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Galvanic corrosion of dental amalgams in contact with titanium in terms of released ions : Biomaterials and bioengineering 牙汞合金与钛接触的电偶腐蚀释出离子:生物材料和生物工程
Pub Date : 2002-12-01 DOI: 10.2320/MATERTRANS.43.3146
Y. Takada, Shi-Duk Lim, K. Asami, K. Kim, O. Okuno
Galvanic corrosion between dental amalgams and titanium was examined in terms of released ions. The ions released from the dental amalgams in contact with titanium at surface area ratios of titanium/amalgam in a range of 1/10-10/1 were quantitatively analyzed after being immersed in 0.9mass% sodium chloride solution at 310K for 6.05 x 10 5 s. The potentials and the anodic polarization curves were also measured under the same conditions. Furthermore, the amalgam surfaces after immersion were analyzed using WDS. Each potential of the conventional amalgams was always lower than that of titanium, though each potential of the high-copper amalgam was reversed in the early stage of immersion and was also lower. When the surface area ratio did not increase to over 1/1, each total amount of ions released from the amalgams in contact with titanium was a little larger or smaller than that released from amalgams not in contact with titanium. However, tin and copper ions released from the conventional amalgams and the high-copper amalgam, respectively, increased greatly when the ratio grew to 10/1. Each amount of released ions with titanium, except mercury ions, was approximated by the equation W with = a x (W without ) b , where the coefficients a and b are constant and W with and W without mean each amount of the released ions with and without titanium, respectively. The coefficient b probably relied on the surface area ratio and immersion time. When the ratio grew to 10/1, the amount of released ions with titanium, except mercury ions, could be shown by the equation W with = a x (W without ) at a = 4.202-9.982. Since the contact with titanium seemed to drastically make the amount of mercury ions decrease, the mercury ions did not fit this equation. These results indicated a risk of galvanic corrosion between dental amalgams and titanium with a large surface area ratio.
从释放离子的角度研究了牙科汞合金与钛之间的电偶腐蚀。在质量分数为0.9 %的氯化钠溶液中浸泡6.05 x 10.5 s后,定量分析钛与牙汞合金在钛/汞合金表面积比为1/10 ~ 10/1范围内接触钛时所释放的离子。测定了在相同条件下的电势和阳极极化曲线。此外,用WDS对浸渍后的汞合金表面进行了分析。常规汞合金的各电势始终低于钛合金,而高铜汞合金的各电势在浸渍初期相反,也低于钛合金。当表面积比未增加到1/1以上时,与钛接触的汞合金释放的各离子总量均略大于或小于未与钛接触的汞合金释放的离子总量。而当比例增加到10/1时,普通汞合金和高铜汞合金释放的锡离子和铜离子均显著增加。除汞离子外,各含钛离子的释放量均近似为公式W with = a x (W without) b,其中系数a和b为常数,W with和W without分别表示含钛离子和不含钛离子的释放量。系数b可能取决于表面积比和浸泡时间。当比例增大到10/1时,在a = 4.202 ~ 9.982时,除汞离子外,有钛的离子的释放量可以用方程W with = a x (W without)表示。由于与钛的接触似乎使汞离子的数量急剧减少,所以汞离子不符合这个方程。这些结果表明,大表面积比的牙科汞合金与钛之间存在电偶腐蚀的风险。
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引用次数: 4
Evaluation of the hydroxyapatite film coating on titanium cathode by QCM : Biomaterials and bioengineering 羟基磷灰石膜涂层在钛阴极上的QCM评价:生物材料与生物工程
Pub Date : 2002-12-01 DOI: 10.2320/MATERTRANS.43.3010
M. Okido, K. Nishikawa, K. Kuroda, R. Ichino, Zhongwei Zhao, O. Takai
A titanium substrate was coated with a hydroxyapatite (HA) film under a cathodic potential in aqueous solutions containing calcium and phosphate ions and hydrogen peroxide at pH 5.5 and a temperature of 309.5 K. The deposition process was monitored using the current density change, and the mass change was measured using the electrochemical quartz crystal microbalance (QCM) technique at cathodic potentials, and compared with deposition on a gold substrate. The deposits were analyzed using X-ray diffraction and scanning electron microscopy. HA films were obtained at different cathodic potentials, and the film morphology changed with the potential. With electrolysis at -557 mV, HA was deposited and accumulated after 800 s, when the mass gain increased significantly, as determined using QCM. After 800 s, the cathodic current increased and then decreased with HA growth. The HA film was porous, with pores several hundred nanometers in size, and formed a network of aggregates with walls about 50 nm thick. The filling factor was about 59 vol%, as evaluated from the mass gain using QCM and microscopic observation.
