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Method for the Characterization of Extreme-Ultraviolet Photoresist Outgassing. 极紫外光刻胶除气的表征方法。
IF 1.5 4区 工程技术 Pub Date : 2009-06-01 Print Date: 2009-05-01 DOI: 10.6028/jres.114.011
Charles Tarrio

Outgassing from photoresists illuminated by extreme ultraviolet radiation can lead to degradation of the very expensive multilayer-coated optics in an extreme ultraviolet stepper. Reliable quantification of the various organic molecules outgassed by photoresists has been a challenging goal. We have designed a compact system for this measurement. In the first step, the total number of molecules emitted by the photoresist is measured using a pressure-rise method in a closed vacuum chamber, with the pressure measured by mechanical means using a capacitance displacement gauge. To provide identification and relative abundances, the outgassed molecules are then collected in an evacuated trap cooled by liquid nitrogen for subsequent analysis by gas chromatography with mass spectrometry. We will discuss the design and performance of the system.

极紫外辐射照射下光刻胶的排气会导致极紫外步进器中非常昂贵的多层涂层光学器件的退化。对光阻剂排出的各种有机分子进行可靠的量化一直是一个具有挑战性的目标。我们为这个测量设计了一个紧凑的系统。在第一步中,在封闭的真空室中使用升压法测量光刻胶发射的分子总数,使用电容位移计通过机械方法测量压力。为了提供鉴定和相对丰度,然后将排出的分子收集在用液氮冷却的真空阱中,用于随后的气相色谱质谱分析。我们将讨论系统的设计和性能。
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引用次数: 7
Measurement of Absorption and Scattering With an Integrating Sphere Detector: Application to Microalgae. 积分球探测器的吸收散射测量:在微藻中的应用。
IF 1.5 4区 工程技术 Pub Date : 2009-04-01 Print Date: 2009-03-01 DOI: 10.6028/jres.114.006
A K Gaigalas, Hua-Jun He, Lili Wang

A spectrometer with an integrating sphere (IS) detector was used to measure the absorbance due to scattering and absorption. Analysis of the measurement process showed that two measurements of the absorbance, one with the cuvette placed in the normal spectrometer position, and the second with the cuvette placed next to the entrance aperture of the IS detector, provide enough information to separate the contributions from scattering and molecular absorption. Measurements were carried out with mixtures of microsphere and chromophore solutions. Two cases were examined: microspheres suspended in an aqueous fluorescein solution, and microspheres suspended in an aqueous holmium oxide solution. In both cases, the proposed measurement model gave results which were in good agreement with the expected response. Measurements on microalgae suspensions yielded a molecular absorption contribution and a scattering contribution. The scattering contribution had significant spectral structure which was inversely related to the molecular absorption contribution. The absorption and scattering contributions may provide independent information on the status of chlorophyll molecules and the structure of chloroplasts in microalgae.

采用积分球(IS)探测器的光谱仪测量了由于散射和吸收引起的吸光度。测量过程分析表明,两次吸光度测量,一次将比色皿放置在光谱仪正常位置,第二次将比色皿放置在IS探测器的入口孔旁边,提供了足够的信息来分离散射和分子吸收的贡献。用微球和发色团溶液的混合物进行测量。研究了两种情况:微球悬浮在荧光素水溶液中,微球悬浮在氧化钬水溶液中。在这两种情况下,所提出的测量模型给出的结果与预期的响应很好地一致。对微藻悬浮液的测量得出了分子吸收贡献和散射贡献。散射贡献具有显著的光谱结构,与分子吸收贡献呈负相关。吸收和散射贡献可以为微藻叶绿素分子的状态和叶绿体结构提供独立的信息。
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引用次数: 28
Priorities for Standards and Measurements to Accelerate Innovations in Nano-Electrotechnologies: Analysis of the NIST-Energetics-IEC TC 113 Survey. 加速纳米电工技术创新的优先标准和测量:NIST-Energetics-IEC TC 113调查分析。
IF 1.5 4区 工程技术 Pub Date : 2009-04-01 Print Date: 2009-03-01 DOI: 10.6028/jres.114.008
Herbert S Bennett, Howard Andres, Joan Pellegrino, Winnie Kwok, Norbert Fabricius, J Thomas Chapin

