Sen Chen, Jiaxuan Ren, Douhao Yang, Lijun Sang, Bowen Liu, Qiang Chen, Zhongwei Liu
Manganese nitride films have been successfully fabricated by the technique of plasma enhanced atomic layer deposition (PEALD). The process employed bis(N,N'-di-tert-butylacetamidinate)manganese [Mn(amd)2] as manganese precursor and ammonia plasma as a coreactant. With a typical PEALD process cycle of 5 s Mn(amd)2 pulse, 10 s Ar purge pulse, 10 s NH3 plasma exposure, 10 s Ar purge pulse, 80 °C deposition temperature, and 60 W input power, the deposited film is continuous and smooth with a growth rate is 0.037 nm/cycle. Based on x-ray diffraction measurement, the film is determined to be η-Mn3N2 crystal structure. The primary deposition mechanism has been investigated by in situ optical emission spectroscopy and quartz crystal microbalance. The deposited manganese nitride film shows an excellent barrier performance against copper diffusion at insulator/copper interface.
利用等离子体增强原子层沉积(PEALD)技术成功制备了氮化锰薄膜。该工艺以双(N,N'-二叔丁基乙脒)锰[Mn(amd)2]为锰前驱体，氨血浆为反应物。在5 s Mn(amd)2脉冲、10 s Ar吹扫脉冲、10 s NH3等离子体暴露、10 s Ar吹扫脉冲、80℃沉积温度、60 W输入功率的典型PEALD工艺周期下，沉积膜连续光滑，生长速度为0.037 nm/周期。通过x射线衍射测定，确定薄膜为η-Mn3N2晶体结构。利用原位发射光谱和石英晶体微天平研究了初沉积机理。沉积的氮化锰薄膜在绝缘子/铜界面对铜的扩散具有良好的阻隔性能。
{"title":"Plasma enhanced atomic layer deposition of manganese nitride thin film from manganese amidinate and ammonia plasma","authors":"Sen Chen, Jiaxuan Ren, Douhao Yang, Lijun Sang, Bowen Liu, Qiang Chen, Zhongwei Liu","doi":"10.1116/6.0002484","DOIUrl":"https://doi.org/10.1116/6.0002484","url":null,"abstract":"Manganese nitride films have been successfully fabricated by the technique of plasma enhanced atomic layer deposition (PEALD). The process employed bis(N,N'-di-tert-butylacetamidinate)manganese [Mn(amd)2] as manganese precursor and ammonia plasma as a coreactant. With a typical PEALD process cycle of 5 s Mn(amd)2 pulse, 10 s Ar purge pulse, 10 s NH3 plasma exposure, 10 s Ar purge pulse, 80 °C deposition temperature, and 60 W input power, the deposited film is continuous and smooth with a growth rate is 0.037 nm/cycle. Based on x-ray diffraction measurement, the film is determined to be η-Mn3N2 crystal structure. The primary deposition mechanism has been investigated by in situ optical emission spectroscopy and quartz crystal microbalance. The deposited manganese nitride film shows an excellent barrier performance against copper diffusion at insulator/copper interface.","PeriodicalId":17490,"journal":{"name":"Journal of Vacuum Science & Technology A","volume":"4 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-05-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"135183577","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
L. Beliaev, E. Shkondin, A. Lavrinenko, O. Takayama
{"title":"Erratum: “Thickness-dependent optical properties of aluminum nitride films for mid-infrared wavelengths” [J. Vac. Sci. Technol. A 39, 043408 (2021)]","authors":"L. Beliaev, E. Shkondin, A. Lavrinenko, O. Takayama","doi":"10.1116/6.0001574","DOIUrl":"https://doi.org/10.1116/6.0001574","url":null,"abstract":"","PeriodicalId":17490,"journal":{"name":"Journal of Vacuum Science & Technology A","volume":"11 1","pages":""},"PeriodicalIF":2.9,"publicationDate":"2022-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86612597","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
3D-printed acrylonitrile butadiene styrene (ABS) polymer structures were coated with alumina (Al2O3) using the trimethylaluminum(III) and water atomic layer deposition (ALD) process at 80 °C, which resulted in a 203 nm thin film with a 1.35 Å growth per cycle. This thin film was a well-adhered protective overcoating on ABS to prevent reaction with acetone vapors in a solvent resistance experiment. Scratch tests were not able to remove the overcoating from the polymer surface, which provided a 50% and 32% increase in acetone vapor resistance before initial deformation and complete structure collapse, respectively. A more aggressive tape test caused delamination of the protective coating. This proof-of-concept experiment demonstrates how 3D printing combined with ALD overcoating can alter the chemical characteristics of complex polymer architectures.
