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2021 IEEE 20th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)最新文献

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Miniature ToF mass spectrometer with an integrated glow-discharge ion source 集成辉光放电离子源的微型ToF质谱仪
M. Białas, Jakub Jendryka, Jan Sobków, Szymon Zakrent, P. Szyszka, T. Grzebyk
This article presents the concept, realization and first mass spectra obtained in a newly developed MEMS mass spectrometer. This device is made of a series of vertically aligned silicon electrodes stacked in a 3D printed holder: three bottom ones form a glow-discharge ion source, next three are responsible for beam steering and the top one serves as a detector. Special electronic systems were designed to interrupt the ion beam and to record quickly changing current signals. By using the developed spectrometer we were able to detect spectrum of air, showing separated peaks of nitrogen and oxygen, both in molecular and atomic form.
本文介绍了一种新研制的MEMS质谱仪的概念、实现和获得的第一质谱。该装置由一系列垂直排列的硅电极堆叠在3D打印支架中组成:底部的三个硅电极形成辉光放电离子源,接下来的三个硅电极负责光束导向,顶部的硅电极作为探测器。设计了特殊的电子系统来中断离子束并记录快速变化的电流信号。通过使用开发的光谱仪,我们能够检测空气的光谱,显示出分子和原子形式的氮和氧的分离峰。
{"title":"Miniature ToF mass spectrometer with an integrated glow-discharge ion source","authors":"M. Białas, Jakub Jendryka, Jan Sobków, Szymon Zakrent, P. Szyszka, T. Grzebyk","doi":"10.1109/PowerMEMS54003.2021.9658357","DOIUrl":"https://doi.org/10.1109/PowerMEMS54003.2021.9658357","url":null,"abstract":"This article presents the concept, realization and first mass spectra obtained in a newly developed MEMS mass spectrometer. This device is made of a series of vertically aligned silicon electrodes stacked in a 3D printed holder: three bottom ones form a glow-discharge ion source, next three are responsible for beam steering and the top one serves as a detector. Special electronic systems were designed to interrupt the ion beam and to record quickly changing current signals. By using the developed spectrometer we were able to detect spectrum of air, showing separated peaks of nitrogen and oxygen, both in molecular and atomic form.","PeriodicalId":165158,"journal":{"name":"2021 IEEE 20th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)","volume":"16 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-12-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122184184","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
An Efficient Maximum Power Point Tracking Architecture for Weakly Coupled Piezoelectric Harvesters based on the source I–V curve 基于源I-V曲线的弱耦合压电采集器高效最大功率点跟踪架构
Nicolas Decroix, P. Gasnier, A. Badel
This paper describes a novel Maximum Power Point Tracking (MPPT) architecture for weakly coupled piezoelectric harvesters. It is based on a new algorithm, called the I–V curve algorithm for Current-Voltage curve. It enables a fast calculation of the optimal electrical loads for different extraction techniques like Standard Energy Harvesting (SEH) and parallel/series Synchronized Switch on Inductor (p/sSSHI) without requiring any open circuit measurement on the piezoelectric harvester. This architecture has been validated thanks to Simulink simulations. Optimal loads are obtained after 1.5 mechanical period and the obtained electrical power is always greater than 90% of the optimal power.
