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Introduction to advanced electronic chemicals 介绍先进的电子化学品
IF 11.9 Pub Date : 2025-08-14 DOI: 10.1039/D5IM90014J
Ruixia Liu, Rong Sun and Guoqiang Yang

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引用次数: 0
Advances in coupling catalytic selective oxidation reactions with in situ synthesis of hydrogen peroxide 催化选择性氧化反应与过氧化氢原位合成耦合的研究进展
IF 11.9 Pub Date : 2025-07-17 DOI: 10.1039/D5IM00103J
Jinghui Lyu, Han Wu, Qingqing Li, Shihao Wang, Jinke Yao, Tao Liu, Wenying Chu, Feng Feng, Qunfeng Zhang, Qingtao Wang, Dahao Jiang, Guofu Zhang, Chunshan Lu, Chengrong Ding and Xiaonian Li

This review presents recent advances in coupling in situ hydrogen peroxide (H2O2) synthesis with selective oxidation reactions. As a green oxidant, H2O2 plays an important role in the chemical industry. However, conventional production methods often yield highly concentrated H2O2, which is not suitable for direct use in reactions and raises significant safety concerns. The integration of in situ H2O2 generation with selective oxidation allows for the immediate use of low-concentration H2O2, improving both safety and process efficiency. This review summarizes various strategies for in situ H2O2 production, including enzymatic and catalytic approaches, and discusses their application in representative oxidation reactions such as olefin epoxidation, benzene hydroxylation, methane oxidation, adipic acid synthesis, Fenton processes, oxidative desulfurization, and the oxidation of sulfides to sulfones. Special attention is given to recent developments in catalyst composition and structural design, particularly in olefin oxidation. This review concludes with a summary of the advantages of in situ H2O2 synthesis and offers perspectives on future research directions aimed at improving reaction efficiency, economic feasibility, and the development of sustainable green chemistry technologies.

Keywords: In situ hydrogen peroxide; Olefin epoxidation; Benzene hydroxylation; Tandem reaction; Desulfurization.

综述了选择性氧化反应偶联原位合成过氧化氢(H2O2)的研究进展。H2O2作为一种绿色氧化剂,在化学工业中发挥着重要作用。然而,传统的生产方法通常会产生高浓度的H2O2,不适合直接用于反应,并且会引起严重的安全问题。将原位H2O2生成与选择性氧化相结合,可以立即使用低浓度H2O2,从而提高安全性和工艺效率。本文综述了原位生产H2O2的各种策略,包括酶和催化方法,并讨论了它们在烯烃环氧化、苯羟基化、甲烷氧化、己二酸合成、Fenton工艺、氧化脱硫和硫化物氧化制砜等代表性氧化反应中的应用。特别关注催化剂组成和结构设计的最新发展,特别是在烯烃氧化方面。本文总结了原位合成H2O2的优点,并对未来的研究方向进行了展望,旨在提高反应效率、经济可行性和发展可持续的绿色化学技术。关键词:原位过氧化氢;烯烃环氧化作用;苯羟基化;串联反应;脱硫。
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引用次数: 0
Ionic liquids: a pitocin for next-generation electronic information materials? 离子液体:下一代电子信息材料的催生剂?
IF 11.9 Pub Date : 2025-07-17 DOI: 10.1039/D5IM00098J
Mengyue Li, Bin He, Yangyang Jiang, Ruirui Wang, Cunliang Gan, Fengqi Ji, Yao Li and Ruixia Liu

