Pub Date : 2009-03-27DOI: 10.1109/MEMSYS.2009.4805379
R. Sochol, A. Mahajerin, B. Casavant, P. Singh, M. Dueck, L. Lee, L. Lin
This paper reports the first demonstration of single nucleotide polymorphism (SNP) genotyping via molecular beacon probes immobilized on polystyrene microbead substrates within a dynamic microfluidic system. Additionally, we present an optimized bead immobilization technique, micropost array trapping (¿PAT), for high-density and high-throughput arraying of beads. Quantitative detection was achieved at room temperature for three label-free DNA oligonucleotide sequences based on the genome of the Hepatitis C Virus (HCV) in humans. SNP detection technology is integral for the realization of personalized medicine and genetic disease identification, and this system offers a promising technique for fast, sensitive, and cost-effective SNP genotyping.
{"title":"Bead-Immobilized Molecular Beacons for High Throughput SNP Genotyping Via a Microfluidic System","authors":"R. Sochol, A. Mahajerin, B. Casavant, P. Singh, M. Dueck, L. Lee, L. Lin","doi":"10.1109/MEMSYS.2009.4805379","DOIUrl":"https://doi.org/10.1109/MEMSYS.2009.4805379","url":null,"abstract":"This paper reports the first demonstration of single nucleotide polymorphism (SNP) genotyping via molecular beacon probes immobilized on polystyrene microbead substrates within a dynamic microfluidic system. Additionally, we present an optimized bead immobilization technique, micropost array trapping (¿PAT), for high-density and high-throughput arraying of beads. Quantitative detection was achieved at room temperature for three label-free DNA oligonucleotide sequences based on the genome of the Hepatitis C Virus (HCV) in humans. SNP detection technology is integral for the realization of personalized medicine and genetic disease identification, and this system offers a promising technique for fast, sensitive, and cost-effective SNP genotyping.","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122602023","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2009-03-27DOI: 10.1109/MEMSYS.2009.4805477
C. Liao, Y. Su
We have successfully demonstrated the fabrication of biodegradable and magnetic microcapsules utilizing PDMS double emulsification devices. Specially designed 3D microfluidic channels with surface modified by a self-aligned photo-grafting process are employed to shape immiscible fluids into monodisperse W/O/W emulsions. By varying the outer and inner fluid flow-rates, the overall and core sizes of the resulting double emulsions can be adjusted accordingly. Biodegradable materials and surface-treated ¿-Fe2O3 nanoparticles are dispersed uniformly in the middle organic phase, and solidified into magnetic microcapsules once the solvent is extracted. In the prototype demonstration, microcapsules made up of poly(L-lactic acid), trilaurin and phosphocholine (DOPC) are successfully fabricated. As such, the proposed PDMS micro-devices could potentially serve as versatile encapsulation tools, which are desired for a variety of biological and pharmaceutical applications.
{"title":"Fabrication of Biodegradable Microcapsules Utilizing 3D, Surface Modified PDMS Microfluidic Devices","authors":"C. Liao, Y. Su","doi":"10.1109/MEMSYS.2009.4805477","DOIUrl":"https://doi.org/10.1109/MEMSYS.2009.4805477","url":null,"abstract":"We have successfully demonstrated the fabrication of biodegradable and magnetic microcapsules utilizing PDMS double emulsification devices. Specially designed 3D microfluidic channels with surface modified by a self-aligned photo-grafting process are employed to shape immiscible fluids into monodisperse W/O/W emulsions. By varying the outer and inner fluid flow-rates, the overall and core sizes of the resulting double emulsions can be adjusted accordingly. Biodegradable materials and surface-treated ¿-Fe2O3 nanoparticles are dispersed uniformly in the middle organic phase, and solidified into magnetic microcapsules once the solvent is extracted. In the prototype demonstration, microcapsules made up of poly(L-lactic acid), trilaurin and phosphocholine (DOPC) are successfully fabricated. As such, the proposed PDMS micro-devices could potentially serve as versatile encapsulation tools, which are desired for a variety of biological and pharmaceutical applications.","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"383 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131762537","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2009-03-27DOI: 10.1109/MEMSYS.2009.4805560
S. Takamatsu, Kiyoshi Matsumoto, I. Shimoyama
We developed the processing technique to form three-dimensionally coiled yarns of display elements from microfabricated organic displays on flat plastic foils in order to realize stretchable electronics. Three dimensional fabrics like sweaters have been much attention as elastic substrates for stretchable electronic devices, but the deposition and patterning of functional materials on the fabric are incompatible to planar process technique of MEMS. To solve this problem, we propose the fabrication technique where firstly display components are constructed on flat plastic foils and the foils are, then, processed to form them into coiled yarns. In detail of the process, organic electrochromic displays are fabricated on the releasable parylene films above the glass. The foils with displays are cut into yarns with dicing cutters and released from the glass. To make yarns stretchable, the resultant foils are spirally rolled around elastic core fibers, forming helical coiled structure. The stretch ratio of the fabricated yarn is tuned with its pitch angle, ranging from 1 to 2. Finally, we demonstrate the projection of the selected one pixel out of 4 pixels both before and after the yarn is stretched at its ratio of 1.3.