In 2008, the National Institute of Standards and Technology and Energetics Incorporated collaborated with the International Electrotechnical Commission Technical Committee 113 (IEC TC 113) on nano-electrotechnologies to survey members of the international nanotechnologies community about priorities for standards and measurements to accelerate innovations in nano-electrotechnologies. In this paper, we analyze the 459 survey responses from 45 countries as one means to begin building a consensus on a framework leading to nano-electrotechnologies standards development by standards organizations and national measurement institutes. The distributions of priority rankings from all 459 respondents are such that there are perceived distinctions with statistical confidence between the relative international priorities for the several items ranked in each of the following five Survey category types: 1) Nano-electrotechnology Properties, 2) Nano-electrotechnology Taxonomy: Products, 3) Nano-electrotechnology Taxonomy: Cross-Cutting Technologies, 4) IEC General Discipline Areas, and 5) Stages of the Linear Economic Model. The global consensus prioritizations for ranked items in the above five category types suggest that the IEC TC 113 should focus initially on standards and measurements for electronic and electrical properties of sensors and fabrication tools that support performance assessments of nano-technology enabled sub-assemblies used in energy, medical, and computer products.

2008年,美国国家标准与技术研究所和Energetics公司与国际电工委员会技术委员会(IEC TC 113)就纳米电工技术开展合作,调查国际纳米技术界成员关于加速纳米电工技术创新的标准和测量的优先事项。在本文中,我们分析了来自45个国家的459份调查回复,作为开始就标准组织和国家测量机构制定纳米电子技术标准的框架达成共识的一种手段。所有459名受访者的优先级排名分布是这样的,在以下五个调查类别中,排名的几个项目的相对国际优先级之间存在统计学上的差异:1)纳米电工特性,2)纳米电工分类法:产品,3)纳米电工分类法:交叉技术,4)IEC一般学科领域,5)线性经济模型的阶段。对上述五类分类中排名项目的全球共识优先次序表明,IEC TC 113应首先侧重于传感器和制造工具的电子和电气特性的标准和测量,以支持对能源、医疗和计算机产品中使用的纳米技术支持的子组件进行性能评估。
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引用次数: 9
Issues in Optical Diffraction Theory. 光学衍射理论问题。
IF 1.5 4区 工程技术 Pub Date : 2009-04-01 Print Date: 2009-03-01 DOI: 10.6028/jres.114.007
Klaus D Mielenz

This paper focuses on unresolved or poorly documented issues pertaining to Fresnel's scalar diffraction theory and its modifications. In Sec. 2 it is pointed out that all thermal sources used in practice are finite in size and errors can result from insufficient coherence of the optical field. A quarter-wave criterion is applied to show how such errors can be avoided by placing the source at a large distance from the aperture plane, and it is found that in many cases it may be necessary to use collimated light as on the source side of a Fraunhofer experiment. If these precautions are not taken the theory of partial coherence may have to be used for the computations. In Sec. 3 it is recalled that for near-zone computations the Kirchhoff or Rayleigh-Sommerfeld integrals are applicable, but fail to correctly describe the energy flux across the aperture plane because they are not continuously differentiable with respect to the assumed geometrical field on the source side. This is remedied by formulating an improved theory in which the field on either side of a semi-reflecting screen is expressed as the superposition of mutually incoherent components which propagate in the opposite directions of the incident and reflected light. These components are defined as linear combinations of the Rayleigh-Sommerfeld integrals, so that they are rigorous solutions of the wave equation as well as continuously differentiable in the aperture plane. Algorithms for using the new theory for computing the diffraction patterns of circular apertures and slits at arbitrary distances z from either side of the aperture (down to z = ± 0.0003 λ) are presented, and numerical examples of the results are given. These results show that the incident geometrical field is modulated by diffraction before it reaches the aperture plane while the reflected field is spilled into the dark space. At distances from the aperture which are large compared to the wavelength λ these field expressions are reduced to the usual ones specified by Fresnel's theory. In the specific case of a diffracting half plane the numerical results obtained were practically the same as those given by Sommerfeld's rigorous theory. The modified theory developed in this paper is based on the explicit assumption that the scalar theory of light cannot explain plolarization effects. This premise is justified in Sec. 4, where it is shown that previous attempts to do so have produced dubious results.