Electronic information materials (EIMs) are key enablers for building a smart society. As the material carriers of next-generation information technology, the development of EIMs is increasingly constrained by the challenges of manufacturing precision, heterogeneous integration reliability, and circular economy compatibility. As traditional approaches struggle to meet the demands for nanoscale machining, low power consumption, structural flexibility, and environmental compatibility, there is an urgent need for disruptive materials and methodologies. Ionic liquids (ILs), with their unique combination of tunable molecular structures, negligible volatility, broad electrochemical windows, and strong solvation capabilities, offer a promising route to address these bottlenecks. As dynamic reaction media, ILs precisely regulate the nucleation kinetics and interfacial behaviours of zero dimension (0D) quantum dots, one dimension (1D) nanowires, and two dimension (2D) semiconductors through their unique solvation environments, yielding advanced materials with next-generation EIMs. Leveraging hydrogen bonding and ion-exchange interactions, ILs enable selective extraction and recycling of critical electronic chemicals (e.g., rare earth elements, conductive polymers), offering greener alternatives to conventional solvent-based processes. In field-effect transistors and flexible electronics, ILs improve charge transport efficiency, reduce operating voltages, and enhance interfacial stability, while their compatibility with heterogeneous integration addresses reliability challenges in scalable manufacturing. This review systematically examines ILs roles in advancing EIMs and proposes design principles for their targeted application, highlighting their potential to drive sustainable innovation in electronic materials science.

Keywords: Ionic liquids; Electronic information materials; Separation and purification; Electronic devices.

电子信息材料(EIMs)是建设智慧社会的关键推动者。作为下一代信息技术的材料载体,电子制造业的发展日益受到制造精度、异构集成可靠性和循环经济兼容性等挑战的制约。由于传统方法难以满足纳米级加工、低功耗、结构灵活性和环境兼容性的要求,因此迫切需要突破性的材料和方法。离子液体(ILs)具有独特的可调分子结构、可忽略的挥发性、广泛的电化学窗口和强大的溶剂化能力,为解决这些瓶颈提供了一条有希望的途径。作为动态反应介质,il通过其独特的溶剂化环境精确调节零维(0D)量子点、一维(1D)纳米线和二维(2D)半导体的成核动力学和界面行为,从而产生具有下一代EIMs的先进材料。利用氢键和离子交换相互作用,ILs可以选择性地提取和回收关键的电子化学品(例如,稀土元素,导电聚合物),为传统的溶剂基工艺提供更环保的替代品。在场效应晶体管和柔性电子产品中,集成电路提高了电荷传输效率,降低了工作电压,增强了接口稳定性,同时它们与异构集成的兼容性解决了可扩展制造中的可靠性挑战。这篇综述系统地研究了ILs在推进电子材料科学中的作用,并提出了针对其目标应用的设计原则,强调了它们在推动电子材料科学可持续创新方面的潜力。关键词:离子液体;电子信息资料;分离纯化;电子设备。
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引用次数: 0
Soft porous crystals: flexible MOFs as a new class of adaptive materials 软多孔晶体:柔性MOFs是一类新型的自适应材料
IF 11.9 Pub Date : 2025-07-16 DOI: 10.1039/D5IM00067J
Jiahui Guo, Sai Chu, Fangli Yuan, Ken-ichi Otake, Ming-Shui Yao and Susumu Kitagawa

Soft porous crystals (SPCs), particularly soft metal–organic frameworks (MOFs), represent a promising class of crystalline porous materials distinguished by their structural flexibility, dynamic behavior, and strong responsiveness to external stimuli. These features set them apart from conventional rigid materials and make them highly attractive for advanced technological applications. Despite extensive research on MOFs overall, soft MOFs remain relatively underexplored, and further investigation into their potential is essential for advancing materials science and enabling next-generation technologies. Although both SPCs and their rigid counterparts face common challenges in long-term operational stability (thermodynamic, chemical resistance, and mechanical durability) and large-scale high-quality production, the adaptive properties of SPCs—such as energy efficiency, high selectivity, and high capture efficiency—open up new frontiers for industrial production and real-world applications. In this perspective, to gain a comprehensive understanding of their promising applications, the research landscape is divided based on dosage usage regarding scaling softness, covering both (i) moderate and high-dose applications (storage and separation, catalysis, and energy storage) and (ii) trace or low-dose applications (electronic devices, biomedicine, and nuclear industry), and summarize the key technological fields within each category. It should be noted that high-quality SPCs can typically be obtained at low doses. However, at high doses, the increased presence of defects or disorder may lead to non-uniform structural transformations that propagate through the material. This behavior must be carefully considered in practical applications. Ultimately, an insightful outlook on the promising prospects of SPCs is provided.

Keywords: Soft porous crystals; Metal–organic frameworks; Flexibility; Applications; Industrialization.