在pH为5.5、温度为309.5 K、含钙、磷酸离子和过氧化氢的水溶液中,在阴极电位下,用羟基磷灰石(HA)薄膜包覆钛基体。利用电流密度变化监测沉积过程,利用电化学石英晶体微天平(QCM)技术在阴极电位下测量沉积过程的质量变化,并与在金衬底上沉积进行比较。利用x射线衍射和扫描电镜对沉积物进行了分析。在不同的阴极电位下制备了HA膜,膜的形态随电位的变化而变化。在-557 mV电解条件下,HA在800 s后沉积和积累,质量增益明显增加,用QCM测定。800s后,阴极电流随HA的增长先增大后减小。透明质酸薄膜是多孔的,具有几百纳米大小的孔,并形成了约50纳米厚的聚集体网络。通过QCM和显微镜观察的质量增益评估,填充因子约为59 vol%。
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引用次数: 22
Grain boundary character and superplasticity of fine-grained ultra-high carbon steel : Superplasticity and its applications 细晶超高碳钢的晶界特性与超塑性:超塑性及其应用
Pub Date : 2002-10-01 DOI: 10.2320/MATERTRANS.43.2455
T. Furuhara, E. Sato, T. Mizoguchi, Shuji Furimoto, T. Maki
The characteristics and superplasticity of the (a + θ) microduplex structures formed by various thermomechanical processings were studied in an ultra-high carbon steel (Fe-1.4Cr-1.0C). After heavy warm rolling of pearlite, an (a + θ) microduplex structure with equi-axed a grains of 0.4 pm in diameter and spheroidized θ particles of 0.2 μm in diameter is obtained. The a matrix exhibits a recovered structure in which most of a grain boundaries are low-angle boundaries, resulting in rather smaller elongation at 973 K. Heavy cold rolling and annealing of pearlite produces an (a + θ) microduplex structure which consists of the coarse-grain region (d α ∼ 0.4 μm) with high-angle a boundaries and the fine-grain region (d α ∼ 0.2 μm) with low-angle a boundaries. Superplasticity in this specimen is slightly better than the warm-rolled specimen. When pearlite was austenitized in the (y + θ) region, quenched and tempered at the temperature below A 1 , an (a + θ) microduplex structure in which a and θ grain sizes are nearly the same as in the warm-rolled specimen and most of a boundaries are of high-angle one is formed. Such ultra-fine a grains are formed through the recovery of the fine (a' lath martensite + θ) mixture during tempering. This microduplex structure exhibits superior superplasticity. Heavy warm rolling prior to the quenching and tempering improves total elongation further because the distribution of prior y grain size is more uniform. When cold-rolled pearlite was austenitized and air-cooled, an (a + θ) microduplex structure with high-angle a boundary is formed. However, since the a grain size was relatively large (ca. 2 μm), its superplastic performance is poor. Finally, more simplification of processing for superplasticity was attempted. Further improvement of superplasticity was achieved by omitting the tempering in the quenching and tempering treatment.