本文的重点是关于菲涅耳标量衍射理论及其修正的未解决或文献贫乏的问题。在第二节中指出,实际使用的所有热源的尺寸都是有限的,光场的相干性不足会导致误差。应用四分之一波判据来说明如何通过将光源置于离孔径平面较远的位置来避免这种误差,并且发现在许多情况下,可能有必要像在弗劳恩霍夫实验的光源侧那样使用准直光。如果不采取这些预防措施,则可能不得不使用部分相干理论进行计算。在第3节中,我们回想起,对于近区计算,Kirchhoff或Rayleigh-Sommerfeld积分是适用的,但不能正确描述穿过孔径平面的能量通量,因为它们对源侧假定的几何场不是连续可微的。这是通过制定一个改进的理论来补救的,在这个理论中,半反射屏幕两侧的场被表示为在入射光和反射光的相反方向上传播的相互不相干分量的叠加。这些分量被定义为Rayleigh-Sommerfeld积分的线性组合,因此它们是波动方程的严格解,并且在孔径平面上连续可微。本文给出了利用新理论计算任意距离(z =±0.0003 λ)圆孔和狭缝衍射图样的算法,并给出了计算结果的数值实例。结果表明,入射的几何场在到达孔径平面之前被衍射调制,而反射的几何场则被散射到暗空间中。与波长λ相比,在距离孔径较远的地方,这些场的表达式被简化为菲涅耳理论所规定的通常表达式。在衍射半平面的具体情况下,所得到的数值结果与索默菲尔德的严格理论几乎相同。本文提出的修正理论是基于光的标量理论不能解释极化效应的明确假设。这一前提在第4节中得到了证明,在第4节中表明,以前这样做的尝试产生了可疑的结果。
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引用次数: 1
Statistical Analysis of a Round-Robin Measurement Survey of Two Candidate Materials for a Seebeck Coefficient Standard Reference Material. 对塞贝克系数标准参考材料的两种候选材料进行循环测量调查的统计分析。
IF 1.5 4区 工程技术 Pub Date : 2009-02-01 Print Date: 2009-01-01 DOI: 10.6028/jres.114.004
Z Q J Lu, N D Lowhorn, W Wong-Ng, W Zhang, E L Thomas, M Otani, M L Green, T N Tran, C Caylor, N R Dilley, A Downey, B Edwards, N Elsner, S Ghamaty, T Hogan, Q Jie, Q Li, J Martin, G Nolas, H Obara, J Sharp, R Venkatasubramanian, R Willigan, J Yang, T Tritt

In an effort to develop a Standard Reference Material (SRM™) for Seebeck coefficient, we have conducted a round-robin measurement survey of two candidate materials-undoped Bi2Te3 and Constantan (55 % Cu and 45 % Ni alloy). Measurements were performed in two rounds by twelve laboratories involved in active thermoelectric research using a number of different commercial and custom-built measurement systems and techniques. In this paper we report the detailed statistical analyses on the interlaboratory measurement results and the statistical methodology for analysis of irregularly sampled measurement curves in the interlaboratory study setting. Based on these results, we have selected Bi2Te3 as the prototype standard material. Once available, this SRM will be useful for future interlaboratory data comparison and instrument calibrations.

为了开发塞贝克系数标准参考材料 (SRM™),我们对两种候选材料--未掺杂的 Bi2Te3 和 Constantan(55% 铜和 45% 镍合金)进行了循环测量调查。参与热电研究的 12 个实验室使用多种不同的商用和定制测量系统和技术进行了两轮测量。在本文中,我们报告了对实验室间测量结果的详细统计分析,以及在实验室间研究环境中分析不规则采样测量曲线的统计方法。基于这些结果,我们选择 Bi2Te3 作为标准材料原型。该标准物质一旦问世,将有助于今后的实验室间数据比较和仪器校准。
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引用次数: 0
Synthesis of Polymerizable Cyclodextrin Derivatives for Use in Adhesion-Promoting Monomer Formulations. 用于增粘单体配方的可聚合环糊精衍生物的合成。
IF 1.5 4区 工程技术 Pub Date : 2009-02-01 Print Date: 2009-01-01 DOI: 10.6028/jres.114.001
Rafael L Bowen, Clifton M Carey, Kathleen M Flynn, Charles M Guttman

