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2021 IEEE 20th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)最新文献

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Application of Two Degree-of-Freedom Vibrational Energy Harvesting Theory to Real Environmental Vibration 二自由度振动能量收集理论在实际环境振动中的应用
N. Shimomura, T. Miyoshi, H. Ashizawa, H. Mitsuya, G. Hashiguchi, Yuji Suzuki, H. Toshiyoshi
A 2-DOF (degree-of-freedom) MEMS vibrational energy harvester has been developed to supply power to a factory monitoring sensor system. Frequency bandwidth is broadened to enhance the output power by designing the spring constant and the mass of the interposer according to the conditions of the vibrational source. A maximum output power of 600 μW is obtained from machines used in a factory.
研制了一种二自由度MEMS振动能量采集器,为工厂监控传感器系统供电。根据振动源的条件,通过设计弹簧常数和中间层的质量,拓宽了频率带宽,提高了输出功率。工厂使用的机器最大输出功率可达600 μW。
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引用次数: 0
Multifunctional composites for energy harvesting based on piezoelectric microgenerator 基于压电微发电机的多功能能量收集复合材料
Boyue Chen, Yu Jia, Xiaoli Tang, F. Narita, Kanjuro Makihara, Yu Shi
This paper developed a piezoelectric energy harvester based on a PVDF-TrFE microgenerator and carbon fibre reinforced polymers (CFRPs) with optimised layup design. The designed harvester targets on self-powering sensor nodes for aerospace and automotive application. As the main concern, the piezoelectric layer of the microgenerator was spin coated. The microgenerators were adhered to the composite panels to experimentally and numerically assessed the optimised layup for energy harvesting. It was observed that harvester with [45/−45]s layup produced the largest power output under sinusoidal excitation.
本文研制了一种基于PVDF-TrFE微型发电机和碳纤维增强聚合物(CFRPs)优化叠层设计的压电能量采集器。设计的收割机目标是用于航空航天和汽车应用的自供电传感器节点。对微发电机的压电层进行了自旋涂覆。将微型发电机粘附在复合材料板上,对能量收集的最佳铺层进行了实验和数值评估。结果表明,在正弦激励下,[45/−45]s铺层的收割机输出功率最大。
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引用次数: 0
Identification of a gas composition based on an optical spectrum of plasma generated in MEMS ion spectrometer 基于MEMS离子光谱仪等离子体光谱的气体成分识别
T. Grzebyk, P. Szyszka, J. Dziuban
This article describes a method of identification of a gas composition based on an optical emission spectroscopy performed in a miniature MEMS plasma generator. Individual components are detected on the bases of characteristic peaks in the optical spectrum. However, determination of exact proportions of components in a gas mixture is much more problematic. Here, we present how to deal with this issue. We show which initial reference tests needs to be done and what signal processing operations are required to derive relative concentration of each gas specie. The developed method was applied to investigate two- and three-component mixtures of carbon dioxide, methane and nitrogen.
本文描述了一种在微型MEMS等离子体发生器中进行的基于光学发射光谱的气体成分识别方法。在光谱特征峰的基础上检测各个成分。然而,测定气体混合物中各成分的精确比例则困难得多。在这里,我们介绍如何处理这个问题。我们展示了需要进行哪些初始参考测试,以及需要进行哪些信号处理操作来得出每种气体的相对浓度。将该方法应用于二氧化碳、甲烷和氮的二组分和三组分混合物的研究。
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引用次数: 5
Non-lithographic and scalable fabrication of one-turn-like inductor having laminated NiFe core for power converters operating at high frequency 用于高频工作的功率变换器的具有层压NiFe核心的单匝电感的非光刻和可扩展制造
J. Pyo, Xuan Wang, Minsoo Kim, M. Allen
We fabricated one-turn-like wire inductor via electrodepositing magnetic core materials, NiFe, on the surface of cylindrical copper wires. The current was applied to flow through a copper wire which generated circumferential magnetic flux around the wire. Control of core thickness and wire lengths showed tunability of inductance values. Compared to an air-core wire inductor (no magnetic core on a wire), 50 μm thick NiFe electroplated wire inductor had 144 times higher inductance values. We also achieved sequential electroplating of NiFe and interlamination layer, polypyrrole, on wire surfaces. Laminated cores showed higher retention of inductance compared to a single layer NiFe core, demonstrating wire inductor’s applicability in high frequency applications. Our one-turn-like wire inductors provide an effective strategy to fabricate micro-inductors in a simple and scalable manner to be integrated for Power system-in-package.