{"title":"Stretchable Yarn of Display Elements","authors":"S. Takamatsu, Kiyoshi Matsumoto, I. Shimoyama","doi":"10.1109/MEMSYS.2009.4805560","DOIUrl":"https://doi.org/10.1109/MEMSYS.2009.4805560","url":null,"abstract":"We developed the processing technique to form three-dimensionally coiled yarns of display elements from microfabricated organic displays on flat plastic foils in order to realize stretchable electronics. Three dimensional fabrics like sweaters have been much attention as elastic substrates for stretchable electronic devices, but the deposition and patterning of functional materials on the fabric are incompatible to planar process technique of MEMS. To solve this problem, we propose the fabrication technique where firstly display components are constructed on flat plastic foils and the foils are, then, processed to form them into coiled yarns. In detail of the process, organic electrochromic displays are fabricated on the releasable parylene films above the glass. The foils with displays are cut into yarns with dicing cutters and released from the glass. To make yarns stretchable, the resultant foils are spirally rolled around elastic core fibers, forming helical coiled structure. The stretch ratio of the fabricated yarn is tuned with its pitch angle, ranging from 1 to 2. Finally, we demonstrate the projection of the selected one pixel out of 4 pixels both before and after the yarn is stretched at its ratio of 1.3.","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"967 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132593540","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2009-03-27DOI: 10.1109/MEMSYS.2009.4805424
Hanseup Kim, K. Najafi
This paper describes a proof-of-concept all-electrical individually-addressable micro piston actuator array that produces high displacement and force by utilizing hydraulic amplification and electrostatic control. This new class of actuator arrays can remove a critical hurdle, pneumatic control ports to lab-on-chips, and achieve fully-integrated, large-scale, and all-electrical microfluidic systems. The fabricated actuator consists of a 3×3 array of 2×2mm2 membranes and produces maximum deflections of 35, 23, and 11 ¿m when hydraulicallydriven by piezoelectric actuation at 100, 80, 60V, respectively. The corresponding hydraulic amplification ratios are 3.2, 3, and 2.5, respectively. The array functions up to a frequency of 2Hz without failing, while allowing control over individual actuators by utilizing electrostatic latching at 100V. The active device part measures as 8.4×8.4×0.65mm3.
