A low-loss and wideband silicon polarizing beam splitter is demonstrated with the assistance of a nano-bridge waveguide. Transverse magnetic light can be coupled to the cross port through the nano-bridge waveguide, while the transverse electric light comes out mainly from the through port. The designed device has a coupling length of 19.6 μm, which can realize an extinction ratio of 32.43 dB for TM mode or 34.23 dB for TE mode at a 1565-nm wavelength. Compared with the conventional three-waveguide coupler structure, the proposed device is based on a resonant tunneling principle, which can help to effectively improve the fabrication tolerance. The device is fabricated with a commercial CMOS processing facility, which can achieve an extinction ratio of 23.07 dB for TM or 23.46 dB for TE mode with a low excess loss, and the extinction ratio of more than 10 dB can be realized in the wavelength range from 1525 to 1610 nm for both modes. The device performance can be further improved, which would facilitate its practical applications in commercial integrated optical circuits.
在纳米桥波导的帮助下，展示了一种低损耗、宽带硅偏振分光器。横向磁光可通过纳米桥波导耦合到十字端口，而横向电光则主要从直通端口发出。所设计器件的耦合长度为 19.6 μm，在波长为 1565nm 的情况下，TM 模式的消光比为 32.43 dB，TE 模式的消光比为 34.23 dB。与传统的三波导耦合器结构相比，该器件基于谐振隧道原理，可有效提高制造容差。该器件采用商用 CMOS 加工设备制造，可实现 23.07 dB 的 TM 消光比或 23.46 dB 的 TE 消光比，且过量损耗较低，在 1525 至 1610 nm 波长范围内，两种模式的消光比均可超过 10 dB。该器件的性能还可以进一步提高，这将有助于其在商用集成光路中的实际应用。
{"title":"Nano-wire bridge waveguide-assisted silicon polarizing beam splitter","authors":"Haipeng Liu, Jijun Feng, Jian Chen, Wenjie Zhou, Qunyu Bi, Heping Zeng","doi":"10.1117/12.2686511","DOIUrl":"https://doi.org/10.1117/12.2686511","url":null,"abstract":"A low-loss and wideband silicon polarizing beam splitter is demonstrated with the assistance of a nano-bridge waveguide. Transverse magnetic light can be coupled to the cross port through the nano-bridge waveguide, while the transverse electric light comes out mainly from the through port. The designed device has a coupling length of 19.6 μm, which can realize an extinction ratio of 32.43 dB for TM mode or 34.23 dB for TE mode at a 1565-nm wavelength. Compared with the conventional three-waveguide coupler structure, the proposed device is based on a resonant tunneling principle, which can help to effectively improve the fabrication tolerance. The device is fabricated with a commercial CMOS processing facility, which can achieve an extinction ratio of 23.07 dB for TM or 23.46 dB for TE mode with a low excess loss, and the extinction ratio of more than 10 dB can be realized in the wavelength range from 1525 to 1610 nm for both modes. The device performance can be further improved, which would facilitate its practical applications in commercial integrated optical circuits.","PeriodicalId":149506,"journal":{"name":"SPIE/COS Photonics Asia","volume":"10 1","pages":"127681I - 127681I-8"},"PeriodicalIF":0.0,"publicationDate":"2023-11-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139233622","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Shengtong Wang, Lvye Gao, Lin Luo, Fuyu Deng, Rui Ma, Xiaohao Wang, Xinghui Li
Absolute measurement has always been one of the important development directions of precision measurement, there are problems that the diffraction and mask working parameters are not considered in the positioning pulse analysis of the absolute code mask at present. Therefore, in order to solve the coupling optimal performance problem of absolute positioning code in actual work, an absolute code should be designed for working in the best parameter-model. In this paper, a multi-parameter model of absolute code working status is established, and the influence of working parameters on its positioning performance is analyzed respectively. The analysis shows that the distance and the angle between the mask and the grating, and the width of the unit code will affect the positioning accuracy. The three parameters restrict each other, and there is a coupling optimal solution. The optimal working state can be obtained through parameter analysis, so as to provide the design and installation parameter guidance of mask. The proposed research can help the practical application of absolute positioning measurement.
