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Assessing performance of standard evaluation circuits for radiation hardened 32 bit processor 抗辐射32位处理器标准评估电路的性能评估
N.A. Koziarz
Methods of determining contractors' ability to meet the requirements of the radiation-hardened 32-b processor before actual production are presented. Standard evaluation circuits were examined, and the results used a gauge to evaluate the contractor performance. Using tests such as wafer yield, electrical tests, package screening, and radiation testing, the test chip could be used to judge the final product.<>
提出了在实际生产前确定承包商满足抗辐射32b处理器要求的能力的方法。对标准评估电路进行了检查,结果用于评估承包商的绩效。通过晶圆良率、电气测试、封装筛选和辐射测试等测试,测试芯片可用于判断最终产品。
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引用次数: 0
Characterization and elimination of threshold voltage problems in the Bimos process Bimos工艺中阈值电压问题的表征与消除
S. Dean
The author identifies two root causes and a number of special causes of high-P/low-N threshold voltage in the Bimos process. The first root cause was chemical carryover from wafer carriers exposed to HF. the F/sup -/ retained in the carrier can hydrate, form a vapor, and condense on the wafer. This phenomenon was the source of a large amount of unexplained high-P threshold problems in the past. The second root cause was oxide charge being introduced at the trim anneal furnace operation. Increasing the N/sub 2/ flow brought a major yield loss problem under control. since the two root causes have been eliminated, there have been no significant threshold voltage problems with this technology.<>
作者找出了Bimos工艺中产生高p /低n阈值电压的两个根本原因和一些特殊原因。第一个根本原因是暴露于HF的晶圆载体的化学物质携带。保留在载体中的F/sup -/可以水化,形成蒸汽,并在硅片上凝结。这一现象是过去大量无法解释的高p阈值问题的根源。第二个根本原因是在修整退火炉操作中引入了氧化物。增加N/ sub2 /流量使主要的产量损失问题得到控制。由于这两个根本原因已经消除,因此该技术没有明显的阈值电压问题。
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引用次数: 0
期刊
Proceedings Ninth Biennial University/Government/Industry Microelectronics Symposium
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