2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)最新文献
Pub Date : 2013-06-16DOI: 10.1109/TRANSDUCERS.2013.6627380
S. Janßen, T. Teßmann, M. Niessen, A. Sklorz, W. Lang
The small gas chromatograph presented in this paper was for the first time able to detect an ethylene concentration of 400 ppbv. Deduced from this measurement a detection limit below 50 ppbv can be reached which is absolutely mandatory for the shelf life prediction of climacteric fruits. To achieve the necessary sensitivity a complete new large-capacity-on-chip preconcentrator device was realized. New stationary phases were tested. The used packed gas chromatography column is now capable to separate vaporized water and ethylene gas from each other which was a yields a breakthrough in the analysis of ethylene concentrations in ambient air.
{"title":"Large-capacity-on-chip preconcentrator device for selective ethylene measurement below 400 PPBV","authors":"S. Janßen, T. Teßmann, M. Niessen, A. Sklorz, W. Lang","doi":"10.1109/TRANSDUCERS.2013.6627380","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6627380","url":null,"abstract":"The small gas chromatograph presented in this paper was for the first time able to detect an ethylene concentration of 400 ppbv. Deduced from this measurement a detection limit below 50 ppbv can be reached which is absolutely mandatory for the shelf life prediction of climacteric fruits. To achieve the necessary sensitivity a complete new large-capacity-on-chip preconcentrator device was realized. New stationary phases were tested. The used packed gas chromatography column is now capable to separate vaporized water and ethylene gas from each other which was a yields a breakthrough in the analysis of ethylene concentrations in ambient air.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"9 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126042745","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-06-16DOI: 10.1109/TRANSDUCERS.2013.6626946
T. Aono, Y. Ebata, S. Matsui, T. Watanabe
A large displacement silicon parasol structure has been realized using a developed two-step silicon plastic deformation process. This process consists of three key processes: first, plastic deformation at high temperature and applying a load from one side; second, two-step plastic deformation for large displacement and third, canopy release after plastic deformation. Accordingly, the silicon parasol structure with a diameter of 30 mm and a curvature radius of 100 mm can be fabricated by the developed plastic deformation process.
{"title":"Large displacement plastic deformation process for silicon parasol structure","authors":"T. Aono, Y. Ebata, S. Matsui, T. Watanabe","doi":"10.1109/TRANSDUCERS.2013.6626946","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6626946","url":null,"abstract":"A large displacement silicon parasol structure has been realized using a developed two-step silicon plastic deformation process. This process consists of three key processes: first, plastic deformation at high temperature and applying a load from one side; second, two-step plastic deformation for large displacement and third, canopy release after plastic deformation. Accordingly, the silicon parasol structure with a diameter of 30 mm and a curvature radius of 100 mm can be fabricated by the developed plastic deformation process.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"202 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123253500","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-06-16DOI: 10.1109/TRANSDUCERS.2013.6626698
Song Lin Cai, R. Zhu, Henggao Ding, Yong Jun Yang, Yan Su
This paper reports a novel micromachined integrated gyroscope and accelerometer based on gas thermal expansion. Using gas movement induced by alternating heat expansion in a micro chamber instead of a solid proof mass movement, a new type of micro gyroscope with a wide-range rotation detectability incorporating with 1-axis acceleration sensing is accomplished. Experiments demonstrate a good linearity of the rotation output in response to the angular rate from -3000 °/s to +3000 °/s and the acceleration output in response to the acceleration in the range of ±1g, which validate the simultaneous measurements of 1-axis angular rate and 1-axis acceleration in one chip. Meanwhile, the coupling effects among 3-axis rotations and accelerations are investigated experimentally to demonstrate low coupling effect via using thermal expansion flow.