软孔晶体(SPCs),特别是软金属有机框架(mof),是一类很有前途的晶体多孔材料,其特点是其结构柔韧性、动态行为和对外部刺激的强响应性。这些特点使它们有别于传统的刚性材料,并使它们对先进的技术应用具有很高的吸引力。尽管对mof进行了广泛的研究,但软mof的开发仍然相对不足,进一步研究其潜力对于推进材料科学和实现下一代技术至关重要。尽管SPCs和它们的刚性对应体在长期运行稳定性(热力学、耐化学性和机械耐久性)和大规模高质量生产方面面临着共同的挑战,但SPCs的自适应特性(如能源效率、高选择性和高捕获效率)为工业生产和实际应用开辟了新的领域。从这个角度来看,为了全面了解它们的应用前景,根据剂量使用对结垢柔软度的研究前景进行了划分,包括(i)中剂量和高剂量应用(储存和分离,催化和能量存储)和(ii)痕量或低剂量应用(电子设备,生物医学和核工业),并总结了每个类别中的关键技术领域。应该指出的是,高质量的SPCs通常可以在低剂量下获得。然而,在高剂量下,缺陷或无序的增加可能导致通过材料传播的不均匀结构转变。在实际应用中必须仔细考虑这种行为。最后,对SPCs的发展前景进行了展望。关键词:软多孔晶体;有机框架;灵活性;应用程序;工业化。
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引用次数: 0
Hybrid alkyl-ligand tin-oxo clusters for enhanced lithographic patterning performance via intramolecular interactions† 杂化烷基配体锡氧簇通过分子内相互作用增强光刻图版性能
IF 11.9 Pub Date : 2025-07-10 DOI: 10.1039/D5IM00058K
Hao Chen, Wenzheng Li, Yingdong Zhao, Xinyan Huang, Jialong Zhang, Peijun Ji, Jun Zhao, Pengzhong Chen and Xiaojun Peng

Tin-oxo clusters (TOCs) are promising candidates for next-generation extreme ultraviolet (EUV) photoresist materials due to their strong EUV absorption properties and small molecular sizes. The surface ligands are critical to the photolithographic patterning process; however, the precise regulatory mechanisms governing their functionality require further investigation. Building upon our previously reported Sn4-oxo clusters, Sn4–Me–C10 and Sn4–Bu–C10, which incorporate butyl and methyl groups, respectively, this study presents the synthesis of a novel cluster, Sn4-MB, which integrates both butyl and methyl groups within the same Sn4-oxo core. This new compound demonstrates superior patterning performance compared to both Sn4–Me–C10 and Sn4–Bu–C10, as well as their mixed formulations. The enhanced performance is attributed to the intramolecular hybridization between Sn–methyl and Sn–butyl moieties in Sn4-MB, which facilitates radical feedback regulation, thereby minimizing energy dissipation and suppressing the extent of reaction diffusion during pattern formation. In electron beam lithography (EBL) exposure experiments, optimization of the developer and reduction of film thickness allowed Sn4-MB to achieve lines with a critical dimension (CD) of 17 nm. Furthermore, during EUV exposure, Sn4-MB produced 75 nm pitch lines at a dose of 150 mJ cm−2, with a line CD of 33 nm. This study provides an effective molecular design strategy for enhancing the lithographic performance of TOC photoresists, highlighting their substantial potential for next-generation EUV lithography applications.

Keywords: Tin-oxo clusters; Intramolecular radical regulation; Photoresist; Electron beam lithography; Extreme ultraviolet lithography.