提出了一种用于弱耦合压电采集器的最大功率点跟踪(MPPT)结构。它是基于一种新的算法,称为电流-电压曲线的I-V曲线算法。它可以快速计算不同提取技术的最佳电负载,如标准能量收集(SEH)和并联/串联同步开关电感(p/sSSHI),而无需在压电采集器上进行任何开路测量。该架构已通过Simulink仿真得到验证。在1.5个机械周期后得到最优负荷,得到的电功率总是大于最优功率的90%。
{"title":"An Efficient Maximum Power Point Tracking Architecture for Weakly Coupled Piezoelectric Harvesters based on the source I–V curve","authors":"Nicolas Decroix, P. Gasnier, A. Badel","doi":"10.1109/PowerMEMS54003.2021.9658370","DOIUrl":"https://doi.org/10.1109/PowerMEMS54003.2021.9658370","url":null,"abstract":"This paper describes a novel Maximum Power Point Tracking (MPPT) architecture for weakly coupled piezoelectric harvesters. It is based on a new algorithm, called the I–V curve algorithm for Current-Voltage curve. It enables a fast calculation of the optimal electrical loads for different extraction techniques like Standard Energy Harvesting (SEH) and parallel/series Synchronized Switch on Inductor (p/sSSHI) without requiring any open circuit measurement on the piezoelectric harvester. This architecture has been validated thanks to Simulink simulations. Optimal loads are obtained after 1.5 mechanical period and the obtained electrical power is always greater than 90% of the optimal power.","PeriodicalId":165158,"journal":{"name":"2021 IEEE 20th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)","volume":"67 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-12-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133756054","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Harvesting performance of a planar thermoelectric microgenerator with a compact design 紧凑设计的平面热电微型发电机的收获性能
D. Estrada-Wiese, Jose-Manuel Sojo, M. Salleras, J. Santander, M. Fernández-Regúlez, I. Martin-Fernandez, Á. Morata, L. Fonseca, A. Tarancón
In Internet of Things (IoT) systems millions of interconnected devices, each with multiple sensors, demand for sustainable and long term autonomous energy sources. Thermoelectricity offers an alternative to primary batteries for powering sensor nodes with energy harvesting solutions like waste heat recovery. In many of these scenarios, small size and large volume technologies are a request. While standard thermoelectric technologies are not viable for such applications due to their incompatibility with miniaturization and the use of scarce and toxic materials, planar thermoelectric microgenerators offer an advantageous solution. By micromachining and nanostructuring silicon, downsizing thermoelectric microgenerators is possible with an environmentally safe and cost effective approach. In the past, single micro-thermocouples based on mature silicon microfabrication technology combined with the integration of Si or SiGe nanowires as thermoelectric material were fabricated in our group producing power densities of several tens of nW/cm2. In this work, we report a new compact design featuring a high integration density of up to 50 series connected micro-thermocouples in a small footprint chip of 0.5 cm2 to increase the generated power. The devices were characterized mimicking a low-grade waste heat environment under natural and forced convection conditions. For an available heat source at 250 °C, power densities of 316 nW/cm2 under natural convection and up to 4.2 μW/cm2 under forced convection conditions have been achieved.
在物联网(IoT)系统中,数以百万计的互联设备(每个设备都有多个传感器)需要可持续和长期的自主能源。热电为传感器节点提供了替代原电池的能源收集解决方案,如废热回收。在许多这样的场景中,都需要小尺寸和大容量的技术。标准的热电技术由于不兼容小型化和使用稀缺和有毒的材料而不适用于这些应用,平面热电微型发电机提供了一个有利的解决方案。通过微机械加工和纳米结构硅,小型化热电微型发电机成为可能,同时具有环保安全和成本效益。以往,本课程组基于成熟的硅微加工技术,结合集成Si或SiGe纳米线作为热电材料,制备了单微热电偶,功率密度可达数十nW/cm2。在这项工作中,我们报告了一种新的紧凑型设计,其特点是在0.5 cm2的小芯片上具有高达50个串联微型热电偶的高集成密度,以增加产生的功率。该装置模拟了自然对流和强制对流条件下的低品位废热环境。对于250°C的可用热源,在自然对流条件下功率密度可达316 nW/cm2,在强制对流条件下功率密度可达4.2 μW/cm2。
{"title":"Harvesting performance of a planar thermoelectric microgenerator with a compact design","authors":"D. Estrada-Wiese, Jose-Manuel Sojo, M. Salleras, J. Santander, M. Fernández-Regúlez, I. Martin-Fernandez, Á. Morata, L. Fonseca, A. Tarancón","doi":"10.1109/PowerMEMS54003.2021.9658361","DOIUrl":"https://doi.org/10.1109/PowerMEMS54003.2021.9658361","url":null,"abstract":"In Internet of Things (IoT) systems millions of interconnected devices, each with multiple sensors, demand for sustainable and long term autonomous energy sources. Thermoelectricity offers an alternative to primary batteries for powering sensor nodes with energy harvesting solutions like waste heat recovery. In many of these scenarios, small size and large volume technologies are a request. While standard thermoelectric technologies are not viable for such applications due to their incompatibility with miniaturization and the use of scarce and toxic materials, planar thermoelectric microgenerators offer an advantageous solution. By micromachining and nanostructuring silicon, downsizing