Pub Date : 2012-05-21DOI: 10.1109/FCS.2012.6243624
Ji Wang, Bo Liu, Jianke Du, T. Ma
As the core element of a quartz crystal resonator, the thickness-shear vibration frequency of a quartz crystal plate is always of great interest and top priority in the analysis and design. Because of the difficulty in solving plate equations with the consideration of two-dimensional configuration with free edges, the analysis of resonators is traditionally done with one-dimensional solutions based on the straight-crested wave assumption, which has been validated from earlier experiences and lately numerical analysis with the finite element method. In this study, we start with the known Mindlin plate equations for the thickness-shear vibrations of a rectangular quartz crystal plate with the consideration of flexural and thickness-shear modes. Through the separation of variables, we can obtain higher-order ordinary differential equations for the thickness-shear mode and obtain characteristic functions. The special boundary considerations of resonators with free edges are satisfied through the work of stress components of each individual mode. The method starts with the approximation in one direction, then the same procedure is performed in other direction. Eventually, iteration is taken for each direction until the vibration frequency solution is close to approximations from both directions. This is known as the extended Kantorovich method for vibrations of plates and solutions are accurate as compared with known results from the finite element analysis.
{"title":"Approximate frequencies of rectangular quartz plates vibrating at thickness-shear modes with free edges","authors":"Ji Wang, Bo Liu, Jianke Du, T. Ma","doi":"10.1109/FCS.2012.6243624","DOIUrl":"https://doi.org/10.1109/FCS.2012.6243624","url":null,"abstract":"As the core element of a quartz crystal resonator, the thickness-shear vibration frequency of a quartz crystal plate is always of great interest and top priority in the analysis and design. Because of the difficulty in solving plate equations with the consideration of two-dimensional configuration with free edges, the analysis of resonators is traditionally done with one-dimensional solutions based on the straight-crested wave assumption, which has been validated from earlier experiences and lately numerical analysis with the finite element method. In this study, we start with the known Mindlin plate equations for the thickness-shear vibrations of a rectangular quartz crystal plate with the consideration of flexural and thickness-shear modes. Through the separation of variables, we can obtain higher-order ordinary differential equations for the thickness-shear mode and obtain characteristic functions. The special boundary considerations of resonators with free edges are satisfied through the work of stress components of each individual mode. The method starts with the approximation in one direction, then the same procedure is performed in other direction. Eventually, iteration is taken for each direction until the vibration frequency solution is close to approximations from both directions. This is known as the extended Kantorovich method for vibrations of plates and solutions are accurate as compared with known results from the finite element analysis.","PeriodicalId":256670,"journal":{"name":"2012 IEEE International Frequency Control Symposium Proceedings","volume":"38 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-05-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114950842","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-05-21DOI: 10.1109/FCS.2012.6243620
S. Yazici, M. Giovannini, N. Kuo, G. Piazza
This paper reports on the application to 1 GHz AlN MEMS contour-mode resonators (CMR) of a spurious mode suppression technique based on the introduction of dummy electrodes and a method to shift the resonator center frequency by modifying its cavity size. The realization of wideband filters with CMRs is currently limited by the need to 1) enlarge the device capacitance (so as to minimize the inductive components in the matching network), 2) reduce in-band ripples and out-of-band spurs (which are introduced when the device capacitance is increased), and 3) shift the device center frequency by a large percentage (>; 2%) to synthesize ladder/lattice configurations. This work addresses these 3 main challenges by optimizing the electromechanical response of AlN CMRs having a large static capacitance, synthesized by using thin AlN films of two different thicknesses (500 nm and 1 μm thick), sandwiched by Pt and Al electrodes and having a large number of fingers (up to 45). 3D COMSOL finite element model is used to analyze and/predict the resonator's behavior.