{"title":"Modified 3D-printed architectures: Effects of coating by alumina on acrylonitrile butadiene styrene","authors":"A. Varga, S. Barry","doi":"10.1116/6.0001595","DOIUrl":"https://doi.org/10.1116/6.0001595","url":null,"abstract":"3D-printed acrylonitrile butadiene styrene (ABS) polymer structures were coated with alumina (Al2O3) using the trimethylaluminum(III) and water atomic layer deposition (ALD) process at 80 °C, which resulted in a 203 nm thin film with a 1.35 Å growth per cycle. This thin film was a well-adhered protective overcoating on ABS to prevent reaction with acetone vapors in a solvent resistance experiment. Scratch tests were not able to remove the overcoating from the polymer surface, which provided a 50% and 32% increase in acetone vapor resistance before initial deformation and complete structure collapse, respectively. A more aggressive tape test caused delamination of the protective coating. This proof-of-concept experiment demonstrates how 3D printing combined with ALD overcoating can alter the chemical characteristics of complex polymer architectures.","PeriodicalId":17490,"journal":{"name":"Journal of Vacuum Science & Technology A","volume":"57 1","pages":""},"PeriodicalIF":2.9,"publicationDate":"2022-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73118998","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
B. Ge, D. Ohori, Yi-Ho Chen, T. Ozaki, K. Endo, Yiming Li, J. Tarng, S. Samukawa
{"title":"Room-temperature and high-quality HfO2/SiO2 gate stacked film grown by neutral beam enhanced atomic layer deposition","authors":"B. Ge, D. Ohori, Yi-Ho Chen, T. Ozaki, K. Endo, Yiming Li, J. Tarng, S. Samukawa","doi":"10.1116/6.0001607","DOIUrl":"https://doi.org/10.1116/6.0001607","url":null,"abstract":"","PeriodicalId":17490,"journal":{"name":"Journal of Vacuum Science & Technology A","volume":"1 1","pages":""},"PeriodicalIF":2.9,"publicationDate":"2022-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81927228","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
F. Buchner, Katrin Forster-Tonigold, Tim Bolter, Alexander Rampf, Jens Klein, A. Gross, R. Behm
{"title":"Interaction of Mg with the ionic liquid 1-butyl-1-methylpyrrolidinium bis(trifluoromethylsulfonyl)imide—An experimental and computational model study of the electrode–electrolyte interface in post-lithium batteries","authors":"F. Buchner, Katrin Forster-Tonigold, Tim Bolter, Alexander Rampf, Jens Klein, A. Gross, R. Behm","doi":"10.1116/6.0001658","DOIUrl":"https://doi.org/10.1116/6.0001658","url":null,"abstract":"","PeriodicalId":17490,"journal":{"name":"Journal of Vacuum Science & Technology A","volume":"90 6 1","pages":""},"PeriodicalIF":2.9,"publicationDate":"2022-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83652521","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
The propensity of trace amounts of sulfur adsorbed on coinage metal(111) surfaces to dramatically enhance surface dynamics has been demonstrated by STM observations of accelerated 2D island decay for Cu and Ag. It is generally accepted that this enhancement is due to the formation of adsorbed metal-sulfur complexes which facilitate surface mass transport of the metal. These complexes were originally proposed to form on terraces following extraction of metal atoms from step edges and subsequent combination with sulfur on the terraces. However, even when Th is is the au tho r’s pe er re vie we d, ac ce pte d m an us cri pt. H ow ev er , th e o nli ne ve rsi on of re co rd w ill be di ffe re nt fro m thi s v er sio n o nc e i t h as be en co py ed ite d a nd ty pe se t. PL EA SE C IT E TH IS A RT IC LE A S DO I: 10 .11 16 /6. 00 01 40 8
微量硫吸附在铸币金属(111)表面的倾向显著增强表面动力学已经被STM观测到加速了Cu和Ag的二维岛衰变。人们普遍认为，这种增强是由于形成了吸附的金属-硫配合物，促进了金属的表面质量运输。这些配合物最初被认为是在台阶边缘提取金属原子并随后与台阶上的硫结合后形成的。然而,即使当届非盟tho r pe er再保险vie我们d, ac ce pte d m一个我们中国国际广播电台pt。H噢ev, Th e o nli ne ve rsi的再保险公司rd就di ffe再保险nt来回m thi s v er sio n o数控e i t H en . py ed尽管d和泰pe se t。EA se PL C, e Th是RT IC LE我:10厚16/6。00 01 40 8
