Pub Date : 2012-05-21DOI: 10.1109/FCS.2012.6243672
P. Dubé, A. Madej, J. Bernard, Z. Zhou
A new strontium ion trap of the endcap design was built recently at the National Research Council of Canada for better control of the micromotion shifts. The uncertainty caused by these shifts has been reduced by more than four orders of magnitude compared to the original NRC trap, down to a level of ≈ 10-18. In this paper we discuss the evaluation of micromotion shifts and of several other sources of importance to optical frequency standards based on single ions. The total fractional frequency uncertainty of the new strontium ion trap system is estimated to be ≈ 2 × 10-17, limited by the blackbody radiation shift. A preliminary measurement of the clock transition frequency with a fractional uncertainty of 2×10-15, limited by the accuracy of the maser reference, is also presented.
{"title":"Systematic shift evaluation of the NRC 88Sr+ single-ion optical frequency standard to a few parts in 1017","authors":"P. Dubé, A. Madej, J. Bernard, Z. Zhou","doi":"10.1109/FCS.2012.6243672","DOIUrl":"https://doi.org/10.1109/FCS.2012.6243672","url":null,"abstract":"A new strontium ion trap of the endcap design was built recently at the National Research Council of Canada for better control of the micromotion shifts. The uncertainty caused by these shifts has been reduced by more than four orders of magnitude compared to the original NRC trap, down to a level of ≈ 10-18. In this paper we discuss the evaluation of micromotion shifts and of several other sources of importance to optical frequency standards based on single ions. The total fractional frequency uncertainty of the new strontium ion trap system is estimated to be ≈ 2 × 10-17, limited by the blackbody radiation shift. A preliminary measurement of the clock transition frequency with a fractional uncertainty of 2×10-15, limited by the accuracy of the maser reference, is also presented.","PeriodicalId":256670,"journal":{"name":"2012 IEEE International Frequency Control Symposium Proceedings","volume":"11 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-05-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132754500","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-05-21DOI: 10.1109/FCS.2012.6243725
D. Y. Tucker, L. Solie, J. Hines
Passive wireless sensors such as surface acoustic wave (SAW) devices are advantageous for applications such as heavy equipment monitoring and process control where harsh environments, moving parts, or limited battery lifetime preclude the use of wired or battery powered wireless sensors. In this work, Barker coded SAW delay lines with desirable autocorrelation properties were developed using time and frequency diversity to enhance the number of devices that may be accessed simultaneously. SAW device responses were modeled in MatLab and response correlations were simulated. Design parameters were selected to allow 100 sensors to be simultaneously operable in a single wireless system, and simulated and experimental results are presented. Results indicate that the combination of time diversity and frequency diversity techniques can significantly increase the number of individually identifiable passive sensors achievable over currently available systems.
{"title":"Enhancement of SAW multi-sensor systems using a combination of time and frequency diversity techniques","authors":"D. Y. Tucker, L. Solie, J. Hines","doi":"10.1109/FCS.2012.6243725","DOIUrl":"https://doi.org/10.1109/FCS.2012.6243725","url":null,"abstract":"Passive wireless sensors such as surface acoustic wave (SAW) devices are advantageous for applications such as heavy equipment monitoring and process control where harsh environments, moving parts, or limited battery lifetime preclude the use of wired or battery powered wireless sensors. In this work, Barker coded SAW delay lines with desirable autocorrelation properties were developed using time and frequency diversity to enhance the number of devices that may be accessed simultaneously. SAW device responses were modeled in MatLab and response correlations were simulated. Design parameters were selected to allow 100 sensors to be simultaneously operable in a single wireless system, and simulated and experimental results are presented. Results indicate that the combination of time diversity and frequency diversity techniques can significantly increase the number of individually identifiable passive sensors achievable over currently available systems.","PeriodicalId":256670,"journal":{"name":"2012 IEEE International Frequency Control Symposium Proceedings","volume":"43 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-05-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132776312","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-05-21DOI: 10.1109/FCS.2012.6243632
A. Rey, M. Martin, M. Swallows, M. Bishof, C. Benko, S. Blatt, J. von Stecher, A. Gorshkov, J. Ye
Advances in ultra-stable lasers now permit sub-Hz resolution of optical atomic transitions. At this level, weak interactions by any ordinary scale can in fact dominate the dynamics of the interrogated atoms, even for spin polarized fermions at ultralow temperatures. Contrary to results obtained in radio frequency spectroscopy of alkali fermionic atoms, optical spectroscopy of 87 Sr and 171 Yb has revealed density dependent frequency shifts of the 1 S0 - 3 P 0 “clock” transition. Understanding interactions in these systems is necessary to improve their accuracy and stability. Moreover, such an understanding will enable optical lattice clock systems to serve as quantum simulators for open, driven, strongly-interacting quantum systems at the mesoscopic scale. In this talk we presented our progress towards a comprehensive evaluation and understanding of the interactions present during spectroscopy of the 87 Sr clock transition under various operating conditions. Our studies indicate that a mean-field solution of a master equation is sufficient to capture the many-body dynamics of alkaline earth atom clocks. Entering the regime in which a treatment beyond mean-field is required for a proper description of the clock dynamics is under immediate experimental reach.