研究了超高碳钢(Fe-1.4Cr-1.0C)在不同热处理条件下形成的(a + θ)微双相组织的特征和超塑性。珠光体经过重温轧制后,得到了直径为0.4 pm的等轴a晶粒和直径为0.2 μm的球化θ晶粒的(a + θ)微双相组织。在973 K时,a基体表现出一种恢复组织,其中大部分晶界为低角晶界,导致延伸率较小。珠光体经冷轧退火后形成(a + θ)微双相组织,由具有高a角边界的粗晶区(d α ~ 0.4 μm)和具有低a角边界的细晶区(d α ~ 0.2 μm)组成。该试样的超塑性略好于热轧试样。当珠光体在(y + θ)区奥氏体化,在低于a1的温度下淬火回火时,形成了A和θ晶粒尺寸与热轧试样基本相同,且晶界大部分为大角度晶界的(A + θ)微双相组织。这种超细晶粒是通过回火过程中细小(a'板条马氏体+ θ)混合物的恢复而形成的。这种微双相组织表现出优异的超塑性。淬火回火前的重温轧制进一步提高了总伸长率,因为先前的晶粒尺寸分布更加均匀。冷轧珠光体经奥氏体化和风冷处理后,形成具有大角度a边界的(a + θ)微双相组织。但由于a晶粒尺寸较大(约2 μm),其超塑性性能较差。最后,对超塑性加工进行了进一步简化。通过在淬火回火处理中省略回火,进一步提高了材料的超塑性。
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引用次数: 12
Martensitic Transformations : Microstructures and Uniaxial Stress, Magnetic Field and Hydrostatic Pressure Effects 马氏体相变:微观结构和单轴应力、磁场和静水压力效应
Pub Date : 2002-08-01 DOI: 10.2320/MATERTRANS.43.2050
K. Shimizu
Microstructures in martensites and effects of uniaxial stress, magnetic field and hydrostatic pressure on martensitic transformations, which were investigated by the author, are briefly summarized. Unsolved problems related to this investigation are pointed out and some ideas are proposed to solve the problems. Interactions between lattices and electrons should be clarified in order to establish the cause of martensitic transformation. In particular, the exact electronic band structure at Brillouin zone boundaries should be delineated, and whether martensitic nuclei are indeed grown from precursory strained regions in matrix phases should be clarified. How the precursory strained region is related to the lattice invariant strain considered in the phenomenological crystallographic theory for martensitic transformations and actually observed by TEM should also be clarified. Some other future research subjects, such as the effects of uniaxial stress, magnetic field and hydrostatic pressure on martensitic transformations, and various related functions, such as shape memory effect and superelasticity, are further pointed out.
简要总结了作者所研究的马氏体组织以及单轴应力、磁场和静水压力对马氏体相变的影响。指出了研究中存在的问题,并提出了解决问题的思路。为了确定马氏体相变的原因,晶格和电子之间的相互作用应该被澄清。特别是,在布里渊带边界处精确的电子带结构应该被描绘出来,并且马氏体核是否确实是从基体相的前兆应变区生长出来的应该被澄清。前兆应变区与马氏体相变的现象晶体学理论中考虑的晶格不变应变之间的关系以及TEM实际观察到的关系也需要澄清。进一步指出了今后的研究方向,如单轴应力、磁场和静水压力对马氏体相变的影响,以及形状记忆效应和超弹性等相关功能。
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引用次数: 4
Role of electrode potential difference between lead-free solder and copper base metal in wetting : Lead-free electronics packaging 无铅焊料和铜基体金属在润湿过程中电极电位差的作用:无铅电子封装
Pub Date : 2002-08-01 DOI: 10.2320/MATERTRANS.43.1784
T. Takemoto, Tatsuya Funaki
The role of the electrochemical reaction between solder and copper base metal in soldering flux was investigated in relation to wetting. The research includes the contact polarization between solder and base metal in soldering flux of RA type. The difference of electrode potential between solder and base metal in soldering flux plays an important role in removing the oxide film by contact polarization. It is concluded that the electrode potential of Sn-based lead-free solders should be significantly lower than copper to obtain good wettability, because the accelerated anodic dissolution of tin by contacting with the copper base metal enhances the wettability by the removal of tin oxide which is one of the stable oxide on base metal and solder. Sn-Pb has the adequate electrode potential to be effectively dissolved when contacted by copper. On the other hand, the electrode potential of Sn-3.5Ag is very close to copper: the condition gives extremely small contact current. The addition of less noble elements that can lower the electrode potential is effective to enhance the wettability of Sn-3.5Ag. Sn-Zn solder has extremely low electrode potential than a copper base metal; the situation excessively accelerates the preferential anodic dissolution of zinc resulting in the no dissolution of tin. The addition of lead to Sn-3.5Ag solder lowered the electrode potential, which increased the potential difference between solder and copper base metal, as a result the contact current between them was increased. The improved wettability is confirmed by adding lead to Sn-3.5Ag; all lead added solders showed a larger spread area, i.e., a smaller contact angle than Sn-3.5Ag after the spreading test. This work proposed the role of electrochemistry in wetting based on the potential difference between base metal and solder including the degree of contact corrosion current between them.