thermoelectric microgenerators is possible with an environmentally safe and cost effective approach. In the past, single micro-thermocouples based on mature silicon microfabrication technology combined with the integration of Si or SiGe nanowires as thermoelectric material were fabricated in our group producing power densities of several tens of nW/cm2. In this work, we report a new compact design featuring a high integration density of up to 50 series connected micro-thermocouples in a small footprint chip of 0.5 cm2 to increase the generated power. The devices were characterized mimicking a low-grade waste heat environment under natural and forced convection conditions. For an available heat source at 250 °C, power densities of 316 nW/cm2 under natural convection and up to 4.2 μW/cm2 under forced convection conditions have been achieved.","PeriodicalId":165158,"journal":{"name":"2021 IEEE 20th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)","volume":"25 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-12-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132873742","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Extending Wireless Power Transfer Distance using Electromagnetic Halbach Array 利用电磁哈尔巴赫阵列扩展无线电力传输距离
Tamuno-omie Gogo, Cristina A. Alexandru, D. Zhu
In this paper, an electromagnetic Halbach array is proposed to extend the wireless power transfer distance. A Halbach array is a special permanent magnets arrangement where one side of the arrangement is stronger, and the other side weaker. The proposed system generates a single-sided AC electromagnetic field using five identical square coils connected in series. With simulation and experimental verification, a single-sided electromagnetic Halbach array for WPT have been designed, and the overall power transfer efficiency (PTE) and power transfer distance have been improved. Experimentally, although the both systems showed high PTE at distance <5 mm, the two-coil system drops below 40% as the proposed system maintained a 40% PTE at maximum distance of 20 mm, which is 4 times greater than the two-coil system. This is a notable improvement in the WPT system.
本文提出了一种电磁哈尔巴赫阵列来延长无线电力传输距离。哈尔巴赫阵列是一种特殊的永磁体排列,其中一侧排列较强,另一侧较弱。提出的系统产生单面交流电磁场使用五个相同的方形线圈串联。通过仿真和实验验证,设计了用于WPT的单面电磁Halbach阵列,提高了整体功率传输效率和功率传输距离。实验结果表明,尽管两种系统在距离<5 mm时都显示出较高的PTE,但双线圈系统的PTE降至40%以下,因为该系统在最大距离为20 mm时保持40%的PTE,这是双线圈系统的4倍。这是WPT系统的一个显著改进。
{"title":"Extending Wireless Power Transfer Distance using Electromagnetic Halbach Array","authors":"Tamuno-omie Gogo, Cristina A. Alexandru, D. Zhu","doi":"10.1109/PowerMEMS54003.2021.9658393","DOIUrl":"https://doi.org/10.1109/PowerMEMS54003.2021.9658393","url":null,"abstract":"In this paper, an electromagnetic Halbach array is proposed to extend the wireless power transfer distance. A Halbach array is a special permanent magnets arrangement where one side of the arrangement is stronger, and the other side weaker. The proposed system generates a single-sided AC electromagnetic field using five identical square coils connected in series. With simulation and experimental verification, a single-sided electromagnetic Halbach array for WPT have been designed, and the overall power transfer efficiency (PTE) and power transfer distance have been improved. Experimentally, although the both systems showed high PTE at distance <5 mm, the two-coil system drops below 40% as the proposed system maintained a 40% PTE at maximum distance of 20 mm, which is 4 times greater than the two-coil system. This is a notable improvement in the WPT system.","PeriodicalId":165158,"journal":{"name":"2021 IEEE 20th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)","volume":"122 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-12-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116607064","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Comparisons of Electromagnetic Transducers for Rotational Energy Harvesting 用于旋转能量收集的电磁换能器的比较
D. Zhu, Tamuno-omie Gogo
This paper presents comparisons of six electromagnetic transducers for rotational energy harvesting, i.e. vertically alternating, 6-pole vertical Halbach array, 8-pole vertical Halbach array, radially alternating, 4-pole radial Halbach array and 6-pole radial Halbach array. Static magnetic simulation carried out in Maxwell shows that Halbach array is able to enhance the magnetic field strength in specific areas. However, in order to improve the output power of the energy harvester, the pole distance in the magnetic arrangement should also be minimized to increase the magnetic field strength gradient. It was concluded that radially magnetized transducers can reduce the overall volume of the energy harvester while the vertically magnetized transducers have the potential to generate higher output power.
