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Accumulation effects in laser ablation of metals with high-repetition-rate lasers 高重复率激光烧蚀金属中的累积效应
Pub Date : 2008-05-08 DOI: 10.1117/12.782937
G. Račiukaitis, M. Brikas, P. Gečys, M. Gedvilas
Effects related to the use of high repetition rate lasers in ablation of metals (aluminum, copper, stainless steel) and silicon were investigated. The multi-pulse irradiation with the laser beam significantly lowered the ablation threshold and led to a relative increase in the ablation rate at the higher repetition rate. The reason of alteration could be accumulation of structural defects on the metal surface formed by irradiation with a laser of the sub-threshold fluence. The mean volumetric ablation rate in laser milling experiments was a non-linear function of the pulse energy. Plasma shielding was the main limiting factor in processing efficiency of metals with the high power picosecond lasers. Increasing the repetition rate keeping the pulse energy below the plasma formation threshold is a way to increase the efficiency of material removal with nanosecond lasers. Thermal management of the specimen could be a problem at high repetition rates because of the laser energy wasted in the bulk. The reduction in the ablation threshold by irradiation with a series of laser pulses might be useful in application of the high- repetition-rate lasers with the low pulse energy.
研究了高重复频率激光烧蚀金属(铝、铜、不锈钢)和硅的影响。激光束的多脉冲辐照显著降低了烧蚀阈值,在较高的重复频率下导致烧蚀率的相对增加。这种变化的原因可能是在亚阈值激光照射下形成的金属表面结构缺陷的积累。激光铣削实验中平均体积烧蚀率是脉冲能量的非线性函数。等离子体屏蔽是制约高功率皮秒激光加工金属效率的主要因素。提高重复频率,保持脉冲能量低于等离子体形成阈值是提高纳秒激光材料去除效率的一种方法。样品的热管理可能是一个问题,在高重复率,因为激光能量浪费在大块。用一系列激光脉冲辐照降低烧蚀阈值,对低脉冲能量高重复率激光器的应用有一定的指导意义。
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引用次数: 114
Diode pumped alkali lasers (DPALs): an overview 二极管抽运碱激光器(DPALs):概述
Pub Date : 2008-05-08 DOI: 10.1117/12.782466
W. Krupke
The concept of power-scalable, high beam-quality diode pumped alkali lasers was introduced in 2003 [Krupke, US Patent No. 6,643,311; Opt. Letters, 28, 2336 (2003)]. Since then several laboratory DPAL devices have been reported on, confirming many of the spectroscopic, kinetic, and laser characteristics projected from literature data. This talk will present an overview of the DPAL concept, summarize key relevant properties of the cesium, rubidium, and potassium alkali vapor gain media so-far examined, outline power scaling considerations, and highlight results of published DPAL laboratory experiments.
功率可扩展的高光束质量二极管抽运碱激光器的概念于2003年提出[Krupke,美国专利号6,643,311;光学通讯,28,2336(2003)]。从那时起,几个实验室DPAL装置被报道,证实了许多光谱、动力学和激光特性从文献数据预测。本讲座将概述DPAL的概念,总结目前为止所研究的铯、铷和钾碱蒸汽增益介质的关键相关特性,概述功率缩放的考虑,并重点介绍已发表的DPAL实验室实验的结果。
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引用次数: 35
Materials for laser propulsion: "liquid" polymers 激光推进材料:“液体”聚合物
Pub Date : 2008-05-08 DOI: 10.1117/12.782867
T. Lippert, L. Urech, R. Fardel, M. Nagel, C. Phipps, A. Wokaun
The application of energetic polymers has resulted in an increased thrust in micro laser plasma thrusters compared to standard polymers. In this study we tested a novel concept for micro laser plasma thrusters, i.e. the application of liquid polymeric fuels, by using polymer solutions of the energetic materials with different viscosity. Shadowgraphy experiments suggest that for higher viscosity solutions ablation without splashing is possible, indicating that liquids are applicable as fuels in laser plasma thrusters. First thrust measurements on a viscous polymer solution confirmed this by yielding a specific impulse similar to a solid material.