{"title":"Probing many-body spin interactions with an optical lattice clock","authors":"A. Rey, M. Martin, M. Swallows, M. Bishof, C. Benko, S. Blatt, J. von Stecher, A. Gorshkov, J. Ye","doi":"10.1109/FCS.2012.6243632","DOIUrl":"https://doi.org/10.1109/FCS.2012.6243632","url":null,"abstract":"Advances in ultra-stable lasers now permit sub-Hz resolution of optical atomic transitions. At this level, weak interactions by any ordinary scale can in fact dominate the dynamics of the interrogated atoms, even for spin polarized fermions at ultralow temperatures. Contrary to results obtained in radio frequency spectroscopy of alkali fermionic atoms, optical spectroscopy of 87 Sr and 171 Yb has revealed density dependent frequency shifts of the 1 S0 - 3 P 0 “clock” transition. Understanding interactions in these systems is necessary to improve their accuracy and stability. Moreover, such an understanding will enable optical lattice clock systems to serve as quantum simulators for open, driven, strongly-interacting quantum systems at the mesoscopic scale. In this talk we presented our progress towards a comprehensive evaluation and understanding of the interactions present during spectroscopy of the 87 Sr clock transition under various operating conditions. Our studies indicate that a mean-field solution of a master equation is sufficient to capture the many-body dynamics of alkaline earth atom clocks. Entering the regime in which a treatment beyond mean-field is required for a proper description of the clock dynamics is under immediate experimental reach.","PeriodicalId":256670,"journal":{"name":"2012 IEEE International Frequency Control Symposium Proceedings","volume":"153 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-05-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132814096","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-05-21DOI: 10.1109/FCS.2012.6243619
C. Calosso, Y. Gruson, E. Rubiola
Their article reports on the measurement of phase noise and amplitude noise of direct digital synthesizers (DDS), ultimately intended for precision time and frequency applications. The DDS noise Sφ(f) tends to scale down as 1/ν02, until the noise hits the limit due to the output stage. The spurs, however disturbing in general, sink power from the white noise. Voltage noise can be more critical in the digital power supply than in the analog supply. Temperature fluctuations are an issue at 10-3 ... 1 Hz Fourier frequency. Passive stabilization (thermal mass) proves to be useful. Other paramours affect the phase noise, like the clock frequency and power. The amplitude 1/f noise is of the order of -110 dB(V2/V2)/Hz in some reference (typical) conditions. Owing to the page and file size limitations, only a small part of the available data can be published here. An extended and free version of this article is available on http://rubiola.org and on http://arxiv.org.
{"title":"Phase noise and amplitude noise in DDS","authors":"C. Calosso, Y. Gruson, E. Rubiola","doi":"10.1109/FCS.2012.6243619","DOIUrl":"https://doi.org/10.1109/FCS.2012.6243619","url":null,"abstract":"Their article reports on the measurement of phase noise and amplitude noise of direct digital synthesizers (DDS), ultimately intended for precision time and frequency applications. The DDS noise Sφ(f) tends to scale down as 1/ν02, until the noise hits the limit due to the output stage. The spurs, however disturbing in general, sink power from the white noise. Voltage noise can be more critical in the digital power supply than in the analog supply. Temperature fluctuations are an issue at 10-3 ... 1 Hz Fourier frequency. Passive stabilization (thermal mass) proves to be useful. Other paramours affect the phase noise, like the clock frequency and power. The amplitude 1/f noise is of the order of -110 dB(V2/V2)/Hz in some reference (typical) conditions. Owing to the page and file size limitations, only a small part of the available data can be published here. An extended and free version of this article is available on http://rubiola.org and on http://arxiv.org.","PeriodicalId":256670,"journal":{"name":"2012 IEEE International Frequency Control Symposium Proceedings","volume":"142 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-05-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134159944","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-05-21DOI: 10.1109/FCS.2012.6243737
S. J. Mihalko, W. Heban, W. Hunt, A. Wathen
Thin film bulk acoustic wave (BAW) resonators have been the subject of research for many years due to their uses in wireless communications and chemical sensing. Both the steady-state and dynamic temperature characteristics of quartz resonators, such as those used in biosensing, have been studied in the past. Information pertaining to the steady-state temperature characteristics of ZnO BAW resonators is available in the literature, but thermal transient characteristics do not appear to be the subject of as much investigation. In this paper, we demonstrate the existence of transient thermal effects in ZnO solidly-mounted resonators (SMR). Resonators are exposed to a gradual and rapid temperature increase and the changes in five resonator parameters are compared. All five parameters are shown to vary linearly with temperature when exposed to a gradual temperature increase and vary in a parabolic manner when exposed to a rapid temperature increase, indicating the existence of thermal transient effects in these devices.