{"title":"Codes coupling optimization for absolute measurement","authors":"Shengtong Wang, Lvye Gao, Lin Luo, Fuyu Deng, Rui Ma, Xiaohao Wang, Xinghui Li","doi":"10.1117/12.2686019","DOIUrl":"https://doi.org/10.1117/12.2686019","url":null,"abstract":"Absolute measurement has always been one of the important development directions of precision measurement, there are problems that the diffraction and mask working parameters are not considered in the positioning pulse analysis of the absolute code mask at present. Therefore, in order to solve the coupling optimal performance problem of absolute positioning code in actual work, an absolute code should be designed for working in the best parameter-model. In this paper, a multi-parameter model of absolute code working status is established, and the influence of working parameters on its positioning performance is analyzed respectively. The analysis shows that the distance and the angle between the mask and the grating, and the width of the unit code will affect the positioning accuracy. The three parameters restrict each other, and there is a coupling optimal solution. The optimal working state can be obtained through parameter analysis, so as to provide the design and installation parameter guidance of mask. The proposed research can help the practical application of absolute positioning measurement.","PeriodicalId":149506,"journal":{"name":"SPIE/COS Photonics Asia","volume":"17 1","pages":"1276910 - 1276910-7"},"PeriodicalIF":0.0,"publicationDate":"2023-11-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139233982","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Xiao Zhang, Lihui Wang, Yuan He, Zhiwei Mou, Yiqi Cao
It is a challenge for conventional monocular-camera single-light source eye tracking methods to achieve high-speed eye tracking. Human gaze motion is a high-speed and miniature eye movement. Eye tracking requires a high-speed sampling frequency. In this work, an eye tracking method was proposed to overcomes the above limitation. The dual-ring infrared lighting source was designed to achieve bright and dark pupils in high-speed. The eye tracking method used a dual-ring infrared lighting source and synchronized triggers for the even and odd camera frames to capture bright and dark pupils. A pupillary corneal reflex was calculated by the center coordinates of the Purkinje spot and the pupil. A map function was established to map the relationship between pupillary corneal reflex and gaze spots. The gaze coordinate was calculated based on the mapping function. The detection time of each frame was less than five milliseconds, which achieved the purpose of high-speed eye tracking of the human gaze.
{"title":"High-speed eye tracking based on a synchronized image acquisition mechanism by dual-ring infrared lighting source","authors":"Xiao Zhang, Lihui Wang, Yuan He, Zhiwei Mou, Yiqi Cao","doi":"10.1117/12.2686717","DOIUrl":"https://doi.org/10.1117/12.2686717","url":null,"abstract":"It is a challenge for conventional monocular-camera single-light source eye tracking methods to achieve high-speed eye tracking. Human gaze motion is a high-speed and miniature eye movement. Eye tracking requires a high-speed sampling frequency. In this work, an eye tracking method was proposed to overcomes the above limitation. The dual-ring infrared lighting source was designed to achieve bright and dark pupils in high-speed. The eye tracking method used a dual-ring infrared lighting source and synchronized triggers for the even and odd camera frames to capture bright and dark pupils. A pupillary corneal reflex was calculated by the center coordinates of the Purkinje spot and the pupil. A map function was established to map the relationship between pupillary corneal reflex and gaze spots. The gaze coordinate was calculated based on the mapping function. The detection time of each frame was less than five milliseconds, which achieved the purpose of high-speed eye tracking of the human gaze.","PeriodicalId":149506,"journal":{"name":"SPIE/COS Photonics Asia","volume":"14 7","pages":"127660F - 127660F-9"},"PeriodicalIF":0.0,"publicationDate":"2023-11-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139232553","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Yuda Chen, Changhe Zhou, Yihan Wang, Xing Li, Wei Jia, Jin Wang
This paper proposed a transmission two-dimensional (2D) slanted grating based on a double-layer cylindrical structure. We used rigorous coupled-wave analysis (RCWA) and simulated annealing algorithm (SA) to optimize the grating parameters. Results show that the diffraction efficiency of the (-1,0) and (0,-1) order exceed 35% under normal incidence in the range of 429–468 nm wavelength for TE and TM polarization. Meanwhile, the total diffraction efficiency can reach up to 78%. We also discuss the tolerances for the grating parameters to ensure high quality manufacturing processes. The relatively large tolerances ensure fabrication of the two-dimensional slanted grating and provides the possibility for practical applications. The proposed 2D slanted grating can be applied to 2D exit pupil expansion, which is of great importance in AR/VR applications.