锡氧簇(Tin-oxo clusters, TOCs)由于具有较强的极紫外吸收性能和小分子尺寸,是下一代极紫外光刻胶材料的理想候选材料。表面配体对光刻图案化过程至关重要;然而,控制其功能的精确调节机制需要进一步研究。在我们之前报道的Sn4-oxo簇Sn4-Me-C10和Sn4-Bu-C10的基础上,本研究提出了一种新的簇Sn4-MB,它在同一个Sn4-oxo核心中集成了丁基和甲基。与Sn4-Me-C10和Sn4-Bu-C10及其混合配方相比,该新化合物具有优越的图图化性能。Sn4-MB中sn -甲基和sn -丁基基团之间的分子内杂交有利于自由基反馈调节,从而最大限度地减少了能量耗散,抑制了图案形成过程中反应扩散的程度。在电子束光刻(EBL)曝光实验中,优化显影剂和减小薄膜厚度使Sn4-MB获得了临界尺寸(CD)为17 nm的谱线。此外,在EUV暴露期间,Sn4-MB在150 mJ cm−2的剂量下产生75 nm的间距线,线CD为33 nm。本研究为提高TOC光刻胶的光刻性能提供了一种有效的分子设计策略,突出了其在下一代EUV光刻应用中的巨大潜力。关键词:锡氧簇;分子内自由基调控;光刻胶;电子束光刻;极紫外光刻。
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引用次数: 0
Efficient stacking of iso-butene in sulfonate functional metal–organic frameworks for efficient iso-butene/iso-butane separation† 异丁烯在磺酸盐功能金属-有机框架中的高效堆叠,用于异丁烯/异丁烷的高效分离
IF 11.9 Pub Date : 2025-07-02 DOI: 10.1039/D5IM00077G
Zhensong Qiu, Jiyu Cui, Dengzhuo Zhou, Zhenglu Yang, Xiaofei Lu, Xian Suo, Anyun Zhang, Xili Cui, Lifeng Yang and Huabin Xing

Separation of iso-butene and iso-butane is vital to producing high purity iso-butene feedstock, but is challenging because of their close molecular size and properties. Adsorptive separation using porous materials like metal organic frameworks (MOFs) is emerging as a potential energy-efficient alternative. But it's hindered by the lack of porous materials that exhibit satisfactory iso-butene/iso-butane separation performance. In this study, a novel sulfonate functionalized material, ZU-603, is reported to achieve the benchmark separation performance of iso-butene/iso-butane via exploiting the geometric difference of the carbon backbone between the planar iso-butene and tetrahedral iso-butane. Single-crystal analysis of ZU-603 loaded with iso-butene and simulation studies reveal that the sulfonate sites bound the iso-butene via Sδ⋯Hδ+C interactions, meanwhile iso-butene molecules are efficiently stacked via π–π interactions within the confined space, realizing higher stacking efficiency of iso-butene than iso-butane. ZU-603 shows an exceptionally high iso-butene adsorption uptake of 2.30 mmol g−1 (298 K, 1 bar) and a record high iso-butene/iso-butane uptake ratio of 2.77 at 1 bar, outperforming previously reported benchmarking materials (1.2). Fixed-bed breakthrough experiments confirm the impressive iso-butene/iso-butane dynamic separation ability of ZU-603. The work provides a potential shape-recognition strategy in designing functional materials for the efficient separation of hydrocarbons with similar physicochemical properties.

Keywords: Adsorptive separation; Hydrocarbon; Metal-organic frameworks; Iso-butene/iso-butane; Purification.

异丁烯和异丁烷的分离对于生产高纯度异丁烯原料至关重要,但由于它们的分子大小和性质接近,因此具有挑战性。利用多孔材料如金属有机骨架(MOFs)进行吸附分离是一种潜在的节能替代方法。但由于缺乏具有令人满意的异丁烯/异丁烷分离性能的多孔材料,阻碍了这一研究。在本研究中,一种新的磺酸盐功能化材料ZU-603利用平面异丁烯和四面体异丁烷之间碳主链的几何差异,实现了异丁烯/异丁烷的基准分离性能。负载异丁烯的su -603的单晶分析和模拟研究表明,磺酸位点通过Sδ−Hδ+C相互作用结合异丁烯,同时异丁烯分子在有限空间内通过π -π相互作用有效堆叠,实现了异丁烯比异丁烷更高的堆叠效率。ZU-603的异丁烯吸收率高达2.30 mmol g−1 (298 K, 1 bar),异丁烯/异丁烷吸收率高达2.77,优于先前报道的基准材料(1.2)。固定床突破实验证实了ZU-603具有令人印象深刻的异丁烯/异丁烷动态分离能力。这项工作为设计功能材料提供了一种潜在的形状识别策略,用于有效分离具有相似物理化学性质的碳氢化合物。关键词:吸附分离;碳氢化合物;有机框架;异丁烯/异丁烷;净化。
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引用次数: 0
Scalable copper-based coordination frameworks with tailored pore chemistry for energy-efficient C2H2/CO2 separation† 可扩展的铜基配位框架,具有量身定制的孔化学,用于节能C2H2/CO2分离†
IF 11.9 Pub Date : 2025-06-30 DOI: 10.1039/D5IM00068H
Hao-Ling Lan, Su-Tao Zheng, Li Xu, Guo-Wei Guan and Qing-Yuan Yang

