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Deep learning-based multi project InP wafer simulation towards unsupervised surface defect detection 面向无监督表面缺陷检测的深度学习多项目InP晶圆仿真
IF 4.2 3区 计算机科学 Q2 AUTOMATION & CONTROL SYSTEMS Pub Date : 2026-01-15 Epub Date: 2025-12-16 DOI: 10.1016/j.jfranklin.2025.108316
Emílio Dolgener Cantú , Rolf Klemens Wittmann , Oliver Abdeen , Patrick Wagner , Wojciech Samek , Moritz Baier , Sebastian Lapuschkin
Quality management in semiconductor manufacturing often relies on template matching with known golden standards. For Indium-Phosphide (InP) multi-project wafer manufacturing, low production scale and high design variability lead to such golden standards being typically unavailable. Defect detection, in turn, is manual and labor-intensive. This work addresses this challenge by proposing a methodology to generate a synthetic golden standard using Deep Neural Networks, trained to simulate photo-realistic InP wafer images from CAD data. We evaluate various training objectives and assess the quality of the simulated images on both synthetic data and InP wafer photographs. Our deep-learning-based method outperforms a baseline decision-tree-based approach, enabling the use of a ‘simulated golden die’ from CAD plans in any user-defined region of a wafer for more efficient defect detection. We apply our method to a template matching procedure, to demonstrate its practical utility in surface defect detection.
半导体制造业的质量管理通常依赖于与已知黄金标准的模板匹配。对于磷化铟(InP)的多项目晶圆制造,低生产规模和高设计可变性导致这种黄金标准通常不可用。缺陷检测,反过来,是手工和劳动密集型的。这项工作通过提出一种使用深度神经网络生成合成黄金标准的方法来解决这一挑战,深度神经网络经过训练可以从CAD数据中模拟逼真的InP晶圆图像。我们评估了各种训练目标,并在合成数据和InP晶圆照片上评估模拟图像的质量。我们基于深度学习的方法优于基于基线决策树的方法,能够在晶圆的任何用户定义区域使用CAD计划中的“模拟金模具”,从而更有效地检测缺陷。我们将该方法应用于模板匹配过程,以证明其在表面缺陷检测中的实用性。
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引用次数: 0
A generalized super-twisting algorithm: Parameter tuning and adaptive strategy development for integral gain 一种广义超扭转算法:积分增益的参数整定与自适应策略开发
IF 4.2 3区 计算机科学 Q2 AUTOMATION & CONTROL SYSTEMS Pub Date : 2026-01-15 Epub Date: 2025-12-17 DOI: 10.1016/j.jfranklin.2025.108367
Jianheng Mao, Zhaobao Yu, Dingfeng Gao, Liaoxue Liu, Yu Guo
This article proposes a generalized super-twisting algorithm (GSTA) for a class of perturbed sliding mode dynamic systems and further develops an adaptive integral gain strategy for the GSTA. First, a novel GSTA ensuring fixed-time stability of the system is proposed, whose parameter tuning and stability proof are addressed by means of geometrical analysis. Then, in the absence of the knowledge regarding the exact bound of the disturbance gradient, the GSTA is improved in a fixed-time adaptive scheme based on equivalent control value where the integral gain can maintain at a magnitude only marginally larger than the absolute value of the disturbance gradient during the sliding motion without yielding an origin neighborhood for decreasing the gain. Moreover, compared with adaptive strategies in the existing literature relying on equivalent control value, it achieves fixed-time adaption by employing a fixed-time filter. The effectiveness of the proposed method is evaluated through simulation analysis and comparisons.