本文对垂直交替、6极垂直哈尔巴赫阵列、8极垂直哈尔巴赫阵列、径向交替、4极径向哈尔巴赫阵列和6极径向哈尔巴赫阵列6种电磁换能器的旋转能量收集进行了比较。在Maxwell中进行的静态磁场模拟表明,Halbach阵列能够增强特定区域的磁场强度。但为了提高能量采集器的输出功率,还应尽量减小磁排中的极距,以增大磁场强度梯度。结果表明,径向磁化换能器可以减小能量采集器的整体体积,而垂直磁化换能器有可能产生更高的输出功率。
{"title":"Comparisons of Electromagnetic Transducers for Rotational Energy Harvesting","authors":"D. Zhu, Tamuno-omie Gogo","doi":"10.1109/PowerMEMS54003.2021.9658329","DOIUrl":"https://doi.org/10.1109/PowerMEMS54003.2021.9658329","url":null,"abstract":"This paper presents comparisons of six electromagnetic transducers for rotational energy harvesting, i.e. vertically alternating, 6-pole vertical Halbach array, 8-pole vertical Halbach array, radially alternating, 4-pole radial Halbach array and 6-pole radial Halbach array. Static magnetic simulation carried out in Maxwell shows that Halbach array is able to enhance the magnetic field strength in specific areas. However, in order to improve the output power of the energy harvester, the pole distance in the magnetic arrangement should also be minimized to increase the magnetic field strength gradient. It was concluded that radially magnetized transducers can reduce the overall volume of the energy harvester while the vertically magnetized transducers have the potential to generate higher output power.","PeriodicalId":165158,"journal":{"name":"2021 IEEE 20th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-12-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130492610","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Exploration of Multi-dimensional Sensing in Human Machine Interactions 人机交互中多维感知的探索
Minglu Zhu, Zhongda Sun, Chengkuo Lee
The advancements of human machine interface (HMI) with diversified sensory systems are essential to the intuitive and dexterous interaction with robotics and virtual world, which greatly affect our industrial, healthcare, and entertainment, etc. The manipulations done by human motions requires the multi-dimensional sensors to detect the complex movements. In this paper, we proposed a grating patterned sensor for both dual directional rotation sensors and tactile sensor which can be integrated into the exoskeleton and robot for motion monitoring. With the aid of the switch, the rotation, twisting, and bending sensing are achieved by the proposed designs with high customizability. The motion of upper limbs of users is projected into the virtual space or applied to control the robotics intuitively.
