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Thermodynamic effects of pulsed laser multilayer thin film etching 脉冲激光多层薄膜刻蚀的热力学效应
Pub Date : 2023-05-31 DOI: 10.1117/12.2683889
Xiaoli Liu, Licheng Zhou, Wending Liu, Yifan Zhou, Y. Xiong, JiZhou Wang
The impact of the interface effect on the etching accuracy of a non-single-layer structure was utilized as a starting point in this work to analyze the correlation between the integrated structure's film surface/interface temperature field, stress field distribution, and interface mutation. Based on single-factor etching experiments, the relationship between the temperature field, stress field, and laser characteristic parameters was evaluated via a combination of theoretical analysis and numerical simulation. For polyimide-based metal aluminum film, a connection between scanning speed and etching characteristic parameters was discovered. The results illustrate that when Al/PI (aluminum film thickness of 2μm) was irradiated by a laser, the interface temperature reached a certain value, which caused distortion of the film and substrate. Changes in the distribution of the temperature and stress fields of the film affect the heat transfer in the system and thus affect the thermodynamic trajectory, thermal feedback, etching rate, and shape of the target film surface. Ultimately, the etching and removal of the Al/PI integration of the non-single-layer structure are attributed to the interplay of thermal and stress field effects.
本文以界面效应对非单层结构刻蚀精度的影响为出发点,分析了集成结构薄膜表面/界面温度场、应力场分布和界面突变之间的相关性。在单因素腐蚀实验的基础上,采用理论分析和数值模拟相结合的方法,研究了温度场、应力场与激光特性参数之间的关系。对于聚酰亚胺基金属铝膜,发现了扫描速度与刻蚀特性参数之间的联系。结果表明:当激光照射Al/PI(铝膜厚度为2μm)时,界面温度达到一定值,导致薄膜和衬底变形;薄膜温度场和应力场分布的变化影响了系统内的传热,从而影响了目标薄膜表面的热力学轨迹、热反馈、蚀刻速率和形状。最终,非单层结构的Al/PI集成的蚀刻和去除归因于热和应力场效应的相互作用。
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引用次数: 0
Fast high-resolution imaging combining deep learning and single-pixel imaging 结合深度学习和单像素成像的快速高分辨率成像
Pub Date : 2023-05-31 DOI: 10.1117/12.2684974
X. Liu, Zilong Li, Jiaqing Dong, Guijun Wang, Wenhua Zhong, Qiegen Liu, Xianlin Song
In the traditional Fourier single-pixel imaging (FSPI), compressed sampling is often used to improve the acquisition speed. However, the reconstructed image after compressed sampling often has a lower resolution and the quality is difficult to meet the imaging requirements of practical applications. To address this issue, we proposed a novel imaging method that combines deep learning and single-pixel imaging, which can reconstruct high-resolution images with only a small-scale sampling. In the training phase of the network, we attempted to incorporate the physical process of FSPI into the training process. To achieve this objective, a large number of natural images were selected to simulate Fourier single-pixel compressed sampling and reconstruction. The compressed reconstructed samples were subsequently employed for network training. In the testing phase of the network, the compressed reconstruction samples of the test dataset were input into the network for optimization. The experimental results showed that compared with traditional compressed reconstruction methods, this method effectively improved the quality of reconstructed images.
