Pub Date : 2021-12-06DOI: 10.1109/PowerMEMS54003.2021.9658410
Shengkai Su, B. Truong, S. Aunet, C. Le
A frequency-tuning method with a high tuning sensitivity is difficult to control precisely or even cause the pull-in phenomenon before attaining the desired frequency. Here, the sensitivity is defined by the rate of change of the frequency with respect to the bias voltage. In this paper, a two-stage tuning technique is proposed to overcome fundamental challenges of MEMS vibration energy harvesting from low-frequency applications. The technique can significantly reduce the tuning sensitivity in comparison with previous tuning methods. In our particular example designs, when the frequency is tuned from 1 kHz to 50 Hz, a traditional tuning approach has a sensitivity of 495 Hz/V, while that of the proposed tuning approach is 18 Hz/V under the same design constraint. The effects of the tip capacitance are taken into account when investigating the pull-in phenomenon and estimating the theoretical lowest tunable frequency. The findings can provide a further guideline towards the optimal design of MEMS vibration energy harvesters operating at low-frequency ranges.
{"title":"A reliable and wide-range tuning technique for low-frequency MEMS energy harvesters","authors":"Shengkai Su, B. Truong, S. Aunet, C. Le","doi":"10.1109/PowerMEMS54003.2021.9658410","DOIUrl":"https://doi.org/10.1109/PowerMEMS54003.2021.9658410","url":null,"abstract":"A frequency-tuning method with a high tuning sensitivity is difficult to control precisely or even cause the pull-in phenomenon before attaining the desired frequency. Here, the sensitivity is defined by the rate of change of the frequency with respect to the bias voltage. In this paper, a two-stage tuning technique is proposed to overcome fundamental challenges of MEMS vibration energy harvesting from low-frequency applications. The technique can significantly reduce the tuning sensitivity in comparison with previous tuning methods. In our particular example designs, when the frequency is tuned from 1 kHz to 50 Hz, a traditional tuning approach has a sensitivity of 495 Hz/V, while that of the proposed tuning approach is 18 Hz/V under the same design constraint. The effects of the tip capacitance are taken into account when investigating the pull-in phenomenon and estimating the theoretical lowest tunable frequency. The findings can provide a further guideline towards the optimal design of MEMS vibration energy harvesters operating at low-frequency ranges.","PeriodicalId":165158,"journal":{"name":"2021 IEEE 20th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)","volume":"77 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-12-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121651573","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2021-12-06DOI: 10.1109/PowerMEMS54003.2021.9658364
K. Tamura, Keigo Nota, K. Miwa, S. Ono, D. Yamane
This paper reports demonstration results of a non-contact type vibration energy harvester (VEH) with electric double layer (EDL) electrets. The surface potential of EDL electrets is, for the first time, utilized to generate induced electrical currents by input vibration. A proof-of-concept in-plane VEH is designed and developed by precision machining processes. The average surface potential of the developed EDL electret is experimentally obtained to be about −2 V. The VEH evaluation results successfully demonstrate the proposed non-contact type power generation, where we confirm a typical output current of about 40 nA (peak-to-peak) with the load resistance of 1 MΩ at the input acceleration of 1 G (1 G = 9.8 m/s2) with the frequency of 155 Hz. The proposed power generation mechanism would contribute to expanding the usage environment of VEHs with EDL electrets.