{"title":"Thermal transient characteristics of zinc oxide solidly mounted resonators","authors":"S. J. Mihalko, W. Heban, W. Hunt, A. Wathen","doi":"10.1109/FCS.2012.6243737","DOIUrl":"https://doi.org/10.1109/FCS.2012.6243737","url":null,"abstract":"Thin film bulk acoustic wave (BAW) resonators have been the subject of research for many years due to their uses in wireless communications and chemical sensing. Both the steady-state and dynamic temperature characteristics of quartz resonators, such as those used in biosensing, have been studied in the past. Information pertaining to the steady-state temperature characteristics of ZnO BAW resonators is available in the literature, but thermal transient characteristics do not appear to be the subject of as much investigation. In this paper, we demonstrate the existence of transient thermal effects in ZnO solidly-mounted resonators (SMR). Resonators are exposed to a gradual and rapid temperature increase and the changes in five resonator parameters are compared. All five parameters are shown to vary linearly with temperature when exposed to a gradual temperature increase and vary in a parabolic manner when exposed to a rapid temperature increase, indicating the existence of thermal transient effects in these devices.","PeriodicalId":256670,"journal":{"name":"2012 IEEE International Frequency Control Symposium Proceedings","volume":"27 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-05-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134258129","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-05-21DOI: 10.1109/FCS.2012.6243639
Kwangyun Jung, Jungwon Kim
We present a fiber-based optical-microwave phase detector that detects the phase error between optical pulse trains and microwave signals with sub-fs resolution over 1 MHz bandwidth. The proposed phase detector is used to synchronize microwave signals from VCO with optical pulse trains from mode-locked Er-fiber lasers. The residual phase noise between the optical pulse trains and the synchronized microwave signals is -133 dBc/Hz (-154 dBc/Hz) at 1 Hz (5 kHz) offset frequency, which results in 838 as integrated rms timing jitter [1 Hz-1 MHz]. The long-term residual phase drift is 847 as (rms) measured over 2 hours. We also used the phase detector and the low-jitter Er-fiber laser to measure the phase noise of a microwave signal synthesizer.
{"title":"Long-term stable sub-femtosecond synchronization of microwave signals with mode-locked Er-fiber lasers","authors":"Kwangyun Jung, Jungwon Kim","doi":"10.1109/FCS.2012.6243639","DOIUrl":"https://doi.org/10.1109/FCS.2012.6243639","url":null,"abstract":"We present a fiber-based optical-microwave phase detector that detects the phase error between optical pulse trains and microwave signals with sub-fs resolution over 1 MHz bandwidth. The proposed phase detector is used to synchronize microwave signals from VCO with optical pulse trains from mode-locked Er-fiber lasers. The residual phase noise between the optical pulse trains and the synchronized microwave signals is -133 dBc/Hz (-154 dBc/Hz) at 1 Hz (5 kHz) offset frequency, which results in 838 as integrated rms timing jitter [1 Hz-1 MHz]. The long-term residual phase drift is 847 as (rms) measured over 2 hours. We also used the phase detector and the low-jitter Er-fiber laser to measure the phase noise of a microwave signal synthesizer.","PeriodicalId":256670,"journal":{"name":"2012 IEEE International Frequency Control Symposium Proceedings","volume":"84 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-05-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131750107","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-05-21DOI: 10.1109/FCS.2012.6243742
Jaesung Lee, P. Feng
This digest paper presents our initial explorations of engineering graphene 2D nanostructures into nanomechanical resonators and transducers vibrating at high frequencies (i.e., ~1-30MHz, in the HF band in radio frequency spectrum) at T ~300K. We explore very small graphene devices that are suspended over micrometer-scale trenches or cavities and are free to vibrate in out-of-plane modes. The devices are derived from single- or few-layer graphene flakes and membranes, made by either mechanical exfoliation of graphite, or transfer of monolayer graphene grown on polycrystalline copper (Cu) by a chemical vapor deposition (CVD) process. We report measured resonance characteristics from our typical exfoliated single- and bi-layer graphene resonators of ~1-5μm in size, with resonance frequency (f) in the ~10-20MHz range, and measured quality (Q) factors of ~800-1200. From a transferred CVD graphene membrane device of ~10μm in size, we have measured a nanomechanical resonance at f≈2.39MHz, with Q≈350. We further explore the potentials of these resonators for enabling sensitive transducers, by evaluating their sensitivities for detecting small displacements, forces, and mass loading effects. Moreover, in this study we have clearly identified and analyzed the striking discrepancies in the measurements and interpretations of both resonance frequency and strain from recently reported studies. Our analyses of these issues help find solutions toward gaining meaningful understandings that will be applicable to future designs and development of graphene nanomechanical devices.
