosh Kumar
In this work, a novel microwave photonic approach is applied to generate an arbitrary chirp microwave waveform in the Ku band that possesses a high chirp rate. Chirp microwave signals can be produced in a variety of ways, the most common of which is the shaping of the temporal pulse and the mapping of the wavelength to the time. The usage of Kuband frequencies is widespread in modern radar applications, such as high-resolution mapping and satellite altimetry. The range-Doppler resolution of a radar system can be enhanced by improving its chirp rate, time-bandwidth product, and center frequency. The proposed approach in this work is based on the direct modulated Laser source and polarization controller. The theoretical and simulation analysis has been done to generate a dual linear chirp microwave signal in the Ku band with a center frequency of 12 GHz.
在这项工作中,应用了一种新颖的微波光子方法,在 Ku 波段产生具有高啁啾率的任意啁啾微波波形。啁啾微波信号可以通过多种方式产生,其中最常见的是时间脉冲整形和波长与时间的映射。Kuband 频率在高分辨率测绘和卫星测高等现代雷达应用中得到广泛使用。雷达系统的测距-多普勒分辨率可通过改进啁啾率、时间-带宽乘积和中心频率来提高。本研究提出的方法基于直接调制激光源和偏振控制器。通过理论和仿真分析,在 Ku 波段产生了中心频率为 12 千兆赫的双线性啁啾微波信号。
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引用次数: 0
Steerable dispersed beam for wireless optical power transfer 用于无线光功率传输的可转向分散光束
Pub Date : 2023-11-28 DOI: 10.1117/12.2688614
Ngoc-Luu Nguyen, Khanh-Hung Nguyen, Nadeem Javed, Jinyong Ha
This study provides a novel two-dimensional beam steering mechanism that takes advantage of wireless optical power systems utilizing diverging angular dispersion laser beams and the resonant beam charging technique. The system exhibits significant improvements compared to conventional systems that utilize pencil beams. These enhancements include reducing scanning time, capable of mitigating inherent errors, and increasing the ability to charge resonant cavities continuously. Specifically, our system exhibits scanning times that are 1.2 times faster than traditional systems. This opens the pathway for practical deployments of beam steering for RBC-based WOPT, enabling real-time charging and communication.
这项研究提供了一种新颖的二维光束转向机制,利用发散角色散激光束和谐振光束充电技术,发挥无线光功率系统的优势。与利用铅笔光束的传统系统相比,该系统具有明显的改进。这些改进包括缩短扫描时间,减少固有误差,以及提高对谐振腔持续充电的能力。具体来说,我们系统的扫描时间比传统系统快 1.2 倍。这为基于 RBC 的 WOPT 光束转向的实际部署开辟了道路,使实时充电和通信成为可能。
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引用次数: 0
Low phase noise optical delay line optoelectronic oscillator uncertainty evaluation 低相位噪声光延迟线光电振荡器不确定性评估
Pub Date : 2023-11-28 DOI: 10.1117/12.2689283
Patrice Salzenstein
In this paper, we present the operation of an optoelectronic oscillator. We look at the evaluation of the uncertainty associated with the measurement of the phase noise of the signal emitted by this oscillator. Uncertainty on the phase noise measured for a low phase noise compact optical delay line optoelectronic oscillator is evaluated as ±1.5 dB at 2 σ.
本文介绍了光电振荡器的工作原理。我们研究了与测量该振荡器发出的信号相位噪声相关的不确定性评估。低相位噪声紧凑型光延迟线光电振荡器的相位噪声测量不确定性在 2 σ 时为 ±1.5 dB。
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引用次数: 0
Ultra-wide angle metalens design with ray-based and wave-based tools 利用射线和波纹工具进行超广角金属膜设计
Pub Date : 2023-11-28 DOI: 10.1117/12.2686361
Li-Ce Hu, Yijun Ding
Designing a metalens of millimeter scale or larger is challenging. We demonstrate how to combine a ray-based automatic design tool with a wave-based inverse design tool to design a mm-size ultra-wide angle metalens imaging system. The ray-based approach parametrizes the distribution of meta-atom design parameters over the surface with a polynomial, and treat the metalens similarly to a grating. The ray-based design tool considers both the transmission and the phase of the meta-atoms as functions of the incident angle. The ray-based approach is fast and robust. It can complete the optimization of a mm-size metalens in a few minutes. This design can then serve as a starting point for a wave-based inverse design tool. The wave-based inverse design tool is applied to further optimize the metalens with arbitrary distribution of meta-atom design parameters. The additional design freedom offered by the arbitrary distribution further increases the light collection efficiency and image resolution. Finally, the design performance is validated with a finite difference time domain (FDTD) algorithm. All analysis results agree well, show that the final ultra-wide angle metalens design is close to diffraction limited. These results demonstrate the effectiveness of our proposed workflow by taking advantage of both the ray-based and the wave-based design tools.
