2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)最新文献
This paper presents an analysis and model verification of a silicon-on-insulator (SOI) micromechanical resonant magnetic field sensor. The sensing mechanism is based on the detection of resonant frequency shift due to a Lorentz force that is generated by the presence of a magnetic field. We analyze the effect of scaling on sensitivity, showing that sensitivity improves when the device is thinner. The measured sensitivity is 677ppm/T with an associated high quality factor of 37000 when the thickness of the device is 10μm. Calibration slopes of the sensitivity measured from devices of different thicknesses all agree well with our analytical model predictions. Based on the model, we envisage that sensitivity could be further improved to about 1.7%/T within fabrication technology limitations.
{"title":"Characterization and model validation of a micromechanical resonant magnetic field sensor","authors":"W. Zhang, J. E. Lee","doi":"10.1109/TRANSDUCERS.2013.6627153","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6627153","url":null,"abstract":"This paper presents an analysis and model verification of a silicon-on-insulator (SOI) micromechanical resonant magnetic field sensor. The sensing mechanism is based on the detection of resonant frequency shift due to a Lorentz force that is generated by the presence of a magnetic field. We analyze the effect of scaling on sensitivity, showing that sensitivity improves when the device is thinner. The measured sensitivity is 677ppm/T with an associated high quality factor of 37000 when the thickness of the device is 10μm. Calibration slopes of the sensitivity measured from devices of different thicknesses all agree well with our analytical model predictions. Based on the model, we envisage that sensitivity could be further improved to about 1.7%/T within fabrication technology limitations.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"45 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128419776","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
This paper describes a simple 3-mask fabrication process to construct a highly-reliable, large deflection (> 8 μm) and high frequency (> 90 kHz) electrostatic (ES) actuator. The ES actuator consists of a high residual stress dielectric diaphragm and an electroplated nickel electrode separated by an electrostatic air gap defined by sacrificial photoresist (PR). Actuators with filleted electrodes were created using solvent reflow of sacrificial photoresist. The process has moderately high yield of greater than 64%. The filleted electrode enables the actuator to be continuously actuated for more than 43 days without any diaphragm breakage or stiction.
{"title":"Highly-reliable electrostatic actuator using filleted electrode made with photoresist solvent reflow","authors":"S. Yee, R. L. Peterson, L. Bernal, K. Najafi","doi":"10.1109/TRANSDUCERS.2013.6627093","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6627093","url":null,"abstract":"This paper describes a simple 3-mask fabrication process to construct a highly-reliable, large deflection (> 8 μm) and high frequency (> 90 kHz) electrostatic (ES) actuator. The ES actuator consists of a high residual stress dielectric diaphragm and an electroplated nickel electrode separated by an electrostatic air gap defined by sacrificial photoresist (PR). Actuators with filleted electrodes were created using solvent reflow of sacrificial photoresist. The process has moderately high yield of greater than 64%. The filleted electrode enables the actuator to be continuously actuated for more than 43 days without any diaphragm breakage or stiction.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"69 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128584547","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
A new fabrication method for locally doped silicon resonators is demonstrated within an epitaxial polysilicon encapsulation process (consistent with the established low cost, high yield, high volume manufacturing at SiTime Corporation). Using a cavity etch followed by a selective epitaxial silicon refill with in situ degenerate doping, distinct locally doped regions on a 40-μm thick silicon device layer were obtained. Resonators from two different families were characterized for a couple of doping levels and show that temperature sensitivity can be suppressed. This capability removes one of the last remaining disadvantages of silicon as a resonator material, relative to quartz, and should directly enable improvements in the performance, power consumption, and cost of MEMS-based timing products.
{"title":"Localized, degenerately doped epitaxial silicon for temperature compensation of resonant MEMS systems","authors":"E. Ng, C. Ahn, Y. Yang, V. Hong, C. Chiang, E. Ahadi, M. Ward, T. Kenny","doi":"10.1109/TRANSDUCERS.2013.6627294","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6627294","url":null,"abstract":"A new fabrication method for locally doped silicon resonators is demonstrated within an epitaxial polysilicon encapsulation process (consistent with the established low cost, high yield, high volume manufacturing at SiTime Corporation). Using a cavity etch followed by a selective epitaxial silicon refill with in situ degenerate doping, distinct locally doped regions on a 40-μm thick silicon device layer were obtained. Resonators from two different families were characterized for a couple of doping levels and show that temperature sensitivity can be suppressed. This capability removes one of the last remaining disadvantages of silicon as a resonator material, relative to quartz, and should directly enable improvements in the performance, power consumption, and cost of MEMS-based timing products.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"14 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129640504","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
For brain analysis, a novel tube-shaped flexible neural probe characterize by its flexibility and stiffness with metal needle inserted into tube was fabricated and demonstrated. This probe consists of an ultra-thin polyimide tube with on outer diameter of 360μm and photofabricated recording electrodes using non-planar photofabrication technique. The probe was inserted into a rat's brain through the dura mater and successfully measured with optical stimulation.