通过在圆柱形铜线表面电沉积NiFe磁芯材料,制备了单匝式导线电感器。电流通过一根铜线,在铜线周围产生环向磁通。对铁芯厚度和导线长度的控制显示了电感值的可调性。与空芯导线电感器(导线上没有磁芯)相比,50 μm厚的NiFe电镀导线电感器的电感值提高了144倍。我们还实现了在电线表面连续电镀NiFe和夹层层聚吡咯。与单层NiFe磁芯相比,层压磁芯显示出更高的电感保留率,证明了导线电感在高频应用中的适用性。我们的单匝式导线电感器提供了一种有效的策略,以简单和可扩展的方式制造微型电感器,以集成到电源系统封装中。
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引用次数: 0
A Rotational Electromagnetic Energy Harvester for The Ultra-low Frequency Vibration 一种用于超低频率振动的旋转电磁能量采集器
Xinyu Ma, Xingyu Tang, Ziyue Zhang, Anxin Luo, Fei Wang
This paper prototypes a rotational electro magnetic energy harvester for the vibrations at ultra-low frequency with potential applications in marine sensor buoys. It mainly contains three sub-systems: the twist-driving system, the pawl-ratchet clutching system, and the magnet-coil transduction system. When the linear motion of the screw is applied at ultra-low frequency, the twist-driving system and pawl-ratchet clutching system can convert it into the high-speed inertial rotation of the rotor. Then the magnet-coil transduction system can help to harvest the electric energy based on Faraday’s law of electromagnetic induction. In our test, an average output power of 112.2 mW can be achieved with the load resistance of 800 Ω at the excitation frequency of 0.25 Hz.
本文设计了一种旋转电磁能量采集器,用于超低频振动,具有在海洋传感器浮标中应用的潜力。它主要包括三个子系统:扭力驱动系统、棘爪-棘轮抓紧系统和磁线圈换向系统。当螺杆的直线运动在超低频率下施加时,扭转驱动系统和棘爪-棘轮抓紧系统可以将其转化为转子的高速惯性旋转。基于法拉第电磁感应定律的磁感应线圈转导系统可以帮助获取电能。在我们的测试中,在激励频率为0.25 Hz时,负载电阻为800 Ω,平均输出功率为112.2 mW。
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引用次数: 1
Comparative Study of Frequency Response of Triboelectric and Piezoelectric Energy Harvesters 摩擦电与压电能量采集器频率响应的比较研究
S. Naval, N. Beigh, Ankesh Jain, D. Mallick
Piezoelectric and Triboelectric energy harvesters are efficient in scavenging useful electrical energy from the low-frequency mechanical vibrations scattered in our ambient. Several researchers have compared the performance of a standalone triboelectric and piezoelectric energy harvester operating under very low frequencies (< 5 Hz). However, there have been no reports of comparison between devices designed with the exact same topology and observing the variation in their relative frequency response under varying design parameters and operating conditions. In this paper, we present a comparative study of frequency response of the triboelectric nanogenerators and impact-driven piezoelectric generators. Both these devices are realized as a combination of a cantilever beam and an impact layer. They have a similar operating mechanism in the sense that they involve an impact between a vibrating beam and a rigid impact layer, but the inherent energy generation mechanism in both cases is very different. Due to this, we observe stark differences in the frequency response of these devices at different resonant frequencies and under varying gap lengths and acceleration amplitudes. We have initially explained the basic energy generation mechanism and developed an analytical model for the triboelectric and piezoelectric mechanisms. It is then solved numerically to predict the device operation and validated using device fabrication and experimentation. This is followed by observation, comparison and explanation of their contrasting frequency responses. This study is crucial as it assists in understanding the contrast that exists between the two energy harvesting mechanisms and will hopefully be useful while choosing and designing any piezoelectric/triboelectric device for powering low power wearable sensors from ultra-low frequency, wideband human motions.