{"title":"Demonstration of Non-Contact Type Vibrational Energy Harvester with Electric Double Layer Electrets","authors":"K. Tamura, Keigo Nota, K. Miwa, S. Ono, D. Yamane","doi":"10.1109/PowerMEMS54003.2021.9658364","DOIUrl":"https://doi.org/10.1109/PowerMEMS54003.2021.9658364","url":null,"abstract":"This paper reports demonstration results of a non-contact type vibration energy harvester (VEH) with electric double layer (EDL) electrets. The surface potential of EDL electrets is, for the first time, utilized to generate induced electrical currents by input vibration. A proof-of-concept in-plane VEH is designed and developed by precision machining processes. The average surface potential of the developed EDL electret is experimentally obtained to be about −2 V. The VEH evaluation results successfully demonstrate the proposed non-contact type power generation, where we confirm a typical output current of about 40 nA (peak-to-peak) with the load resistance of 1 MΩ at the input acceleration of 1 G (1 G = 9.8 m/s2) with the frequency of 155 Hz. The proposed power generation mechanism would contribute to expanding the usage environment of VEHs with EDL electrets.","PeriodicalId":165158,"journal":{"name":"2021 IEEE 20th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)","volume":"38 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-12-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127155057","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
This research aims to realize a miniature ORC (organic Rankine cycle) generator, and a MEMS process is used to reduce the size of the turbine structure. The developed MEMS turbine had millimeter scale structure, and it demonstrated the rotational motion by a low-boiling-point medium as a working fluid that can be harvested a low temperature waste heat. The rotation speed of the turbine was measured and compared in open and closed measurement systems. As a result, in the closed system, the maximum rotation speed was 113,207 rpm at heating temperature of 80.2 °C and the inlet pressure of 0.26 MPa. The rotation speed of the open system was lower than that of the closed system because the low-boiling-point medium changed to gas-liquid two-phase in the open system. However, the working fluid released from the turbine in the liquid-phase is preferable for downsizing because it eliminates the need for a condenser.
{"title":"Rotational Experiment of MEMS Turbine for Miniature Organic Rankin Cycle Generator","authors":"Kobayashi Yuya, Niki Yuya, Takeda Kenji, Aibara Megumi, Kaneko Minami, Uchikoba Fumio","doi":"10.1109/PowerMEMS54003.2021.9658385","DOIUrl":"https://doi.org/10.1109/PowerMEMS54003.2021.9658385","url":null,"abstract":"This research aims to realize a miniature ORC (organic Rankine cycle) generator, and a MEMS process is used to reduce the size of the turbine structure. The developed MEMS turbine had millimeter scale structure, and it demonstrated the rotational motion by a low-boiling-point medium as a working fluid that can be harvested a low temperature waste heat. The rotation speed of the turbine was measured and compared in open and closed measurement systems. As a result, in the closed system, the maximum rotation speed was 113,207 rpm at heating temperature of 80.2 °C and the inlet pressure of 0.26 MPa. The rotation speed of the open system was lower than that of the closed system because the low-boiling-point medium changed to gas-liquid two-phase in the open system. However, the working fluid released from the turbine in the liquid-phase is preferable for downsizing because it eliminates the need for a condenser.","PeriodicalId":165158,"journal":{"name":"2021 IEEE 20th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)","volume":"79 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-12-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127880403","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2021-12-06DOI: 10.1109/powermems54003.2021.9658365
{"title":"PowerMEMS 2021 Conference Officials","authors":"","doi":"10.1109/powermems54003.2021.9658365","DOIUrl":"https://doi.org/10.1109/powermems54003.2021.9658365","url":null,"abstract":"","PeriodicalId":165158,"journal":{"name":"2021 IEEE 20th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)","volume":"8 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-12-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126941496","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2021-12-06DOI: 10.1109/powermems54003.2021.9658379
{"title":"PowerMEMS 2021 Acknowledgements","authors":"","doi":"10.1109/powermems54003.2021.9658379","DOIUrl":"https://doi.org/10.1109/powermems54003.2021.9658379","url":null,"abstract":"","PeriodicalId":165158,"journal":{"name":"2021 IEEE 20th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)","volume":"17 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-12-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121404129","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2021-12-06DOI: 10.1109/PowerMEMS54003.2021.9658330
Weihan Xu, Anxin Luo, Fei Wang
This paper proposed the analysis of magnetic coupling force for an energy harvester with rotational frequency up-conversion structure. The harvester consists of a piezoelectric cantilever with a tip magnet and a rotatable disk with a magnet fixed on its edge as the driving magnet, and its operating principle for frequency up-conversion is introduced in detail. Since the magnetization direction of the driving magnet is along the radial direction of disk which is time-varying during the rotation of disk, traditional methods are not suitable for the proposed energy harvester to calculate the magnetic coupling force. Therefore, a novel theoretical model is established. Through both the simulation and the experimental validation, it can be proven that the proposed model has achieved an excellent accuracy and is in good agreement with the practical situation.