{"title":"High frequency graphene nanomechanical resonators and transducers","authors":"Jaesung Lee, P. Feng","doi":"10.1109/FCS.2012.6243742","DOIUrl":"https://doi.org/10.1109/FCS.2012.6243742","url":null,"abstract":"This digest paper presents our initial explorations of engineering graphene 2D nanostructures into nanomechanical resonators and transducers vibrating at high frequencies (i.e., ~1-30MHz, in the HF band in radio frequency spectrum) at T ~300K. We explore very small graphene devices that are suspended over micrometer-scale trenches or cavities and are free to vibrate in out-of-plane modes. The devices are derived from single- or few-layer graphene flakes and membranes, made by either mechanical exfoliation of graphite, or transfer of monolayer graphene grown on polycrystalline copper (Cu) by a chemical vapor deposition (CVD) process. We report measured resonance characteristics from our typical exfoliated single- and bi-layer graphene resonators of ~1-5μm in size, with resonance frequency (f) in the ~10-20MHz range, and measured quality (Q) factors of ~800-1200. From a transferred CVD graphene membrane device of ~10μm in size, we have measured a nanomechanical resonance at f≈2.39MHz, with Q≈350. We further explore the potentials of these resonators for enabling sensitive transducers, by evaluating their sensitivities for detecting small displacements, forces, and mass loading effects. Moreover, in this study we have clearly identified and analyzed the striking discrepancies in the measurements and interpretations of both resonance frequency and strain from recently reported studies. Our analyses of these issues help find solutions toward gaining meaningful understandings that will be applicable to future designs and development of graphene nanomechanical devices.","PeriodicalId":256670,"journal":{"name":"2012 IEEE International Frequency Control Symposium Proceedings","volume":"194 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-05-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131773753","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-05-21DOI: 10.1109/FCS.2012.6243646
Shaofeng Dong, W. Zhou, Baoqiang Du, Changzhe Jiao
This paper reveals the quantized phase step phenomenon between every two cyclical signals and its characteristics. With these characteristics, ultra-high resolution phase difference measurement limited by the quantized phase step and its corresponding measurements can be achieved. The princple that the quantized phase steps between two radio frequencies are usually less than picosecond, femtosecond and even sub-femtoseconds, namely, the princple that the corresponding equivalent phase comparison frequency between two radio frequencies can enter into the microwave or light bands is also revealed, which provides a foundation for the precise link based on phase group processing between frequencies in different bands. In this paper, an ultra-high resolution phase difference measurement method based on the quantized phase step phenomenon and the phase coincidence detection is proposed. By introducing an intermediate frequency, this method utilizes the quantized phase step phenomenon between the measured frequency and the intermediate frequency to measure the phase difference. Highspeed A/D sampling and data processing are used to improve the phase coincidence detection accuracy.
{"title":"Ultra-high resolution phase difference measurement method","authors":"Shaofeng Dong, W. Zhou, Baoqiang Du, Changzhe Jiao","doi":"10.1109/FCS.2012.6243646","DOIUrl":"https://doi.org/10.1109/FCS.2012.6243646","url":null,"abstract":"This paper reveals the quantized phase step phenomenon between every two cyclical signals and its characteristics. With these characteristics, ultra-high resolution phase difference measurement limited by the quantized phase step and its corresponding measurements can be achieved. The princple that the quantized phase steps between two radio frequencies are usually less than picosecond, femtosecond and even sub-femtoseconds, namely, the princple that the corresponding equivalent phase comparison frequency between two radio frequencies can enter into the microwave or light bands is also revealed, which provides a foundation for the precise link based on phase group processing between frequencies in different bands. In this paper, an ultra-high resolution phase difference measurement method based on the quantized phase step phenomenon and the phase coincidence detection is proposed. By introducing an intermediate frequency, this method utilizes the quantized phase step phenomenon between the measured frequency and the intermediate frequency to measure the phase difference. Highspeed A/D sampling and data processing are used to improve the phase coincidence detection accuracy.","PeriodicalId":256670,"journal":{"name":"2012 IEEE International Frequency Control Symposium Proceedings","volume":"95 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-05-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122883595","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-05-21DOI: 10.1109/FCS.2012.6243717
F. Ayazi, R. Tabrizian, L. Sorenson
Fundamental characteristics of MEMS resonators such as acoustic velocity and energy dissipation may have strong temperature and process dependencies that must be carefully compensated in applications requiring high degrees of stability and accuracy. This paper presents an overview of compensation, tuning, and trimming techniques for MEMS resonators. The use of these techniques in implementation of high precision and high performance MEMS resonators is described, and the benefits and challenges of different approaches are discussed and compared.