在传统的傅立叶单像素成像(FSPI)中,通常采用压缩采样来提高采集速度。然而,压缩采样后的重建图像往往分辨率较低,质量难以满足实际应用的成像要求。为了解决这一问题,我们提出了一种将深度学习和单像素成像相结合的新型成像方法,该方法仅用小范围采样就可以重建高分辨率图像。在网络的训练阶段,我们尝试将FSPI的物理过程融入到训练过程中。为了实现这一目标,选取大量的自然图像进行傅立叶单像素压缩采样和重构模拟。随后将压缩后的重构样本用于网络训练。在网络的测试阶段,将测试数据集的压缩重构样本输入到网络中进行优化。实验结果表明,与传统的压缩重建方法相比,该方法有效地提高了重建图像的质量。
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引用次数: 0
Active modulation of multiple metamaterial induced transparences in terahertz region 多超材料在太赫兹区诱导透明的有源调制
Pub Date : 2023-05-31 DOI: 10.1117/12.2683140
Huiwen Shi, Longyu Shi, Xuteng Zhang, Pujing Zhang, Jinyu Chen, Mengyuan Wang, Huijuan Sun, Qing-li Zhou, Cunlin Zhang
Metamaterial induced transparency (MIT) has great potential in photonic device applications. Here, we design a metastructure with MIT effect generated by destructive interference of bright-dark-dark three modes. Therein, the cross resonator formed by the combination of the cut-wire resonator and the long vertical metal bar (LVMB) act as the bright mode, and two pairs of split ring resonators of different lengths are distributed around the cross resonator as two dark modes, realizing significant multi-band MIT effect. Furthermore, the embedded photosensitive Si island in the broken LVMB can be used to tune the effective length by changing the conductivity, thereby actively controlling the conversion from multi-band behaviors into triple MITs. Our results could achieve the dynamic multi-band switching, which has broad application prospects for optical information processing and communication.
超材料诱导透明(MIT)在光子器件中具有巨大的应用潜力。在这里,我们设计了一个由亮-暗-暗三种模式相消干涉产生MIT效应的元结构。其中,由断线谐振器与长垂直金属棒(LVMB)组合形成的交叉谐振器作为亮模,在交叉谐振器周围分布两对不同长度的裂环谐振器作为暗模,实现了显著的多波段MIT效应。此外,在断裂的LVMB中嵌入光敏硅岛可以通过改变电导率来调节有效长度,从而主动控制从多带行为转换为三重MITs。实现了动态多波段交换,在光信息处理和通信领域具有广阔的应用前景。
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引用次数: 0
Visible nonlinear stimulated scatterings generated in a carbon disulfide filled microbubble cavity 二硫化碳填充微泡腔中产生的可见非线性受激散射
Pub Date : 2023-05-31 DOI: 10.1117/12.2685005
Longxiang Chen, Zhenlin Zhao, Zixiang Fu, Hao Lin, Tianhe Wu, S. Xie, Qijing Lu
In recent years, multicolor lasers have shown high potential for applications in many fields, such as white light source generation, biosensor or bioimaging, and optical communication, etc. Here, we use an optofluidic microbubble resonator (OFMBR) filled with a highly nonlinear liquid to obtain multicolor stimulated scatterings. By filling OFMBR with carbon disulfide and pumping it with nanosecond pulsed laser, a broadband visible supercontinuum spanning from 532 nm to 630 nm is generated due to the stimulated Raman scattering and stimulated Raman-Kerr scattering. This study opens the way towards potential application of multicolor or white light generation using optical nonlinear liquids.
近年来,多色激光器在白光光源产生、生物传感器或生物成像、光通信等领域显示出巨大的应用潜力。在这里,我们使用一个充满高度非线性液体的光流微泡谐振器(OFMBR)来获得多色受激散射。用二硫化碳填充OFMBR,再用纳秒脉冲激光泵浦OFMBR,通过受激拉曼散射和受激拉曼-克尔散射产生532 ~ 630 nm的宽带可见超连续光谱。本研究为利用光学非线性液体产生多色或白光的潜在应用开辟了道路。
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引用次数: 0
Infrared background spectral radiance analysis of limb observation based on satellite observation data 基于卫星观测数据的翼面观测红外背景光谱辐射度分析
Pub Date : 2023-05-31 DOI: 10.1117/12.2684729
J. Bai, Lu Bai, Chao Huang
Aiming at the requirement of accurate simulation of near-space atmospheric infrared background radiation, this paper simulates near-space infrared atmospheric background radiance according to atmospheric parameters detected by satellites. The multi-channel infrared radiometer SABER (Sound of the Atmosphere using Broadband Emission Radiometry) carried by TIMED satellite (Thermosphere, Ionosphere Mesosphere Energetics and Dynamics) is used to acquire atmospheric profile. Combined with limb observation model and atmospheric background radiance calculation model, the transmittance and spectral radiance of infrared atmospheric background were simulated. The spectral radiance of atmospheric background under the standard atmospheric model and satellite atmospheric profiles was compared to analyze the difference between the two atmospheric parameter. In the infrared band, the atmospheric profile has a great impact on atmospheric background radiance. For the accurate simulation calculation of infrared background spectral radiance in different regions, the influence of atmospheric profile parameters should be taken into account.