针对一类摄动滑模动态系统,提出了一种广义超扭转算法(GSTA),并进一步发展了该算法的自适应积分增益策略。首先,提出了一种保证系统定时稳定性的新型GSTA,并通过几何分析解决了其参数整定和稳定性证明问题。然后,在不知道干扰梯度的确切边界的情况下,采用基于等效控制值的定时自适应方案对GSTA进行改进,使积分增益在滑动运动期间仅能保持在略大于干扰梯度绝对值的幅度,而不会产生降低增益的原点邻域。并且,与现有文献中依赖等效控制值的自适应策略相比,该方法通过采用定时滤波器实现了定时自适应。通过仿真分析和比较,对该方法的有效性进行了评价。
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引用次数: 0
Low-Cost vehicle rebalancing control for an autonomous mobility on demand system 自动按需移动系统的低成本车辆再平衡控制
IF 4.2 3区 计算机科学 Q2 AUTOMATION & CONTROL SYSTEMS Pub Date : 2026-01-15 Epub Date: 2025-12-18 DOI: 10.1016/j.jfranklin.2025.108333
Fernando Viadero-Monasterio , Miguel Meléndez-Useros , Hui Zhang , Beatriz L. Boada , Maria Jesus L. Boada
The continuous expansion of urban areas and population growth have created an urgent need for innovative solutions in traffic management. Addressing fluctuating mobility demands and optimizing resource allocation in real time are fundamental challenges for modern cities. To address these issues, this paper introduces a low computational cost mobility-on-demand (MoD) rebalancing solution designed to dynamically adapt to varying demand across the traffic network. The proposed algorithm continuously evaluates both the current state of the traffic network and projected future demand to optimize rebalancing times. It operates using two adjustable parameters: one for requesting additional vehicles and another for allowing nodes to dispatch rebalancing vehicles. Simulation results demonstrate a significant reduction in maximum waiting times compared to scenarios without rebalancing. Additionally, the proposed solution outperforms existing methods, including reinforcement learning approaches such as deep deterministic policy gradient (DDPG), and Model Predictive Control (MPC), which require significantly longer training times. This efficiency enhances operational responsiveness, making the proposed system a more practical and scalable solution for real-world urban mobility challenges.
随着城市地区的不断扩大和人口的增长,迫切需要在交通管理方面找到创新的解决办法。应对不断变化的交通需求,实时优化资源配置,是现代城市面临的根本挑战。为了解决这些问题,本文介绍了一种低计算成本的按需移动(MoD)再平衡解决方案,旨在动态适应交通网络中不断变化的需求。该算法持续评估交通网络的当前状态和预测的未来需求,以优化再平衡时间。它使用两个可调参数运行:一个用于请求额外的车辆,另一个用于允许节点调度再平衡车辆。模拟结果表明,与不进行再平衡的情况相比,最大等待时间显著减少。此外,提出的解决方案优于现有的方法,包括强化学习方法,如深度确定性策略梯度(DDPG)和模型预测控制(MPC),这些方法需要更长的训练时间。这种效率提高了操作响应能力,使所提出的系统成为一个更实用和可扩展的解决方案,以应对现实世界的城市交通挑战。
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引用次数: 0
Input-output data-driven consensus control of multiagent systems under switching communication network topologies 交换通信网络拓扑下多智能体系统的输入输出数据驱动一致性控制
IF 4.2 3区 计算机科学 Q2 AUTOMATION & CONTROL SYSTEMS Pub Date : 2026-01-15 Epub Date: 2025-12-17 DOI: 10.1016/j.jfranklin.2025.108344
Yucheng Li , Zhongxin Liu , Malika Sader
In this article, the input-output data-driven consensus problem is investigated for linear discrete-time multiagent systems (MASs) under switching communication network topologies, where the system dynamics of each agent is assumed to be completely unknown and only the input-output data of each agent are available. The distributed dynamic output feedback protocol is adopted without state data. The equivalence between the protocol and a specific static state feedback controller is established, enabling the transformation of the protocol into a feedback controller compatible with data-driven techniques. By leveraging input-output data structured as Hankel matrices, data-driven linear matrix inequalities (LMIs) are formulated to find the optimal feedback gain and the control input of each agent is calculated with the feedback gain, replicating the role of dynamic output feedback protocol. For the scenario involving noise, a regularized optimization is employed to enhance robustness. It has been demonstrated that the consensus of MASs under switching communication network topologies is guaranteed during the process of synthesizing control inputs under both noise-free and noise-corrupted conditions. Compared to the existing data-driven methods for MASs with input-state data, the application scenarios are broader with our algorithm. Finally, the efficiency of the algorithm is proven by a numerical example.