{"title":"Development and evaluation of tube-shaped neural probe with working channel","authors":"Shunsuke Tamaki, T. Matsunaga, Toshinobu Kuki, Yoshihito Furusawa, Hajime Musiake, Y. Haga","doi":"10.1109/TRANSDUCERS.2013.6626904","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6626904","url":null,"abstract":"For brain analysis, a novel tube-shaped flexible neural probe characterize by its flexibility and stiffness with metal needle inserted into tube was fabricated and demonstrated. This probe consists of an ultra-thin polyimide tube with on outer diameter of 360μm and photofabricated recording electrodes using non-planar photofabrication technique. The probe was inserted into a rat's brain through the dura mater and successfully measured with optical stimulation.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"16 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129925205","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
A novel approach for filtration on a centrifugal microfluidic platform is presented for the first time. This approach is intended to concentrate bacteria from a large volume. In axial centrifugal filtration the filter is oriented perpendicular to the axis of rotation. This feature allows for integration of dead-end filtration while the filter cake is continuously removed from the filter by centrifugation. This prevents clogging of the filter. Furthermore, a continuous sample feed enables processing of large samples on one disk. Especially for analyzing drinking water large volumes have to be processed and solutions for rapid bacterial concentration are highly appreciated.
{"title":"Axial centrifugal filtration — A novel approach for rapid bacterial concentration from a large volume","authors":"Marc Karle, Johannes Wohrle, F. von Stetten, R. Zengerle, D. Mark","doi":"10.1109/TRANSDUCERS.2013.6626998","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6626998","url":null,"abstract":"A novel approach for filtration on a centrifugal microfluidic platform is presented for the first time. This approach is intended to concentrate bacteria from a large volume. In axial centrifugal filtration the filter is oriented perpendicular to the axis of rotation. This feature allows for integration of dead-end filtration while the filter cake is continuously removed from the filter by centrifugation. This prevents clogging of the filter. Furthermore, a continuous sample feed enables processing of large samples on one disk. Especially for analyzing drinking water large volumes have to be processed and solutions for rapid bacterial concentration are highly appreciated.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"590 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122361670","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
This paper reports a new type of soft PDMS/metal-film photo-mask which can be applied in contact photolithography with a resolution at sub-micrometer scale and a patterning area over a 4" wafer. This new type of photo-mask is made from a soft PDMS mold which contains a patterned metal film on the concave surface of its microstructures. The metal film can selectively block incident UV light, while the convex PDMS microstructures can guide the incident UV light to expose a PR layer. Due to its soft and compliant property, this new soft photo-mask can from intimate contact with a substrate and carry out UV exposure to form PR microstructures. It is particularly useful in patterning slightly curved substrates such as sapphire wafers, and therefore has a great potential on manufacturing patterned sapphire substrates (PSSs) in light-emitting diodes (LEDs). In this wok, both 2" and 4" PSSs with sub-micrometer feature sizes are successfully achieved. This new type of soft photo-mask and its contact photolithography can be easily implemented at a low cost for large-area, non-flat, and sub-micrometer scaled patterning, and therefore has a great potential in many applications in the future.
{"title":"A PDMS/metal-film photo-mask for large-area contact photolithograpy at sub-micrometr scale","authors":"Y. C. Lee, Y. Hsieh","doi":"10.1109/TRANSDUCERS.2013.6627181","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6627181","url":null,"abstract":"This paper reports a new type of soft PDMS/metal-film photo-mask which can be applied in contact photolithography with a resolution at sub-micrometer scale and a patterning area over a 4\" wafer. This new type of photo-mask is made from a soft PDMS mold which contains a patterned metal film on the concave surface of its microstructures. The metal film can selectively block incident UV light, while the convex PDMS microstructures can guide the incident UV light to expose a PR layer. Due to its soft and compliant property, this new soft photo-mask can from intimate contact with a substrate and carry out UV exposure to form PR microstructures. It is particularly useful in patterning slightly curved substrates such as sapphire wafers, and therefore has a great potential on manufacturing patterned sapphire substrates (PSSs) in light-emitting diodes (LEDs). In this wok, both 2\" and 4\" PSSs with sub-micrometer feature sizes are successfully achieved. This new type of soft photo-mask and its contact photolithography can be easily implemented at a low cost for large-area, non-flat, and sub-micrometer scaled patterning, and therefore has a great potential in many applications in the future.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130609028","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
This paper reports the design, fabrication procedure and functional tests of a continuous-flow hybrid technology 16-line evaporative concentrator. The unique and complete integration of the microscale silicon-glass evaporator with a mesoscale 3D printed polymer manifold platform is successfully demonstrated. The hardware platform of concentrator control unit is described. The continuous-flow concentrator chips were tested with respect to their evaporation capability. A very high water evaporation rates were achieved in evaporative concentrator. An evaporation rate of 10 μL/min, achieved in mild conditions, compatible with biological sample treatment (T≤37°C), allowed for 4-fold sample enrichment. High-throughput flow ability and 33-fold concentration factor achieved in temperature of 50°C facilitates the application of prototype for chemical sample enrichment.