{"title":"Sulfur-enhanced dynamics of coinage metal(111) surfaces: Step edges versus terraces as locations for metal-sulfur complex formation","authors":"Da‐Jiang Liu, J. Evans","doi":"10.1116/6.0001408","DOIUrl":"https://doi.org/10.1116/6.0001408","url":null,"abstract":"The propensity of trace amounts of sulfur adsorbed on coinage metal(111) surfaces to dramatically enhance surface dynamics has been demonstrated by STM observations of accelerated 2D island decay for Cu and Ag. It is generally accepted that this enhancement is due to the formation of adsorbed metal-sulfur complexes which facilitate surface mass transport of the metal. These complexes were originally proposed to form on terraces following extraction of metal atoms from step edges and subsequent combination with sulfur on the terraces. However, even when Th is is the au tho r’s pe er re vie we d, ac ce pte d m an us cri pt. H ow ev er , th e o nli ne ve rsi on of re co rd w ill be di ffe re nt fro m thi s v er sio n o nc e i t h as be en co py ed ite d a nd ty pe se t. PL EA SE C IT E TH IS A RT IC LE A S DO I: 10 .11 16 /6. 00 01 40 8","PeriodicalId":17490,"journal":{"name":"Journal of Vacuum Science & Technology A","volume":"42 1","pages":""},"PeriodicalIF":2.9,"publicationDate":"2022-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82042200","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
H. Sato, N. Pachauri, S. Keshavarz, Chhatra R. Joshi, Hwachol Lee, G. Mankey, P. Leclair
{"title":"Magnetic transition behavior in epitaxial Fe47Rh47Pd6 films","authors":"H. Sato, N. Pachauri, S. Keshavarz, Chhatra R. Joshi, Hwachol Lee, G. Mankey, P. Leclair","doi":"10.1116/6.0001573","DOIUrl":"https://doi.org/10.1116/6.0001573","url":null,"abstract":"","PeriodicalId":17490,"journal":{"name":"Journal of Vacuum Science & Technology A","volume":"61 1","pages":""},"PeriodicalIF":2.9,"publicationDate":"2022-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76955831","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Optoelectronic properties of transparent oxide semiconductor ASnO3 (A = Ba, Sr, and Ca) epitaxial films and thin film transistors","authors":"A. Sanchela, M. Wei, H. Cho, H. Ohta","doi":"10.1116/6.0001474","DOIUrl":"https://doi.org/10.1116/6.0001474","url":null,"abstract":"","PeriodicalId":17490,"journal":{"name":"Journal of Vacuum Science & Technology A","volume":"38 1","pages":""},"PeriodicalIF":2.9,"publicationDate":"2022-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"79251259","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Preparation of Nd1.85Ce0.15CuO4 superconducting thin film by pulsed laser deposition","authors":"Jiqiang Jia, Chen Liu, Mengjiao Guo, L. Lei","doi":"10.1116/6.0001540","DOIUrl":"https://doi.org/10.1116/6.0001540","url":null,"abstract":"","PeriodicalId":17490,"journal":{"name":"Journal of Vacuum Science & Technology A","volume":"115 1","pages":""},"PeriodicalIF":2.9,"publicationDate":"2022-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81234976","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Surface diffusion on metal oxides is key in many areas of materials technology, yet it has been scarcely explored at the atomic scale. This work provides phenomenological insights from scanning tunneling microscopy on the link between surface diffusion, surface atomic structure, and oxygen chemical potential based on three model oxide surfaces: Fe2O3[Formula: see text], La1− xSr xMnO3(110), and In2O3(111). In all instances, changing the oxygen chemical potential used for annealing stabilizes reconstructions of different compositions while promoting the flattening of the surface morphology—a sign of enhanced surface diffusion. It is argued that thermodynamics, rather than kinetics, rules surface diffusion under these conditions: the composition change of the surface reconstructions formed at differently oxidizing conditions drives mass transport across the surface.
{"title":"Reconstruction changes drive surface diffusion and determine the flatness of oxide surfaces","authors":"Giada Franceschi, M. Schmid, U. Diebold, M. Riva","doi":"10.1116/6.0001704","DOIUrl":"https://doi.org/10.1116/6.0001704","url":null,"abstract":"Surface diffusion on metal oxides is key in many areas of materials technology, yet it has been scarcely explored at the atomic scale. This work provides phenomenological insights from scanning tunneling microscopy on the link between surface diffusion, surface atomic structure, and oxygen chemical potential based on three model oxide surfaces: Fe2O3[Formula: see text], La1− xSr xMnO3(110), and In2O3(111). In all instances, changing the oxygen chemical potential used for annealing stabilizes reconstructions of different compositions while promoting the flattening of the surface morphology—a sign of enhanced surface diffusion. It is argued that thermodynamics, rather than kinetics, rules surface diffusion under these conditions: the composition change of the surface reconstructions formed at differently oxidizing conditions drives mass transport across the surface.","PeriodicalId":17490,"journal":{"name":"Journal of Vacuum Science & Technology A","volume":"15 1","pages":""},"PeriodicalIF":2.9,"publicationDate":"2022-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80909835","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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