{"title":"The Analysis of Magnetic Coupling Force to An Energy Harvester with Rotational Frequency Up-Conversion Structure","authors":"Weihan Xu, Anxin Luo, Fei Wang","doi":"10.1109/PowerMEMS54003.2021.9658330","DOIUrl":"https://doi.org/10.1109/PowerMEMS54003.2021.9658330","url":null,"abstract":"This paper proposed the analysis of magnetic coupling force for an energy harvester with rotational frequency up-conversion structure. The harvester consists of a piezoelectric cantilever with a tip magnet and a rotatable disk with a magnet fixed on its edge as the driving magnet, and its operating principle for frequency up-conversion is introduced in detail. Since the magnetization direction of the driving magnet is along the radial direction of disk which is time-varying during the rotation of disk, traditional methods are not suitable for the proposed energy harvester to calculate the magnetic coupling force. Therefore, a novel theoretical model is established. Through both the simulation and the experimental validation, it can be proven that the proposed model has achieved an excellent accuracy and is in good agreement with the practical situation.","PeriodicalId":165158,"journal":{"name":"2021 IEEE 20th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)","volume":"15 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-12-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130905496","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2021-12-06DOI: 10.1109/PowerMEMS54003.2021.9658411
B. Kawa, R. Walczak
Zero energy devices, mainly used in IoT, need a stable power source that will power them for a very long period of their operation. Additive manufacturing is one of the few methods of producing strongly adaptive IoT solutions that can meet the requirements if large number of devices connected to the IoT network is needed wit additional adjusting to the changing environmental conditions in which they work. In this paper we present for the first time 3D printed multi-frequency energy harvester that can be designed to work in specific conditions required by the application. The work presents the process of fabrication, characterization and electrical/mechanical measurements with a strong emphasis on test related to the generated power.
{"title":"3D printed multi-frequency vibrational energy harvester","authors":"B. Kawa, R. Walczak","doi":"10.1109/PowerMEMS54003.2021.9658411","DOIUrl":"https://doi.org/10.1109/PowerMEMS54003.2021.9658411","url":null,"abstract":"Zero energy devices, mainly used in IoT, need a stable power source that will power them for a very long period of their operation. Additive manufacturing is one of the few methods of producing strongly adaptive IoT solutions that can meet the requirements if large number of devices connected to the IoT network is needed wit additional adjusting to the changing environmental conditions in which they work. In this paper we present for the first time 3D printed multi-frequency energy harvester that can be designed to work in specific conditions required by the application. The work presents the process of fabrication, characterization and electrical/mechanical measurements with a strong emphasis on test related to the generated power.","PeriodicalId":165158,"journal":{"name":"2021 IEEE 20th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)","volume":"16 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-12-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133047539","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2021-12-06DOI: 10.1109/PowerMEMS54003.2021.9658412
N. Hodžić, Ahmad Delbani, A. Karami, D. Galayko, P. Basset
Unstable charge pumps used as rectifier circuits for triboelectric generators, like the Bennet’s doubler, have been proven to drastically improve the harvested power compared to traditional diode bridges, at the cost of longer starting time. In this work, we propose for the first time a kinetic energy harvesting system based on the Bennet’s doubler, polarizing two triboelectric transducers with antiphasic capacitance variations, instead of just one triboelectric transducer. We show that this configuration reduces the time needed to reach the circuit’s unstable regime compared to its single-transducer counterpart. Consequently, the harvested power is increased.