与标准聚合物相比,高能聚合物的应用使微激光等离子体推力器的推力增加。在本研究中,我们通过使用不同粘度的含能材料的聚合物溶液,测试了微激光等离子体推进器的一个新概念,即液体聚合物燃料的应用。阴影实验表明,对于高粘度溶液,不飞溅的烧蚀是可能的,这表明液体可以用作激光等离子体推进器的燃料。第一次对粘性聚合物溶液的推力测量通过产生类似于固体材料的比冲量证实了这一点。
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引用次数: 11
Reflection Fourier transform infrared spectroscopy of polymer targets for CO2 laser ablation CO2激光烧蚀聚合物靶的反射傅里叶变换红外光谱研究
Pub Date : 2008-05-08 DOI: 10.1117/12.782436
J. Sinko, C. A. Schlecht
One of the many challenges faced by laser propulsion is the long-term performance of the propellant. The chemical changes that can take place at the propellant surface during ablation can greatly modify the in-flight performance characteristics. For stable regimes for propulsion, such chemical action should be minimized. A TEA (Transverse Electrical discharge in gas at Atmospheric pressure) CO2 laser of 10.6 μm wavelength, 300 ns pulse length, and up to 20 J pulse energy was used to ablate several types of polymer targets with a range of observable chemical changes at the surface following ablation. After 10 subsequent shots, the target samples were measured using Attenuated Total Reflectance Fourier Transform Infrared (ATR FTIR) spectroscopy then compared to unablated samples of the same polymer. An analysis of the results was made with an emphasis on laser propulsion applications, with a comparison of the propulsion performance of the targets, specifically regarding the ablated mass per spot area (Δma). Chemical reaction pathways for combustion and vaporization are discussed on the basis of the differences observed in the FTIR spectra, and the consequences for using such materials as laser propulsion propellants are explored.
激光推进面临的诸多挑战之一是推进剂的长期性能。在烧蚀过程中推进剂表面发生的化学变化可以极大地改变飞行中的性能特征。为了稳定的推进机制,这种化学作用应该最小化。利用波长10.6 μm、脉冲长度300 ns、脉冲能量高达20 J的TEA (Atmospheric pressure横放电气体)CO2激光器对几种聚合物靶材进行了烧蚀,烧蚀后表面发生了一系列可观察到的化学变化。在随后的10次射击后,使用衰减全反射傅里叶变换红外(ATR)光谱对目标样品进行测量,然后与未衰减的相同聚合物样品进行比较。对结果进行了分析,重点是激光推进应用,比较了目标的推进性能,特别是关于每个光斑面积的烧蚀质量(Δma)。根据观察到的红外光谱差异,讨论了燃烧和汽化的化学反应途径,并探讨了使用激光推进推进剂等材料的后果。
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引用次数: 1
Molecular dynamics simulation study of the ejection of polymer molecules and generation of molecular balloons in matrix-assisted pulsed laser evaporation 基质辅助脉冲激光蒸发过程中聚合物分子喷射和分子气球生成的分子动力学模拟研究
Pub Date : 2008-05-08 DOI: 10.1117/12.782524
L. Zhigilei, E. Leveugle, A. Sellinger, J. Fitz-Gerald
Coarse-grained molecular dynamics simulations are performed to investigate the origins of the surface features observed in films deposited by the Matrix-Assisted Pulsed Laser Evaporation (MAPLE) technique. The simulations of MAPLE are performed for polymer concentrations up to 6 wt.% and a broad range of laser fluences. The polymer molecules are found to be ejected only in the ablation regime and are always incorporated into polymer-matrix clusters/droplets generated in the process of the explosive disintegration of the overheated matrix. The entanglement of the polymer molecules facilitates the formation of intricate elongated viscous droplets that can be related to the complex morphologies observed in polymer films deposited by MAPLE. The effect of dynamic molecular redistribution in the ejected matrix-polymer droplets, leading to the generation of transient "molecular balloons" in which polymer-rich surface layers enclose the volatile matrix material, has been identified as the mechanism responsible for the formation of characteristic wrinkled polymer structures observed experimentally in films deposited by MAPLE.