本文研究了交换通信网络拓扑下线性离散时间多智能体系统(MASs)的输入-输出数据驱动的一致性问题,其中假设每个智能体的系统动态完全未知,并且每个智能体的输入-输出数据是可用的。采用无状态数据的分布式动态输出反馈协议。建立了协议与特定静态反馈控制器之间的等价关系,使协议能够转换为与数据驱动技术兼容的反馈控制器。利用Hankel矩阵结构的输入-输出数据,建立数据驱动线性矩阵不等式(lmi),求出最优反馈增益,并利用反馈增益计算各agent的控制输入,复制动态输出反馈协议的作用。对于有噪声的场景,采用正则化优化来增强鲁棒性。研究结果表明,在无噪声和有噪声的情况下,在交换通信网络拓扑下的控制输入合成过程中,质量的一致性得到了保证。与现有的具有输入状态数据的质量数据驱动方法相比,该算法的应用场景更加广泛。最后,通过一个算例验证了该算法的有效性。
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引用次数: 0
Multi-agent flocking with asynchronous cooperative-competitive interactions 具有异步合作-竞争交互的多智能体群集
IF 4.2 3区 计算机科学 Q2 AUTOMATION & CONTROL SYSTEMS Pub Date : 2026-01-15 Epub Date: 2026-01-05 DOI: 10.1016/j.jfranklin.2025.108392
Shuo Wang, Shuaiming Yan, Lei Shi, Panpan Zhu
Flocking aims to induce collective aggregation through complex interactions among interconnected agents. Given the pervasive and intricate co-opetitive dynamics in multi-agent systems, realizing flocking behavior in such networks presents both practical relevance and significant challenges. This paper investigates the flocking dynamic behavior of multi-agent systems with cooperative and competitive relationships under asynchronous communication. Building on the classical Cucker-Smale (C-S) model, a distributed control protocol with asynchronous communication is designed. In this protocol, the timing of communication is determined by each agent individually, rather than being updated synchronously by a unified clock. The protocol quantifies the intensity of cooperation and competition by introducing bio-inspired nonlinear positive/negative weight functions related to interaction distances. The convergence of the dynamic model is rigorously verified through mathematical analysis using products of super-stochastic matrices, establishing an algebraic relationship between the degrees of cooperation and competition that ensures emergent flocking behavior. Finally, numerical simulations validate the effectiveness of the proposed algebraic conditions in achieving flocking behavior.