{"title":"Suppression of spurious modes via dummy electrodes and 2% frequency shift via cavity size selection for 1 GHz AlN MEMS contour-mode resonators","authors":"S. Yazici, M. Giovannini, N. Kuo, G. Piazza","doi":"10.1109/FCS.2012.6243620","DOIUrl":"https://doi.org/10.1109/FCS.2012.6243620","url":null,"abstract":"This paper reports on the application to 1 GHz AlN MEMS contour-mode resonators (CMR) of a spurious mode suppression technique based on the introduction of dummy electrodes and a method to shift the resonator center frequency by modifying its cavity size. The realization of wideband filters with CMRs is currently limited by the need to 1) enlarge the device capacitance (so as to minimize the inductive components in the matching network), 2) reduce in-band ripples and out-of-band spurs (which are introduced when the device capacitance is increased), and 3) shift the device center frequency by a large percentage (>; 2%) to synthesize ladder/lattice configurations. This work addresses these 3 main challenges by optimizing the electromechanical response of AlN CMRs having a large static capacitance, synthesized by using thin AlN films of two different thicknesses (500 nm and 1 μm thick), sandwiched by Pt and Al electrodes and having a large number of fingers (up to 45). 3D COMSOL finite element model is used to analyze and/predict the resonator's behavior.","PeriodicalId":256670,"journal":{"name":"2012 IEEE International Frequency Control Symposium Proceedings","volume":"39 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-05-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121330297","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-05-21DOI: 10.1109/FCS.2012.6243602
Jianwei Zhang, Zhengbo Wang, Shiguang Wang, K. Miao, Bo Wang, Lijun Wang
The progress towards to a microwave frequency standard based on laser-cooled 113Cd+ ions trapped in a linear quadrupole trap is reported. The experimental apparatus is introduced and the measurement of the clock transition is demonstrated. The estimated performance of the clock is also discussed.
{"title":"Progress towards a microwave frequency standard based on the laser cooled 113Cd+ ions","authors":"Jianwei Zhang, Zhengbo Wang, Shiguang Wang, K. Miao, Bo Wang, Lijun Wang","doi":"10.1109/FCS.2012.6243602","DOIUrl":"https://doi.org/10.1109/FCS.2012.6243602","url":null,"abstract":"The progress towards to a microwave frequency standard based on laser-cooled 113Cd+ ions trapped in a linear quadrupole trap is reported. The experimental apparatus is introduced and the measurement of the clock transition is demonstrated. The estimated performance of the clock is also discussed.","PeriodicalId":256670,"journal":{"name":"2012 IEEE International Frequency Control Symposium Proceedings","volume":"15 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-05-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125477552","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-05-21DOI: 10.1109/FCS.2012.6243636
F. Fang, Weiliang Chen, Nianfeng Liu, Kun Liu, R. Suo, Ping Wang, Tian-chu Li
Several evaluations of the frequency shifts have been carried out after NIM5 was moved to the new NIM campus at Changping in 2011. The dominate frequency uncertainty was the microwave power related frequency shifts, which was mainly induced by the microwave leakage for NIM5. The experimental results show that fountains are more sensitive to the leakage field below the Ramsey cavity than above the cavity at the odd multiples of the optimal power. This effect can be reduced by trimming interferometric RF switch time, which makes atoms feel more symmetric leakage field during the ascending and the descending. The fractional frequency shift due to this effect is evaluated by alternatively running the NIM5 fountain between two timing modes. The overall uncertainty of NIM5 is smaller than 2e-15. The comparisons of NIM5 with other fountain clocks in 3 months are shown and consistent with this result.