压电和摩擦电能量收集器可以有效地从散布在我们周围环境中的低频机械振动中收集有用的电能。几位研究人员比较了在极低频率(< 5 Hz)下工作的独立摩擦电和压电能量采集器的性能。然而,目前还没有报道对具有完全相同拓扑设计的器件进行比较,并观察在不同设计参数和操作条件下其相对频率响应的变化。本文对摩擦纳米发电机和冲击驱动压电发电机的频率响应进行了比较研究。这两种装置都是由悬臂梁和冲击层组成的。它们在涉及振动梁和刚性冲击层之间的冲击的意义上具有相似的操作机制,但在这两种情况下的固有能量产生机制是非常不同的。因此,我们观察到这些器件在不同谐振频率、不同间隙长度和加速度幅值下的频率响应存在明显差异。我们初步解释了基本的能量产生机制,并建立了摩擦电和压电机构的分析模型。然后通过数值求解来预测器件的运行,并通过器件制造和实验进行验证。接下来是观察、比较和解释它们不同的频率响应。这项研究是至关重要的,因为它有助于理解两种能量收集机制之间存在的对比,并有望在选择和设计任何压电/摩擦电设备时有用,这些设备可用于从超低频率、宽带人体运动中为低功耗可穿戴传感器供电。
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引用次数: 5
Design Space Exploration of a Fully Autonomous Health Monitoring WBAN Node with Hybrid Energy Harvesting 基于混合能量收集的全自主健康监测WBAN节点的设计空间探索
M. Sharone, A. Muhtaroğlu
The emergence of WBANs with health monitoring capabilities has greatly revolutionized health care. Enabling WBAN nodes to be fully autonomous is critical in making this thrust sustainable. However, regular charging of batteries in such systems remains a significant inhibitive factor. In this work, Health Monitoring Energy System (HeMeS) tool previously developed by our group using comprehensive analytical models is utilized to study various energy flow scenarios in a particular health monitoring WBAN node powered by a hybrid thermal-vibrational energy harvester. The use of HeMeS for design space exploration is thus demonstrated for various patient categories, incorporating environmental factors, electronic load activity levels, and system cost/size constraints. The described comprehensive system design approach of incorporating transducer, electronics, user environment and data duty-cycling profiles, is demonstrated to be viable and appealing for delivering sustainable WBANs that directly contribute to climate-neutral society without significantly increasing cost.
具有健康监测功能的wban的出现极大地改变了医疗保健。使WBAN节点完全自治对于使这一推力可持续发展至关重要。然而,在这种系统中,电池的定期充电仍然是一个重要的抑制因素。在这项工作中,利用我们小组之前开发的健康监测能量系统(HeMeS)工具,利用综合分析模型,研究了由热-振动混合能量采集器供电的特定健康监测WBAN节点的各种能量流场景。因此,HeMeS在设计空间探索中的使用被证明适用于各种患者类别,包括环境因素、电子负载活动水平和系统成本/尺寸限制。所描述的综合系统设计方法结合了传感器、电子设备、用户环境和数据职责循环概况,被证明是可行的,并且具有吸引力,可以提供可持续的wban,直接为气候中性社会做出贡献,而不会显著增加成本。
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引用次数: 0
Investigation of self-oscillation piezoelectric energy harvesting mechanics for lower-limb motion 下肢运动自振荡压电能量收集力学研究
Shanshi Gao, Tianyiyi He, H. Ao, Chengkuo Lee
In this work, a lower-limb motion capturing piezoelectric energy harvester is demonstrated by integration of a 3D printing sliding block-rail mechanical structure with piezoelectric bimorph array. The unique sliding block-rail piezoelectric generator (S-PEG) is superior as converting three-dimensional (3D) lower-limb motion into one-dimensional (1D) linear sliding on the rail, which further activates the vibration of piezoelectric bimorphs for effective energy scavenging. The particularly designed mechanical structure enables to achieve a high-power output of 2.4mW at an extremely low operating frequency (0.75Hz) and reach to 160μC/s of the charging speed on a 1mF capacitor. Moreover, we demonstrate the feasibility of the S-PEG on the lower limb acts as an auxiliary battery to supply the wireless transmission modules for diversified applications. In addition, the capability of the S-PEG is displayed as a practical power source for wearable sensors of low-power Bluetooth temperature and humidity modules. Moving forward to the Internet of Things (IoT) framework, the S-PEG is able to become a promising candidate in the sustainable energy sources to further extend the lifetime of the wearable sensors.
