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Scalable copper-based coordination frameworks with tailored pore chemistry for energy-efficient C2H2/CO2 separation† 可扩展的铜基配位框架,具有量身定制的孔化学,用于节能C2H2/CO2分离†
IF 11.9 Pub Date : 2025-06-30 DOI: 10.1039/D5IM00068H
Hao-Ling Lan, Su-Tao Zheng, Li Xu, Guo-Wei Guan and Qing-Yuan Yang

The separation of C2H2/CO2 mixtures for acetylene purification presents both industrial significance and fundamental challenges due to their nearly identical kinetic diameters and similar physical properties. This study demonstrates the effectiveness of ultramicroporous metal–organic frameworks (MOFs) in addressing this challenge through precise pore confinement effects. We introduce two ultramicroporous materials, Cu(cyhdc) and Cu(bdc), and assess their ability to capture C2H2. Under ambient conditions, Cu(cyhdc) and Cu(bdc) exhibit C2H2 uptakes of 1.92 mmol g−1 and 1.44 mmol g−1, respectively. The most promising candidate is Cu(cyhdc), which possesses a C2H2/CO2 selectivity of 8.45 at 298 K and 1 bar. Grand canonical Monte Carlo simulations revealed that the enhanced performance originates from multiple van der Waals interactions between C2H2 molecules and the curved cyclohexane-derived pore walls of Cu(cyhdc). Importantly, dynamic breakthrough experiments and scalable synthesis processes validated the practical separation potential of Cu(cyhdc) for C2H2/CO2 mixtures. This work provides both mechanistic insights into gas–framework interactions and a potential solution for energy-efficient acetylene purification.

Keywords: C2H2/CO2 separation; Ultramicroporous; Metal–organic framework; Pore confinement; Scalable synthesis.

C2H2/CO2混合物的分离用于乙炔净化,由于其几乎相同的动力学直径和相似的物理性质,既具有工业意义,又面临着基本挑战。这项研究证明了超微孔金属有机框架(mof)通过精确的孔限制效应来解决这一挑战的有效性。我们介绍了两种超微孔材料Cu(cyhdc)和Cu(bdc),并评估了它们捕获C2H2的能力。在环境条件下,Cu(cyhdc)和Cu(bdc)对C2H2的吸收率分别为1.92 mmol g−1和1.44 mmol g−1。Cu(cyhdc)在298 K和1bar条件下的C2H2/CO2选择性为8.45。大规范蒙特卡罗模拟表明,C2H2分子与Cu(cyhdc)弯曲的环己烷孔壁之间的多重范德华相互作用增强了性能。重要的是,动态突破实验和可扩展的合成工艺验证了Cu(cyhdc)对C2H2/CO2混合物的实际分离潜力。这项工作提供了气体框架相互作用的机理见解和节能乙炔净化的潜在解决方案。关键词:C2H2/CO2分离;Ultramicroporous;有机框架;孔隙监禁;可伸缩的合成。
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引用次数: 0
On-line detection of additive concentrations in acidic copper plating solution for metal interconnection by an electrochemical microfluidic workstation† 电化学微流控工作站在线检测金属互连用酸性镀铜溶液中添加剂浓度
IF 11.9 Pub Date : 2025-06-26 DOI: 10.1039/D5IM00073D
Yi Zhao, Ju-Xing Zeng, Jia-Qiang Yang, Tao Song, Ren Hu, Jian-Jia Su, Bo Zhang, Fang-Zu Yang, Dongping Zhan and Lianhuan Han

On-line detection of additive concentrations in acidic copper (Cu) electroplating solution, including the suppressor, accelerator and leveler, is crucial for the industrial production of integrated circuit metal interconnections. For this purpose, a portable electrochemical microfluidic workstation (EMW) is developed. The polymer electrochemical microfluidic chip is designed and fabricated by 3D printing, in which a liquid mixer is integrated with an electrochemical microcell. The asymmetrically distributed herringbone microstructures in the microchannels (width: 400 μm, height: 300 μm, length: 4 cm) ensure the highly efficient mixture of solutions. In the electrochemical microcell, a 12.5 μm radius platinum ultramicroelectrode (Pt UME) acts as the working electrode. Based on the suppressing or accelerating effects of the additives on Cu electroplating, the calibration curves can be obtained by the stripping charge of electrodeposited Cu. Thus, the concentration of each additive in the acidic Cu electroplating solution can be detected on line and adjusted in time. The solution volume needed for each additive is approximately 220 μL. The detection error is lower than 10%, meeting the analytic requirements in industry. The automated EMW has the potential to replace the current manual cyclic voltammetry stripping (CVS) employed in lab analysis.