The synthesis of the cyclodextrin derivatives reported herein was assisted by extensive literature research together with structure-property relationships derived from three-dimensional molecular modeling. These studies led to the hypothesis that many of the 21 hydroxyl groups on beta-cyclodextrin molecules could be derivatized to form a closely related family of analogous chemical compounds containing both polymerizable groups and hydrophilic ionizable ligand (substrate-binding) groups, each attached via hydrolytically-stable ether-linkages. The vinylbenzylether polymerizable groups should readily homopolymerize and also copolymerize with methacrylates. This could be highly useful for dental applications because substantially all contemporary dental resins and composites are based on methacrylate monomers. Due to hydrophilic ligands and residual hydroxyl groups, these cyclodextrin derivatives should penetrate hydrated layers of dentin and enamel to interact with collagen and tooth mineral. Analyses indicated that the diverse reaction products resulting from the method of synthesis reported herein should comprise a family of copolymerizable molecules that collectively contain about 30 different combinations of vinylbenzyl and hexanoate groups on the various molecules, with up to approximately seven of such groups combined on some of the molecules. Although the hypothesis was supported, and adhesive bonding to dentin is expected to be significantly improved by the use of these polymerizable cyclodextrin derivatives, other efforts are planned for improved synthetic methods to ensure that each of the reaction-product molecules will contain at least one copolymerizable moiety. The long-term objective is to enable stronger and more durable attachments of densely cross-linked polymers to hydrated hydrophilic substrates. Capabilities for bonding of hydrolytically stable polymers to dental and perhaps other hydrous biological tissues could provide widespread benefits.

本文所报道的环糊精衍生物的合成得到了广泛的文献研究和三维分子建模得出的结构-性质关系的帮助。这些研究提出了一个假设:β-环糊精分子上的 21 个羟基中,有许多可以衍生化,形成一个密切相关的类似化合物家族,其中既含有可聚合基团,又含有亲水性可离子化配体(底物结合)基团,每个基团都通过水解稳定的醚键连接。乙烯基苄基醚可聚合基团很容易与甲基丙烯酸酯发生均聚和共聚。这对牙科应用非常有用,因为当代几乎所有的牙科树脂和复合材料都是以甲基丙烯酸酯单体为基础的。由于具有亲水性配体和残余羟基,这些环糊精衍生物应能穿透牙本质和珐琅质的水合层,与胶原蛋白和牙齿矿物质相互作用。分析表明,本文报告的合成方法所产生的各种反应产物应包括一系列可共聚的分子,这些分子上共含有约 30 种不同的乙烯基苄基和己酸酯基团组合,其中一些分子上的此类基团组合多达约 7 种。尽管假设得到了支持,而且使用这些可聚合环糊精衍生物有望显著改善与牙本质的粘合性,但我们还计划改进合成方法,以确保每个反应生成物分子至少含有一个可共聚的分子。长期目标是使密集交联的聚合物能够更牢固、更持久地附着在水合亲水基质上。将水解稳定的聚合物粘合到牙科组织或其他水合生物组织上的能力可带来广泛的益处。
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引用次数: 0
Implementation of Two-Dimensional Polycrystalline Grains in Object Oriented Micromagnetic Framework. 面向对象微磁框架中二维多晶颗粒的实现。
IF 1.5 4区 工程技术 Pub Date : 2009-02-01 Print Date: 2009-01-01 DOI: 10.6028/jres.114.005
J W Lau, R D McMichael, M J Donahue

In response to the growing need for a more accurate micromagnetic model to understand switching phenomenon in nanoscale magnets, we developed the capability to simulate two-dimensional polycrystalline grains using the Object Oriented Micromagnetic Framework (OOMMF). This addition allows users full flexibility in determining the magnetocrystalline anisotropy and axe in each grain as well as the inter- and intragranular exchange coupling strength.