{"title":"An Electrically-Driven, Large-Deflection, High-Force, Micro Piston Hydraulic Actuator Array for Large-Scale Microfluidic Systems","authors":"Hanseup Kim, K. Najafi","doi":"10.1109/MEMSYS.2009.4805424","DOIUrl":"https://doi.org/10.1109/MEMSYS.2009.4805424","url":null,"abstract":"This paper describes a proof-of-concept all-electrical individually-addressable micro piston actuator array that produces high displacement and force by utilizing hydraulic amplification and electrostatic control. This new class of actuator arrays can remove a critical hurdle, pneumatic control ports to lab-on-chips, and achieve fully-integrated, large-scale, and all-electrical microfluidic systems. The fabricated actuator consists of a 3×3 array of 2×2mm2 membranes and produces maximum deflections of 35, 23, and 11 ¿m when hydraulicallydriven by piezoelectric actuation at 100, 80, 60V, respectively. The corresponding hydraulic amplification ratios are 3.2, 3, and 2.5, respectively. The array functions up to a frequency of 2Hz without failing, while allowing control over individual actuators by utilizing electrostatic latching at 100V. The active device part measures as 8.4×8.4×0.65mm3.","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"12 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133343964","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2009-03-27DOI: 10.1109/MEMSYS.2009.4805458
E. Defay, G. Le Rhun, F. Perruchot, P. Rey, A. Suhm, M. Aid, L.J. Liu, S. Pacheco, M. Miller
This paper reports the piezoelectric properties of sputtered and sol gel PZT thin films investigated in a low thickness range (100-250nm). Piezoelectric-elastic bimorphs including very thin PZT films were realized and the maximum reachable deflection at 5V was characterized. The depoling effect experienced by the PZT versus the maximum post process temperature is also discussed which leads to the motivation of developing low thickness range PZT thin films. Elastic-piezoelectric bimorphs were realized and exhibited deflection higher than 5¿m at 5V. Moreover, these bimorphs showed only a 10% decrease of the deflection after 5 billions cycles.
{"title":"Piezoelectric PZT Thin Films in the 100nm Range: A Solution for Actuators Embedded in Low Voltage Devices","authors":"E. Defay, G. Le Rhun, F. Perruchot, P. Rey, A. Suhm, M. Aid, L.J. Liu, S. Pacheco, M. Miller","doi":"10.1109/MEMSYS.2009.4805458","DOIUrl":"https://doi.org/10.1109/MEMSYS.2009.4805458","url":null,"abstract":"This paper reports the piezoelectric properties of sputtered and sol gel PZT thin films investigated in a low thickness range (100-250nm). Piezoelectric-elastic bimorphs including very thin PZT films were realized and the maximum reachable deflection at 5V was characterized. The depoling effect experienced by the PZT versus the maximum post process temperature is also discussed which leads to the motivation of developing low thickness range PZT thin films. Elastic-piezoelectric bimorphs were realized and exhibited deflection higher than 5¿m at 5V. Moreover, these bimorphs showed only a 10% decrease of the deflection after 5 billions cycles.","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"41 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133382390","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2009-03-27DOI: 10.1109/MEMSYS.2009.4805374
K. S. Demirci, Jae Hyeong Seo, S. Truax, L. Beardslee, Y. Luzinova, B. Mizaikoff, O. Brand
The successful compensation of frequency drift in a mass-sensitive chemical microsensor is demonstrated. The proposed compensation method uses a periodic stiffness modulation, generated by a second feedback loop, to monitor the microresonator's quality factor (Q-factor). The Q-factor is solely obtained from frequency measurements and monitored along with the measurand-induced frequency shift during normal closed-loop sensor operation. This simultaneous measurement of Q-factor and frequency shift enables the compensation of frequency drift induced by environmental disturbances using the extracted Q-factor. The feasibility of drift compensation has been demonstrated by implementing the compensation scheme into a closed-loop chemical sensing system and performing gas-phase chemical measurements.