{"title":"Microwave power related frequency shifts of NIM5","authors":"F. Fang, Weiliang Chen, Nianfeng Liu, Kun Liu, R. Suo, Ping Wang, Tian-chu Li","doi":"10.1109/FCS.2012.6243636","DOIUrl":"https://doi.org/10.1109/FCS.2012.6243636","url":null,"abstract":"Several evaluations of the frequency shifts have been carried out after NIM5 was moved to the new NIM campus at Changping in 2011. The dominate frequency uncertainty was the microwave power related frequency shifts, which was mainly induced by the microwave leakage for NIM5. The experimental results show that fountains are more sensitive to the leakage field below the Ramsey cavity than above the cavity at the odd multiples of the optimal power. This effect can be reduced by trimming interferometric RF switch time, which makes atoms feel more symmetric leakage field during the ascending and the descending. The fractional frequency shift due to this effect is evaluated by alternatively running the NIM5 fountain between two timing modes. The overall uncertainty of NIM5 is smaller than 2e-15. The comparisons of NIM5 with other fountain clocks in 3 months are shown and consistent with this result.","PeriodicalId":256670,"journal":{"name":"2012 IEEE International Frequency Control Symposium Proceedings","volume":"27 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-05-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125699885","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-05-21DOI: 10.1109/FCS.2012.6243674
D. Agrawal, J. Woodhouse, A. Seshia
The modelling of the non-linear behaviour of MEMS oscillators is of interest to understand the effects of non-linearities on start-up, limit cycle behaviour and performance metrics such as output frequency and phase noise. This paper proposes an approach to integrate the non-linear modelling of the resonator, transducer and sustaining amplifier in a single numerical modelling environment so that their combined effects may be investigated simultaneously. The paper validates the proposed electrical model of the resonator through open-loop frequency response measurements on an electrically addressed flexural silicon MEMS resonator driven to large motional amplitudes. A square wave oscillator is constructed by embedding the same resonator as the primary frequency determining element. Measurements of output power and output frequency of the square wave oscillator as a function of resonator bias and driving voltage are consistent with model predictions ensuring that the model captures the essential non-linear behaviour of the resonator and the sustaining amplifier in a single mathematical equation.
{"title":"Modelling non-linearities in a MEMS square wave oscillator","authors":"D. Agrawal, J. Woodhouse, A. Seshia","doi":"10.1109/FCS.2012.6243674","DOIUrl":"https://doi.org/10.1109/FCS.2012.6243674","url":null,"abstract":"The modelling of the non-linear behaviour of MEMS oscillators is of interest to understand the effects of non-linearities on start-up, limit cycle behaviour and performance metrics such as output frequency and phase noise. This paper proposes an approach to integrate the non-linear modelling of the resonator, transducer and sustaining amplifier in a single numerical modelling environment so that their combined effects may be investigated simultaneously. The paper validates the proposed electrical model of the resonator through open-loop frequency response measurements on an electrically addressed flexural silicon MEMS resonator driven to large motional amplitudes. A square wave oscillator is constructed by embedding the same resonator as the primary frequency determining element. Measurements of output power and output frequency of the square wave oscillator as a function of resonator bias and driving voltage are consistent with model predictions ensuring that the model captures the essential non-linear behaviour of the resonator and the sustaining amplifier in a single mathematical equation.","PeriodicalId":256670,"journal":{"name":"2012 IEEE International Frequency Control Symposium Proceedings","volume":"456 2","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-05-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"120897478","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-05-21DOI: 10.1109/FCS.2012.6243632
A. Rey, M. Martin, M. Swallows, M. Bishof, C. Benko, S. Blatt, J. von Stecher, A. Gorshkov, J. Ye
Advances in ultra-stable lasers now permit sub-Hz resolution of optical atomic transitions. At this level, weak interactions by any ordinary scale can in fact dominate the dynamics of the interrogated atoms, even for spin polarized fermions at ultralow temperatures. Contrary to results obtained in radio frequency spectroscopy of alkali fermionic atoms, optical spectroscopy of 87 Sr and 171 Yb has revealed density dependent frequency shifts of the 1 S0 - 3 P 0 “clock” transition. Understanding interactions in these systems is necessary to improve their accuracy and stability. Moreover, such an understanding will enable optical lattice clock systems to serve as quantum simulators for open, driven, strongly-interacting quantum systems at the mesoscopic scale. In this talk we presented our progress towards a comprehensive evaluation and understanding of the interactions present during spectroscopy of the 87 Sr clock transition under various operating conditions. Our studies indicate that a mean-field solution of a master equation is sufficient to capture the many-body dynamics of alkaline earth atom clocks. Entering the regime in which a treatment beyond mean-field is required for a proper description of the clock dynamics is under immediate experimental reach.