研究了焊料与铜母材在助焊剂中的电化学反应与润湿的关系。对RA型焊剂中焊料与母材的接触极化进行了研究。焊剂中焊料与母材电极电位的差异对接触极化去除氧化膜起着重要作用。结果表明,锡基无铅钎料的电极电位应明显低于铜,以获得良好的润湿性,这是由于锡与铜母金属接触加速阳极溶解,从而使氧化锡(母金属和焊料上的稳定氧化物之一)脱除,从而提高了润湿性。Sn-Pb具有足够的电极电位,当与铜接触时可以有效溶解。另一方面,Sn-3.5Ag的电极电位非常接近铜:这种情况下接触电流非常小。在Sn-3.5Ag中加入能降低电极电位的低贵金属元素,可有效提高Sn-3.5Ag的润湿性。锡锌焊料具有极低的电极电位比铜基体金属;这种情况过度加速了锌的优先阳极溶解,导致锡不溶解。Sn-3.5Ag钎料中添加铅降低了电极电位,增大了钎料与铜母材之间的电位差,从而增大了两者之间的接触电流。Sn-3.5Ag中添加铅证实了润湿性的改善;与Sn-3.5Ag相比,所有添加铅的钎料在扩散试验后的扩散面积更大,即接触角更小。本文根据母材和焊料之间的电位差,包括它们之间的接触腐蚀电流的程度,提出了电化学在润湿过程中的作用。
{"title":"Role of electrode potential difference between lead-free solder and copper base metal in wetting : Lead-free electronics packaging","authors":"T. Takemoto, Tatsuya Funaki","doi":"10.2320/MATERTRANS.43.1784","DOIUrl":"https://doi.org/10.2320/MATERTRANS.43.1784","url":null,"abstract":"The role of the electrochemical reaction between solder and copper base metal in soldering flux was investigated in relation to wetting. The research includes the contact polarization between solder and base metal in soldering flux of RA type. The difference of electrode potential between solder and base metal in soldering flux plays an important role in removing the oxide film by contact polarization. It is concluded that the electrode potential of Sn-based lead-free solders should be significantly lower than copper to obtain good wettability, because the accelerated anodic dissolution of tin by contacting with the copper base metal enhances the wettability by the removal of tin oxide which is one of the stable oxide on base metal and solder. Sn-Pb has the adequate electrode potential to be effectively dissolved when contacted by copper. On the other hand, the electrode potential of Sn-3.5Ag is very close to copper: the condition gives extremely small contact current. The addition of less noble elements that can lower the electrode potential is effective to enhance the wettability of Sn-3.5Ag. Sn-Zn solder has extremely low electrode potential than a copper base metal; the situation excessively accelerates the preferential anodic dissolution of zinc resulting in the no dissolution of tin. The addition of lead to Sn-3.5Ag solder lowered the electrode potential, which increased the potential difference between solder and copper base metal, as a result the contact current between them was increased. The improved wettability is confirmed by adding lead to Sn-3.5Ag; all lead added solders showed a larger spread area, i.e., a smaller contact angle than Sn-3.5Ag after the spreading test. This work proposed the role of electrochemistry in wetting based on the potential difference between base metal and solder including the degree of contact corrosion current between them.","PeriodicalId":18264,"journal":{"name":"Materials Transactions Jim","volume":"74 1","pages":"1784-1790"},"PeriodicalIF":0.0,"publicationDate":"2002-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85895977","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 36
Determination of atomic sites of Nb dissolved in metastable Fe23B6 phase : Bulk amorphous, nano-crystalline and nano-quasicrystalline alloys IV 铌在亚稳Fe23B6相中原子位置的测定:大块非晶、纳米晶和纳米准晶合金IV
Pub Date : 2002-08-01 DOI: 10.2320/MATERTRANS.43.1918