{"title":"Frequency Drift Compensation in Mass-Sensitive Chemical Sensors based on Periodic Stiffness Modulation","authors":"K. S. Demirci, Jae Hyeong Seo, S. Truax, L. Beardslee, Y. Luzinova, B. Mizaikoff, O. Brand","doi":"10.1109/MEMSYS.2009.4805374","DOIUrl":"https://doi.org/10.1109/MEMSYS.2009.4805374","url":null,"abstract":"The successful compensation of frequency drift in a mass-sensitive chemical microsensor is demonstrated. The proposed compensation method uses a periodic stiffness modulation, generated by a second feedback loop, to monitor the microresonator's quality factor (Q-factor). The Q-factor is solely obtained from frequency measurements and monitored along with the measurand-induced frequency shift during normal closed-loop sensor operation. This simultaneous measurement of Q-factor and frequency shift enables the compensation of frequency drift induced by environmental disturbances using the extracted Q-factor. The feasibility of drift compensation has been demonstrated by implementing the compensation scheme into a closed-loop chemical sensing system and performing gas-phase chemical measurements.","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"115 ","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133684736","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2009-03-27DOI: 10.1109/MEMSYS.2009.4805476
Sangwon Park, D. Senesky, A. Pisano
An electrodeposition process for embedding NiFe alloys in deep silicon trenches (100 ¿m) without edge-overgrowth was developed by utilizing dry film photoresist as a sacrificial trench top. The dry film photoresist prevented high concentration of current flux at the trench edges during electrodeposition leading to planar deposition topographies. In addition, the effect of the applied current density on material composition of the electrodeposited NiFe film was investigated, and the composition for permalloy (Ni80Fe20) was obtained with a current density of 100 mA/cm2. Furthermore, the B-H response of the electrodeposited permalloy films exhibited a saturation magnetic flux density and relative permeability of 1.23 Tesla and 82, respectively. The electrodeposition technique developed in this work was utilized to fabricate a free-standing MEMS electromagnetic linear actuator composed of silicon and permalloy structures.
{"title":"Electrodeposition of Permalloy in Deep Silicon Trenches Without Edge-Overgrowth Utilizing Dry Film Photoresist","authors":"Sangwon Park, D. Senesky, A. Pisano","doi":"10.1109/MEMSYS.2009.4805476","DOIUrl":"https://doi.org/10.1109/MEMSYS.2009.4805476","url":null,"abstract":"An electrodeposition process for embedding NiFe alloys in deep silicon trenches (100 ¿m) without edge-overgrowth was developed by utilizing dry film photoresist as a sacrificial trench top. The dry film photoresist prevented high concentration of current flux at the trench edges during electrodeposition leading to planar deposition topographies. In addition, the effect of the applied current density on material composition of the electrodeposited NiFe film was investigated, and the composition for permalloy (Ni80Fe20) was obtained with a current density of 100 mA/cm2. Furthermore, the B-H response of the electrodeposited permalloy films exhibited a saturation magnetic flux density and relative permeability of 1.23 Tesla and 82, respectively. The electrodeposition technique developed in this work was utilized to fabricate a free-standing MEMS electromagnetic linear actuator composed of silicon and permalloy structures.","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"16 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122898396","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2009-03-27DOI: 10.1109/MEMSYS.2009.4805545
M. G. Kim, K. Jo, Y. S. Park, W. Jang, J. Lee
On-axis LDV (Laser Doppler Vibrometer), where the direction of incident beam is the same as that of the movement, intrinsically offers an accurate dynamic measurement, but it is not presently applicable to the MEMS actuator with in-plane motion due to no accessibility of the sidewall. The only available measurement method is off-axis LDV, which still shows a serious measurement error depending on the device pattern of the target surface. The on-axis FLDV (Fiber-optic LDV) with a 45°-angled optical fiber is proposed to accurately measure the in-plane motion of MEMS actuator. The performance of the proposed FLDV is evaluated in terms of signal stability and the measurable range.