具有多种感官系统的人机界面(HMI)的发展是实现与机器人和虚拟世界的直观、灵巧交互的必要条件,它对我们的工业、医疗、娱乐等领域产生了重大影响。人体动作的操纵需要多维传感器来检测复杂的动作。本文提出了一种光栅图案传感器,用于双向旋转传感器和触觉传感器,可以集成到外骨骼和机器人中进行运动监测。在开关的帮助下,该设计实现了旋转、扭曲和弯曲的传感,具有很高的可定制性。将用户上肢的运动投射到虚拟空间中,或用于直观地控制机器人。
{"title":"Exploration of Multi-dimensional Sensing in Human Machine Interactions","authors":"Minglu Zhu, Zhongda Sun, Chengkuo Lee","doi":"10.1109/PowerMEMS54003.2021.9658394","DOIUrl":"https://doi.org/10.1109/PowerMEMS54003.2021.9658394","url":null,"abstract":"The advancements of human machine interface (HMI) with diversified sensory systems are essential to the intuitive and dexterous interaction with robotics and virtual world, which greatly affect our industrial, healthcare, and entertainment, etc. The manipulations done by human motions requires the multi-dimensional sensors to detect the complex movements. In this paper, we proposed a grating patterned sensor for both dual directional rotation sensors and tactile sensor which can be integrated into the exoskeleton and robot for motion monitoring. With the aid of the switch, the rotation, twisting, and bending sensing are achieved by the proposed designs with high customizability. The motion of upper limbs of users is projected into the virtual space or applied to control the robotics intuitively.","PeriodicalId":165158,"journal":{"name":"2021 IEEE 20th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)","volume":"31 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-12-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129657099","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Experimental Analysis of Rotary Freestanding Triboelectric Nanogenerators 旋转独立式摩擦纳米发电机的实验分析
Keenan Chatar, S. Uehara, Hiroki Kojima, A. Miura, T. Yabuki, K. Miyazaki
In this paper, we design, develop, and test rotary freestanding triboelectric nanogenerators (TENGs) for harvesting energy from mechanical rotation. The objective is characterizing the fundamental processes involved in energy harvesting and obtaining a thorough understanding of the development process for TENG devices. An experimental testbed was built for mounting, testing, and analyzing the TENG electrical characteristics. To test the electrical performance, several versions of TENGs were created with varying design and measurement parameters. We measured the effects of changing the diameter (50, 75, 100mm) and changing the number of blades (4, 8 and 12-blade). We also analyzed the effect of changing RPM, applied torque and electrode materials on the output performance produced. Additionally, we also measured and characterized the performance of thin-film MEMS deposition techniques by depositing an Aluminum Oxide (Al2O3) layer and Aluminum (Al) electrode layer for the TENGs. The 12-blade 100mm TENG produced an open circuit voltage of 180VOC and a short circuit current of 10μA at 1000RPM and 0.04Nm applied torque. The Al2O3 thin-film blocking layer exhibited a two-fold increase in current and a three-fold increase in voltage output for the tested TENG devices.
在本文中,我们设计,开发和测试了旋转独立式摩擦电纳米发电机(TENGs),用于从机械旋转中收集能量。目标是描述涉及能量收集的基本过程,并对TENG设备的开发过程有一个透彻的了解。搭建了一个实验测试平台,用于安装、测试和分析TENG的电气特性。为了测试电性能,制造了几种具有不同设计和测量参数的teng版本。我们测量了改变直径(50、75、100毫米)和改变叶片数量(4、8和12片)的效果。分析了转速、外加转矩和电极材料对输出性能的影响。此外,我们还通过为TENGs沉积氧化铝(Al2O3)层和铝(Al)电极层来测量和表征薄膜MEMS沉积技术的性能。12叶片100mm TENG在1000RPM和0.04Nm扭矩下产生180VOC的开路电压和10μA的短路电流。在测试的TENG器件中,Al2O3薄膜阻断层的电流增加了两倍,电压输出增加了三倍。
{"title":"Experimental Analysis of Rotary Freestanding Triboelectric Nanogenerators","authors":"Keenan Chatar, S. Uehara, Hiroki Kojima, A. Miura, T. Yabuki, K. Miyazaki","doi":"10.1109/PowerMEMS54003.2021.9658403","DOIUrl":"https://doi.org/10.1109/PowerMEMS54003.2021.9658403","url":null,"abstract":"In this paper, we design, develop, and test rotary freestanding triboelectric nanogenerators (TENGs) for harvesting energy from mechanical rotation. The objective is characterizing the fundamental processes involved in energy harvesting and obtaining a thorough understanding of the development process for TENG devices. An experimental testbed