{"title":"Compensation, tuning, and trimming of MEMS resonators","authors":"F. Ayazi, R. Tabrizian, L. Sorenson","doi":"10.1109/FCS.2012.6243717","DOIUrl":"https://doi.org/10.1109/FCS.2012.6243717","url":null,"abstract":"Fundamental characteristics of MEMS resonators such as acoustic velocity and energy dissipation may have strong temperature and process dependencies that must be carefully compensated in applications requiring high degrees of stability and accuracy. This paper presents an overview of compensation, tuning, and trimming techniques for MEMS resonators. The use of these techniques in implementation of high precision and high performance MEMS resonators is described, and the benefits and challenges of different approaches are discussed and compared.","PeriodicalId":256670,"journal":{"name":"2012 IEEE International Frequency Control Symposium Proceedings","volume":"44 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-05-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125630315","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-05-21DOI: 10.1109/FCS.2012.6243641
M. Rinaldi, Y. Hui, C. Zuniga, A. Tazzoli, G. Piazza
This paper presents the design and experimental verification of the first MEMS resonator ovenized by means of an integrated nano hot plate suspended over the micromechanical resonant element. This first prototype is formed by a composite structure in which a fully anchored Aluminum Nitride (AlN) Lateral Field Excited-Floating (LFE-F) Contour-Mode MEMS resonator (CMR) and a nanoscale heating element are perfectly overlapped and separated by a sub-micron air gap. The placement of the heating element outside the body of the resonator, but suspended over it, allowed maintaining the electromechanical properties of the device unchanged (same kt2·Q compared to the non-ovenized case). This resulted in a 968 MHz ovenized microresonator with quality factor, Q, of ~1800, electromechanical coupling coefficient, kt2, of ~0.9% and motional resistance, Rm, of ~50 Ω. At the same time, efficient ovenization of the MEMS resonator (CMR temperature rise factor of 18.3 K/mW) is achieved by scaling the dimensions of the heating element (i.e. implementing a nano hot plate) and minimizing the air gap between the resonator and the heater.
{"title":"High frequency AlN MEMS resonators with integrated nano hot plate for temperature controlled operation","authors":"M. Rinaldi, Y. Hui, C. Zuniga, A. Tazzoli, G. Piazza","doi":"10.1109/FCS.2012.6243641","DOIUrl":"https://doi.org/10.1109/FCS.2012.6243641","url":null,"abstract":"This paper presents the design and experimental verification of the first MEMS resonator ovenized by means of an integrated nano hot plate suspended over the micromechanical resonant element. This first prototype is formed by a composite structure in which a fully anchored Aluminum Nitride (AlN) Lateral Field Excited-Floating (LFE-F) Contour-Mode MEMS resonator (CMR) and a nanoscale heating element are perfectly overlapped and separated by a sub-micron air gap. The placement of the heating element outside the body of the resonator, but suspended over it, allowed maintaining the electromechanical properties of the device unchanged (same kt2·Q compared to the non-ovenized case). This resulted in a 968 MHz ovenized microresonator with quality factor, Q, of ~1800, electromechanical coupling coefficient, kt2, of ~0.9% and motional resistance, Rm, of ~50 Ω. At the same time, efficient ovenization of the MEMS resonator (CMR temperature rise factor of 18.3 K/mW) is achieved by scaling the dimensions of the heating element (i.e. implementing a nano hot plate) and minimizing the air gap between the resonator and the heater.","PeriodicalId":256670,"journal":{"name":"2012 IEEE International Frequency Control Symposium Proceedings","volume":"69 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-05-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125885790","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
京公网安备 11010802042870号
京ICP备2023020795号-1
扫码关注我们
求助内容：
应助结果提醒方式：