群集的目的是通过相互连接的主体之间复杂的相互作用诱导集体聚集。考虑到多智能体系统中普遍而复杂的合作竞争动态,在这种网络中实现群集行为既有现实意义,也有重大挑战。研究了异步通信条件下具有合作和竞争关系的多智能体系统的群集动态行为。在经典cucker - small (C-S)模型的基础上,设计了一种异步通信的分布式控制协议。在该协议中,通信的时间由每个代理单独决定,而不是由统一的时钟同步更新。该方案通过引入与相互作用距离相关的生物启发的非线性正/负权重函数来量化合作和竞争的强度。利用超随机矩阵的乘积,通过数学分析严格验证了动态模型的收敛性,建立了保证紧急群集行为的合作度与竞争度之间的代数关系。最后,数值模拟验证了所提出的代数条件在实现群集行为方面的有效性。
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引用次数: 0
Estimation of maximum allowable sampling interval for hybrid systems with aperiodic sampling using the event-triggered approach 用事件触发法估计非周期采样混合系统的最大允许采样间隔
IF 4.2 3区 计算机科学 Q2 AUTOMATION & CONTROL SYSTEMS Pub Date : 2026-01-15 Epub Date: 2025-12-21 DOI: 10.1016/j.jfranklin.2025.108334
Yan He , Lushuang Gao , Xiaoyu Yang , Ruijun Liu , Xuncai Zhang
The paper investigates the estimation problem for a class of nonlinear hybrid systems with aperiodic sampling. First, an aperiodic sampling mechanism is proposed using the event-triggered approach, in which a aperiodic sampling hybrid model is developed to describe the nonlinear systems. Second, the exponential stability is analyzed for the considered nonlinear hybrid model based on the Lyapunov function methods, and the stability rate is studied under different Lyapunov functions. In particular, a sufficient condition is provided to analyze the linear hybrid model. Third, an improved estimation method is proposed to derive the maximum allowable sampling interval (MASI) by constructing a new ordinary differential equation. Finally, several practical models are illustrated to verify the effectiveness of the proposed theorems.
研究了一类具有非周期采样的非线性混合系统的估计问题。首先,提出了一种采用事件触发方法的非周期采样机制,其中建立了非周期采样混合模型来描述非线性系统。其次,分析了基于Lyapunov函数方法的考虑的非线性混合模型的指数稳定性,并研究了不同Lyapunov函数下的稳定率。特别地,给出了分析线性混合模型的充分条件。第三,提出了一种改进的估计方法,通过构造新的常微分方程推导出最大允许抽样区间(MASI)。最后,通过几个实际模型验证了所提定理的有效性。
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引用次数: 0
Off-policy hierarchical reinforcement learning for collision avoidance via broad learning system 基于广义学习系统的非策略分层强化避碰学习
IF 4.2 3区 计算机科学 Q2 AUTOMATION & CONTROL SYSTEMS Pub Date : 2026-01-15 Epub Date: 2025-11-26 DOI: 10.1016/j.jfranklin.2025.108274
Tao Zhang , Peixuan Song , Jia Long , Qian Kang , Peng Li , Dengxiu Yu
In this paper, an off-policy hierarchical reinforcement learning (HRL) algorithm is proposed to solve the collision avoidance problem for a class of multi-agent systems. The collision avoidance refers to maintaining a predefined formation pattern and avoiding collisions with obstacles while driving each agent to the target state, which is formulated as a differential game. We leverage the idea of divide and conquer to artificially decompose the problem into three corresponding subtasks: target state attraction, neighbor agent repulsion, and static obstacle repulsion, to cope with the complex external environment. The off-policy HRL algorithm is designed based on the original policy iteration algorithm and implemented in real-time using only measured data to cope with the problem of completely unknown system information. Compared with the traditional least-square and gradient descent approach, critic and action neural networks of each subtask are simultaneously added to a broad learning system (BLS). It is worth noting that the pseudo-inverse operation of BLS allows us to achieve a faster and better approximate solution of the weight using global data online. The uniform ultimate bounded stability of the closed-loop system is proved based on the Lyapunov approach. Finally, a simulation example is given to demonstrate the effectiveness of the developed algorithm.
