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Multifunction InGaAs detector with on-chip signal processing 具有片上信号处理功能的多功能InGaAs探测器
Pub Date : 2013-06-18 DOI: 10.1117/12.2015580
L. Shkedy, R. Fraenkel, T. Fishman, A. Giladi, L. Bykov, I. Grimberg, E. Ilan, Shay Vaserman, A. Koifman
Advanced electro-optical systems are designed towards a more compact, low power, and low cost solution with respect to traditional systems. Integration of several components or functionalities, such as infrared imager, laser designator, laser range finder (LRF), into one multi-function detector serves this trend. SNIR Read-Out Integrated Circuit (ROIC) incorporates this high level of signal processing and with relatively low power consumption. In this paper we present measurement results from a Focal Plane Array (FPA) where the SNIR ROIC is Flip-Chip bonded to a 15µm pitch VGA InGaAs detector array. The FPA is integrated into a metallic vacuum sealed package. We present InGaAs arrays with dark current density below 1.5 nA/cm2 at 280K (typically 1fA), Quantum Efficiency higher than 80% at 1550 nm and operability better than 99.5%. The metallic package is integrated with a low power proximity electronics which delivers Camera Link output. The overall power dissipation is less than 1W, not including Thermal-Electric Cooling (TEC), which is required in some applications. The various active and passive operation modes of this detector will be reviewed. Specifically, we concentrate on the "high gain" mode with low readout noise for Low Light Level imaging application. Another promising feature is the Asynchronous Laser Pulse Detection (ALPD) with remarkably low detection thresholds.
与传统系统相比,先进的光电系统旨在实现更紧凑、低功耗和低成本的解决方案。集成几个组件或功能,如红外成像仪,激光指示器,激光测距仪(LRF),成一个多功能探测器服务于这一趋势。SNIR读出集成电路(ROIC)结合了这种高水平的信号处理和相对较低的功耗。在本文中,我们给出了焦平面阵列(FPA)的测量结果,其中SNIR ROIC被倒装到15 μ m间距的VGA InGaAs探测器阵列上。FPA集成在金属真空密封封装中。我们的InGaAs阵列在280K(通常为1fA)下的暗电流密度低于1.5 nA/cm2,量子效率高于80%,可操作性优于99.5%。金属封装集成了低功耗近距离电子器件,提供Camera Link输出。整机功耗小于1W,不含某些应用需要的TEC (Thermal-Electric Cooling)功能。我们将回顾该探测器的各种主动和被动工作模式。具体来说,我们专注于“高增益”模式与低读出噪声的微光成像应用。另一个有前途的特点是异步激光脉冲检测(ALPD)具有非常低的检测阈值。
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引用次数: 11
A novel optical gating method for laser gated imaging 一种用于激光门控成像的新型光学门控方法
Pub Date : 2013-06-18 DOI: 10.1117/12.2018118
Ran Ginat, R. Schneider, Eyal Zohar, O. Nesher
For the past 15 years, Elbit Systems is developing time-resolved active laser-gated imaging (LGI) systems for various applications. Traditional LGI systems are based on high sensitive gated sensors, synchronized to pulsed laser sources. Elbit propriety multi-pulse per frame method, which is being implemented in LGI systems, improves significantly the imaging quality. A significant characteristic of the LGI is its ability to penetrate a disturbing media, such as rain, haze and some fog types. Current LGI systems are based on image intensifier (II) sensors, limiting the system in spectral response, image quality, reliability and cost. A novel propriety optical gating module was developed in Elbit, untying the dependency of LGI system on II. The optical gating module is not bounded to the radiance wavelength and positioned between the system optics and the sensor. This optical gating method supports the use of conventional solid state sensors. By selecting the appropriate solid state sensor, the new LGI systems can operate at any desired wavelength. In this paper we present the new gating method characteristics, performance and its advantages over the II gating method. The use of the gated imaging systems is described in a variety of applications, including results from latest field experiments.