{"title":"A micromachined integrated gyroscope and accelerometer based on gas thermal expansion","authors":"Song Lin Cai, R. Zhu, Henggao Ding, Yong Jun Yang, Yan Su","doi":"10.1109/TRANSDUCERS.2013.6626698","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6626698","url":null,"abstract":"This paper reports a novel micromachined integrated gyroscope and accelerometer based on gas thermal expansion. Using gas movement induced by alternating heat expansion in a micro chamber instead of a solid proof mass movement, a new type of micro gyroscope with a wide-range rotation detectability incorporating with 1-axis acceleration sensing is accomplished. Experiments demonstrate a good linearity of the rotation output in response to the angular rate from -3000 °/s to +3000 °/s and the acceleration output in response to the acceleration in the range of ±1g, which validate the simultaneous measurements of 1-axis angular rate and 1-axis acceleration in one chip. Meanwhile, the coupling effects among 3-axis rotations and accelerations are investigated experimentally to demonstrate low coupling effect via using thermal expansion flow.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"81 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123542346","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-06-16DOI: 10.1109/TRANSDUCERS.2013.6626733
W. Ruan, Y. Li, Z. Tan, Z. Y. Wang
We have developed a microcalorimeter with carbon nanotube adsorber (CNA) integrated on a suspended microcalorimeter for detection of trace energetic substance. The energetic substance vapors are adsorbed onto the CNA surfaces and are heated to micro deflagration using a heater integrated on the microcalorimeter. The released heat from micro deflagration raises the temperature of the microcalorimeter, which is detected by an integrated thermistor as an indicator of energetic substances. The huge surface areas of the CNA facilitate the adsorption to the energetic substances, and are helpful to achieving fast adsorption. The microcalorimeter is able to detect 2,4,6-trinitrotoluene (TNT) with a limit of detection of 2.6 pg and reduce the adsorption time as much as 60% compared without CNA.
{"title":"A microcalorimeter with in-situ synthesized nanotube adsorber for trace energetic substance detection","authors":"W. Ruan, Y. Li, Z. Tan, Z. Y. Wang","doi":"10.1109/TRANSDUCERS.2013.6626733","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6626733","url":null,"abstract":"We have developed a microcalorimeter with carbon nanotube adsorber (CNA) integrated on a suspended microcalorimeter for detection of trace energetic substance. The energetic substance vapors are adsorbed onto the CNA surfaces and are heated to micro deflagration using a heater integrated on the microcalorimeter. The released heat from micro deflagration raises the temperature of the microcalorimeter, which is detected by an integrated thermistor as an indicator of energetic substances. The huge surface areas of the CNA facilitate the adsorption to the energetic substances, and are helpful to achieving fast adsorption. The microcalorimeter is able to detect 2,4,6-trinitrotoluene (TNT) with a limit of detection of 2.6 pg and reduce the adsorption time as much as 60% compared without CNA.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"16 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125423001","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-06-16DOI: 10.1109/TRANSDUCERS.2013.6626851
Lingtao Wang, Chun-Peng Liao, M. Gross, E. S. Kim
This paper reports three-dimensional (3D) localized cytolysis of cell spheroids by Self Focusing Acoustic Transducers (SFAT) with 10 mm focal length. In previous studies, it has been demonstrated that an SFAT with 800 μm focal length caused localized cytolysis on monolayer cells. Since practical ultrasonic cancer therapeutics are usually performed in a 3D biological environment, an SFAT having a long penetration depth and focusing acoustic energy at 10 mm within an area of 160 μm in diameter has been designed and fabricated. Also, the acoustic intensity thresholds (AITs) of spheroids for cancer-specific cytolysis of malignant cells (breast cancer MCF-7 and prostate cancer 22RV1) are investigated. According to experiments with the spheroids in 3D Matrigel environment, the crosslinks between Matrigel and spheroids greatly increase AITs of 22RV1 and MCF-7 cell spheroids from 0.11 W/cm2 to 11.10 ~ 15.14 W/cm2. In addition, in both “unsolidified” (without crosslink) and solidified (with crosslink) Matrigel environments, spheroids of non-malignant cell line MCF-10A are not lysed even with two to three times higher acoustic intensities than the AITs of MCF-7. Therefore, the general trend associating a lower AIT with a more malignant still stands for MCF-7 and MCF-10A 3D spheroids in 3D Matrigel environment.