Takahiro Nakamura, H. Koshiba, M. Imafuku, A. Inoue, E. Matsubara
The primary metastable phase in the Fe 70 Nb 10 B 20 amorphous alloy is the complex fcc Fe 23 B 6 phase with a large lattice parameter. The atomic site of Nb atoms in this metastable phase was determined by the anomalous X-ray scattering (AXS) method. Nb atoms in the metastable phase located at the similar position expected in the local structural unit in the amorphous state. Thus, the precipitation of the metastable phase does not require long-distance diffusion of Nb atoms in the amorphous matrix.
fe70nb 10b20非晶合金的初亚稳相是具有大晶格参数的复杂fcc fe23b6相。用异常x射线散射(AXS)方法确定了Nb原子在亚稳相中的原子位置。亚稳相的Nb原子在非晶态的局部结构单元中所处的位置与预期的相似。因此,亚稳相的析出不需要Nb原子在非晶基体中的远距离扩散。
{"title":"Determination of atomic sites of Nb dissolved in metastable Fe23B6 phase : Bulk amorphous, nano-crystalline and nano-quasicrystalline alloys IV","authors":"Takahiro Nakamura, H. Koshiba, M. Imafuku, A. Inoue, E. Matsubara","doi":"10.2320/MATERTRANS.43.1918","DOIUrl":"https://doi.org/10.2320/MATERTRANS.43.1918","url":null,"abstract":"The primary metastable phase in the Fe 70 Nb 10 B 20 amorphous alloy is the complex fcc Fe 23 B 6 phase with a large lattice parameter. The atomic site of Nb atoms in this metastable phase was determined by the anomalous X-ray scattering (AXS) method. Nb atoms in the metastable phase located at the similar position expected in the local structural unit in the amorphous state. Thus, the precipitation of the metastable phase does not require long-distance diffusion of Nb atoms in the amorphous matrix.","PeriodicalId":18264,"journal":{"name":"Materials Transactions Jim","volume":"27 1","pages":"1918-1920"},"PeriodicalIF":0.0,"publicationDate":"2002-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73389805","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 15
Effect of annealing atmosphere on void formation in copper interconnects : Special issue on materials-related issues for Cu interconnects used in ultra high speed large scaled integrated Si devices 退火气氛对铜互连中空洞形成的影响:超高速大型集成硅器件用铜互连材料相关问题特刊
Pub Date : 2002-07-01 DOI: 10.2320/MATERTRANS.43.1624
S. Konishi, M. Moriyama, M. Murakami
In order to understand the void formation mechanism in electroplated Cu interconnects used in Si-semiconductor devices, microstructure of Cu/CuO/Cu layered films which were prepared on the Si 3 N 4 /Si substrates by the sputter-deposition technique was observed by transmission electron microscopy (TEM) and scanning ion microscopy (SIM). A high density of macro and micro voids were observed in the samples annealed in atmosphere containing hydrogen, whereas no voids were observed in the samples annealed in Ar atmosphere. TEM observation suggested that a small amount of oxygen contained in the Cu films (even a native oxide layer) formed water vapor at elevated temperatures, causing formation of the micro-voids when the samples were annealed in hydrogen atmosphere. The present result suggested that the void formation in the electroplated Cu films was induced by existence of impurities such as oxygen in the Cu films, and that the void growth was strongly enhanced by annealing in hydrogen atmosphere.