在过去的15年里,Elbit系统公司一直致力于开发各种应用的时间分辨主动激光门控成像(LGI)系统。传统的LGI系统是基于高灵敏度的门控传感器,与脉冲激光源同步。Elbit适当的每帧多脉冲方法在LGI系统中得到了应用,显著提高了成像质量。LGI的一个重要特征是它能够穿透干扰介质,如雨、雾霾和某些类型的雾。目前的LGI系统基于图像增强器(II)传感器,在光谱响应、图像质量、可靠性和成本方面限制了系统。在Elbit开发了一种新型的专用光门控模块,解除了LGI系统对II的依赖。光选通模块不局限于辐射波长,并位于系统光学器件和传感器之间。这种光学门控方法支持传统固态传感器的使用。通过选择合适的固态传感器,新的LGI系统可以在任何所需的波长下工作。本文介绍了这种新型门控方法的特点、性能及其相对于II门控方法的优势。门控成像系统的使用描述了各种应用,包括最新的现场实验结果。
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引用次数: 1
Numerical simulation of quantum efficiency and surface recombination in HgCdTe IR photon-trapping structures HgCdTe红外光子捕获结构中量子效率和表面复合的数值模拟
Pub Date : 2013-06-18 DOI: 10.1117/12.2016496
J. Schuster, E. Bellotti
We have investigated the quantum effiency in HgCdTe photovoltaic pixel arrays employing a photon-trapping structure realized with a periodic array of pillars intended to provide broadband operation. We have found that the quantum efficiency depends heavily on the passivation of the pillar surface. Pillars passivated with anodicoxide have a large fixed positive charge on the pillar surface. We use our three-dimensional numerical simulation model to study the effect of surface charge and surface recombination velocity on the exterior of the pillars. We then evaluate the quantum efficiency of this structure subject to different surface conditions. We have found that by themselves, the surface charge and surface recombination are detrimental to the quantum efficiency but the quantum efficiency is recovered when both phenomena are present. We will discuss the effects of these phenomena and the trade offs that exist between the two.
我们研究了HgCdTe光伏像素阵列的量子效率,采用了一种光子捕获结构,该结构由旨在提供宽带操作的周期性柱阵实现。我们发现,量子效率在很大程度上取决于柱表面的钝化。用阳极氧化物钝化的柱在柱表面具有较大的固定正电荷。利用三维数值模拟模型研究了表面电荷和表面复合速度对矿柱外表面的影响。然后我们评估了不同表面条件下该结构的量子效率。我们发现,表面电荷和表面复合本身对量子效率是有害的,但当这两种现象同时存在时,量子效率得到了恢复。我们将讨论这些现象的影响以及两者之间存在的权衡。
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引用次数: 0
MEMS clocking-cantilever thermal detector MEMS时钟悬臂式热探测器
Pub Date : 2013-06-18 DOI: 10.1117/12.2018102
Evan M. Smith, Javaneh Boroumand, Imen Rezadad, P. Figueiredo, J. Nath, Deep Panjwani, R. Peale, O. Edwards
We present performance calculations for a MEMS cantilever device for sensing heat input from convection or radiation. The cantilever deflects upwards under an electrostatic repulsive force from an applied periodic saw-tooth bias voltage, and returns to a null position as the bias decreases. Heat absorbed during the cycle causes the cantilever to deflect downwards, thus decreasing the time to return to the null position. In these calculations, the total deflection with respect to absorbed heat is determined and is described as a function of time. We present estimates of responsivity and noise.
我们提出了一种MEMS悬臂装置的性能计算,用于感应对流或辐射的热输入。悬臂梁在施加周期性锯齿偏压的静电斥力作用下向上偏转,并随着偏压的减小而返回零位置。在循环过程中吸收的热量使悬臂向下偏转,从而减少了返回零位置的时间。在这些计算中,总偏转相对于吸收的热量是确定的,并被描述为时间的函数。我们给出了响应性和噪声的估计。
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引用次数: 7
Nanoantenna-enabled midwave infrared detection 纳米天线支持的中波红外探测
Pub Date : 2013-06-18 DOI: 10.1117/12.2016179
D. Peters, D. Leonhardt, C. Reinke, Jin K. Kim, J. Wendt, P. Davids, J. Klem
We show simulation results of the integration of a nanoantenna in close proximity to the active material of a photodetector. The nanoantenna allows a much thinner active layer to be used for the same amount of incident light absorption. This is accomplished through the nanoantenna coupling incoming radiation to surface plasmon modes bound to the metal surface. These modes are tightly bound and only require a thin layer of active material to allow complete absorption. Moreover, the nanoantenna impedance matches the incoming radiation to the surface waves without the need for an antireflection coating. While the nanoantenna concept may be applied to any active photodetector material, we chose to integrate the nanoantenna with an InAsSb photodiode. The addition of the nanoantenna to the photodiode requires changes to the geometry of the stack beyond the simple addition of the nanoantenna and thinning the active layer. We will show simulations of the electric fields in the nanoantenna and the active region and optimized designs to maximize absorption in the active layer as opposed to absorption in the metal of the nanoantenna. We will review the fabrication processes.