The separation of C2H2/CO2 mixtures for acetylene purification presents both industrial significance and fundamental challenges due to their nearly identical kinetic diameters and similar physical properties. This study demonstrates the effectiveness of ultramicroporous metal–organic frameworks (MOFs) in addressing this challenge through precise pore confinement effects. We introduce two ultramicroporous materials, Cu(cyhdc) and Cu(bdc), and assess their ability to capture C2H2. Under ambient conditions, Cu(cyhdc) and Cu(bdc) exhibit C2H2 uptakes of 1.92 mmol g−1 and 1.44 mmol g−1, respectively. The most promising candidate is Cu(cyhdc), which possesses a C2H2/CO2 selectivity of 8.45 at 298 K and 1 bar. Grand canonical Monte Carlo simulations revealed that the enhanced performance originates from multiple van der Waals interactions between C2H2 molecules and the curved cyclohexane-derived pore walls of Cu(cyhdc). Importantly, dynamic breakthrough experiments and scalable synthesis processes validated the practical separation potential of Cu(cyhdc) for C2H2/CO2 mixtures. This work provides both mechanistic insights into gas–framework interactions and a potential solution for energy-efficient acetylene purification.

Keywords: C2H2/CO2 separation; Ultramicroporous; Metal–organic framework; Pore confinement; Scalable synthesis.

C2H2/CO2混合物的分离用于乙炔净化,由于其几乎相同的动力学直径和相似的物理性质,既具有工业意义,又面临着基本挑战。这项研究证明了超微孔金属有机框架(mof)通过精确的孔限制效应来解决这一挑战的有效性。我们介绍了两种超微孔材料Cu(cyhdc)和Cu(bdc),并评估了它们捕获C2H2的能力。在环境条件下,Cu(cyhdc)和Cu(bdc)对C2H2的吸收率分别为1.92 mmol g−1和1.44 mmol g−1。Cu(cyhdc)在298 K和1bar条件下的C2H2/CO2选择性为8.45。大规范蒙特卡罗模拟表明,C2H2分子与Cu(cyhdc)弯曲的环己烷孔壁之间的多重范德华相互作用增强了性能。重要的是,动态突破实验和可扩展的合成工艺验证了Cu(cyhdc)对C2H2/CO2混合物的实际分离潜力。这项工作提供了气体框架相互作用的机理见解和节能乙炔净化的潜在解决方案。关键词:C2H2/CO2分离;Ultramicroporous;有机框架;孔隙监禁;可伸缩的合成。
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引用次数: 0
On-line detection of additive concentrations in acidic copper plating solution for metal interconnection by an electrochemical microfluidic workstation† 电化学微流控工作站在线检测金属互连用酸性镀铜溶液中添加剂浓度
IF 11.9 Pub Date : 2025-06-26 DOI: 10.1039/D5IM00073D
Yi Zhao, Ju-Xing Zeng, Jia-Qiang Yang, Tao Song, Ren Hu, Jian-Jia Su, Bo Zhang, Fang-Zu Yang, Dongping Zhan and Lianhuan Han