{"title":"Polarization-independent double-layer transmission two-dimensional slanted grating under normal incidence","authors":"Yuda Chen, Changhe Zhou, Yihan Wang, Xing Li, Wei Jia, Jin Wang","doi":"10.1117/12.2687062","DOIUrl":"https://doi.org/10.1117/12.2687062","url":null,"abstract":"This paper proposed a transmission two-dimensional (2D) slanted grating based on a double-layer cylindrical structure. We used rigorous coupled-wave analysis (RCWA) and simulated annealing algorithm (SA) to optimize the grating parameters. Results show that the diffraction efficiency of the (-1,0) and (0,-1) order exceed 35% under normal incidence in the range of 429–468 nm wavelength for TE and TM polarization. Meanwhile, the total diffraction efficiency can reach up to 78%. We also discuss the tolerances for the grating parameters to ensure high quality manufacturing processes. The relatively large tolerances ensure fabrication of the two-dimensional slanted grating and provides the possibility for practical applications. The proposed 2D slanted grating can be applied to 2D exit pupil expansion, which is of great importance in AR/VR applications.","PeriodicalId":149506,"journal":{"name":"SPIE/COS Photonics Asia","volume":"4 1","pages":"127681S - 127681S-7"},"PeriodicalIF":0.0,"publicationDate":"2023-11-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139235033","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Yiping Liu, Jinyu Wang, Peiliang Qi, Xinyi Yuan, Tian Ye, Di Zhang, Zhiyun Huang, Yi Yang, Xiaodi Tan
Polarization grating (PG) divides the incident wave into the left- and right-handed circularly polarized waves, the intensities of two waves depending on the state of polarization of incident wave. Large deflection angle of the commercial PG is usually made by the grating cascade due to the limit of grating period. While using the tensor polarization holography theory, arbitrary deflection angles of PGs have been designed, where the polarization-sensitive material phenanthraquinone-doped polymethyl methacrylate (PQ/PMMA) is utilized as the recording medium in our experiments. We have made PG with the deflection angle of 40°.
{"title":"Preparing polarization grating based on polarization holography","authors":"Yiping Liu, Jinyu Wang, Peiliang Qi, Xinyi Yuan, Tian Ye, Di Zhang, Zhiyun Huang, Yi Yang, Xiaodi Tan","doi":"10.1117/12.2688979","DOIUrl":"https://doi.org/10.1117/12.2688979","url":null,"abstract":"Polarization grating (PG) divides the incident wave into the left- and right-handed circularly polarized waves, the intensities of two waves depending on the state of polarization of incident wave. Large deflection angle of the commercial PG is usually made by the grating cascade due to the limit of grating period. While using the tensor polarization holography theory, arbitrary deflection angles of PGs have been designed, where the polarization-sensitive material phenanthraquinone-doped polymethyl methacrylate (PQ/PMMA) is utilized as the recording medium in our experiments. We have made PG with the deflection angle of 40°.","PeriodicalId":149506,"journal":{"name":"SPIE/COS Photonics Asia","volume":"14 1","pages":"127681D - 127681D-5"},"PeriodicalIF":0.0,"publicationDate":"2023-11-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139229426","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
A. Kuznetsov, A. Wolf, Zh.E. Munkueva, A. Dostovalov, Sergey A. Babin
We report on the optimization of femtosecond-pulse inscribed arrays of short randomly spaced FBGs for Raman lasing in multimode GRIN fiber pumped by highly multimode (M2 ~34) 940-nm diodes. The fabricated 1D-3D FBG arrays used as a complex output mirror together with input highly reflective FBG provide random lasing of the Stokes beam at 976 nm with output power around 30 W. The optimization of array structure results in beam quality improvement to M2 ⪅2 and the linewidth narrowing to 0.1 nm to 0.2 nm that is better than that for long regular FBG of comparable reflection. Potential of such cavity structure for further parameter improvement and its practical applications are discussed.
{"title":"Optimization of random FBG array in multimode graded-index fiber for Raman lasing with improved spatio-spectral characteristics","authors":"A. Kuznetsov, A. Wolf, Zh.E. Munkueva, A. Dostovalov, Sergey A. Babin","doi":"10.1117/12.2689180","DOIUrl":"https://doi.org/10.1117/12.2689180","url":null,"abstract":"We report on the optimization of femtosecond-pulse inscribed arrays of short randomly spaced FBGs for Raman lasing in multimode GRIN fiber pumped by highly multimode (M2 ~34) 940-nm diodes. The fabricated 1D-3D FBG arrays used as a complex output mirror together with input highly reflective FBG provide random lasing of the Stokes beam at 976 nm with output power around 30 W. The optimization of array structure results in beam quality improvement to M2 ⪅2 and the linewidth narrowing to 0.1 nm to 0.2 nm that is better than that for long regular FBG of comparable reflection. Potential of such cavity structure for further parameter improvement and its practical applications are discussed.","PeriodicalId":149506,"journal":{"name":"SPIE/COS Photonics Asia","volume":"13 1","pages":"127600L - 127600L-4"},"PeriodicalIF":0.0,"publicationDate":"2023-11-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139229777","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
A. Starobor, D.A. Kuzin, I. Kuznetsov, O. Palashov
A concept of compact, scalable and reliable solid-state amplifier based on thin slab is proposed. It combines the following features: single pass pump and signal propagation without internal reflections; use of a gradient doped thin-slab AE; beam guiding effect pre-compensation. The direct passage of the radiation allows to obtain a high quality of the beam (M2⪅1.4). Thin slab geometry and gradient doping provide excellent heat dissipation and low heating (30 °C at 500 W pumping power). The amplification of stretched and pre-amplified femtosecond radiation reached 3.6 (with input of 6 mJ) at a pump power of 500 W, so output energy was 22 mJ at 1.5kHz. A further increase in the output energy is possible according to calculations, up to 100 mJ, which is limited by the breakdown threshold of the output end at a pump power of 1 kW.