{"title":"Hybrid technology (3D additive printing — silicon — glass) multiline evaporative concentrator for water quality monitoring system","authors":"W. Bula, Y. Takahata, K. Aritome, Y. Murakami, J. Gardeniers, R. Miyake","doi":"10.1109/TRANSDUCERS.2013.6626787","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6626787","url":null,"abstract":"This paper reports the design, fabrication procedure and functional tests of a continuous-flow hybrid technology 16-line evaporative concentrator. The unique and complete integration of the microscale silicon-glass evaporator with a mesoscale 3D printed polymer manifold platform is successfully demonstrated. The hardware platform of concentrator control unit is described. The continuous-flow concentrator chips were tested with respect to their evaporation capability. A very high water evaporation rates were achieved in evaporative concentrator. An evaporation rate of 10 μL/min, achieved in mild conditions, compatible with biological sample treatment (T≤37°C), allowed for 4-fold sample enrichment. High-throughput flow ability and 33-fold concentration factor achieved in temperature of 50°C facilitates the application of prototype for chemical sample enrichment.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130722802","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Microfabricated instruments featuring functional elements at the nanometre scale are ideally suited to interrogate and manipulate objects in the small domain. This ability would also be attractive and open new opportunities for industrial applications. However, robustness of the instrument and their currently low throughput are considered as almost insurmountable obstacles for a successful implementation in many commercial fields. Here, scientific instrumentation in harsh, demanding environments can play a pivotal role in validating the concept and demonstrating the reliability of the instrument. This is highlighted in two examples, one in medicine and one in planetary science.
{"title":"Interrogating and manipulating at the nanometre scale — From scientific instrumentation to industrial applications","authors":"U. Staufer, T. Akiyama, S. Gautsch, D. Parrat, N. D. de Rooij, R. Imer","doi":"10.1109/TRANSDUCERS.2013.6627062","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6627062","url":null,"abstract":"Microfabricated instruments featuring functional elements at the nanometre scale are ideally suited to interrogate and manipulate objects in the small domain. This ability would also be attractive and open new opportunities for industrial applications. However, robustness of the instrument and their currently low throughput are considered as almost insurmountable obstacles for a successful implementation in many commercial fields. Here, scientific instrumentation in harsh, demanding environments can play a pivotal role in validating the concept and demonstrating the reliability of the instrument. This is highlighted in two examples, one in medicine and one in planetary science.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132400784","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
In this paper, we report on the mechanical coupling of the stochastic resonance (SR) in 100 nm-thick Si cantilevered resonators. Nonlinear resonators exhibit SR response by applying noise, in which the resonator shows two vibration states. The SR responses of coupled resonators are investigated, and it is found that SR is affected by each other. Moreover, the nonlinearity of each resonator can be switched by mechanical interaction via a thin Si plate. In addition, the phase of the stochastic resonance is also related to the vibration amplitude and the nonlinearity.
{"title":"Synchronization of stochastic resonance using coupled nonlinear silicon resonators","authors":"Yosuke Mitsui, Y. Kawai, T. Ono","doi":"10.1109/TRANSDUCERS.2013.6627192","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6627192","url":null,"abstract":"In this paper, we report on the mechanical coupling of the stochastic resonance (SR) in 100 nm-thick Si cantilevered resonators. Nonlinear resonators exhibit SR response by applying noise, in which the resonator shows two vibration states. The SR responses of coupled resonators are investigated, and it is found that SR is affected by each other. Moreover, the nonlinearity of each resonator can be switched by mechanical interaction via a thin Si plate. In addition, the phase of the stochastic resonance is also related to the vibration amplitude and the nonlinearity.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"54 4 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132970900","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
This paper investigates the vibration dynamics of a closed-chain, cross-coupled architecture of MEMS resonators. The system presented here is electrostatically transduced and operates at 1.04 MHz. Curve veering of the eigenvalue loci is used to experimentally quantify the coupling spring constants. Numerical simulations of the motional resistance variation against induced perturbation are used to assess the robustness of the cross-coupled system as opposed to equivalent traditional open-ended linear one-dimensional coupling scheme. Results show improvements of as much as 32% in the motional resistance between the cross-coupled system and its one-dimensional counterpart.
{"title":"Investigating vibration dyanmics of cross-coupled MEMS resonators for reduced motional resistance","authors":"A. Erbes, P. Thiruvenkatanathan, J. Yan, A. Seshia","doi":"10.1109/TRANSDUCERS.2013.6627116","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6627116","url":null,"abstract":"This paper investigates the vibration dynamics of a closed-chain, cross-coupled architecture of MEMS resonators. The system presented here is electrostatically transduced and operates at 1.04 MHz. Curve veering of the eigenvalue loci is used to experimentally quantify the coupling spring constants. Numerical simulations of the motional resistance variation against induced perturbation are used to assess the robustness of the cross-coupled system as opposed to equivalent traditional open-ended linear one-dimensional coupling scheme. Results show improvements of as much as 32% in the motional resistance between the cross-coupled system and its one-dimensional counterpart.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"70 4 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132273074","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)
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