针对一类多智能体系统的避碰问题,提出了一种离策略分层强化学习算法。避碰是指在驱动各个agent到达目标状态的过程中,保持预定义的队形模式,避免与障碍物发生碰撞,可表述为微分博弈。我们利用分而治之的思想,人为地将问题分解为三个相应的子任务:目标状态吸引、邻居代理排斥和静态障碍物排斥,以应对复杂的外部环境。脱策略HRL算法是在原有策略迭代算法的基础上设计的,针对系统信息完全未知的问题,仅使用实测数据实时实现。与传统的最小二乘和梯度下降方法相比,将每个子任务的批评和行动神经网络同时添加到广义学习系统中。值得注意的是,BLS的伪逆运算使我们能够在网上使用全局数据获得更快更好的权值近似解。利用李雅普诺夫方法证明了闭环系统的一致极限有界稳定性。最后,通过仿真实例验证了所提算法的有效性。
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引用次数: 0
Finite-time H∞ consensus control of multi-agent systems with dynamic event-triggered mechanism and multiple cyber attacks 具有动态事件触发机制和多重网络攻击的多智能体系统的有限时间H∞共识控制
IF 4.2 3区 计算机科学 Q2 AUTOMATION & CONTROL SYSTEMS Pub Date : 2026-01-15 Epub Date: 2025-12-20 DOI: 10.1016/j.jfranklin.2025.108353
Xiangyang Cao , Daduan Zhao , Yan Li , Chao Wu
This paper is concerned with the finite-time H consensus control problem of a class of nonlinear multi-agent systems (MASs) with dynamic event-triggered mechanism (DETM) and multiple cyber attacks including denial-of-service (DoS) attack and random deception attack. First, a new networked switched model is formulated for appropriately characterizing the initial MASs with the impacts of multiple cyber attacks and physical constraint of actuator saturation. Second, by means of switched system theory and iterative technique, the event-triggered finite-time secure consensus is achieved, providing that the frequency and duration of DoS attack satisfy certain conditions. Particularly, the developed dynamic event-triggered control scheme has the advantages of simultaneously alleviating the computation/transmission burdens and resisting cyber attacks. Then, to suppress the influence of external disturbance on consensus regulation performance, an event-triggered H consensus criterion is established, which achieves secure consensus in finite-time interval while guaranteeing a prescribed H performance index. The corresponding control gain is derived based on the linear matrix inequality approach. Finally, two circuit simulations are exemplified to illustrate the effectiveness of the theoretical results.
研究一类具有动态事件触发机制(DETM)的非线性多智能体系统(MASs)的有限时间H∞一致性控制问题,该系统具有多种网络攻击,包括拒绝服务攻击和随机欺骗攻击。首先,建立了一个新的网络交换模型,以适当地表征多重网络攻击和执行器饱和物理约束下的初始质量。其次,利用交换系统理论和迭代技术,在DoS攻击频率和持续时间满足一定条件的前提下,实现了事件触发的有限时间安全共识;特别是,所开发的动态事件触发控制方案具有同时减轻计算/传输负担和抵抗网络攻击的优点。然后,为了抑制外部干扰对共识调节性能的影响,建立了一个事件触发的H∞共识准则,在保证给定H∞性能指标的情况下,在有限时间间隔内实现安全共识。根据线性矩阵不等式方法推导出相应的控制增益。最后,通过两个电路仿真验证了理论结果的有效性。
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引用次数: 0
Long-term time series forecasting by combining local periodic change features in frequency domain and global features in time domain 结合频域局部周期变化特征和时域全局特征进行长期时间序列预测
IF 4.2 3区 计算机科学 Q2 AUTOMATION & CONTROL SYSTEMS Pub Date : 2026-01-15 Epub Date: 2025-12-12 DOI: 10.1016/j.jfranklin.2025.108304
Peng-qi Wu, Jian-wei Liu, Jia-yi Han
Given the complex feature dependencies of time-series data, learning and integrating local features with global features is crucial for long-term time series forecasting. Although CNN-based methods have significant advantages in modeling local features, they are generally unable to capture the global features of time series through simple model structures or low model complexity, as many MLP networks do. Additionally, research on modeling dependencies in time-series data by combining frequency domain information remains limited, particularly in learning local periodic features using frequency domain information. To address the above issues, we propose FTMixer, which models and integrates local periodic variations in the frequency domain and global features in the time domain using an improved CNN structure and MLP networks. Unlike conventional methods, FTMixer directly extracts intra-local and inter-local periodic change features in a single-scale manner, thus forecasting the time series in the perspective of the local periodicity. Our experiments on eight benchmark datasets demonstrate that FTMixer outperforms previous state-of-the-art methods. In multivariate forecasting experiments, compared with the state-of-the-art methods and the best MLP-based baseline model, FTMixer achieves relative MSE reductions of 6.1 % and 27.1 %. FTMixer also achieves significantly better predictive performance than the best CNN-based methods. Furthermore, FTMixer exhibits higher capabilities and training efficiency in capturing temporal information. These results highlight the effectiveness of combining global and local features, time domain information and frequency domain information for LTSF. We will make our code and model publicly available.