was built for mounting, testing, and analyzing the TENG electrical characteristics. To test the electrical performance, several versions of TENGs were created with varying design and measurement parameters. We measured the effects of changing the diameter (50, 75, 100mm) and changing the number of blades (4, 8 and 12-blade). We also analyzed the effect of changing RPM, applied torque and electrode materials on the output performance produced. Additionally, we also measured and characterized the performance of thin-film MEMS deposition techniques by depositing an Aluminum Oxide (Al2O3) layer and Aluminum (Al) electrode layer for the TENGs. The 12-blade 100mm TENG produced an open circuit voltage of 180VOC and a short circuit current of 10μA at 1000RPM and 0.04Nm applied torque. The Al2O3 thin-film blocking layer exhibited a two-fold increase in current and a three-fold increase in voltage output for the tested TENG devices.","PeriodicalId":165158,"journal":{"name":"2021 IEEE 20th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)","volume":"4 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-12-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117078082","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Stretchable Piezoelectric Tensile Sensor Patterned via Ultraviolet Laser Cutting 紫外激光切割可拉伸压电张力传感器
Mayue Shi, A. Holmes, E. Yeatman
This paper reports a piezoelectric dynamic tensile sensor comprising a metalized polyvinylidene fluoride (PVDF) film patterned with fractal curves and encapsulated in polydimethylsiloxane (PDMS). Because of the high precision and low peripheral heating of the UV laser process, we could achieve a PVDF linewidth down to 600 μm with single step cutting while maintaining piezoelectric functionality. With a second-order fractal curve, our PVDF sensor is omnidirectionally stretchable. In tensile tests using a linear slider, we found this sensor showed good dynamic sensitivity, detecting extension rates down to 5 mm/s. UV laser cutting provides a simple, fast and cheap fabrication process for stretchable piezoelectric devices including low-power sensors and wearable energy harvesters. The fabrication process and the device are highly compatible with rapidly developing stretchable self-powered systems.
本文报道了一种压电式动态张力传感器,该传感器由分形曲线图案的金属化聚偏氟乙烯(PVDF)薄膜和聚二甲基硅氧烷(PDMS)封装而成。由于UV激光加工的高精度和低外围加热,我们可以在保持压电功能的情况下实现PVDF线宽低至600 μm的单步切割。利用二阶分形曲线,我们的PVDF传感器是全方位可拉伸的。在使用线性滑块的拉伸测试中,我们发现该传感器具有良好的动态灵敏度,可以检测到低至5 mm/s的拉伸速率。紫外激光切割为包括低功率传感器和可穿戴能量采集器在内的可拉伸压电器件提供了一种简单、快速和廉价的制造工艺。制造工艺和器件与快速发展的可拉伸自供电系统高度兼容。
{"title":"Stretchable Piezoelectric Tensile Sensor Patterned via Ultraviolet Laser Cutting","authors":"Mayue Shi, A. Holmes, E. Yeatman","doi":"10.1109/PowerMEMS54003.2021.9658378","DOIUrl":"https://doi.org/10.1109/PowerMEMS54003.2021.9658378","url":null,"abstract":"This paper reports a piezoelectric dynamic tensile sensor comprising a metalized polyvinylidene fluoride (PVDF) film patterned with fractal curves and encapsulated in polydimethylsiloxane (PDMS). Because of the high precision and low peripheral heating of the UV laser process, we could achieve a PVDF linewidth down to 600 μm with single step cutting while maintaining piezoelectric functionality. With a second-order fractal curve, our PVDF sensor is omnidirectionally stretchable. In tensile tests using a linear slider, we found this sensor showed good dynamic sensitivity, detecting extension rates down to 5 mm/s. UV laser cutting provides a simple, fast and cheap fabrication process for stretchable piezoelectric devices including low-power sensors and wearable energy harvesters. The fabrication process and the device are highly compatible with rapidly developing stretchable self-powered systems.","PeriodicalId":165158,"journal":{"name":"2021 IEEE 20th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)","volume":"161 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-12-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124505976","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