{"title":"Accuracy Enhancement in the In-Plane Dynamic Measurement of MEMS Actuators using a Laser Doppler Vibrometer with a 45°-Angled Optical Fiber","authors":"M. G. Kim, K. Jo, Y. S. Park, W. Jang, J. Lee","doi":"10.1109/MEMSYS.2009.4805545","DOIUrl":"https://doi.org/10.1109/MEMSYS.2009.4805545","url":null,"abstract":"On-axis LDV (Laser Doppler Vibrometer), where the direction of incident beam is the same as that of the movement, intrinsically offers an accurate dynamic measurement, but it is not presently applicable to the MEMS actuator with in-plane motion due to no accessibility of the sidewall. The only available measurement method is off-axis LDV, which still shows a serious measurement error depending on the device pattern of the target surface. The on-axis FLDV (Fiber-optic LDV) with a 45°-angled optical fiber is proposed to accurately measure the in-plane motion of MEMS actuator. The performance of the proposed FLDV is evaluated in terms of signal stability and the measurable range.","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"43 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131747694","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2009-03-27DOI: 10.1109/MEMSYS.2009.4805314
T. Metz, G. Birkle, R. Zengerle, P. Koltay
In this work we present a novel, simple and robust, pneumatically actuated dispenser for nano- to picoliter sized droplets of liquid metals. The so called StarJet dispenser utilizes a star-shaped nozzle geometry that stabilizes plugs of liquid in the centre of the nozzle by capillary force. This minimizes the wall contact of the liquid plug and reduces contact line friction. Individual droplets of liquid metal can be pneumatically generated by interplay of the sheathing gas flow in the outer grooves of the nozzle and the liquid metal. The working principle was first discovered and studied by Computational Fluid Dynamic (CFD) simulations. For experimental validation silicon chips with the star-shaped geometry were fabricated by Deep Reactive Ion Etching (DRIE) and assembled into a printhead. With different nozzle chips volumes between 120 pl and 3.6 nl could be generated at natural frequencies of 90 Hz and 400 Hz. The StarJet can either be operated as drop on demand or as continuous droplet dispenser. We printed columns of metal with 0,5 to 1,0 mm width and 40 mm height (aspect ratio ≫40) to demonstrate the directional stability of the ejection.
{"title":"StarJet: Pneumatic Dispensing of Nano- to Picoliter Droplets of Liquid Metal","authors":"T. Metz, G. Birkle, R. Zengerle, P. Koltay","doi":"10.1109/MEMSYS.2009.4805314","DOIUrl":"https://doi.org/10.1109/MEMSYS.2009.4805314","url":null,"abstract":"In this work we present a novel, simple and robust, pneumatically actuated dispenser for nano- to picoliter sized droplets of liquid metals. The so called StarJet dispenser utilizes a star-shaped nozzle geometry that stabilizes plugs of liquid in the centre of the nozzle by capillary force. This minimizes the wall contact of the liquid plug and reduces contact line friction. Individual droplets of liquid metal can be pneumatically generated by interplay of the sheathing gas flow in the outer grooves of the nozzle and the liquid metal. The working principle was first discovered and studied by Computational Fluid Dynamic (CFD) simulations. For experimental validation silicon chips with the star-shaped geometry were fabricated by Deep Reactive Ion Etching (DRIE) and assembled into a printhead. With different nozzle chips volumes between 120 pl and 3.6 nl could be generated at natural frequencies of 90 Hz and 400 Hz. The StarJet can either be operated as drop on demand or as continuous droplet dispenser. We printed columns of metal with 0,5 to 1,0 mm width and 40 mm height (aspect ratio ≫40) to demonstrate the directional stability of the ejection.","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"39 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134538744","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2009-03-27DOI: 10.1109/MEMSYS.2009.4805360
G. E. Perlin, K. Wise
A new approach to microsystem integration to replace conventional area-consuming platform architectures with an overlay integration cable is presented. A parylene cable carrying interconnect lines is used to integrate a 3-D array of silicon microelectrodes with a custom-designed signal conditioning chip to realize a neural recording microsystem in its most compact form. This low-profile integrated front-end was implanted in a guinea pig and used to obtain discriminable neural activity.
{"title":"Ultra-Compact Integration for Fully-Implantable Neural Microsystems","authors":"G. E. Perlin, K. Wise","doi":"10.1109/MEMSYS.2009.4805360","DOIUrl":"https://doi.org/10.1109/MEMSYS.2009.4805360","url":null,"abstract":"A new approach to microsystem integration to replace conventional area-consuming platform architectures with an overlay integration cable is presented. A parylene cable carrying interconnect lines is used to integrate a 3-D array of silicon microelectrodes with a custom-designed signal conditioning chip to realize a neural recording microsystem in its most compact form. This low-profile integrated front-end was implanted in a guinea pig and used to obtain discriminable neural activity.","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"99 3","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131541021","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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