我们展示了在光电探测器活性材料附近集成纳米天线的模拟结果。纳米天线允许更薄的有源层用于相同数量的入射光吸收。这是通过纳米天线将入射辐射耦合到与金属表面结合的表面等离子体模式来实现的。这些模式紧密结合,只需要一层薄薄的活性材料就可以完全吸收。此外,纳米天线的阻抗使入射辐射与表面波相匹配,而不需要抗反射涂层。虽然纳米天线概念可以应用于任何有源光电探测器材料,但我们选择将纳米天线与InAsSb光电二极管集成在一起。在光电二极管中加入纳米天线,除了简单地增加纳米天线和减薄有源层外,还需要改变堆叠的几何形状。我们将展示纳米天线和有源区的电场模拟和优化设计,以最大化有源层的吸收,而不是纳米天线金属中的吸收。我们将回顾制造过程。
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引用次数: 2
High-resistant multispectral optical coatings for infrared applications 用于红外应用的高耐多光谱光学涂层
Pub Date : 2013-06-18 DOI: 10.1117/12.2014376
M. Degel, E. Gittler, T. Wagner, M. Serwazi, P. Maushake
Hybrid diamondlike carbon (h-DLC) coatings for multispectral use combine the hardness of protective DLC coatings with the multispectral functionality of high-end IR coatings.
用于多光谱用途的杂化类金刚石(h-DLC)涂层结合了保护性DLC涂层的硬度和高端红外涂层的多光谱功能。
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引用次数: 1
Dual- and triple-band AR coatings for IR systems 用于红外系统的双波段和三波段AR涂层
Pub Date : 2013-06-18 DOI: 10.1117/12.2014826
Daniel Cohen, Yevgeni Stolov, A. Azran, M. Gilo
Dual-band infrared camera systems allow viewing and comparison of the 3-5µ and 8-12µ spectrum regions, improve visibility at sunrise/sunset and help distinguish between targets and decoys. They also enhance the ability to defeat many IR countermeasures such as smoke, camouflage and flares. As dual band 3rd generation FLIR systems progress, we introduce coatings for these systems. This paper describes advanced dual band coatings for the 3-5µ and 8-12µ spectrum regions, with reference to single band coatings. Theoretical and measured designs are shown for ZnSe, ZnS, Ge and IG-6 substrates. Triple band AR coatings with additional transmittance at 1.06µ are also demonstrated.
双频红外相机系统允许查看和比较3-5µ和8-12µ光谱区域,提高日出/日落时的能见度,并有助于区分目标和诱饵。它们还增强了挫败许多红外对抗措施(如烟雾、伪装和照明弹)的能力。随着第三代双波段FLIR系统的发展,我们推出了用于这些系统的涂层。本文介绍了用于3-5µ和8-12µ光谱区域的先进双带涂层,并参考了单带涂层。给出了ZnSe、ZnS、Ge和IG-6衬底的理论设计和实测设计。三波段AR涂层具有1.06µ的额外透光率。
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引用次数: 3
Development of high-sensitivity SWIR APD receivers 高灵敏度SWIR APD接收机的研制
Pub Date : 2013-06-18 DOI: 10.1117/12.2016480
Xiaogang Bai, P. Yuan, James Chang, R. Sudharsanan, M. Krainak, Guangning Yang, Xiaoli Sun, W. Lu
Emerging short wavelength infrared (SWIR) LIght Detection And Ranging (LIDAR) and long range laser rangefinder systems, require large optical aperture avalanche photodiodes (APDs) receivers with high sensitivity and high bandwidth. A large optical aperture is critical to increase the optical coupling efficiency and extend the LIDAR sensing range of the above systems. Both APD excess noise and transimpedance amplifier (TIA) noise need to be reduced in order to achieve high receiver sensitivity. The dark current and capacitance of large area APDs increase with APD aperture and thus limit the sensitivity and bandwidth of receivers. Spectrolab has been developing low excess noise InAlAs/InGaAs APDs with impact ionization engineering (I2E) designs for many years and has demonstrated APDs with optical gain over 100 utilizing multiple period I2E structures in the APD multiplier. These high gain I2E APDs have an excess noise factor less than 0.15. With an optical aperture of 200 μm, low excess noise multiple periods I2E APDs have capacitances about 1.7 pF. In addition, optical gains of InAlAs based APDs show very little temperature dependence and will enable APD photoreceivers without thermal electric cooling.