{"title":"Probing many-body spin interactions with an optical lattice clock","authors":"A. Rey, M. Martin, M. Swallows, M. Bishof, C. Benko, S. Blatt, J. von Stecher, A. Gorshkov, J. Ye","doi":"10.1109/FCS.2012.6243632","DOIUrl":"https://doi.org/10.1109/FCS.2012.6243632","url":null,"abstract":"Advances in ultra-stable lasers now permit sub-Hz resolution of optical atomic transitions. At this level, weak interactions by any ordinary scale can in fact dominate the dynamics of the interrogated atoms, even for spin polarized fermions at ultralow temperatures. Contrary to results obtained in radio frequency spectroscopy of alkali fermionic atoms, optical spectroscopy of 87 Sr and 171 Yb has revealed density dependent frequency shifts of the 1 S0 - 3 P 0 “clock” transition. Understanding interactions in these systems is necessary to improve their accuracy and stability. Moreover, such an understanding will enable optical lattice clock systems to serve as quantum simulators for open, driven, strongly-interacting quantum systems at the mesoscopic scale. In this talk we presented our progress towards a comprehensive evaluation and understanding of the interactions present during spectroscopy of the 87 Sr clock transition under various operating conditions. Our studies indicate that a mean-field solution of a master equation is sufficient to capture the many-body dynamics of alkaline earth atom clocks. Entering the regime in which a treatment beyond mean-field is required for a proper description of the clock dynamics is under immediate experimental reach.","PeriodicalId":256670,"journal":{"name":"2012 IEEE International Frequency Control Symposium Proceedings","volume":"153 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-05-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132814096","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-05-21DOI: 10.1109/FCS.2012.6243700
T. Cai, F. Josse, S. Heinrich, N. Nigro, I. Dufour, O. Brand
The resonant characteristics of rectangular microcantilevers vibrating in the torsional mode in viscous liquid media are investigated. The hydrodynamic load (torque per unit length) on the vibrating beam due to the liquid was first determined using a finite element model. An analytical expression of the hydrodynamic function in terms of the Reynolds number and aspect ratio, h/b (with thickness, h, and width, b) was then obtained by fitting the numerical results. This allowed for the resonance frequency and quality factor to be investigated as functions of both beam geometry and medium properties. Moreover, the effects of the aspect ratio on the cross-section's torsional constant, K, which affects the microcantilever's torsional stiffness, and on its polar moment of inertia, Jp, which is associated with the beam's rotational inertia, are also considered when obtaining the resonance frequency and quality factor. Compared with microcantilevers under out-of-plane (transverse) flexural vibration, the results show that microcantilevers that vibrate in their 1st torsional or 1st in-plane (lateral) flexural resonant modes have higher resonance frequency and quality factor. The increase in resonance frequency and quality factor results in higher mass sensitivity and reduced frequency noise, respectively. The improvement in the sensitivity and quality factor are expected to yield much lower limits of detection in liquid-phase chemical sensing applications.