{"title":"Self focusing acoustic transducer (SFAT) with 10-mm focal length for cancer-specific localized cytolysis of 3D cell spheroids in 3D Matrigel","authors":"Lingtao Wang, Chun-Peng Liao, M. Gross, E. S. Kim","doi":"10.1109/TRANSDUCERS.2013.6626851","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6626851","url":null,"abstract":"This paper reports three-dimensional (3D) localized cytolysis of cell spheroids by Self Focusing Acoustic Transducers (SFAT) with 10 mm focal length. In previous studies, it has been demonstrated that an SFAT with 800 μm focal length caused localized cytolysis on monolayer cells. Since practical ultrasonic cancer therapeutics are usually performed in a 3D biological environment, an SFAT having a long penetration depth and focusing acoustic energy at 10 mm within an area of 160 μm in diameter has been designed and fabricated. Also, the acoustic intensity thresholds (AITs) of spheroids for cancer-specific cytolysis of malignant cells (breast cancer MCF-7 and prostate cancer 22RV1) are investigated. According to experiments with the spheroids in 3D Matrigel environment, the crosslinks between Matrigel and spheroids greatly increase AITs of 22RV1 and MCF-7 cell spheroids from 0.11 W/cm2 to 11.10 ~ 15.14 W/cm2. In addition, in both “unsolidified” (without crosslink) and solidified (with crosslink) Matrigel environments, spheroids of non-malignant cell line MCF-10A are not lysed even with two to three times higher acoustic intensities than the AITs of MCF-7. Therefore, the general trend associating a lower AIT with a more malignant still stands for MCF-7 and MCF-10A 3D spheroids in 3D Matrigel environment.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"2009 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125626281","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-06-16DOI: 10.1109/TRANSDUCERS.2013.6627215
J. Wang, C. Bian, J. Tong, J. Sun, Y. Li, H. Zhang, S. Xia
In this paper, a novel Biochemical Oxygen Demand (BOD) microsensor consisted of a biological reservoir and an electrochemical reservoir was fabricated by Micro Electro-Mechanical System (MEMS) technology. The consumption of Dissolved Oxygen (DO) is occurred in biological reservoir by respiration of the microbial, and the change of DO was detected in the electrochemical reservoir by the integrated microelectrode array (MEA). Because of the hemispherical diffusion mode of the MEA, the increase in current densities, the enhancement in mass transport and the increase in signal-to-noise ratios were displayed. The fabricated microsensor showed linear response to DO ranging from 0.5 mg/L to 7.2 mg/L and linear response to BOD ranging from 0 to 20 mg/L. The satisfied results showed that the miniaturized BOD microsensor can be used to detect BOD in the solution, and this method can be applied in other microsystem fabrication.
{"title":"A biological/electrochemical reservoirs integrated microsensor for the determination of biochemical oxygen demand","authors":"J. Wang, C. Bian, J. Tong, J. Sun, Y. Li, H. Zhang, S. Xia","doi":"10.1109/TRANSDUCERS.2013.6627215","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6627215","url":null,"abstract":"In this paper, a novel Biochemical Oxygen Demand (BOD) microsensor consisted of a biological reservoir and an electrochemical reservoir was fabricated by Micro Electro-Mechanical System (MEMS) technology. The consumption of Dissolved Oxygen (DO) is occurred in biological reservoir by respiration of the microbial, and the change of DO was detected in the electrochemical reservoir by the integrated microelectrode array (MEA). Because of the hemispherical diffusion mode of the MEA, the increase in current densities, the enhancement in mass transport and the increase in signal-to-noise ratios were displayed. The fabricated microsensor showed linear response to DO ranging from 0.5 mg/L to 7.2 mg/L and linear response to BOD ranging from 0 to 20 mg/L. The satisfied results showed that the miniaturized BOD microsensor can be used to detect BOD in the solution, and this method can be applied in other microsystem fabrication.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"79 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126739616","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-06-16DOI: 10.1109/TRANSDUCERS.2013.6627196
J. Sim, D. Kwon, J. Kim
We have demonstrated a novel and simple pH sensor using electrolysis process. The pH sensor is composed of actuating and sensing electrodes sets, micro-channel and micro-reservoir embedded PDMS part. The electrodes on silicon substrate are formed by a single-step lift-off, and the channel and reservoir are molded on PDMS. The volume of hydrogen bubbles generated by electrolysis is dependent on the pH value, and the bubbles push the pH buffer solution in the reservoir into the micro-channel. The pushed distance results in the current changes between the sensing electrodes. The experimental results show that the developed pH sensor gives enhanced sensing response at strong acid, and the sensing resolution can be enhanced as the electrolysis time increases.