Keywords: Electrochemical microfluidic workstation; On-line detection of additive concentration; Microfluidic chip; Ultramicroelectrode; Acidic copper electroplating.

在线检测酸性铜(Cu)电镀溶液中的添加剂浓度,包括抑制剂、促进剂和矫直剂,对于集成电路金属互连的工业生产至关重要。为此,研制了便携式电化学微流体工作站(EMW)。采用3D打印技术设计制作了聚合物电化学微流控芯片,该芯片将液体混合器与电化学微电池集成在一起。微通道(宽400 μm,高300 μm,长4cm)中不对称分布的人字形微结构保证了溶液的高效混合。在电化学微电池中,半径为12.5 μm的铂超微电极(Pt UME)作为工作电极。基于添加剂对Cu电镀的抑制或加速作用,可以通过电沉积Cu的剥离电荷得到校准曲线。从而可以在线检测酸性镀铜液中各添加剂的浓度并及时调整。每种添加剂所需的溶液体积约为220 μL。检测误差小于10%,满足工业分析要求。自动化EMW有可能取代目前实验室分析中使用的手动循环伏安法溶出(CVS)。关键词:电化学微流控工作站;添加剂浓度在线检测;微流控芯片;Ultramicroelectrode;酸性镀铜。
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引用次数: 0
Fine-tuned ultramicroporous carbon materials via CO2 activation for molecular sieving of fluorinated propylene and propane† 通过CO2活化微调超微孔碳材料用于氟化丙烯和丙烷†的分子筛分
IF 11.9 Pub Date : 2025-06-24 DOI: 10.1039/D5IM00079C
Yiwen Fu, Liangzheng Sheng, Wei Xia, Guangtong Hai, Jialei Yan, Lihang Chen, Qiwei Yang, Zhiguo Zhang, Qilong Ren and Zongbi Bao

Ultramicroporous carbon materials with precisely engineered pore structures offer a promising pathway for the challenging separation of fluorinated gases with similar physicochemical properties, such as C3F6 (fluorinated propylene) and C3F8 (fluorinated propane). In this work, we report the synthesis of CO2-activated porous carbon adsorbents derived from a precursory resin and systematically investigate their molecular sieving behavior for C3F6/C3F8 mixtures. Through controlled thermal pyrolysis and stepwise CO2 activation, we tailored ultramicropore size distributions to selectively exclude or admit target molecules. Adsorption studies reveal that optimal CO2 activation yields pore sizes that enable effective separation of C3F6 from C3F8, achieving efficient molecular sieving due to size exclusion effects. Excessive activation, however, generates larger pores that diminish selectivity due to nonspecific affinity for both gases. The findings highlight the importance of ultramicropore control for energy-efficient separation of fluorinated hydrocarbons and provide insights for designing advanced adsorbents for industrial gas purification.

Keywords: Electronic specialty gas (ESGs); Adsorption separation; Phenolic resin-derived carbon; Molecular sieving; C3F6/C3F8.

具有精确设计的孔结构的超微孔碳材料为具有类似物理化学性质的氟化气体(如C3F6(氟化丙烯)和C3F8(氟化丙烷))的挑战性分离提供了一条有希望的途径。在这项工作中,我们报道了由前驱树脂衍生的co2活化多孔碳吸附剂的合成,并系统地研究了它们对C3F6/C3F8混合物的分子筛分行为。通过控制热裂解和逐步CO2活化,我们定制了超微孔尺寸分布,以选择性地排除或允许目标分子。吸附研究表明,最佳的CO2活化产生的孔径能够使C3F6和C3F8有效分离,并由于粒径排斥效应实现高效的分子筛分。然而,由于对两种气体的非特异性亲和力,过度活化会产生更大的孔隙,从而降低选择性。该研究结果强调了超微孔控制对氟化烃节能分离的重要性,并为设计用于工业气体净化的高级吸附剂提供了见解。关键词:电子特种气体;吸附分离;酚醛树脂衍生碳;分子筛选;C3F6 / C3F8。
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引用次数: 0
Synergistic strengthening of ion-exchange resins by post-crosslinking and selective sulfonation for PGMEA purification† 离子交换树脂的后交联和选择性磺化对PGMEA净化的协同强化作用
IF 11.9 Pub Date : 2025-06-24 DOI: 10.1039/D5IM00078E
Nian Zhang, Fan Liu, Dan Li, Chunyan Shi, Aizi Cai, Shizhe Xu, Yaocheng Dai, Yan Wang and Haifeng Dong