为了了解硅半导体器件中电镀Cu互连的空穴形成机理,采用透射电镜(TEM)和扫描离子显微镜(SIM)观察了溅射沉积技术在si3n4 /Si衬底上制备的Cu/CuO/Cu层状薄膜的微观结构。在含氢气氛中退火的样品中观察到高密度的宏观和微观空洞,而在氩气气氛中退火的样品中没有观察到空洞。透射电镜观察表明,Cu膜中含有少量的氧(甚至是天然氧化层)在高温下形成水蒸气,导致样品在氢气气氛中退火时形成微空洞。结果表明,Cu膜中存在氧等杂质,导致了Cu膜中空穴的形成,而在氢气气氛中退火能明显促进空穴的生长。
{"title":"Effect of annealing atmosphere on void formation in copper interconnects : Special issue on materials-related issues for Cu interconnects used in ultra high speed large scaled integrated Si devices","authors":"S. Konishi, M. Moriyama, M. Murakami","doi":"10.2320/MATERTRANS.43.1624","DOIUrl":"https://doi.org/10.2320/MATERTRANS.43.1624","url":null,"abstract":"In order to understand the void formation mechanism in electroplated Cu interconnects used in Si-semiconductor devices, microstructure of Cu/CuO/Cu layered films which were prepared on the Si 3 N 4 /Si substrates by the sputter-deposition technique was observed by transmission electron microscopy (TEM) and scanning ion microscopy (SIM). A high density of macro and micro voids were observed in the samples annealed in atmosphere containing hydrogen, whereas no voids were observed in the samples annealed in Ar atmosphere. TEM observation suggested that a small amount of oxygen contained in the Cu films (even a native oxide layer) formed water vapor at elevated temperatures, causing formation of the micro-voids when the samples were annealed in hydrogen atmosphere. The present result suggested that the void formation in the electroplated Cu films was induced by existence of impurities such as oxygen in the Cu films, and that the void growth was strongly enhanced by annealing in hydrogen atmosphere.","PeriodicalId":18264,"journal":{"name":"Materials Transactions Jim","volume":"28 1","pages":"1624-1628"},"PeriodicalIF":0.0,"publicationDate":"2002-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83270632","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 14
Recovery of hydrogen induced defects and thermal desorption of residual hydrogen in LaNi5 : Special issue on grain boundaries, interfaces, defects and localized quantum structures in ceramics LaNi5中氢致缺陷的恢复和残余氢的热解吸:陶瓷中的晶界、界面、缺陷和局域量子结构专刊
Pub Date : 2002-07-01 DOI: 10.2320/MATERTRANS.43.1494
K. Sakaki, H. Araki, Y. Shirai
Lattice defects induced by initial hydriding and their effect on residual hydrogen content in LaNi 5 have been studied by means of positron lifetime spectroscopy and hydrogen thermal desorption measurement. Component analyses of positron lifetime spectra show that surprising amount of vacancies together with dislocations are generated by the initial hydriding. Vacancy migration in LaNi 5 after hydrogen desorption at room temperature is observed around 423-673 K, while dislocations in LaNi 5 are much more stable. Hydrogen thermal desorption measurement shows that the release of residual hydrogen occurs mainly in the temperature range from 450 to 650 K, and it ceases at about 800 K. The release temperature of residual hydrogen closely corresponds with the temperature of vacancy migration and annihilation in LaNi 5 . Residual hydrogen in LaNi 5 is most likely trapped by vacancies and vacancy clusters, which are induced by hydriding.