{"title":"High-energy gradient doped Yb:YAG thin slab laser amplifier","authors":"A. Starobor, D.A. Kuzin, I. Kuznetsov, O. Palashov","doi":"10.1117/12.2687175","DOIUrl":"https://doi.org/10.1117/12.2687175","url":null,"abstract":"A concept of compact, scalable and reliable solid-state amplifier based on thin slab is proposed. It combines the following features: single pass pump and signal propagation without internal reflections; use of a gradient doped thin-slab AE; beam guiding effect pre-compensation. The direct passage of the radiation allows to obtain a high quality of the beam (M2⪅1.4). Thin slab geometry and gradient doping provide excellent heat dissipation and low heating (30 °C at 500 W pumping power). The amplification of stretched and pre-amplified femtosecond radiation reached 3.6 (with input of 6 mJ) at a pump power of 500 W, so output energy was 22 mJ at 1.5kHz. A further increase in the output energy is possible according to calculations, up to 100 mJ, which is limited by the breakdown threshold of the output end at a pump power of 1 kW.","PeriodicalId":149506,"journal":{"name":"SPIE/COS Photonics Asia","volume":"78 1","pages":"1276006 - 1276006-4"},"PeriodicalIF":0.0,"publicationDate":"2023-11-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139230056","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Jiyoung Joo, Hyeon Seung Ha, Seok Gi Han, Jun Ho Lee, Timothy Butterley
We developed SLODAR (SLOpe Detection And Ranging) in order to measure atmospheric characteristics in Geochang, Korea for the purpose of utilizing adaptive optics technology. In order to operate adaptive optics, it is necessary to measure the Fried parameter (r0) and Refractive index structure constant (Cn2) of the corresponding region, which can be measured through atmospheric characteristics measuring module. SLODAR mounts two wavefront sensors on a telescope and directs a binary star towards each sensor using a prism mirror. Then it measures the slope by detecting the focus shift caused by the atmospheric disturbance using the binary star. We attached z-axis motors to SLODAR and Prism to ensure that the focal position would always be the same even if the separation angle of the binary star changed. SLODAR can measure atmospheric characteristics at various altitudes, depending on the separation angle of the binary star. It is divided into wide mode (measured altitude about 400 ~ 700 m) and narrow mode (measured altitude about 5 ~ 9 km). We obtained r0 and Cn2 through Auto-Covariance and Cross-Covariance, respectively, from the measured slope. Currently, we are measuring the annual average r0 Cn2 in Geochang, Korea.