针对近空间大气红外背景辐射精确模拟的要求,根据卫星探测到的大气参数,模拟近空间红外大气背景辐射。利用TIMED卫星搭载的多通道红外辐射计SABER (Sound of Atmosphere using Broadband Emission Radiometry)(热层、电离层、中间层能量学与动力学)获取大气剖面。结合翼缘观测模型和大气背景辐亮度计算模型,对红外大气背景的透射率和光谱辐亮度进行了模拟。比较了标准大气模式和卫星大气廓线下大气背景的光谱辐亮度,分析了这两个大气参数的差异。在红外波段,大气剖面对大气背景辐射有很大的影响。为了准确模拟计算不同区域的红外背景光谱辐射,需要考虑大气廓线参数的影响。
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引用次数: 0
Research on hollow-core terahertz fiber based on anti-resonant Bragg structure elements 基于抗谐振Bragg结构元件的空心太赫兹光纤研究
Pub Date : 2023-05-31 DOI: 10.1117/12.2684783
Jin-long Ding, Ming-Yang Chen, L. Ding, Zhengqiu Dong
An hollow-core terahertz fiber applying anti-resonant Bragg structure as the basic unit is proposed. Simulations results shown that the proposed THz fiber shows both the transmission characteristics of a conventional anti-resonant structure and a Bragg fiber. The confinement loss of which could be two-three orders of magnitude lower than that of an anti-resonant structure fiber consists of a single anti-resonant ring, and the total loss is one order of magnitude lower, the transmission loss of the proposed THz fiber could be 0.5 dB/m or less with a relative wide bandwidth of 0.15 THz.
提出了一种以抗谐振布拉格结构为基本单元的空心太赫兹光纤。仿真结果表明,所设计的太赫兹光纤具有传统抗谐振结构和布拉格光纤的传输特性。其约束损耗比由单个抗谐振环组成的抗谐振结构光纤低2 - 3个数量级,总损耗低1个数量级,在0.15太赫兹的相对带宽下,该光纤的传输损耗可达0.5 dB/m以下。
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引用次数: 0
Simultaneous measurement method of six-degree-of-freedom absolute position and attitude based on light spots 基于光点的六自由度绝对位置和姿态同时测量方法
Pub Date : 2023-05-31 DOI: 10.1117/12.2684020
Ruimao Ma, Jianquan Zhang, Wenbo Dong, Jiaqi Yu, Jiancheng Liu, W. Ge, Jianguo He, Meng Yu, Aimin Xiao
This article presents a novel method to simultaneously measure the six-degree-of-freedom (6-DOF) absolute position and attitude based on light spots. The proposed system consists of a measurement unit and a moving target: the measurement unit contains a laser, three cube corner retroreflectors (CCR), three CMOSs, and some beam splitters; the target is a cube with three CCRs installed on each of its three orthogonal planes. In the measurement unit, the laser is split into three reference lights as well as three measured lights which are detected by three CMOSs after returning from six CCRs. Based on the vector analysis of the optical path, the relationship between 6-DOF position and attitude of the moving target and the output coordinates of three CMOSs is established. This method is capable of simultaneously measuring translational motions along as well as rotational motions around three orthogonal axes and achieving the absolute positioning of the target, which has overcome the shortage that the measurement systems based on laser interference can not measure absolute position and attitude. The accuracy of this method has been verified by Monte Carlo stochastic simulation and sinusoidal trajectory simulation in the range of the target’s motion. The simulation results show that the errors of position are less than 0.5 μm and the errors of attitude are less than 2.3 ″, which indicates the algorithm error is no more than the minimum pixel size of CMOS. This 6-DOF absolute pose simultaneous measurement method with simplicity and high precision has great potential for application in various precision machining fields.