On-line detection of additive concentrations in acidic copper (Cu) electroplating solution, including the suppressor, accelerator and leveler, is crucial for the industrial production of integrated circuit metal interconnections. For this purpose, a portable electrochemical microfluidic workstation (EMW) is developed. The polymer electrochemical microfluidic chip is designed and fabricated by 3D printing, in which a liquid mixer is integrated with an electrochemical microcell. The asymmetrically distributed herringbone microstructures in the microchannels (width: 400 μm, height: 300 μm, length: 4 cm) ensure the highly efficient mixture of solutions. In the electrochemical microcell, a 12.5 μm radius platinum ultramicroelectrode (Pt UME) acts as the working electrode. Based on the suppressing or accelerating effects of the additives on Cu electroplating, the calibration curves can be obtained by the stripping charge of electrodeposited Cu. Thus, the concentration of each additive in the acidic Cu electroplating solution can be detected on line and adjusted in time. The solution volume needed for each additive is approximately 220 μL. The detection error is lower than 10%, meeting the analytic requirements in industry. The automated EMW has the potential to replace the current manual cyclic voltammetry stripping (CVS) employed in lab analysis.

Keywords: Electrochemical microfluidic workstation; On-line detection of additive concentration; Microfluidic chip; Ultramicroelectrode; Acidic copper electroplating.

在线检测酸性铜(Cu)电镀溶液中的添加剂浓度,包括抑制剂、促进剂和矫直剂,对于集成电路金属互连的工业生产至关重要。为此,研制了便携式电化学微流体工作站(EMW)。采用3D打印技术设计制作了聚合物电化学微流控芯片,该芯片将液体混合器与电化学微电池集成在一起。微通道(宽400 μm,高300 μm,长4cm)中不对称分布的人字形微结构保证了溶液的高效混合。在电化学微电池中,半径为12.5 μm的铂超微电极(Pt UME)作为工作电极。基于添加剂对Cu电镀的抑制或加速作用,可以通过电沉积Cu的剥离电荷得到校准曲线。从而可以在线检测酸性镀铜液中各添加剂的浓度并及时调整。每种添加剂所需的溶液体积约为220 μL。检测误差小于10%,满足工业分析要求。自动化EMW有可能取代目前实验室分析中使用的手动循环伏安法溶出(CVS)。关键词:电化学微流控工作站;添加剂浓度在线检测;微流控芯片;Ultramicroelectrode;酸性镀铜。
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引用次数: 0
Fine-tuned ultramicroporous carbon materials via CO2 activation for molecular sieving of fluorinated propylene and propane† 通过CO2活化微调超微孔碳材料用于氟化丙烯和丙烷†的分子筛分
IF 11.9 Pub Date : 2025-06-24 DOI: 10.1039/D5IM00079C
Yiwen Fu, Liangzheng Sheng, Wei Xia, Guangtong Hai, Jialei Yan, Lihang Chen, Qiwei Yang, Zhiguo Zhang, Qilong Ren and Zongbi Bao

Ultramicroporous carbon materials with precisely engineered pore structures offer a promising pathway for the challenging separation of fluorinated gases with similar physicochemical properties, such as C3F6 (fluorinated propylene) and C3F8 (fluorinated propane). In this work, we report the synthesis of CO2-activated porous carbon adsorbents derived from a precursory resin and systematically investigate their molecular sieving behavior for C3F6/C3F8 mixtures. Through controlled thermal pyrolysis and stepwise CO2 activation, we tailored ultramicropore size distributions to selectively exclude or admit target molecules. Adsorption studies reveal that optimal CO2 activation yields pore sizes that enable effective separation of C3F6 from C3F8, achieving efficient molecular sieving due to size exclusion effects. Excessive activation, however, generates larger pores that diminish selectivity due to nonspecific affinity for both gases. The findings highlight the importance of ultramicropore control for energy-efficient separation of fluorinated hydrocarbons and provide insights for designing advanced adsorbents for industrial gas purification.

Keywords: Electronic specialty gas (ESGs); Adsorption separation; Phenolic resin-derived carbon; Molecular sieving; C3F6/C3F8.