PGMEA is widely used as a solvent and diluent for photoresists, yet developing an efficient resin that simultaneously resists organic dissolution and removes trace metal ions presents a significant challenge. To overcome this, a novel sulfonated hyper-cross-linked resin (2-CS-DVB-SO3H) was synthesized through a multi-step process involving the preparation of a Cl-functionalized gel polymer, followed by sulfonation and post-crosslinking. The effects of the monomers, crosslinking degree, sulfonation degree, dosage, adsorption temperature, and resin stability on its purity performance were discussed. The resulting resin demonstrated exceptional stability in organic media and effectively purified PGMEA under optimized conditions (30% crosslinking, 4.69% S content, and 0.2 g mL−1 resin dosage), with Ti, Co, Ni, and Cu metal ion concentrations reduced below 10 ppb. This process elevated PGMEA purity from 98.90% to 99.48%. Thermodynamic analysis revealed the adsorption to be non-spontaneous. The resin maintained chemical stability in PGMEA within 18 h. FT-IR and XPS data identified ion exchange, electrostatic interactions and lone electron pair coordination between sulfonic acid groups and metal ions as the binding mechanisms. The hydrogen bonds formed between Cl on the resin and hydroxyl groups in methanol (as organic impurities) were considered the primary factor responsible for enhancing the purity of PGMEA. These results collectively establish 2-CS-DVB-SO3H as a robust and reliable material for metal ion removal in PGMEA purification, thereby improving the purity of photoresist solvents and potentially enhancing photoresist performance.

Keywords: Sulfonated resin; PGMEA; Metal ion removal; Purification mechanisms.

PGMEA被广泛用作光阻剂的溶剂和稀释剂,但开发一种同时抵抗有机溶解和去除微量金属离子的高效树脂是一个重大挑战。为了克服这一问题,通过制备cl功能化凝胶聚合物,然后进行磺化和后交联,合成了一种新型磺化超交联树脂(2-CS-DVB-SO3H)。讨论了单体、交联度、磺化度、用量、吸附温度和树脂稳定性对其纯度性能的影响。所得树脂在有机介质中表现出优异的稳定性,并在优化条件下(交联30%,S含量4.69%,树脂用量0.2 g mL - 1)有效纯化了PGMEA, Ti, Co, Ni和Cu金属离子浓度降至10 ppb以下。该工艺将PGMEA的纯度从98.90%提高到99.48%。热力学分析表明,吸附是非自发的。树脂在PGMEA中保持了18 h的化学稳定性。FT-IR和XPS数据鉴定了磺酸基与金属离子之间的离子交换、静电相互作用和孤电子对配位是其结合机制。树脂上的Cl−与甲醇中的羟基(作为有机杂质)之间形成的氢键被认为是提高PGMEA纯度的主要因素。这些结果共同证明了2-CS-DVB-SO3H是一种稳定可靠的材料,可以在PGMEA纯化中去除金属离子,从而提高光刻胶溶剂的纯度,并有可能提高光刻胶的性能。关键词:磺化树脂;PGMEA;金属离子去除;净化机制。
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引用次数: 0
Alternative sources of carbon for moving towards a sustainable carbon cycle 实现可持续碳循环的替代碳源
IF 11.9 Pub Date : 2025-06-21 DOI: 10.1039/D5IM00061K
Michele Aresta

This perspective identifies the carbon needs of the chemical and transport industries in the short-to-medium term, categorizes the available renewable alternative carbon sources (biomass, waste-plastics and CO2) to fossil carbon and discusses their usability and potential for the short-, medium- and long-term use. Given the constraints to the use of biomass (grown on purpose and waste) and the limited overall amount of waste plastics, CO2 is the most abundant and at-hand source of renewable carbon. The conversion of CO2 into chemicals, materials and energy products is discussed for meeting the energetic and hydrogen demands. The use of solar energy as a primary energy source and water as a proton and electron source in recycling carbon via CO2 conversion into energy products is also elucidated. E-fuels and solar-fuels are compared for their commercialization, and the benefits of co-processing CO2 and water (in electrochemical, photochemical and photoelectrochemical processes) instead of producing green-H2 for CO2 reduction are emphasized.