采用粗粒度的分子动力学模拟研究了基质辅助脉冲激光蒸发(MAPLE)技术沉积薄膜表面特征的起源。MAPLE的模拟在聚合物浓度高达6 wt.%和广泛的激光影响范围内进行。聚合物分子只在烧蚀状态下被喷射出来,并且总是被纳入过热基质爆炸崩解过程中产生的聚合物基质簇/液滴中。聚合物分子的纠缠促进了复杂的细长粘性液滴的形成,这可能与MAPLE沉积的聚合物薄膜中观察到的复杂形态有关。在抛射的基质-聚合物液滴中,动态分子重分配的作用导致了瞬态“分子气球”的产生,在这种“分子气球”中,富含聚合物的表面层包裹着挥发性的基质材料,这被确定为MAPLE沉积薄膜中实验观察到的特征褶皱聚合物结构形成的机制。
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引用次数: 3
Magnetic field for efficient exhaustion of CO2 laser-produced Sn plasma in EUV light source 在极紫外光源中有效耗尽CO2激光产生的锡等离子体的磁场
Pub Date : 2008-05-08 DOI: 10.1117/12.782475
Y. Ueno, G. Soumagne, T. Suganuma, T. Yabu, M. Moriya, H. Komori, T. Abe, A. Endo, A. Sumitani
We are developing a laser produced plasma light source for high volume manufacturing (HVM) EUV lithography. The light source is based on a high power, high repetition rate CO2 laser (10.6μm) system, a tin (Sn) target and a magnetic ion guiding for Sn treatment. We evaluated the characteristics of Sn debris generated by a CO2 laser produced plasma. Experiments were performed with bulk Sn-plate targets and Mo/Si multilayer mirror samples were used for debris analysis. We observed very thin and uniform Sn layers of nano/sub-nano size debris particles. The layer deposition rate at 120mm from the plasma is, without magnetic field, about 30nm per million shots. The fast Sn ion flux was measured with Faraday cups and the signal decreased by more than 3 orders of magnitude on application of a magnetic field of 1T. The Sn deposition on the Mo/Si multilayer mirror decreased in small magnetic field space by a factor of 5. In a large magnetic field space, the effectiveness of the magnetic guiding of Sn ions is examined by monitoring the fast Sn ions. The ion flux from a Sn plasma was confined along the magnetic axis with a maximum magnetic field of 2T.