具有精确设计的孔结构的超微孔碳材料为具有类似物理化学性质的氟化气体(如C3F6(氟化丙烯)和C3F8(氟化丙烷))的挑战性分离提供了一条有希望的途径。在这项工作中,我们报道了由前驱树脂衍生的co2活化多孔碳吸附剂的合成,并系统地研究了它们对C3F6/C3F8混合物的分子筛分行为。通过控制热裂解和逐步CO2活化,我们定制了超微孔尺寸分布,以选择性地排除或允许目标分子。吸附研究表明,最佳的CO2活化产生的孔径能够使C3F6和C3F8有效分离,并由于粒径排斥效应实现高效的分子筛分。然而,由于对两种气体的非特异性亲和力,过度活化会产生更大的孔隙,从而降低选择性。该研究结果强调了超微孔控制对氟化烃节能分离的重要性,并为设计用于工业气体净化的高级吸附剂提供了见解。关键词:电子特种气体;吸附分离;酚醛树脂衍生碳;分子筛选;C3F6 / C3F8。
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引用次数: 0
Synergistic strengthening of ion-exchange resins by post-crosslinking and selective sulfonation for PGMEA purification† 离子交换树脂的后交联和选择性磺化对PGMEA净化的协同强化作用
IF 11.9 Pub Date : 2025-06-24 DOI: 10.1039/D5IM00078E
Nian Zhang, Fan Liu, Dan Li, Chunyan Shi, Aizi Cai, Shizhe Xu, Yaocheng Dai, Yan Wang and Haifeng Dong

PGMEA is widely used as a solvent and diluent for photoresists, yet developing an efficient resin that simultaneously resists organic dissolution and removes trace metal ions presents a significant challenge. To overcome this, a novel sulfonated hyper-cross-linked resin (2-CS-DVB-SO3H) was synthesized through a multi-step process involving the preparation of a Cl-functionalized gel polymer, followed by sulfonation and post-crosslinking. The effects of the monomers, crosslinking degree, sulfonation degree, dosage, adsorption temperature, and resin stability on its purity performance were discussed. The resulting resin demonstrated exceptional stability in organic media and effectively purified PGMEA under optimized conditions (30% crosslinking, 4.69% S content, and 0.2 g mL−1 resin dosage), with Ti, Co, Ni, and Cu metal ion concentrations reduced below 10 ppb. This process elevated PGMEA purity from 98.90% to 99.48%. Thermodynamic analysis revealed the adsorption to be non-spontaneous. The resin maintained chemical stability in PGMEA within 18 h. FT-IR and XPS data identified ion exchange, electrostatic interactions and lone electron pair coordination between sulfonic acid groups and metal ions as the binding mechanisms. The hydrogen bonds formed between Cl on the resin and hydroxyl groups in methanol (as organic impurities) were considered the primary factor responsible for enhancing the purity of PGMEA. These results collectively establish 2-CS-DVB-SO3H as a robust and reliable material for metal ion removal in PGMEA purification, thereby improving the purity of photoresist solvents and potentially enhancing photoresist performance.

Keywords: Sulfonated resin; PGMEA; Metal ion removal; Purification mechanisms.

PGMEA被广泛用作光阻剂的溶剂和稀释剂,但开发一种同时抵抗有机溶解和去除微量金属离子的高效树脂是一个重大挑战。为了克服这一问题,通过制备cl功能化凝胶聚合物,然后进行磺化和后交联,合成了一种新型磺化超交联树脂(2-CS-DVB-SO3H)。讨论了单体、交联度、磺化度、用量、吸附温度和树脂稳定性对其纯度性能的影响。所得树脂在有机介质中表现出优异的稳定性,并在优化条件下(交联30%,S含量4.69%,树脂用量0.2 g mL - 1)有效纯化了PGMEA, Ti, Co, Ni和Cu金属离子浓度降至10 ppb以下。该工艺将PGMEA的纯度从98.90%提高到99.48%。热力学分析表明,吸附是非自发的。树脂在PGMEA中保持了18 h的化学稳定性。FT-IR和XPS数据鉴定了磺酸基与金属离子之间的离子交换、静电相互作用和孤电子对配位是其结合机制。树脂上的Cl−与甲醇中的羟基(作为有机杂质)之间形成的氢键被认为是提高PGMEA纯度的主要因素。这些结果共同证明了2-CS-DVB-SO3H是一种稳定可靠的材料,可以在PGMEA纯化中去除金属离子,从而提高光刻胶溶剂的纯度,并有可能提高光刻胶的性能。关键词:磺化树脂;PGMEA;金属离子去除;净化机制。
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Industrial Chemistry & Materials
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