设计毫米级或更大的金属膜是一项挑战。我们展示了如何将基于射线的自动设计工具与基于波的逆向设计工具相结合,来设计毫米级超广角金属膜成像系统。基于射线的方法用多项式对元原子设计参数在表面上的分布进行参数化,并将金属膜与光栅进行类似处理。基于射线的设计工具将元原子的传输和相位视为入射角的函数。基于射线的方法既快速又稳健。它可以在几分钟内完成毫米级金属膜的优化。这种设计可以作为基于波的逆向设计工具的起点。基于波的逆向设计工具可用于进一步优化元原子设计参数任意分布的金属膜。任意分布提供的额外设计自由度进一步提高了光收集效率和图像分辨率。最后,使用有限差分时域(FDTD)算法对设计性能进行了验证。所有分析结果一致,表明最终的超广角金属透镜设计接近衍射限制。这些结果表明,我们提出的工作流程同时利用了基于射线和基于波的设计工具,因而非常有效。
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引用次数: 0
Real-time aimer based on special-shaped microlens and optical fiber bundle 基于异形微透镜和光纤束的实时瞄准器
Pub Date : 2023-11-28 DOI: 10.1117/12.2689239
Anzhi Wang, Jiabin Wang, Zhaoxu Gan, Yuxiang Yan, Shengjia Wang, Qi Yan, Tao Geng, Shuang Chen, Pengfei Wang, Weimin Sun
High precision alignment between the fiber core in the focal plane and the image of the target star is of great significance for the observation of multi-target telescopes. In this work, we propose and demonstrate a Special-shaped Micro-lens Aimer for Real-time Targeting, namely SMART, combining a special-shaped microlens and a fiber bundle to realize online alignment and improve the coupling efficiency of fibers. The platform in the center of the microlens transmits the starlight to the science fiber of the fiber bundle without changes in focal ratio. Six side micro-lenses couple leakage light to six feedback fibers and return misalignment signals. The structural parameters of SMART are well designed. Fresnel diffraction theory is applied to build a model for simulating the performance of SMART. In the SMART measurement, a pinhole with a diameter of 200 μm is used to imitate the effect of atmospheric turbulence during astronomical observations. Experimental results indicate that when the image spot is offset relative to the science fiber, the misaligned direction and displacement distance are identified by the signal of feedback fibers in SMART with a resolution of 0.02 mm and a detection range of 0.08 mm to 0.26 mm.
焦平面光纤纤芯与目标星图像之间的高精度对准对于多目标望远镜的观测具有重要意义。在这项工作中,我们提出并演示了一种用于实时瞄准的异形微透镜瞄准器,即 SMART,它将异形微透镜和光纤束结合在一起,实现了在线对准并提高了光纤的耦合效率。微透镜中心的平台将星光传输到光纤束的科学光纤,而不会改变焦比。六侧微透镜将漏光耦合到六根反馈光纤,并返回失准信号。SMART 的结构参数经过精心设计。菲涅尔衍射理论用于建立模拟 SMART 性能的模型。在 SMART 测量中,使用了一个直径为 200 μm 的针孔来模仿天文观测过程中的大气湍流效应。实验结果表明,当图像点相对于科学光纤发生偏移时,SMART 的反馈光纤信号可识别出错位方向和位移距离,分辨率为 0.02 毫米,检测范围为 0.08 毫米至 0.26 毫米。
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引用次数: 0
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SPIE/COS Photonics Asia
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