我们正在开发一种用于大批量制造(HVM) EUV光刻的激光等离子体光源。该光源基于高功率、高重复率CO2激光(10.6μm)系统、锡(Sn)靶和用于锡处理的磁离子引导。我们评估了由CO2激光产生的等离子体产生的锡碎片的特性。实验采用大块锡板靶,Mo/Si多层镜样品进行碎片分析。我们观察到非常薄且均匀的纳米/亚纳米大小的Sn碎片颗粒层。在没有磁场的情况下,距离等离子体120mm处的层沉积速率约为每百万次30nm。用法拉第杯测量了快速锡离子通量,施加1T磁场时,信号降低了3个数量级以上。在小磁场空间中,Mo/Si多层反射镜上的锡沉积减少了5倍。在较大的磁场空间中,通过对快速Sn离子的监测,考察了Sn离子磁导的有效性。锡等离子体的离子通量沿磁轴方向受限,最大磁场为2T。
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引用次数: 3
Latest developments toward the demonstration of a KW-class EOIL laser 千瓦级EOIL激光器演示的最新进展
Pub Date : 2008-05-08 DOI: 10.1117/12.782656
A. E. Hill
The electric oxygen iodine laser (EOIL) offers a vastly more practical, implementable, and safer alternative to its predecessor, the chemical oxygen iodine laser (COIL), particularly for airborne or other mobile military applications. Despite its promise and after 25 years effort, numerous laboratories around the world have not succeeded in providing the known basic physical requirements needed to electrically convert O2 into O2(a1Δ) with the fractional yields and efficiencies needed to make a practical laser. Hence, as of this date, the world record power generated from an EOIL device is only 6.5 watts. In this paper, a 30% conversion from O2 into O2(a1Δ) operating at substantial oxygen mass flow rates (0.090 moles O2/sec at 50 torr) and 40% electrical efficiency is reported. The O2(a1Δ) flow stream being produced carries 2400 watts. Gain measurements are currently in progress, to be followed shortly by power extraction. Current conditions imply that initial power extraction could push beyond 1 KW. Efforts to date have failed to generate substantial laser power because critical criteria have not been met. In order to achieve good O2(a1Δ) fractional yield, it is normally mandatory to impart on the order of 100 KJ/mole O2 while efficiently removing the waste heat energy from the generator so that less than a few hundred degrees Kelvin rise occurs due to gas heating. The generator must be excited by an electric field on the order of 10 Td. This is far below glow potential; hence, a fully externally sustained plasma generation technique is required. Ionization is supplied by means of applying short (tens of nanosecond) pulses to the O2(a1Δ) generator at 50,000 PPS, which are on the order of ten times breakdown potential. This enables a quasi-steady adjustable DC current to flow through the generator, being conducted by application of a DC, 10 to 14 Td pump E-field. This field is independently tunable. The result is that up to 180 KJ/mole O2 gets imparted to the gas by means of the 6 KW sub-breakdown pump field, while another 2700 watts is applied to the controlled avalanche field. The generator consists of 24 each, 1 cm diameter tubes that are submerged in rapidly circulating cold fluorinert. Heat is efficiently removed so that that the gas temperature, initially 273°K, raises only by 125°K, as evidenced by spectrographic analysis of the fine structure of O2(b1Σ) at lower pressure. Since all necessary conditions have been met, a 30% conversion rate of O2 to O2(a1Δ) has been achieved. Fortuitously, neither excited O atom production nor O2(b1Σ) production is visible in the spectra of the higher pressure, best yield runs. Essentially all other spectral lines are dwarfed in comparison the O2(a1Δ) line. Energy normally partitioned to O2(b1Σ) and apparently O atoms now feeds into O2(a1Δ) directly, enabling electrical efficiency to exceed 40%. As a continuation of this work, an I2 disassociating mixing section - then subsequently a 20 cm transverse M = 2.5