Keywords: Carbon dioxide as source of renewable carbon; Carbon cyclic economy; Photochemistry; Photoelectrochemistry; E-fuels; Solar-fuels

这一观点确定了化学和运输工业在中短期内的碳需求,将现有的可再生替代碳源(生物质、废塑料和二氧化碳)分类为化石碳,并讨论了它们在短期、中期和长期使用方面的可用性和潜力。考虑到生物质的使用受到限制(有目的的种植和废物)以及废塑料总量有限,二氧化碳是最丰富和最容易获得的可再生碳来源。讨论了将二氧化碳转化为化学品、材料和能源产品以满足能源和氢的需求。还阐述了利用太阳能作为主要能源和水作为质子和电子源,通过二氧化碳转化为能源产品来回收碳。对电子燃料和太阳能燃料的商业化进行了比较,并强调了共同处理二氧化碳和水(在电化学、光化学和光电化学过程中)而不是生产绿色h2以减少二氧化碳的好处。关键词:二氧化碳作为可再生碳源;碳循环经济;光化学;光电化学;E-fuels;太阳能原料
{"title":"Alternative sources of carbon for moving towards a sustainable carbon cycle","authors":"Michele Aresta","doi":"10.1039/D5IM00061K","DOIUrl":"https://doi.org/10.1039/D5IM00061K","url":null,"abstract":"<p>This perspective identifies the carbon needs of the chemical and transport industries in the short-to-medium term, categorizes the available renewable alternative carbon sources (biomass, waste-plastics and CO<small><sub>2</sub></small>) to fossil carbon and discusses their usability and potential for the short-, medium- and long-term use. Given the constraints to the use of biomass (grown on purpose and waste) and the limited overall amount of waste plastics, CO<small><sub>2</sub></small> is the most abundant and at-hand source of renewable carbon. The conversion of CO<small><sub>2</sub></small> into chemicals, materials and energy products is discussed for meeting the energetic and hydrogen demands. The use of solar energy as a primary energy source and water as a proton and electron source in recycling carbon <em>via</em> CO<small><sub>2</sub></small> conversion into energy products is also elucidated. E-fuels and solar-fuels are compared for their commercialization, and the benefits of co-processing CO<small><sub>2</sub></small> and water (in electrochemical, photochemical and photoelectrochemical processes) instead of producing green-H<small><sub>2</sub></small> for CO<small><sub>2</sub></small> reduction are emphasized.</p><p>Keywords: Carbon dioxide as source of renewable carbon; Carbon cyclic economy; Photochemistry; Photoelectrochemistry; E-fuels; Solar-fuels</p>","PeriodicalId":29808,"journal":{"name":"Industrial Chemistry & Materials","volume":" 6","pages":" 703-709"},"PeriodicalIF":11.9,"publicationDate":"2025-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://pubs.rsc.org/en/content/articlepdf/2025/im/d5im00061k?page=search","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145493313","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Nitrogen doped hierarchical porous carbon for supercapacitors and zinc ion hybrid capacitors† 超级电容器和锌离子杂化电容器用氮掺杂分层多孔碳†
Pub Date : 2025-06-20 DOI: 10.1039/D5IM00044K
Jun Ni, Weijian Chen, Xinyang Zhang, Hui Xu, Minghui Zhang and Xiaoliang Wu

Heteroatom-doped hierarchical porous carbon materials demonstrate significant promise for energy storage applications. In this paper, nitrogen-doped hierarchical porous carbon (NPC) materials were synthesized by one-step carbonization process using agar as the carbon precursor, urea as the nitrogen precursor, and KHCO3 as the activating agent. Owing to the combined influence of substantial nitrogen and oxygen functional groups, interconnected hierarchical porous structure and large specific surface area, the NPC-600 electrode delivers a high specific capacitance of 450 F g−1 and remarkable cyclic stability. Moreover, the NPC-600//NPC-600 symmetrical supercapacitor delivers an energy density of 29.41 Wh kg−1 and good cyclic performance. More interestingly, a zinc ion hybrid capacitor (ZIHC) constructed with NPC-600 as the positive electrode achieves a capacitance of 368.78 F g−1 (163.9 mAh g−1), an energy density reaching 120.75 Wh kg−1 and superior cyclic characteristics. The research affords a straightforward way for fabricating heteroatom-doped porous carbon as electrode for supercapacitor and ZIHCs.

Keywords: Hierarchical porous carbon; KHCO3; Agar; Supercapacitor; Zinc ion hybrid capacitor.