提出了一种基于光点同时测量六自由度绝对位置和姿态的新方法。该系统由一个测量单元和一个运动目标组成:测量单元包括一个激光器、三个立方体角反射器(CCR)、三个CMOSs和一些分束器;目标是一个立方体,在它的三个正交平面上各安装了三个ccr。在测量单元中,激光分为三个参考光和三个被测光,从六个ccr返回后由三个CMOSs检测。在光路矢量分析的基础上,建立了运动目标的6自由度位置和姿态与三个CMOSs输出坐标之间的关系。该方法能够同时测量目标沿三个正交轴的平移运动和旋转运动,实现目标的绝对定位,克服了基于激光干涉的测量系统无法测量绝对位置和姿态的缺点。通过蒙特卡罗随机仿真和目标运动范围内的正弦轨迹仿真,验证了该方法的准确性。仿真结果表明,位置误差小于0.5 μm,姿态误差小于2.3″,表明算法误差不超过CMOS最小像元尺寸。该六自由度绝对位姿同时测量方法简单、精度高,在各种精密加工领域具有很大的应用潜力。
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引用次数: 0
Active and passive modulation of dual metamaterial induced transparency in terahertz regime 双超材料诱导太赫兹透明的有源和无源调制
Pub Date : 2023-05-31 DOI: 10.1117/12.2683535
Xuteng Zhang, Yuwang Deng, Longyu Shi, Huiwen Shi, Pujing Zhang, Z. Wang, Qing-li Zhou, Cunlin Zhang
Metamaterial induced transparency (MIT) has shown great application potential in terahertz regime, which is of great significance in constructing photonic components such as slow light systems and tunable filters. The single or multiple transparent windows can be induced through near-field coupling via two or more resonant modes. Compared with the single MIT, multi-MIT effect can realize multiband sensing, communication, and storage applications. Here, we design a dual-MIT metastructure composed of three bright resonators including a cut-wire resonator (CWR), a pair of large toroidal split ring resonators (LTSRRs), and a pair of small toroidal split ring resonators (STSRRs). Dual-MIT windows can be induced through coupling between the electric dipole resonance and two inductance capacitance (LC) resonances. By optimizing and adjusting the geometric parameters of the metasurface, the resonant strength could be suppressed or enhanced. Thus, we can passively manipulate the frequency and amplitude of the dual-MIT windows and realize the switching between the two windows and single MIT. In addition, by actively tuning the conductivity of photosensitive Si introduced in the gap of the LTSRRs and STSRRs, we observe the LC resonance can be weakened to quench the dual-MIT windows. Our research provides an approach to explore the miniaturized, multi-functional, and switching components in terahertz regime.