电氧碘激光器(EOIL)提供了一个更实用,可实施,更安全的替代其前身,化学氧碘激光器(COIL),特别是机载或其他移动军事应用。尽管前景光明,经过25年的努力,世界各地的许多实验室还没有成功地提供已知的基本物理要求,以电将O2转化为O2(a1Δ),以及制造实用激光器所需的小产量和效率。因此,到目前为止,EOIL设备产生的世界纪录功率仅为6.5瓦。在本文中,从O2到O2的30%的转化率(a1Δ)在相当大的氧气质量流率(0.090摩尔O2/秒,50托)和40%的电效率的报道。产生的O2(a1Δ)流携带2400瓦。目前正在进行增益测量,稍后将进行功率提取。目前的条件意味着最初的功率提取可以超过1千瓦。由于没有达到关键标准,迄今为止的努力未能产生大量的激光功率。为了获得良好的O2(a1Δ)分数产率,通常必须给予100 KJ/mol的O2,同时有效地从发生器中去除废热能量,以便由于气体加热而产生的温度上升不到几百度。发电机必须用10td量级的电场激励。这远低于发光电位;因此,需要一种完全外部持续的等离子体产生技术。电离是通过以50,000 PPS的速度向O2(a1Δ)发生器施加短脉冲(数十纳秒)来提供的,这是击穿电位的十倍。这使得准稳定的可调直流电流流过发电机,通过应用直流,10至14 Td泵浦e场。该字段可独立调节。结果表明,通过6kw的子击穿泵场,高达180 KJ/mol的O2被传递到气体中,而另外2700瓦的O2被施加到受控雪崩场中。发生器由24根直径为1厘米的管子组成,这些管子浸泡在快速循环的冷氟惰性液体中。通过对O2(b1Σ)在较低压力下精细结构的光谱分析可以证明,热量被有效地除去,使得气体温度从最初的273°K仅升高125°K。由于所有必要条件都已满足,O2到O2的转化率达到30% (a1Δ)。幸运的是,无论是激发的O原子的产生还是O2(b1Σ)的产生,在更高压力、最佳产率运行的光谱中都是不可见的。基本上,与O2(a1Δ)谱线相比,所有其他谱线都相形见绌。通常分配给O2的能量(b1Σ)和明显的O原子现在直接进入O2(a1Δ),使电效率超过40%。作为这项工作的延续,一个I2解缔合混合部分-然后是一个20厘米的横向M = 2.5激光通道-已经耦合到O2(a1Δ)发生器。滴定NO、NO2等对O原子和O3原子的清除作用目前正在研究中。激光功率提取将在优化所有参数以获得最大增益后开始。由于机械设备出现重大故障,电力提取被推迟;然而,这个装置现在已经完全恢复了。此外,还发现了高氧(a1Δ)浓度特有的几种电位放电不稳定性模式。本文将讨论这些现象及其预防方法。
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引用次数: 1
Dynamics of femtosecond laser-induced periodic surface structures on metals 飞秒激光诱导金属表面周期性结构的动力学
Pub Date : 2008-05-08 DOI: 10.1117/12.782743
Jincheng Wang, Chunlei Guo
We perform a comparison study of periodic structures on the surfaces of three different noble metals, Cu, Ag, and Au, following femtosecond laser radiation. Under identical experimental conditions, laser-induced surface patterns show distinctly different level of morphological clearness on the three different metals. Simply calculations based on metal melting fail to explain the pattern differences. We show that our observation result from the competition of two ultrafast processes, electron-phonon energy coupling and hot electron diffusion, following femtosecond laser heating of metals.
我们对三种不同的贵金属,Cu, Ag和Au,在飞秒激光辐射下表面的周期结构进行了比较研究。在相同的实验条件下,激光诱导的表面图案在三种不同的金属上表现出明显不同的形态清晰度。基于金属熔化的简单计算无法解释模式差异。我们证明了飞秒激光加热金属后,电子-声子能量耦合和热电子扩散两个超快过程的竞争结果。
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引用次数: 1
Evaluation of materials for on-board laser diagnostics 机载激光诊断材料的评估
Pub Date : 2008-05-08 DOI: 10.1117/12.782754
J. Luke, David Thomas, Jay S. Lewis, C. Phipps
The AEgis Technologies Group and RTI International are developing microsensors for High Energy Laser (HEL) diagnostic applications. The conformal sensor array will measure the irradiance profile of an incident laser beam, and concomitant rise in surface temperature of the target. The open mesh architecture allows 90% of the beam to impact the surface. A critical part of this program is developing a protective coating that ensures sensor survivability at high irradiance levels for operational lifetimes on the order of 10 seconds. The protective coating must transmit a measurable amount of light to the irradiance sensor. We have conducted experiments to evaluate candidate heat shield materials. In the first round of experiments, a 10kW CO2 laser was used to irradiate pure materials, including metals and carbon foils. Although many of the metal foils were perforated by the laser, no significant amount of material was ablated away. In fact, most of the test samples gained mass, presumably due to oxidation. Analysis of high speed video shows that once the metal melted, surface tension caused the molten metal to coalesce into droplets around the rim of the hole. The second and third rounds of testing, conducted with a 3kW, 1.07μm fiber laser, included samples of highly reflective metals and ceramics, standard plasma-sprayed coatings, and multilayer stacks. We have also measured the performance of temperature sensors and irradiance sensors fabricated from nanoparticle solutions deposited by advanced printing technology and have completed a preliminary investigation of high temperature adhesives.
