M. Adhikary, T. Cromwijk, C. Messinis, J. de Wit, S. Konijnenberg, S. Witte, J. de Boer, A. D. den Boef
We present dark-field digital holographic microscopy for diffraction-based overlay metrology in semiconductor layers with feature size of a few nanometers. We aim for higher accuracy and precision by calibrating the illumination profile on the targets.
{"title":"Improving the precision of semiconductor overlay measurements using dark-field digital holographic microscopy","authors":"M. Adhikary, T. Cromwijk, C. Messinis, J. de Wit, S. Konijnenberg, S. Witte, J. de Boer, A. D. den Boef","doi":"10.1364/3d.2022.jth2a.8","DOIUrl":"https://doi.org/10.1364/3d.2022.jth2a.8","url":null,"abstract":"We present dark-field digital holographic microscopy for diffraction-based overlay metrology in semiconductor layers with feature size of a few nanometers. We aim for higher accuracy and precision by calibrating the illumination profile on the targets.","PeriodicalId":286361,"journal":{"name":"Imaging and Applied Optics Congress 2022 (3D, AOA, COSI, ISA, pcAOP)","volume":"28 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114335093","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1900-01-01DOI: 10.1364/cosi.2022.cm3a.7
Shaurya Aarav, J. Fleischer
We add depth resolution to conventional speckle correlation imaging by capturing images at two detector positions. The method relies on speckle scaling from the axial memory effect.
{"title":"Non-invasive, Depth-resolved Imaging through Scattering Media","authors":"Shaurya Aarav, J. Fleischer","doi":"10.1364/cosi.2022.cm3a.7","DOIUrl":"https://doi.org/10.1364/cosi.2022.cm3a.7","url":null,"abstract":"We add depth resolution to conventional speckle correlation imaging by capturing images at two detector positions. The method relies on speckle scaling from the axial memory effect.","PeriodicalId":286361,"journal":{"name":"Imaging and Applied Optics Congress 2022 (3D, AOA, COSI, ISA, pcAOP)","volume":"31 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114293266","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1900-01-01DOI: 10.1364/cosi.2022.ctu4f.3
Hongshuo Zhang, H. Zou, Yongzhuang Zhou
We report a geometric-phase-based helical PSF for simultaneously estimating the 3D position and orientation of point emitters. It has a compact and simpler optical configuration compared to conventional polarization-splitting techniques and yields nearly 100% optical throughput.
{"title":"Geometric-phase helical PSFs for 3D localization microscopy and compact orientation microscopy","authors":"Hongshuo Zhang, H. Zou, Yongzhuang Zhou","doi":"10.1364/cosi.2022.ctu4f.3","DOIUrl":"https://doi.org/10.1364/cosi.2022.ctu4f.3","url":null,"abstract":"We report a geometric-phase-based helical PSF for simultaneously estimating the 3D position and orientation of point emitters. It has a compact and simpler optical configuration compared to conventional polarization-splitting techniques and yields nearly 100% optical throughput.","PeriodicalId":286361,"journal":{"name":"Imaging and Applied Optics Congress 2022 (3D, AOA, COSI, ISA, pcAOP)","volume":"203 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122440153","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1900-01-01DOI: 10.1364/cosi.2022.ctu4f.2
Daniel Olesker, Bingying Chen, James D. Manton, R. Fiolka, A. Harvey, Jonathan M. Taylor
Imaging biological dynamics in 3D requires fast, high-resolution volumetric imaging techniques. We present a 3D-from-2D imaging pipeline that permits volumetric reconstruction from 2D projection snapshots, applicable to a range of microscopy image acquisition platforms.
{"title":"Volumetric Reconstruction from 2D Projection Data for Fast 3D Imaging","authors":"Daniel Olesker, Bingying Chen, James D. Manton, R. Fiolka, A. Harvey, Jonathan M. Taylor","doi":"10.1364/cosi.2022.ctu4f.2","DOIUrl":"https://doi.org/10.1364/cosi.2022.ctu4f.2","url":null,"abstract":"Imaging biological dynamics in 3D requires fast, high-resolution volumetric imaging techniques. We present a 3D-from-2D imaging pipeline that permits volumetric reconstruction from 2D projection snapshots, applicable to a range of microscopy image acquisition platforms.","PeriodicalId":286361,"journal":{"name":"Imaging and Applied Optics Congress 2022 (3D, AOA, COSI, ISA, pcAOP)","volume":"111 3","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"120859958","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
We demonstrate the generation of phase holograms of multiple overlapping 3D objects at different axial positions without crosstalk. We introduce a singular value decomposition approach, leading to significant improvements in performance over conventional methods.
{"title":"Generation of phase hologram from multiple 3D axially overlapping objects without crosstalk","authors":"Alejandro Velez-Zea, J. Barrera-Ramírez","doi":"10.1364/3d.2022.jw2a.2","DOIUrl":"https://doi.org/10.1364/3d.2022.jw2a.2","url":null,"abstract":"We demonstrate the generation of phase holograms of multiple overlapping 3D objects at different axial positions without crosstalk. We introduce a singular value decomposition approach, leading to significant improvements in performance over conventional methods.","PeriodicalId":286361,"journal":{"name":"Imaging and Applied Optics Congress 2022 (3D, AOA, COSI, ISA, pcAOP)","volume":"29 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126129779","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1900-01-01DOI: 10.1364/cosi.2022.cth3c.5
E. Norris, Jarno van der Kolk, L. Ramunno
Tensorial framework of ptychographic for simultaneous reconstruction of second order nonlinear optical susceptibility tensor components and analytical method for extracting orientation information from numerically generated collagen sample is demonstrated.