杂原子掺杂层次化多孔碳材料在储能应用方面具有重要前景。本文以琼脂为碳前驱体,尿素为氮前驱体,KHCO3为活化剂,采用一步炭化法制备了氮掺杂层次多孔碳(NPC)材料。由于大量的氮和氧官能团、相互连接的分层多孔结构和大比表面积的共同影响,NPC-600电极具有450 F g−1的高比电容和卓越的循环稳定性。此外,NPC-600//NPC-600对称超级电容器提供29.41 Wh kg−1的能量密度和良好的循环性能。更有趣的是,以NPC-600为正极构建的锌离子混合电容器(ZIHC)的电容达到368.78 F g−1 (163.9 mAh g−1),能量密度达到120.75 Wh kg−1,具有优异的循环特性。该研究为制备杂原子掺杂多孔碳作为超级电容器和zihc电极提供了一种简单易行的方法。关键词:分级多孔碳;KHCO3;琼脂;超级电容器;锌离子杂化电容器。
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引用次数: 0
Continuous direct air capture and conversion tandem system applicable to a wide range of CO2 concentrations† 连续直接空气捕获和转换串联系统适用于广泛的二氧化碳浓度†
IF 11.9 Pub Date : 2025-06-13 DOI: 10.1039/D5IM00028A
Shinta Miyazaki, Akihiko Anzai, Masaki Yoshihara, Hsu Sheng Feng, Shinya Mine, Takashi Toyao and Ken-ichi Shimizu

The concentrations of CO2 emitted from different CO2 sources vary significantly. Thus, processes capable of accommodating a broad range of CO2 concentrations, from 0.04% (air) to 10% (power plants), must be developed to achieve carbon neutrality. In this study, we developed a two-step CO2 capture and hydrogenation system by employing Rb-oxide-incorporated zeolites as CO2 adsorbents and Ni/CeO2 or Cu/ZnO/Al2O3 as catalysts for CO2 hydrogenation. This process is suitable for continuous operation over a temperature swing of 40–200 °C. Notably, this system can operate at low temperatures (below 200 °C) using a simple temperature-swing process in the presence of O2. Compared with more than 100 previously reported systems that can convert CO2 including O2 to green fuels such as CO or CH4, the proposed system achieved the best CO2 conversions to CH4 and CO.

Keywords: Direct air capture (DAC); Zeolite sorbent; Temperature swing adsorption (TSA); Methanation; Reverse water-gas shift (RWGS).

不同CO2源排放的CO2浓度差别很大。因此,必须开发能够适应从0.04%(空气)到10%(发电厂)的广泛二氧化碳浓度范围的工艺,以实现碳中和。在本研究中,我们开发了一种两步CO2捕获和加氢系统,采用氧化铷掺杂的沸石作为CO2吸附剂,Ni/CeO2或Cu/ZnO/Al2O3作为CO2加氢催化剂。该工艺适用于在40-200°C的温度范围内连续操作。值得注意的是,该系统可以在O2存在下使用简单的变温过程在低温(低于200°C)下运行。与之前报道的100多种将二氧化碳(包括O2)转化为绿色燃料(如CO或CH4)的系统相比,该系统实现了最佳的CO2转化为CH4和CO。沸石吸附剂;变温吸附;甲烷化;反向水气转换(RWGS)。
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引用次数: 0
Lithographic performances of aryl sulfonate ester-modified polystyrenes as nonchemically amplified resists† 芳基磺酸酯改性聚苯乙烯的光刻性能
IF 11.9 Pub Date : 2025-06-12 DOI: 10.1039/D5IM00046G
Rongrong Peng, Peng Lian, Jinping Chen, Tianjun Yu, Yi Zeng, Shuangqing Wang, Xudong Guo, Rui Hu, Jun Zhao, Yanqing Wu, Guoqiang Yang and Yi Li

Aryl sulfonate ester modified polystyrenes with different substituents (X–SEPS, X = H–, MeO–, and CN–) were synthesized by reversible addition-fragmentation chain transfer (RAFT) polymerization. The excellent thermal stability and film-forming capability of these three polymers suggest that they can satisfy the lithography process and are candidates for resist materials. Comparative electron beam lithography (EBL) demonstrates that the three resists (H–SEPS, MeO–SEPS and CN–SEPS) exhibit different EBL performances. Calculation of bond energies for the model compounds suggests that the influence of substituent groups on the bond energy is not the reason for the differences in sensitivity. Results obtained using a fully automated dissipative quartz crystal microbalance (QCM) analyzer confirm that the influence of substituent groups on the solubility behavior of resist films in developers leads to different photolithographic performances. The H–SEPS resist exhibits better comprehensive performance than the MeO–SEPS and CN–SEPS resists, achieving an 18 nm line/space (L/S) pattern and a 10 nm line/4 space (L/4S) semi-dense pattern by EBL at doses of 3200 and 2800 μC cm−2, respectively. Further extreme ultraviolet lithography (EUVL) demonstrates the capability of H–SEPS resist to form 22 nm half-pitch (HP) patterns. The detailed study of the photochemical reaction and patterning mechanism suggests that the decomposition of sulfonate ester groups into polar sulfonic acid groups, along with a rearrangement, leads to a solubility switch of resist films in the developer.