{"title":"Atmospheric turbulence profiling in Korea with SLODAR","authors":"Jiyoung Joo, Hyeon Seung Ha, Seok Gi Han, Jun Ho Lee, Timothy Butterley","doi":"10.1117/12.2685354","DOIUrl":"https://doi.org/10.1117/12.2685354","url":null,"abstract":"We developed SLODAR (SLOpe Detection And Ranging) in order to measure atmospheric characteristics in Geochang, Korea for the purpose of utilizing adaptive optics technology. In order to operate adaptive optics, it is necessary to measure the Fried parameter (r0) and Refractive index structure constant (Cn2) of the corresponding region, which can be measured through atmospheric characteristics measuring module. SLODAR mounts two wavefront sensors on a telescope and directs a binary star towards each sensor using a prism mirror. Then it measures the slope by detecting the focus shift caused by the atmospheric disturbance using the binary star. We attached z-axis motors to SLODAR and Prism to ensure that the focal position would always be the same even if the separation angle of the binary star changed. SLODAR can measure atmospheric characteristics at various altitudes, depending on the separation angle of the binary star. It is divided into wide mode (measured altitude about 400 ~ 700 m) and narrow mode (measured altitude about 5 ~ 9 km). We obtained r0 and Cn2 through Auto-Covariance and Cross-Covariance, respectively, from the measured slope. Currently, we are measuring the annual average r0 Cn2 in Geochang, Korea.","PeriodicalId":149506,"journal":{"name":"SPIE/COS Photonics Asia","volume":"3 1","pages":"127670I - 127670I-3"},"PeriodicalIF":0.0,"publicationDate":"2023-11-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139232322","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Takashi Nishitsuji, David Blinder, T. Shimobaba, T. Kakue, P. Schelkens, T. Ito
Accelerating computer-generated holograms (CGHs) is crucial for practical three-dimensional (3D) displays with electro-holography. The authors developed a fast CGH calculation algorithm that focuses on projecting only 3D wireframes because the formulas or algorithms for generating CGH become simpler and, in many cases, the expressivity of the wireframe is sufficient to provide users with all necessary information, such as which direction to move in a car navigation system. In this presentation, we provide an overview of how to accelerate the CGH calculation of wireframe art and discuss our future research directions with respect to the remaining issues.
{"title":"Fast calculation techniques of computer-generated hologram for line-drawn 3D objects","authors":"Takashi Nishitsuji, David Blinder, T. Shimobaba, T. Kakue, P. Schelkens, T. Ito","doi":"10.1117/12.2686940","DOIUrl":"https://doi.org/10.1117/12.2686940","url":null,"abstract":"Accelerating computer-generated holograms (CGHs) is crucial for practical three-dimensional (3D) displays with electro-holography. The authors developed a fast CGH calculation algorithm that focuses on projecting only 3D wireframes because the formulas or algorithms for generating CGH become simpler and, in many cases, the expressivity of the wireframe is sufficient to provide users with all necessary information, such as which direction to move in a car navigation system. In this presentation, we provide an overview of how to accelerate the CGH calculation of wireframe art and discuss our future research directions with respect to the remaining issues.","PeriodicalId":149506,"journal":{"name":"SPIE/COS Photonics Asia","volume":"15 1","pages":"1276803 - 1276803-5"},"PeriodicalIF":0.0,"publicationDate":"2023-11-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139232747","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
A. Dostovalov, K. Bronnikov, S. Gladkikh, E. Mitsai, A. Zhizhchenko, A. Kuchmizhak
We present the results of direct laser-induced periodic surface structuring of semiconductors thin films (a-Si, a-Ge) deposited on glass substrate at different ambient environments (air, vacuum, nitrogen) resulting in regular gratings with the period of 600 nm to 900 nm at the laser wavelength of 1026 nm oriented either along (a-Si) or transverse (a-Ge) to the linear laser polarization direction. The processing speed has a different effect on morphology of obtained structures: on a-Si film, an increase of scanning speed leads to the reorientation of gratings and reduction of their period, while on a-Ge, the uniformity degradation and increase of the period are observed. Changing the ambient atmosphere from air to nitrogen and vacuum, when writing structures on a-Ge, helps to minimize the uniformity degradation and obtain highly regular nanogratings.
{"title":"Highly regular nanogratings formation on amorphous semiconductors films by femtosecond laser radiation","authors":"A. Dostovalov, K. Bronnikov, S. Gladkikh, E. Mitsai, A. Zhizhchenko, A. Kuchmizhak","doi":"10.1117/12.2687393","DOIUrl":"https://doi.org/10.1117/12.2687393","url":null,"abstract":"We present the results of direct laser-induced periodic surface structuring of semiconductors thin films (a-Si, a-Ge) deposited on glass substrate at different ambient environments (air, vacuum, nitrogen) resulting in regular gratings with the period of 600 nm to 900 nm at the laser wavelength of 1026 nm oriented either along (a-Si) or transverse (a-Ge) to the linear laser polarization direction. The processing speed has a different effect on morphology of obtained structures: on a-Si film, an increase of scanning speed leads to the reorientation of gratings and reduction of their period, while on a-Ge, the uniformity degradation and increase of the period are observed. Changing the ambient atmosphere from air to nitrogen and vacuum, when writing structures on a-Ge, helps to minimize the uniformity degradation and obtain highly regular nanogratings.","PeriodicalId":149506,"journal":{"name":"SPIE/COS Photonics Asia","volume":"4 1","pages":"127620A - 127620A-5"},"PeriodicalIF":0.0,"publicationDate":"2023-11-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139233123","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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