{"title":"Resonant characteristics of rectangular microcantilevers vibrating torsionally in viscous liquid media","authors":"T. Cai, F. Josse, S. Heinrich, N. Nigro, I. Dufour, O. Brand","doi":"10.1109/FCS.2012.6243700","DOIUrl":"https://doi.org/10.1109/FCS.2012.6243700","url":null,"abstract":"The resonant characteristics of rectangular microcantilevers vibrating in the torsional mode in viscous liquid media are investigated. The hydrodynamic load (torque per unit length) on the vibrating beam due to the liquid was first determined using a finite element model. An analytical expression of the hydrodynamic function in terms of the Reynolds number and aspect ratio, h/b (with thickness, h, and width, b) was then obtained by fitting the numerical results. This allowed for the resonance frequency and quality factor to be investigated as functions of both beam geometry and medium properties. Moreover, the effects of the aspect ratio on the cross-section's torsional constant, K, which affects the microcantilever's torsional stiffness, and on its polar moment of inertia, Jp, which is associated with the beam's rotational inertia, are also considered when obtaining the resonance frequency and quality factor. Compared with microcantilevers under out-of-plane (transverse) flexural vibration, the results show that microcantilevers that vibrate in their 1st torsional or 1st in-plane (lateral) flexural resonant modes have higher resonance frequency and quality factor. The increase in resonance frequency and quality factor results in higher mass sensitivity and reduced frequency noise, respectively. The improvement in the sensitivity and quality factor are expected to yield much lower limits of detection in liquid-phase chemical sensing applications.","PeriodicalId":256670,"journal":{"name":"2012 IEEE International Frequency Control Symposium Proceedings","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-05-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131333904","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-05-21DOI: 10.1109/FCS.2012.6243646
Shaofeng Dong, W. Zhou, Baoqiang Du, Changzhe Jiao
This paper reveals the quantized phase step phenomenon between every two cyclical signals and its characteristics. With these characteristics, ultra-high resolution phase difference measurement limited by the quantized phase step and its corresponding measurements can be achieved. The princple that the quantized phase steps between two radio frequencies are usually less than picosecond, femtosecond and even sub-femtoseconds, namely, the princple that the corresponding equivalent phase comparison frequency between two radio frequencies can enter into the microwave or light bands is also revealed, which provides a foundation for the precise link based on phase group processing between frequencies in different bands. In this paper, an ultra-high resolution phase difference measurement method based on the quantized phase step phenomenon and the phase coincidence detection is proposed. By introducing an intermediate frequency, this method utilizes the quantized phase step phenomenon between the measured frequency and the intermediate frequency to measure the phase difference. Highspeed A/D sampling and data processing are used to improve the phase coincidence detection accuracy.
{"title":"Ultra-high resolution phase difference measurement method","authors":"Shaofeng Dong, W. Zhou, Baoqiang Du, Changzhe Jiao","doi":"10.1109/FCS.2012.6243646","DOIUrl":"https://doi.org/10.1109/FCS.2012.6243646","url":null,"abstract":"This paper reveals the quantized phase step phenomenon between every two cyclical signals and its characteristics. With these characteristics, ultra-high resolution phase difference measurement limited by the quantized phase step and its corresponding measurements can be achieved. The princple that the quantized phase steps between two radio frequencies are usually less than picosecond, femtosecond and even sub-femtoseconds, namely, the princple that the corresponding equivalent phase comparison frequency between two radio frequencies can enter into the microwave or light bands is also revealed, which provides a foundation for the precise link based on phase group processing between frequencies in different bands. In this paper, an ultra-high resolution phase difference measurement method based on the quantized phase step phenomenon and the phase coincidence detection is proposed. By introducing an intermediate frequency, this method utilizes the quantized phase step phenomenon between the measured frequency and the intermediate frequency to measure the phase difference. Highspeed A/D sampling and data processing are used to improve the phase coincidence detection accuracy.","PeriodicalId":256670,"journal":{"name":"2012 IEEE International Frequency Control Symposium Proceedings","volume":"95 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-05-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122883595","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-05-21DOI: 10.1109/FCS.2012.6243717
F. Ayazi, R. Tabrizian, L. Sorenson
Fundamental characteristics of MEMS resonators such as acoustic velocity and energy dissipation may have strong temperature and process dependencies that must be carefully compensated in applications requiring high degrees of stability and accuracy. This paper presents an overview of compensation, tuning, and trimming techniques for MEMS resonators. The use of these techniques in implementation of high precision and high performance MEMS resonators is described, and the benefits and challenges of different approaches are discussed and compared.