Keywords: Nonchemically amplified resist; Reversible addition-fragmentation chain transfer polymerization; Aryl sulfonate; Electron beam lithography; Extreme ultraviolet lithography.

采用可逆加成-断裂链转移(RAFT)聚合法制备了不同取代基(X - seps、X = H -、MeO -和CN -)的芳基磺酸酯改性聚苯乙烯。这三种聚合物优异的热稳定性和成膜能力表明它们可以满足光刻工艺,是抗蚀剂材料的候选材料。对比电子束光刻(EBL)表明,H-SEPS、MeO-SEPS和CN-SEPS三种抗蚀剂表现出不同的EBL性能。模型化合物的键能计算表明,取代基对键能的影响不是导致灵敏度差异的原因。利用全自动耗散石英晶体微天平(QCM)分析仪获得的结果证实,取代基对显影剂中抗蚀剂薄膜溶解度的影响导致了不同的光刻性能。H-SEPS抗蚀剂的综合性能优于MeO-SEPS和cnn - seps抗蚀剂,在3200 μC cm−2和2800 μC cm−2的剂量下,H-SEPS抗蚀剂分别获得了18 nm的线/空间(L/S)和10 nm的线/4空间(L/4S)半致密图案。进一步的极紫外光刻(EUVL)证明了H-SEPS抗蚀剂形成22 nm半间距(HP)图案的能力。光化学反应和图像化机理的详细研究表明,磺酸酯基分解为极性磺酸基,并伴随着重排,导致了显影剂中抗蚀剂膜的溶解度切换。关键词:非化学放大抗蚀剂;可逆加成-破碎链转移聚合;芳基磺酸盐;电子束光刻;极紫外光刻。
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引用次数: 0
Engineering sulfonated polymers for the removal of ultra-trace complexed Cr(iii) in tris(2-carboxyethyl) isocyanurate photoresist resin monomers† 工程磺化聚合物用于去除三(2-羧基乙基)异氰脲酸酯光刻胶单体†中的超痕量络合Cr(iii)
IF 11.9 Pub Date : 2025-06-09 DOI: 10.1039/D5IM00057B
Huiyao Huang, Shiquan Zhong, Yawen Chen, Wangquan Gong, Changshen Ye, Ting Qiu and Jie Chen

The semiconductor manufacturing industry imposes stringent requirements on the metal ion content of photoresist resin monomers. Tris(2-carboxyethyl) isocyanurate (H3tci), a critical raw material for photoresist resin monomers, inevitably incorporates metal ions during production. However, its inherent carboxyethyl groups form stable coordination complexes with Cr(III), hindering the semiconductor-grade resin monomer production. To achieve the ultra-deep removal of Cr(III) at ultra-trace concentrations, inspired by the hard–soft-acid–base theory, we systematically modulated the electron-rich sulfonic acid group on polymers via controlled sulfonation conditions to achieve a novel series of adsorption materials (St) with ultra-high Cr(III) adsorption affinity. The adsorption–recrystallization process using 6 g of St-V-15 could reduce the Cr(III) concentration in a solution containing 1 g of H3tci from 840 ppb to 27.5 ppb. Furthermore, St-V-15 exhibited a maximum adsorption capacity of 145 mg g−1 calculated using the Langmuir model and a rapid initial adsorption rate of 82.92 mg g−1 min−1 at 333 K. Additionally, St-V-15 demonstrated exceptional selectivity for Cr(III) over competing ions (e.g., K(I), Mg(II), Na(I) and Zn(II)) and maintained stable performance over at least 10 adsorption–desorption cycles. The superior performance originated from the chelation between Cr(III) and the sites of O atoms (S–O and SO) combined with the electrostatic interaction between deprotonated sulfonic acid groups and Cr(III). These results position St-V-15 as a promising adsorption material for ultra-trace Cr(III) removal in H3tci, offering a cost-effective solution for semiconductor-grade resin monomer production for the very first time.

Keywords: Tris(2-carboxyethyl) isocyanurate; Complexed Cr(III); Ultra-trace; Cr(III) removal; Sulfonated polymers.