{"title":"Development of pH sensor with enhanced sensitivity using volume of bubbles generated by electrolysis","authors":"J. Sim, D. Kwon, J. Kim","doi":"10.1109/TRANSDUCERS.2013.6627196","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6627196","url":null,"abstract":"We have demonstrated a novel and simple pH sensor using electrolysis process. The pH sensor is composed of actuating and sensing electrodes sets, micro-channel and micro-reservoir embedded PDMS part. The electrodes on silicon substrate are formed by a single-step lift-off, and the channel and reservoir are molded on PDMS. The volume of hydrogen bubbles generated by electrolysis is dependent on the pH value, and the bubbles push the pH buffer solution in the reservoir into the micro-channel. The pushed distance results in the current changes between the sensing electrodes. The experimental results show that the developed pH sensor gives enhanced sensing response at strong acid, and the sensing resolution can be enhanced as the electrolysis time increases.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"69 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115060820","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-06-16DOI: 10.1109/TRANSDUCERS.2013.6627276
S. Emaminejae, M. Javanmare, C. Gupta, R. Dutton, R. W. Davis, R. Howe
By increasing the strength of the negative dielectrophoresis (DEP) force, we demonstrate a significantly improved electrokinetic actuation and filtering microsystem. A pinhole-free, nanometer-scale, thin film oxide was deposited using atomic layer deposition, as a protective layer to protect the electrodes from corrosion, when applying high AC voltages (>20 Vpp) at the electrodes. The electrodes were capacitively coupled to the electrolyte buffer by the application of a high frequency AC voltage signal, thus avoiding electric field degradation and the consequent reduction in dielectrophoresis force due to the presence of the insulating oxide layer. In this work, we demonstrated the use of this DEP-enhanced device for two microfluidic applications. First, we demonstrate an on-chip platform for the depletion of cells and highly abundant serum proteins in blood, which is a prerequisite to assay low-abundance protein biomarkers. For the second application, we show 100% detachment of anti-IgG and IgG bound beads (which is on the same order of magnitude in strength as typical antibody-antigen interactions) from the surface, upon the application of the enhanced negative DEP force. This capability offers the possibility of performing a bead-based multiplexed assay against multiple antigen targets where in a single microfluidic channel various regions are immobilized with a different antibody, each targeting a different antigen.