PowerMEMS 2021 Index PowerMEMS 2021指数
{"title":"PowerMEMS 2021 Index","authors":"","doi":"10.1109/powermems54003.2021.9658372","DOIUrl":"https://doi.org/10.1109/powermems54003.2021.9658372","url":null,"abstract":"","PeriodicalId":165158,"journal":{"name":"2021 IEEE 20th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)","volume":"10 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-12-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131412181","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Systematic investigation of bipolar-charged electret/triboelectric power generator: modeling, experiments and applications 双极充电驻极体/摩擦发电机的系统研究:建模、实验与应用
Zhe Zhao, K. Tao
Inspired by an electromagnetic hydropower station with a reverse polarized magnet, we proposed a new design methodology of electret rotatory power generator (e-RPG) with bipolar-charged electrets for boosting its output performance. A selectively localized corona discharging method is invented to have both positive and negative ultra-high-resolution charges implanted into a single electret thin film. A generalized theoretical model of unipolar-charged and bipolar-charged e-RPG is derived to evaluate their performance and the key features affecting their performance are the initial capacitances with different connection schemes. Experimental results show that: the output power of the bipolar-charged e-RPG is increased to 393.4% compared to those of the positive alone and negative alone configurations, which fully agree with those obtained from the theoretical model. Based on the modeling analysis and experimental verification, it is clarified the average output power of the bipolar e-RPG are increased up to 400% compared with those of the unipolar e-RPG, which provides a direction for the subsequent research on improving the output performance of the electret generator.
摘要受反极化磁体电磁水电站的启发,提出了一种双极充电驻极体旋转发电机(e-RPG)的设计方法,以提高其输出性能。发明了一种选择性局部电晕放电方法,将正、负超高分辨率电荷植入到单个驻极体薄膜中。推导了单极电和双极电的广义理论模型来评价其性能,并指出影响其性能的关键因素是不同连接方式下的初始电容。实验结果表明:双极带电e-RPG的输出功率比正负两种构型的输出功率提高了393.4%,与理论模型的结果完全一致。通过建模分析和实验验证,表明双极电子rpg的平均输出功率比单极电子rpg的平均输出功率提高了400%,为后续提高驻极体发生器输出性能的研究提供了方向。
{"title":"Systematic investigation of bipolar-charged electret/triboelectric power generator: modeling, experiments and applications","authors":"Zhe Zhao, K. Tao","doi":"10.1109/PowerMEMS54003.2021.9658384","DOIUrl":"https://doi.org/10.1109/PowerMEMS54003.2021.9658384","url":null,"abstract":"Inspired by an electromagnetic hydropower station with a reverse polarized magnet, we proposed a new design methodology of electret rotatory power generator (e-RPG) with bipolar-charged electrets for boosting its output performance. A selectively localized corona discharging method is invented to have both positive and negative ultra-high-resolution charges implanted into a single electret thin film. A generalized theoretical model of unipolar-charged and bipolar-charged e-RPG is derived to evaluate their performance and the key features affecting their performance are the initial capacitances with different connection schemes. Experimental results show that: the output power of the bipolar-charged e-RPG is increased to 393.4% compared to those of the positive alone and negative alone configurations, which fully agree with those obtained from the theoretical model. Based on the modeling analysis and experimental verification, it is clarified the average output power of the bipolar e-RPG are increased up to 400% compared with those of the unipolar e-RPG, which provides a direction for the subsequent research on improving the output performance of the electret generator.","PeriodicalId":165158,"journal":{"name":"2021 IEEE 20th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)","volume":"14 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-12-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123169109","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
期刊
2021 IEEE 20th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)
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