为了满足对更精确的微磁模型来理解纳米级磁铁中的开关现象的日益增长的需求,我们开发了使用面向对象微磁框架(OOMMF)模拟二维多晶颗粒的能力。这种添加允许用户充分灵活地确定磁晶各向异性和斧头在每个晶粒以及间和粒内交换耦合强度。
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引用次数: 19
Adhesive Bonding to Dentin Improved by Polymerizable Cyclodextrin Derivatives. 可聚合环糊精衍生物改善牙本质的粘合性
IF 1.5 4区 工程技术 Pub Date : 2009-02-01 Print Date: 2009-01-01 DOI: 10.6028/jres.114.002
Rafael L Bowen, Gary E Schumacher, Anthony A Giuseppetti, Charles M Guttman, Clifton M Carey

The objective of this work was to determine bonding characteristics of a hydrophilic monomer formulation containing polymerizable cyclodextrin derivatives. The hypothesis was that a formulation containing hydrophilic cross-linking diluent comonomers and cyclodextrins with functional groups attached by hydrolytically stable ether linkages could form strong adhesive bonds to dentin. The previously synthesized polymerizable cyclodextrin derivatives were formulated with sorbitol dimethacrylate, methacrylic acid and phenylbis(2,4,6-trimethylbenzoyl) phosphine oxide photoinitiator. The same formulation without the polymerizable cyclodextrin derivatives isolated the effects of the polymerizable cyclodextrin derivatives. A commercial self-etching bonding system was tested as a comparative control. Ground mid-coronal dentin was etched with 37 % phosphoric acid (H3PO4) for 15 s and rinsed with distilled water for 10 s. Formulations were applied to the moist dentin and light-cured 10 s. A packable composite was then applied through irises and light-cured 60 s. Teeth were stored in water for 24 h before bonds were tested in a shearing orientation. One-way ANOVA was performed on the data. The average values of shear bond strengths were defined as loads at fracture divided by the 4 mm diameter iris areas. The average value of shear bond strength for the formulation containing the polymerizable cyclodextrin derivatives was higher (p < 0.05), where p is a fraction of the probability distribution) than that of the same monomeric formulation except that the polymerizable cyclodextrin derivatives were not included. This was supporting evidence that the polymerizable cyclodextrin derivatives contributed to improved bonding. The average value of shear bond strength for the formulation containing the polymerizable cyclodextrin derivatives was also higher (p < 0.05) than that of the commercial self-etching bonding system. These preliminary results are in accordance with the hypothesis that formulations containing polymerizable cyclodextrin derivatives can form strong adhesive bonds to hydrated dentin surfaces. Further improvements in bonding to hydrated biological tissues by use of advanced formulations are anticipated.

这项工作的目的是确定含有可聚合环糊精衍生物的亲水单体配方的粘合特性。假设含有亲水性交联稀释共聚单体和通过水解稳定的醚键连接官能团的环糊精的配方可以与牙本质形成牢固的粘合。之前合成的可聚合环糊精衍生物与山梨醇二甲基丙烯酸酯、甲基丙烯酸和苯基双(2,4,6-三甲基苯甲酰基)氧化膦光引发剂配制在一起。不含可聚合环糊精衍生物的相同配方隔离了可聚合环糊精衍生物的影响。一种商用自酸蚀粘接系统作为对比对照进行了测试。用 37% 磷酸(H3PO4)腐蚀中冠牙本质 15 秒钟,然后用蒸馏水冲洗 10 秒钟。将配方涂抹在潮湿的牙本质上并光固化 10 秒钟。对数据进行单因素方差分析。剪切粘接强度的平均值定义为断裂时的载荷除以直径为 4 毫米的虹膜面积。含有可聚合环糊精衍生物的配方的剪切粘接强度平均值高于相同单体配方的剪切粘接强度平均值(p < 0.05,p 为概率分布的分数),但不包括可聚合环糊精衍生物的配方除外。这证明了可聚合环糊精衍生物有助于提高粘合力。含有可聚合环糊精衍生物的配方的剪切粘接强度平均值也高于商用自酸蚀粘接系统(p < 0.05)。这些初步结果与含有可聚合环糊精衍生物的配方能在水合牙本质表面形成强粘合力的假设相符。通过使用先进的制剂,与水合生物组织的粘接效果有望得到进一步改善。
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引用次数: 0
ASME B89.4.19 Performance Evaluation Tests and Geometric Misalignments in Laser Trackers. ASME B89.4.19激光跟踪仪的性能评估试验和几何失调。
IF 1.5 4区 工程技术 Pub Date : 2009-02-01 Print Date: 2009-01-01 DOI: 10.6028/jres.114.003
B Muralikrishnan, D Sawyer, C Blackburn, S Phillips, B Borchardt, W T Estler