在这项工作中,通过集成3D打印滑动块轨道机械结构和压电双晶片阵列,展示了一种下肢运动捕捉压电能量采集器。独特的滑动块轨压电发生器(S-PEG)将三维(3D)下肢运动转化为一维(1D)在导轨上的线性滑动,进一步激活压电双晶片的振动,实现有效的能量清除。特别设计的机械结构可以在极低的工作频率(0.75Hz)下实现2.4mW的大功率输出,并在1mF电容器上达到160μC/s的充电速度。此外,我们论证了S-PEG在下肢作为辅助电池为多种应用提供无线传输模块的可行性。此外,还展示了S-PEG作为低功耗蓝牙温湿度模块可穿戴传感器的实用电源的能力。向物联网(IoT)框架迈进,S-PEG能够成为可持续能源的有前途的候选者,以进一步延长可穿戴传感器的使用寿命。
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引用次数: 0
Towards 3D printed compact Quadrupole mass spectrometer with MEMS components 3D打印紧凑型四极杆质谱仪与MEMS组件
P. Szyszka, Jakub Jendryka, M. Białas, T. Grzebyk
This article presents preliminary works on utilization of 3D printing and MEMS techniques to obtain compact Quadrupole mass spectrometer (3Dp QMS). Fabricated device consists of a glow discharge ion source, a quadrupole mass analyzer and a Faraday cup detector. Obtained mass spectra already show satisfactory resolution, it is possible to distinguish the components of the air mixture, while there is still prospect of enhancing it by optimizing the ionization conditions or the analysis itself. Design of the device as well as electronics necessary for the analysis are characterized by low complexity, thus there is still place for further miniaturization.
本文介绍了利用3D打印和MEMS技术获得紧凑型四极杆质谱仪(3Dp QMS)的初步工作。该装置由辉光放电离子源、四极杆质谱仪和法拉第杯探测器组成。所获得的质谱已经显示出令人满意的分辨率,可以区分空气混合物的成分,但仍有可能通过优化电离条件或分析本身来增强它。该装置的设计以及分析所需的电子设备的特点是复杂性低,因此仍有进一步小型化的空间。
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引用次数: 3
Rotation-induced-tunable stochastic resonance for stabilizing sustainability of energy harvesting 稳定能量收集可持续性的旋转诱导可调随机共振
Yunshun Zhang, Xiangshuai Zhao, Wanshu Wang
Energy harvesting from rotating system has been an important topic for realizing the applications of tire monitoring system. This paper proposes a self-tuning stochastic resonance for exploring its principle for further stabilizing the sustainable capability of energy harvesting. The principle of stochastic resonance of a nonlinear system in a rotating environment is studied which is used to increase the energy harvesting efficiency of the cantilever piezoelectric vibrator at low frequencies. The centrifugal force caused by the behavior of ration acting on the end mass of the cantilever changes the equivalent stiffness of the cantilever and thus can tune the stochastic resonance frequency. Through the match-able relationship of non-linear bitable system between the Kramers rate and the external rotation frequency, the optimal centrifugal distance is theoretically obtained. The simulation results show that when the centrifugal distance is 12.11 cm, the effective frequency bandwidth of the system response is broadened to 20–40 rad/s and the output root mean square (RMS) voltage is significantly improved.
从旋转系统中获取能量一直是实现轮胎监测系统应用的一个重要课题。为了进一步稳定能量收集的持续能力,本文提出了一种自调谐随机共振的原理。研究了旋转环境下非线性系统的随机共振原理,利用该原理提高了悬臂式压电振子在低频时的能量收集效率。作用在悬臂梁端部质量上的质点所产生的离心力改变了悬臂梁的等效刚度,从而可以调节随机共振频率。通过非线性可咬系统克雷默率与外旋转频率的匹配关系,从理论上得到了最优离心距离。仿真结果表明,当离心距离为12.11 cm时,系统响应的有效频率带宽展宽至20 ~ 40 rad/s,输出均方根(RMS)电压显著提高。
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引用次数: 1
期刊
2021 IEEE 20th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)
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