{"title":"Compensation, tuning, and trimming of MEMS resonators","authors":"F. Ayazi, R. Tabrizian, L. Sorenson","doi":"10.1109/FCS.2012.6243717","DOIUrl":"https://doi.org/10.1109/FCS.2012.6243717","url":null,"abstract":"Fundamental characteristics of MEMS resonators such as acoustic velocity and energy dissipation may have strong temperature and process dependencies that must be carefully compensated in applications requiring high degrees of stability and accuracy. This paper presents an overview of compensation, tuning, and trimming techniques for MEMS resonators. The use of these techniques in implementation of high precision and high performance MEMS resonators is described, and the benefits and challenges of different approaches are discussed and compared.","PeriodicalId":256670,"journal":{"name":"2012 IEEE International Frequency Control Symposium Proceedings","volume":"44 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-05-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125630315","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-05-21DOI: 10.1109/FCS.2012.6243641
M. Rinaldi, Y. Hui, C. Zuniga, A. Tazzoli, G. Piazza
This paper presents the design and experimental verification of the first MEMS resonator ovenized by means of an integrated nano hot plate suspended over the micromechanical resonant element. This first prototype is formed by a composite structure in which a fully anchored Aluminum Nitride (AlN) Lateral Field Excited-Floating (LFE-F) Contour-Mode MEMS resonator (CMR) and a nanoscale heating element are perfectly overlapped and separated by a sub-micron air gap. The placement of the heating element outside the body of the resonator, but suspended over it, allowed maintaining the electromechanical properties of the device unchanged (same kt2·Q compared to the non-ovenized case). This resulted in a 968 MHz ovenized microresonator with quality factor, Q, of ~1800, electromechanical coupling coefficient, kt2, of ~0.9% and motional resistance, Rm, of ~50 Ω. At the same time, efficient ovenization of the MEMS resonator (CMR temperature rise factor of 18.3 K/mW) is achieved by scaling the dimensions of the heating element (i.e. implementing a nano hot plate) and minimizing the air gap between the resonator and the heater.
{"title":"High frequency AlN MEMS resonators with integrated nano hot plate for temperature controlled operation","authors":"M. Rinaldi, Y. Hui, C. Zuniga, A. Tazzoli, G. Piazza","doi":"10.1109/FCS.2012.6243641","DOIUrl":"https://doi.org/10.1109/FCS.2012.6243641","url":null,"abstract":"This paper presents the design and experimental verification of the first MEMS resonator ovenized by means of an integrated nano hot plate suspended over the micromechanical resonant element. This first prototype is formed by a composite structure in which a fully anchored Aluminum Nitride (AlN) Lateral Field Excited-Floating (LFE-F) Contour-Mode MEMS resonator (CMR) and a nanoscale heating element are perfectly overlapped and separated by a sub-micron air gap. The placement of the heating element outside the body of the resonator, but suspended over it, allowed maintaining the electromechanical properties of the device unchanged (same kt2·Q compared to the non-ovenized case). This resulted in a 968 MHz ovenized microresonator with quality factor, Q, of ~1800, electromechanical coupling coefficient, kt2, of ~0.9% and motional resistance, Rm, of ~50 Ω. At the same time, efficient ovenization of the MEMS resonator (CMR temperature rise factor of 18.3 K/mW) is achieved by scaling the dimensions of the heating element (i.e. implementing a nano hot plate) and minimizing the air gap between the resonator and the heater.","PeriodicalId":256670,"journal":{"name":"2012 IEEE International Frequency Control Symposium Proceedings","volume":"69 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-05-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125885790","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
京公网安备 11010802042870号
京ICP备2023020795号-1
扫码关注我们
求助内容：
应助结果提醒方式：