{"title":"Applications of nanoNewton dielectrophoretic forces using atomic layer deposited oxides for microfluidic sample preparation and proteomics","authors":"S. Emaminejae, M. Javanmare, C. Gupta, R. Dutton, R. W. Davis, R. Howe","doi":"10.1109/TRANSDUCERS.2013.6627276","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6627276","url":null,"abstract":"By increasing the strength of the negative dielectrophoresis (DEP) force, we demonstrate a significantly improved electrokinetic actuation and filtering microsystem. A pinhole-free, nanometer-scale, thin film oxide was deposited using atomic layer deposition, as a protective layer to protect the electrodes from corrosion, when applying high AC voltages (>20 Vpp) at the electrodes. The electrodes were capacitively coupled to the electrolyte buffer by the application of a high frequency AC voltage signal, thus avoiding electric field degradation and the consequent reduction in dielectrophoresis force due to the presence of the insulating oxide layer. In this work, we demonstrated the use of this DEP-enhanced device for two microfluidic applications. First, we demonstrate an on-chip platform for the depletion of cells and highly abundant serum proteins in blood, which is a prerequisite to assay low-abundance protein biomarkers. For the second application, we show 100% detachment of anti-IgG and IgG bound beads (which is on the same order of magnitude in strength as typical antibody-antigen interactions) from the surface, upon the application of the enhanced negative DEP force. This capability offers the possibility of performing a bead-based multiplexed assay against multiple antigen targets where in a single microfluidic channel various regions are immobilized with a different antibody, each targeting a different antigen.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"13 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115105625","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-06-16DOI: 10.1109/TRANSDUCERS.2013.6627129
J. C. Wang, X. Xia, H. Zou, F. Song, Xinxin Li
With our developed MIS (Microholes Inter-etch & Sealing) micromachining process that is implemented only from the front-side of single-side polished (111) silicon wafers, a novel piezoresistive pressure sensing unit and another identically structured pressure-insensitive dummy unit are on-chip integrated compactly to eliminate unbalance factors induced temperature-drift by mutual compensation between the two units. In addition, the two units are both suspended from silicon substrate to suppress the packaging-stress. The high-performance pressure sensors are low-cost fabricated in a single (111)-wafer by repeatedly using the single-sided MIS process. The tested ultra-low TCO (temperature coefficient of offset) of 0.002%/°C·FS (-40°C to +125°C) well verifies the highly stable performance of the developed sensor structure.
{"title":"Piezoresistive pressure sensor with dual-unit configuration for on-chip self-compensation and suppression of temperature drift","authors":"J. C. Wang, X. Xia, H. Zou, F. Song, Xinxin Li","doi":"10.1109/TRANSDUCERS.2013.6627129","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6627129","url":null,"abstract":"With our developed MIS (Microholes Inter-etch & Sealing) micromachining process that is implemented only from the front-side of single-side polished (111) silicon wafers, a novel piezoresistive pressure sensing unit and another identically structured pressure-insensitive dummy unit are on-chip integrated compactly to eliminate unbalance factors induced temperature-drift by mutual compensation between the two units. In addition, the two units are both suspended from silicon substrate to suppress the packaging-stress. The high-performance pressure sensors are low-cost fabricated in a single (111)-wafer by repeatedly using the single-sided MIS process. The tested ultra-low TCO (temperature coefficient of offset) of 0.002%/°C·FS (-40°C to +125°C) well verifies the highly stable performance of the developed sensor structure.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"5 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115512039","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-06-16DOI: 10.1109/TRANSDUCERS.2013.6627137
Y. Yamanishi, S. Sameshima, H. Kuriki, S. Sakuma, F. Arai
We have successfully produced mono-dispersed micro-scale plasma bubble in microfluidic chip under atmospheric pressure, and which can be transported to the downstream of the chip. The plasma produced has characteristics of low temperature and which was generated by dielectric barrier discharge for biomedical applications. The discretized plasma phase in microfluidic chip provides high accuracy irradiation to the affected area with limited collateral damage area. This technique is closely tied to the therapeutic uses with high accuracy.
{"title":"Transportation of mono-dispersed micro-plasma bubble in microfluidic chip under atmospheric pressure","authors":"Y. Yamanishi, S. Sameshima, H. Kuriki, S. Sakuma, F. Arai","doi":"10.1109/TRANSDUCERS.2013.6627137","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6627137","url":null,"abstract":"We have successfully produced mono-dispersed micro-scale plasma bubble in microfluidic chip under atmospheric pressure, and which can be transported to the downstream of the chip. The plasma produced has characteristics of low temperature and which was generated by dielectric barrier discharge for biomedical applications. The discretized plasma phase in microfluidic chip provides high accuracy irradiation to the affected area with limited collateral damage area. This technique is closely tied to the therapeutic uses with high accuracy.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"9 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122447844","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)
京公网安备 11010802042870号
京ICP备2023020795号-1
扫码关注我们
求助内容：
应助结果提醒方式：