{"title":"Bennet’s Doubler With Double Capacitive TENG for Kinetic Energy Harvesting","authors":"N. Hodžić, Ahmad Delbani, A. Karami, D. Galayko, P. Basset","doi":"10.1109/PowerMEMS54003.2021.9658412","DOIUrl":"https://doi.org/10.1109/PowerMEMS54003.2021.9658412","url":null,"abstract":"Unstable charge pumps used as rectifier circuits for triboelectric generators, like the Bennet’s doubler, have been proven to drastically improve the harvested power compared to traditional diode bridges, at the cost of longer starting time. In this work, we propose for the first time a kinetic energy harvesting system based on the Bennet’s doubler, polarizing two triboelectric transducers with antiphasic capacitance variations, instead of just one triboelectric transducer. We show that this configuration reduces the time needed to reach the circuit’s unstable regime compared to its single-transducer counterpart. Consequently, the harvested power is increased.","PeriodicalId":165158,"journal":{"name":"2021 IEEE 20th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)","volume":"31 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-12-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134565552","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2021-12-06DOI: 10.1109/PowerMEMS54003.2021.9658406
D. Gibus, P. Gasnier, A. Morel, A. Ameye, A. Badel
The present work introduces the design and fabrication of a strongly coupled piezoelectric vibration energy harvester dedicated to resonant frequency tuning by electrical methods. The electromechanical coupling coefficient of the harvester is maximized thanks to an analytical model and 3D FEM simulations in order to extend the frequency tuning bandwidth. Moreover, losses of candidate substrates are analyzed in order to maximize the mechanical quality factor of the harvester. A PZN-5.5PT and aluminum based cantilever is proposed and experimentally validated with resistive output loads. Among state-of-the-art solutions, the proposed prototype exhibits one of the best coupling coefficient (k2=41%) and normalized power density (115 kg.s.m−3).
{"title":"A strong electromechanically coupled and low-damped harvester for resonant frequency tuning","authors":"D. Gibus, P. Gasnier, A. Morel, A. Ameye, A. Badel","doi":"10.1109/PowerMEMS54003.2021.9658406","DOIUrl":"https://doi.org/10.1109/PowerMEMS54003.2021.9658406","url":null,"abstract":"The present work introduces the design and fabrication of a strongly coupled piezoelectric vibration energy harvester dedicated to resonant frequency tuning by electrical methods. The electromechanical coupling coefficient of the harvester is maximized thanks to an analytical model and 3D FEM simulations in order to extend the frequency tuning bandwidth. Moreover, losses of candidate substrates are analyzed in order to maximize the mechanical quality factor of the harvester. A PZN-5.5PT and aluminum based cantilever is proposed and experimentally validated with resistive output loads. Among state-of-the-art solutions, the proposed prototype exhibits one of the best coupling coefficient (k2=41%) and normalized power density (115 kg.s.m−3).","PeriodicalId":165158,"journal":{"name":"2021 IEEE 20th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-12-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123118927","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2021-12-06DOI: 10.1109/PowerMEMS54003.2021.9658398
Qingzhao Li, Xinbao Hou, Zhiwei Wang, Lanxing Qin, L. Bu
Efficiently collecting ambient vibrations has been the research hotspot of energy harvesting technology. In this paper, an asymmetric bi-stable energy harvester is proposed to tune the bandwidth as well as to enhance the output power. By only shifting the magnet positions from symmetric to asymmetric, and requiring no ancillary mechanical structures, asymmetric double potential wells can be constructed, working bandwidth can be extended, and average output power can be increased by 10.2%. Maximally, the asymmetric bi-stable energy harvester prototype generates root mean square voltage of 3.173V on 90.5MΩ resistance @9.5Hz excitation.
{"title":"Power and Bandwidth Enhancement through Asymmetric Bi-stable Design for Piezoelectric Energy Harvesters","authors":"Qingzhao Li, Xinbao Hou, Zhiwei Wang, Lanxing Qin, L. Bu","doi":"10.1109/PowerMEMS54003.2021.9658398","DOIUrl":"https://doi.org/10.1109/PowerMEMS54003.2021.9658398","url":null,"abstract":"Efficiently collecting ambient vibrations has been the research hotspot of energy harvesting technology. In this paper, an asymmetric bi-stable energy harvester is proposed to tune the bandwidth as well as to enhance the output power. By only shifting the magnet positions from symmetric to asymmetric, and requiring no ancillary mechanical structures, asymmetric double potential wells can be constructed, working bandwidth can be extended, and average output power can be increased by 10.2%. Maximally, the asymmetric bi-stable energy harvester prototype generates root mean square voltage of 3.173V on 90.5MΩ resistance @9.5Hz excitation.","PeriodicalId":165158,"journal":{"name":"2021 IEEE 20th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)","volume":"50 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-12-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115615345","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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