半导体制造业对光刻胶树脂单体的金属离子含量有严格的要求。三(2-羧基乙基)异氰尿酸酯(H3tci)是光刻胶树脂单体的关键原料,在生产过程中不可避免地掺入金属离子。然而,其固有的羧乙基与Cr(III)形成稳定的配位配合物,阻碍了半导体级树脂单体的生产。为了在超微量浓度下实现对Cr(III)的超深度去除,受硬-软酸碱理论的启发,我们通过控制磺化条件系统地调节聚合物上的富电子磺酸基团,从而获得一系列具有超高Cr(III)吸附亲和力的新型吸附材料(St)。采用6g St-V-15吸附-再结晶工艺,可使含1g H3tci溶液中的Cr(III)浓度从840ppb降至27.5 ppb。此外,根据Langmuir模型计算,St-V-15的最大吸附量为145 mg g−1,在333 K下的快速初始吸附速率为82.92 mg g−1 min−1。此外,St-V-15对Cr(III)的选择性优于竞争离子(如K(I)、Mg(II)、Na(I)和Zn(II)),并在至少10次吸附-解吸循环中保持稳定的性能。优异的性能源于Cr(III)与O原子(S-O和SO)位点的螯合作用以及去质子磺酸基与Cr(III)之间的静电相互作用。这些结果表明St-V-15是一种很有前途的吸附材料,可以去除H3tci中的超痕量Cr(III),首次为半导体级树脂单体生产提供了一种经济有效的解决方案。关键词:三(2-羧基乙基)异氰尿酸酯;复杂铬(III);Ultra-trace;铬(III)去除;磺化聚合物。
{"title":"Engineering sulfonated polymers for the removal of ultra-trace complexed Cr(iii) in tris(2-carboxyethyl) isocyanurate photoresist resin monomers†","authors":"Huiyao Huang, Shiquan Zhong, Yawen Chen, Wangquan Gong, Changshen Ye, Ting Qiu and Jie Chen","doi":"10.1039/D5IM00057B","DOIUrl":"https://doi.org/10.1039/D5IM00057B","url":null,"abstract":"<p>The semiconductor manufacturing industry imposes stringent requirements on the metal ion content of photoresist resin monomers. Tris(2-carboxyethyl) isocyanurate (H<small><sub>3</sub></small>tci), a critical raw material for photoresist resin monomers, inevitably incorporates metal ions during production. However, its inherent carboxyethyl groups form stable coordination complexes with Cr(<small>III</small>), hindering the semiconductor-grade resin monomer production. To achieve the ultra-deep removal of Cr(<small>III</small>) at ultra-trace concentrations, inspired by the hard–soft-acid–base theory, we systematically modulated the electron-rich sulfonic acid group on polymers <em>via</em> controlled sulfonation conditions to achieve a novel series of adsorption materials (St) with ultra-high Cr(<small>III</small>) adsorption affinity. The adsorption–recrystallization process using 6 g of St-<em>V</em>-15 could reduce the Cr(<small>III</small>) concentration in a solution containing 1 g of H<small><sub>3</sub></small>tci from 840 ppb to 27.5 ppb. Furthermore, St-<em>V</em>-15 exhibited a maximum adsorption capacity of 145 mg g<small><sup>−1</sup></small> calculated using the Langmuir model and a rapid initial adsorption rate of 82.92 mg g<small><sup>−1</sup></small> min<small><sup>−1</sup></small> at 333 K. Additionally, St-<em>V</em>-15 demonstrated exceptional selectivity for Cr(<small>III</small>) over competing ions (<em>e.g.</em>, K(<small>I</small>), Mg(<small>II</small>), Na(<small>I</small>) and Zn(<small>II</small>)) and maintained stable performance over at least 10 adsorption–desorption cycles. The superior performance originated from the chelation between Cr(<small>III</small>) and the sites of O atoms (S–O and S<img>O) combined with the electrostatic interaction between deprotonated sulfonic acid groups and Cr(<small>III</small>). These results position St-<em>V</em>-15 as a promising adsorption material for ultra-trace Cr(<small>III</small>) removal in H<small><sub>3</sub></small>tci, offering a cost-effective solution for semiconductor-grade resin monomer production for the very first time.</p><p>Keywords: Tris(2-carboxyethyl) isocyanurate; Complexed Cr(<small>III</small>); Ultra-trace; Cr(<small>III</small>) removal; Sulfonated polymers.</p>","PeriodicalId":29808,"journal":{"name":"Industrial Chemistry & Materials","volume":" 5","pages":" 618-630"},"PeriodicalIF":11.9,"publicationDate":"2025-06-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://pubs.rsc.org/en/content/articlepdf/2025/im/d5im00057b?page=search","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145078706","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Coarse-grained models for ionic liquids and applications to biological and electrochemical systems 离子液体的粗粒度模型及其在生物和电化学系统中的应用
Pub Date : 2025-06-09 DOI: 10.1039/D5IM00021A
Yang Ge, Qiang Zhu, Xueping Wang and Jing Ma