Small and unintended offsets, tilts, and eccentricity of the mechanical and optical components in laser trackers introduce systematic errors in the measured spherical coordinates (angles and range readings) and possibly in the calculated lengths of reference artifacts. It is desirable that the tests described in the ASME B89.4.19 Standard [1] be sensitive to these geometric misalignments so that any resulting systematic errors are identified during performance evaluation. In this paper, we present some analysis, using error models and numerical simulation, of the sensitivity of the length measurement system tests and two-face system tests in the B89.4.19 Standard to misalignments in laser trackers. We highlight key attributes of the testing strategy adopted in the Standard and propose new length measurement system tests that demonstrate improved sensitivity to some misalignments. Experimental results with a tracker that is not properly error corrected for the effects of the misalignments validate claims regarding the proposed new length tests.

激光跟踪器中机械和光学部件的微小和无意的偏移、倾斜和偏心会在测量的球坐标(角度和距离读数)中引入系统误差,并可能在计算的参考工件长度中引入系统误差。希望ASME B89.4.19标准[1]中描述的测试对这些几何偏差敏感,以便在性能评估期间识别任何产生的系统误差。本文采用误差模型和数值模拟的方法,分析了B89.4.19标准中长度测量系统和双面系统测试对激光跟踪仪对准误差的敏感性。我们强调了标准中采用的测试策略的关键属性,并提出了新的长度测量系统测试,该测试表明对某些错位的灵敏度有所提高。使用跟踪器进行的实验结果没有对不对准的影响进行适当的误差校正,验证了有关拟议的新长度测试的主张。
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引用次数: 78
A Low-Cost Fiducial Reference Phantom for Computed Tomography. 一种用于计算机断层扫描的低成本基准参考影。
IF 1.5 4区 工程技术 Pub Date : 2008-12-01 Print Date: 2008-11-01 DOI: 10.6028/jres.113.027
Zachary H Levine, Steven Grantham, Daniel S Sawyer, Anthony P Reeves, David F Yankelevitz

To detect the growth in lesions, it is necessary to ensure that the apparent changes in size are above the noise floor of the system. By introducing a fiducial reference, it may be possible to detect smaller changes in lesion size more reliably. We suspend three precision spheres with a precision structure built from pieces from a popular children's building toy. We measure the distances between the centroids of the structures three ways; namely, with a high-precision mechanical method, micro computerized tomography, and medical computerized tomography. The three methods are in agreement, and also agree with the design values for the structure. It is also possible to pick a threshold so that the three spheres have their nominal volumes in the medical computerized tomography images. The use of volumetric measures allows the determination of lengths to much less than the voxel size using materials which have x-ray properties within the range of the human body. A suitable structure may be built with a very small parts cost.

为了检测病变的增长,有必要确保尺寸的明显变化高于系统的噪声底。通过引入基准参考,可以更可靠地检测病灶大小的较小变化。我们用一种流行的儿童建筑玩具的零件,用精确的结构悬挂三个精确的球体。我们用三种方法测量结构质心之间的距离;即采用高精度机械方法、显微计算机断层扫描和医学计算机断层扫描。这三种方法是一致的,也符合结构的设计值。也可以选择一个阈值,使三个球体在医学计算机断层扫描图像中具有其标称体积。体积测量的使用允许使用在人体范围内具有x射线特性的材料来确定远小于体素大小的长度。一个合适的结构可以用非常小的零件成本建造。
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引用次数: 8
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