{"title":"Orientation Imaging using Tensorial Ptychography","authors":"E. Norris, Jarno van der Kolk, L. Ramunno","doi":"10.1364/cosi.2022.cth3c.5","DOIUrl":"https://doi.org/10.1364/cosi.2022.cth3c.5","url":null,"abstract":"Tensorial framework of ptychographic for simultaneous reconstruction of second order nonlinear optical susceptibility tensor components and analytical method for extracting orientation information from numerically generated collagen sample is demonstrated.","PeriodicalId":286361,"journal":{"name":"Imaging and Applied Optics Congress 2022 (3D, AOA, COSI, ISA, pcAOP)","volume":"20 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127304338","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1900-01-01DOI: 10.1364/aoa.2022.oth3b.3
Ruizhe Lin, P. Kner
By applying Adaptive Optics in Structured Illumination Microscopy, we developed an adaptive three-dimensional super-resolution microscopy system and demonstrate three-dimensional super-resolution aberration-free imaging deep through multicellular thick tissues with improved image quality and fidelity.
{"title":"Three-dimensional adaptive super-resolution imaging deep through multicellular thick tissues","authors":"Ruizhe Lin, P. Kner","doi":"10.1364/aoa.2022.oth3b.3","DOIUrl":"https://doi.org/10.1364/aoa.2022.oth3b.3","url":null,"abstract":"By applying Adaptive Optics in Structured Illumination Microscopy, we developed an adaptive three-dimensional super-resolution microscopy system and demonstrate three-dimensional super-resolution aberration-free imaging deep through multicellular thick tissues with improved image quality and fidelity.","PeriodicalId":286361,"journal":{"name":"Imaging and Applied Optics Congress 2022 (3D, AOA, COSI, ISA, pcAOP)","volume":"42 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122373194","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1900-01-01DOI: 10.1364/isa.2022.ith4d.2
Jaeheung Kim, Nguyen Thanh Phong Truong, J. Oh, Chang-Seok Kim
We propose line-field white light interferometry using a tunable-path-difference source, improving imaging performance. By simultaneously acquiring signals along the line, the system has higher imaging speed and stability for a wide field of view imaging.
{"title":"Line-field white light interferometry using tunable-path-difference source","authors":"Jaeheung Kim, Nguyen Thanh Phong Truong, J. Oh, Chang-Seok Kim","doi":"10.1364/isa.2022.ith4d.2","DOIUrl":"https://doi.org/10.1364/isa.2022.ith4d.2","url":null,"abstract":"We propose line-field white light interferometry using a tunable-path-difference source, improving imaging performance. By simultaneously acquiring signals along the line, the system has higher imaging speed and stability for a wide field of view imaging.","PeriodicalId":286361,"journal":{"name":"Imaging and Applied Optics Congress 2022 (3D, AOA, COSI, ISA, pcAOP)","volume":"11 2 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122428613","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1900-01-01DOI: 10.1364/cosi.2022.cm1a.6
C. Schrama, J. Barolak, Daniel Adams, C. Durfee
We are using a two-color Mach-Zehnder interferometer with multi-frame cameras to measure the electrode and neutral atom density in a threshold electrostatic discharge system through FFT phase retrieval using visible and IR laser sources.
{"title":"Two-Color Time-Resolved Interferometry for Shock-Wave and Conductivity Analysis of a Threshold Electrostatic Discharge","authors":"C. Schrama, J. Barolak, Daniel Adams, C. Durfee","doi":"10.1364/cosi.2022.cm1a.6","DOIUrl":"https://doi.org/10.1364/cosi.2022.cm1a.6","url":null,"abstract":"We are using a two-color Mach-Zehnder interferometer with multi-frame cameras to measure the electrode and neutral atom density in a threshold electrostatic discharge system through FFT phase retrieval using visible and IR laser sources.","PeriodicalId":286361,"journal":{"name":"Imaging and Applied Optics Congress 2022 (3D, AOA, COSI, ISA, pcAOP)","volume":"37 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122448106","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1900-01-01DOI: 10.1364/isa.2022.ith4d.5
Min Uk Jung, G. Kim, Dawoon Jeong, Hui-Ju Kim, Chang-Seok Kim
Frequency-modulated continuous wave (FMCW) system was implemented using dual interferometers with two different optical delay lengths. This system can overcome the limitation of the distance measurement range due to the coherence length of the light source.
{"title":"FMCW LiDAR Using Dual Interferometer for Improving Distance Measurement","authors":"Min Uk Jung, G. Kim, Dawoon Jeong, Hui-Ju Kim, Chang-Seok Kim","doi":"10.1364/isa.2022.ith4d.5","DOIUrl":"https://doi.org/10.1364/isa.2022.ith4d.5","url":null,"abstract":"Frequency-modulated continuous wave (FMCW) system was implemented using dual interferometers with two different optical delay lengths. This system can overcome the limitation of the distance measurement range due to the coherence length of the light source.","PeriodicalId":286361,"journal":{"name":"Imaging and Applied Optics Congress 2022 (3D, AOA, COSI, ISA, pcAOP)","volume":"1091 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122905739","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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