采用正电子寿命谱法和氢热脱附法研究了lani5中初始氢化引起的晶格缺陷及其对残余氢含量的影响。正电子寿命谱的成分分析表明,初始氢化产生了数量惊人的空位和位错。室温下,在423 ~ 673 K范围内,LaNi 5的空位迁移现象较为明显,而LaNi 5的位错更为稳定。氢热解吸测量表明,残余氢的释放主要发生在450 ~ 650 K温度范围内,在800 K左右停止。残余氢的释放温度与lani5中空位迁移和湮灭的温度密切相关。lani5中残留的氢很可能被氢化引起的空位和空位团簇所捕获。
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引用次数: 20
Theoretical formation energy of oxygen-vacancies in oxides : Special issue on grain boundaries, interfaces, defects and localized quantum structures in ceramics 氧化物中氧空位的理论形成能:陶瓷的晶界、界面、缺陷和局域量子结构专刊
Pub Date : 2002-07-01 DOI: 10.2320/MATERTRANS.43.1426
I. Tanaka, F. Oba, K. Tatsumi, M. Kunisu, M. Nakano, H. Adachi
Formation energies of neutral and charged oxygen vacancies in MgO, ZnO, Al 2 O 3 , In 2 O 3 and SnO 2 have been calculated by a first principles plane-wave pseudopotential method. Two kinds of polymorphs, i.e., an ordinary phase and a high-pressure or an hypothetical negative pressure phase, have been chosen in order to see the effects of crystal structure. Supercells composed of 54 to 96 atoms were employed, and structural relaxation around the vacancy within second nearest neighbor distances was taken into account. Defect levels were obtained from the difference in total energies of the neutral and charged supercells that contain a vacancy. Ionization energies of the vacancy were calculated as the difference in the bottom of the conduction band and the defect levels. They are found to be proportional to band-gaps with a factor of approximately 0.5, which are prohibitively large for the n-type conduction.
用第一性原理平面波赝势法计算了MgO、ZnO、al2o3、in2o3和sno2中中性和带电氧空位的形成能。为了观察晶体结构的影响,我们选择了两种多晶,即普通相和高压或假设的负压相。使用了由54到96个原子组成的超级电池,并考虑了第二近邻距离内空位周围的结构弛豫。缺陷水平是由含有空位的中性和带电超级电池的总能量差得到的。空位的电离能计算为导带底部与缺陷能级的差值。发现它们与带隙成正比,因子约为0.5,这对于n型传导来说太大了。
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引用次数: 99
Copper wires for high speed logic LSI prepared by low pressure long throw sputtering method : Special issue on materials-related issues for Cu interconnects used in ultra high speed large scaled integrated Si devices 低压长溅射法制备高速逻辑LSI用铜线:超高速大规模集成硅器件用铜互连材料相关问题专刊
Pub Date : 2002-07-01 DOI: 10.2320/MATERTRANS.43.1599
T. Saito, T. Hashimoto, N. Ohashi, T. Fujiwara, H. Yamaguchi
Copper sputtering method for fabrication of high performance logic LSI was studied. Extension of target to substrate distance is effective to improve step coverage of sputtered film combined with reduced operation pressure. Step coverage of low pressure long throw sputtering method also strongly depends upon the feature size of trenches and holes which are formed on silicon wafer. Sub-micron holes and trenches are successfully filled with copper by using this sputtering process followed by re-flow annealing process. Hydrogen annealing process prior to the sputtering deposition on via openings is also investigated to realize good conductivity through the via. This process results in the reduction of copper oxide at the surface of copper film. Using these newly developed processes, 0.2μm node BiCMOS LSI with 4 level copper interconnects was successfully fabricated and high performance of the copper interconnect system was clearly demonstrated.
研究了铜溅射制备高性能逻辑大规模集成电路的方法。靶材与衬底距离的延长可以有效地提高溅射膜的台阶覆盖率,同时降低操作压力。低压长溅射法的步长覆盖范围也很大程度上取决于硅片上形成的沟槽和孔的特征尺寸。采用该溅射工艺和再流动退火工艺成功地填充了亚微米孔洞和沟槽。研究了在孔孔溅射沉积之前的氢退火工艺,以实现通过孔的良好导电性。这一过程导致铜膜表面氧化铜的减少。利用这些新工艺,成功地制作了具有4级铜互连的0.2μm节点BiCMOS LSI,并充分证明了铜互连系统的高性能。
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引用次数: 3
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