AEgis技术集团和RTI国际公司正在开发用于高能激光(HEL)诊断应用的微传感器。共形传感器阵列将测量入射激光束的辐照度分布,以及伴随的目标表面温度上升。开放的网格结构允许90%的光束撞击表面。该项目的一个关键部分是开发一种保护涂层,以确保传感器在高辐照水平下的生存能力,使用寿命约为10秒。防护涂层必须向辐照度传感器传输可测量量的光。我们已经进行了实验来评估候选的隔热材料。在第一轮实验中,使用10kW的CO2激光器照射纯材料,包括金属和碳箔。虽然许多金属箔被激光穿孔,但没有大量的材料被烧蚀掉。事实上,大多数测试样品都增加了质量,可能是由于氧化。高速视频分析显示,一旦金属熔化,表面张力导致熔融金属在孔边缘周围凝聚成液滴。第二轮和第三轮测试使用3kW, 1.07μm光纤激光器进行,包括高反射金属和陶瓷样品,标准等离子喷涂涂层和多层堆叠。我们还测量了由先进印刷技术沉积的纳米颗粒溶液制成的温度传感器和辐照度传感器的性能,并完成了高温粘合剂的初步研究。
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引用次数: 1
High speed high precision ablation from ms to fs 从毫秒到秒的高速高精度烧蚀
Pub Date : 2008-05-08 DOI: 10.1117/12.785225
R. Poprawe, A. Gillner, D. Hoffmann, J. Gottmann, Welf Wawers, W. Schulz
In recent years new generations of precision lasers have been demonstrated and are increasingly available on an industrial level. For example high beam quality and diffraction limited Fiber lasers, Slab lasers, Disk lasers and still Rod lasers are used very successfully. This paper focuses on - ns and μs drilling of shaped holes by helical drilling1 - drilling of extreme aspect ratios in dielectrics/glass by ns-slab lasers2 - nm-size periodic structuring of polymers by interferometric approaches - ablation by ns- and ps-pulses for metal moulds - generation of waveguide structures in glass by fs-pulses.3 On the laboratory scale a next generation of diffraction limited short pulse lasers is at the horizon.4 In particular, ps-lasers at multi-hundred watts of average power with repetition rates of several MHz,2 fs-lasers at 400W2 average power and green, frequency doubled lasers at 200W are under construction. At the short end of pulses, attosecond lasers have been demonstrated and themselves shall open a new domain of interaction of light and matter5.
近年来,新一代的精密激光器已经被证明,并越来越多地在工业水平上可用。例如,高光束质量和衍射限制光纤激光器,平板激光器,磁盘激光器和仍然棒激光器使用非常成功。本文的研究重点是:螺旋钻孔- ns和μs的形孔钻孔1 - ns平板激光在电介质/玻璃中的极端纵横比钻孔2 - ns平板激光干涉法在聚合物的纳米级周期性结构研究2 - ns和ps脉冲在金属模具中的烧蚀1 - fs脉冲在玻璃中产生波导结构在实验室规模上,新一代限制衍射的短脉冲激光器正处于水平阶段特别是,平均功率为几百瓦、重复频率为几兆赫兹的ps激光器、平均功率为400W2的ps激光器和200W的绿色倍频激光器正在建设中。在脉冲的短端,阿秒激光器已经被证明,它将打开光与物质相互作用的一个新领域。
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引用次数: 1
期刊
High-Power Laser Ablation
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