Ionic liquids (ILs) are a class of molten salts with a collection of exciting properties and have been employed for wide-ranging applications across chemistry, biology, and materials science. However, the high viscosity of ionic liquids challenges atomistic molecular dynamics (MD) simulations in studying their structure–property relationships on large spatiotemporal scales. Coarse-grained (CG) models provide insight into the microscopic structure and intermolecular interactions underlying various properties by eliminating unnecessary atomic details. The general protocol for proposing a new CG model is reviewed, including determination of CG representation and force field (FF) parameterization. Recent advances in polarizable CG models were discussed with the emphasis on Drude oscillators and QM-based polarizable models. An overview was given on some recent applications of machine learning (ML) techniques on development of CG potentials, including the utilization of an ML surrogate model for FF parameterization and the development of ML potentials. Applications and challenges of IL CG models in treating complex systems, including pure solvents, mixtures, biological systems, and electrochemically confined environments, were presented. Finally, prospects for the development of transferable IL CG models are highlighted to extend the applicability to more mesoscopic systems.

Keywords: Ionic liquids; Coarse-grained models; Polarization effect; Machine learning; Molecular dynamics simulation.

离子液体(ILs)是一类具有一系列令人兴奋的性质的熔盐,在化学、生物学和材料科学等领域有着广泛的应用。然而,离子液体的高粘度对原子分子动力学(MD)模拟在大时空尺度上研究其结构-性质关系提出了挑战。粗粒度(CG)模型通过消除不必要的原子细节,可以深入了解微观结构和各种特性背后的分子间相互作用。综述了提出一种新的质心模型的一般方法,包括质心表示的确定和力场参数化。讨论了偏振CG模型的最新进展,重点讨论了德鲁德振荡器和基于量子力学的偏振模型。综述了机器学习(ML)技术在CG电位发展方面的一些最新应用,包括利用ML代理模型进行FF参数化和ML电位的发展。介绍了IL - CG模型在处理复杂系统(包括纯溶剂、混合物、生物系统和电化学受限环境)中的应用和挑战。最后,展望了可转移IL - CG模型的发展前景,以扩大其对更多介观系统的适用性。关键词:离子液体;粗粒度模型;极化效应;机器学习;分子动力学模拟。
{"title":"Coarse-grained models for ionic liquids and applications to biological and electrochemical systems","authors":"Yang Ge, Qiang Zhu, Xueping Wang and Jing Ma","doi":"10.1039/D5IM00021A","DOIUrl":"https://doi.org/10.1039/D5IM00021A","url":null,"abstract":"<p>Ionic liquids (ILs) are a class of molten salts with a collection of exciting properties and have been employed for wide-ranging applications across chemistry, biology, and materials science. However, the high viscosity of ionic liquids challenges atomistic molecular dynamics (MD) simulations in studying their structure–property relationships on large spatiotemporal scales. Coarse-grained (CG) models provide insight into the microscopic structure and intermolecular interactions underlying various properties by eliminating unnecessary atomic details. The general protocol for proposing a new CG model is reviewed, including determination of CG representation and force field (FF) parameterization. Recent advances in polarizable CG models were discussed with the emphasis on Drude oscillators and QM-based polarizable models. An overview was given on some recent applications of machine learning (ML) techniques on development of CG potentials, including the utilization of an ML surrogate model for FF parameterization and the development of ML potentials. Applications and challenges of IL CG models in treating complex systems, including pure solvents, mixtures, biological systems, and electrochemically confined environments, were presented. Finally, prospects for the development of transferable IL CG models are highlighted to extend the applicability to more mesoscopic systems.</p><p>Keywords: Ionic liquids; Coarse-grained models; Polarization effect; Machine learning; Molecular dynamics simulation.</p>","PeriodicalId":29808,"journal":{"name":"Industrial Chemistry & Materials","volume":" 4","pages":" 383-411"},"PeriodicalIF":0.0,"publicationDate":"2025-06-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://pubs.rsc.org/en/content/articlepdf/2025/im/d5im00021a?page=search","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144641115","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
期刊
Industrial Chemistry & Materials
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