超材料诱导透明(MIT)在太赫兹波段显示出巨大的应用潜力,在构建慢光系统和可调谐滤波器等光子元件方面具有重要意义。通过两个或多个谐振模式的近场耦合可以诱导出单个或多个透明窗口。与单个MIT相比,多MIT效应可以实现多频段传感、通信和存储应用。在这里,我们设计了一个双mit元结构,由三个明亮谐振器组成,包括一个断线谐振器(CWR),一对大环面分裂环谐振器(LTSRRs)和一对小环面分裂环谐振器(STSRRs)。双mit窗口可以通过电偶极子共振和两个电感电容(LC)共振之间的耦合产生。通过优化和调整超表面的几何参数,可以抑制或增强谐振强度。因此,我们可以被动地操纵双MIT窗口的频率和幅度,实现双MIT窗口和单MIT窗口之间的切换。此外,通过主动调节ltsrr和stsrr间隙中引入的光敏硅的电导率,我们观察到LC共振可以被削弱以淬灭双mit窗口。我们的研究为探索太赫兹环境下的小型化、多功能和开关元件提供了一种方法。
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引用次数: 0
Study on obtaining rotation temperature by using the relative intensity of the CN spectrum in the ultraviolet band 利用紫外光波段CN光谱的相对强度获得旋转温度的研究
Pub Date : 2023-05-31 DOI: 10.1117/12.2684746
Mengjun Sun, Lu Bai, Dan-meng Zhang, Huigang Shi
The non-equilibrium ultraviolet radiation characteristics of plume and shock are closely related to flight parameters such as vibration-rotation temperature, where temperature is the most important thermodynamic quantity for calculating non-equilibrium radiation. CN is the main product of aircraft reentry into the atmosphere and the ablation of carbon-based composite materials, and has very high emission efficiency, making it one of the best molecules for high-temperature gas temperature measurement. In this paper, the two-temperature model and the line-by-line method are used to calculate the CN ultraviolet spectral radiance, and the spectral structure of the violet band is analyzed. The effects of vibration temperature and rotation temperature on the spectral intensity and spectral shape of ultraviolet radiation under thermodynamic non-equilibrium conditions are discussed. According to the relationship between the band tail of CN violet band v=0 peak and the vibration temperature and rotation temperature, a method to invert the rotation temperature using the the slope of CN spectral relative intensity
羽流和激波的非平衡紫外辐射特性与振动-旋转温度等飞行参数密切相关,其中温度是计算非平衡辐射最重要的热力学量。CN是飞机再入大气层和碳基复合材料烧蚀的主要产物,具有非常高的发射效率,是高温气体测温的最佳分子之一。本文采用双温模型和逐行法计算了CN的紫外光谱辐亮度,并分析了紫外波段的光谱结构。讨论了在热力学非平衡条件下,振动温度和旋转温度对紫外辐射光谱强度和光谱形状的影响。根据CN紫外光带v=0峰带尾与振动温度和旋转温度的关系,提出了利用CN光谱相对强度斜率反演旋转温度的方法
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引用次数: 0
Research on strain testing based on binocular stereo vision 基于双目立体视觉的应变测试研究
Pub Date : 2023-05-31 DOI: 10.1117/12.2684063
Wenyong Lu, Y. Shi, Zhan Jin, Weijie Luo, Jing Chen, Jiajie He
Binocular stereo vision technology has good application prospects and practical value in industrial production, autonomous driving, quality inspection, and many other aspects, and is an important research direction in computer vision. Strain measurement based on binocular stereo vision is different from traditional strain measurement methods, and has advantages such as convenient operation, high accuracy, and global dynamic measurement. This article focuses on the strain measurement technology of binocular stereo vision, and studies the camera calibration, stereo matching, 3D reconstruction, and SGBM algorithm in stereo matching of binocular cameras. By constructing a binocular camera strain testing system, the distance between the corresponding point AB before and after the strain of the target object is measured, thereby achieving the measurement of the strain of the target object. The strain of the target object obtained from the experimental test results is 47.53%, the theoretical tensile strain is 48.54%, and the relative error is controlled within ± 2%.
双目立体视觉技术在工业生产、自动驾驶、质量检测等诸多方面具有良好的应用前景和实用价值,是计算机视觉领域的一个重要研究方向。基于双目立体视觉的应变测量不同于传统的应变测量方法,具有操作方便、精度高、全局动态测量等优点。本文以双目立体视觉的应变测量技术为重点,研究了双目摄像机立体匹配中的摄像机标定、立体匹配、三维重建和SGBM算法。通过搭建双目相机应变测试系统,测量目标物体应变前后对应点AB之间的距离,从而实现对目标物体应变的测量。实验测试结果得到的目标物体应变为47.53%,理论拉伸应变为48.54%,相对误差控制在±2%以内。
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引用次数: 0
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Optical Frontiers
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