考虑到时间序列数据复杂的特征依赖关系,学习和整合局部特征与全局特征对于长期时间序列预测至关重要。尽管基于cnn的方法在建模局部特征方面具有明显的优势,但它们通常无法像许多MLP网络那样,通过简单的模型结构或低模型复杂度来捕获时间序列的全局特征。此外,结合频域信息对时间序列数据依赖关系建模的研究仍然有限,特别是在利用频域信息学习局部周期特征方面。为了解决上述问题,我们提出了FTMixer,它使用改进的CNN结构和MLP网络对频域的局部周期变化和时域的全局特征进行建模和集成。与传统方法不同,FTMixer以单尺度直接提取局部内和局部间的周期变化特征,从而从局部周期的角度预测时间序列。我们在八个基准数据集上的实验表明,FTMixer优于以前最先进的方法。在多变量预测实验中,与最先进的方法和最好的基于mlp的基线模型相比,FTMixer实现了相对MSE降低6.1%和27.1%。FTMixer的预测性能也明显优于最好的基于cnn的方法。此外,FTMixer在捕获时间信息方面表现出更高的能力和训练效率。这些结果突出了LTSF结合全局和局部特征、时域信息和频域信息的有效性。我们将公开我们的代码和模型。
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引用次数: 0
Safety guarantee via periodic discrete-time high-order control barrier function: Application to bipedal robots 基于周期离散高阶控制屏障函数的安全保证:在双足机器人中的应用
IF 4.2 3区 计算机科学 Q2 AUTOMATION & CONTROL SYSTEMS Pub Date : 2026-01-15 Epub Date: 2025-12-17 DOI: 10.1016/j.jfranklin.2025.108358
Kai Zong , Xiaochen Xie , Zhaoji Ling , Jing Dai , Ka-Wai Kwok
In this paper, the concept of periodic discrete-time high-order control barrier function (P-DHOCBF) is developed. The proposed P-DHOCBF is utilized to ensure the forward invariance of the safety set for discrete-time systems with periodic characteristics in system states of any relative degree. Focusing on the periodic forward walking problem of bipedal robots based on the variable-height inverted pendulum model, a periodic model predictive control optimization problem incorporating P-DHOCBF is formulated, and periodicity-related constraints are established. Compared to the existing discrete-time control barrier function, the proposed P-DHOCBF significantly reduces the conservatism of safety, thereby enhancing the system safety by promptly preventing unsafe occurrences. An illustrative example and simulation results based on a 12-degree-of-freedom (DOF) bipedal robot verify the effectiveness of the proposed approach.
提出了周期离散高阶控制势垒函数(P-DHOCBF)的概念。利用所提出的P-DHOCBF保证具有周期特征的离散时间系统在任何相对程度的系统状态下安全集的前向不变性。针对基于变高度倒立摆模型的两足机器人周期正向行走问题,建立了包含P-DHOCBF的周期模型预测控制优化问题,并建立了周期约束。与现有的离散时间控制屏障函数相比,所提出的P-DHOCBF显著降低了安全的保守性,从而通过及时预防不安全事件的发生来提高系统的安全性。基于一个12自由度双足机器人的实例和仿真结果验证了所提方法的有效性。
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引用次数: 0
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Journal of The Franklin Institute-engineering and Applied Mathematics
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