新兴的短波红外(SWIR)光探测与测距(LIDAR)和远程激光测距系统需要具有高灵敏度和高带宽的大光学孔径雪崩光电二极管(apd)接收器。较大的光孔径对于提高光耦合效率和扩大上述系统的激光雷达探测范围至关重要。为了实现高接收机灵敏度,需要降低APD过量噪声和跨阻放大器(TIA)噪声。大面积APD的暗电流和电容随着APD孔径的增大而增大,从而限制了接收机的灵敏度和带宽。Spectrolab多年来一直致力于开发具有冲击电离工程(I2E)设计的低过量噪声InAlAs/InGaAs APD,并在APD乘法器中使用多周期I2E结构,展示了光学增益超过100的APD。这些高增益I2E apd的多余噪声系数小于0.15。光学孔径为200 μm,低多余噪声的多周期I2E APD的电容约为1.7 pF。此外,基于InAlAs的APD的光学增益对温度的依赖性很小,并且可以使APD光电接收器无需热电冷却。
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引用次数: 3
Nickel-oxide film as an AR coating of Si window for IR sensor packaging 氧化镍薄膜作为红外传感器封装硅窗的AR涂层
Pub Date : 2013-06-18 DOI: 10.1117/12.2013929
H. Shim, Dongsoo Kim, Ingu Kang, Jinkwan Kim, Hee-Chul Lee
An infrared (IR) transparent window is necessary for the IR sensor package. The most commonly used materials for IR transparent window are germanium (Ge) and silicon (Si). Ge has excellent optical properties but also the disadvantage of expensive price. Si has merits such as inexpensive cost and CMOS process compatibility but it has lower transmittance in the range of LWIR region than Ge. Therefore, an alternative anti-reflection (AR) coating is necessary to increase the transmittance of Si as an IR transparent window in the LWIR region. A simple single layer antireflection coating was newly designed on the silicon window for the infrared sensor package. Among the various materials, nickel oxide (NiO) was selected as an AR coating material due to its suitable optical properties and simple process. NiO film was deposited onto the double sided polished Si wafer by reactive rf sputtering with Ni target in an environment of Ar and O2 mixed gas. The thickness of the NiO film was determined by Essential Macleod simulation. FT-IR was used to measure the transmittance of the samples in the LWIR region. After the nickel oxide film was sputtered onto the double sides of the silicon wafer, the measured transmittance of the Si wafer was increased over 20% in the LWIR region compared with that of uncoated Si wafer. Additionally, annealing effect on the transmittance of NiO coated Si wafer was studied. By increasing the annealing temperature from 300° to 700°, an additional increase of transmittance was achieved.
红外(IR)透明窗口是红外传感器封装所必需的。红外透明窗最常用的材料是锗(Ge)和硅(Si)。锗具有优良的光学性能,但也有价格昂贵的缺点。硅具有成本低廉、兼容CMOS工艺等优点,但在低红外区透光率低于锗。因此,需要一种替代的抗反射(AR)涂层来增加Si作为低红外区域的红外透明窗口的透射率。在红外传感器封装的硅窗上设计了一种简单的单层增透涂层。在各种材料中,选择氧化镍(NiO)作为AR涂层材料,因为它具有合适的光学性能和简单的工艺。在Ar和O2混合气体环境下,用Ni靶材反应射频溅射法在双面抛光硅晶片上沉积了NiO薄膜。采用Essential Macleod模拟确定了NiO膜的厚度。利用傅里叶变换红外光谱(FT-IR)测量样品在LWIR区域的透过率。将氧化镍薄膜溅射到硅片的双面后,硅片在LWIR区域的透射率比未涂覆的硅片提高了20%以上。此外,还研究了退火对NiO包覆硅片透射率的影响。将退火温度从300°提高到700°,透射率进一步提高。
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引用次数: 1
3 mega-pixel InSb detector with 10μm pitch 3百万像素10μm间距InSb探测器
Pub Date : 2013-06-18 DOI: 10.1117/12.2015583
G. Gershon, A. Albo, M. Eylon, O. Cohen, Z. Calahorra, M. Brumer, M. Nitzani, E. Avnon, Y. Aghion, I. Kogan, E. Ilan, L. Shkedy
SCD has developed a new 1920x1536 / 10 μm digital Infrared detector for the MWIR window named Blackbird. The Blackbird detector features a Focal Plane Array (FPA) that incorporates two technological building blocks developed over the past few years. The first one is a 10 μm InSb pixel based on the matured planar technology. The second building block is an innovative 10 μm ReadOut Integrated Circuit (ROIC) pixel. The InSb and the ROIC arrays are connected using Flip-Chip technology by means of indium bumps. The digital ROIC consists a matrix of 1920x1536 pixels and has an analog to digital (A/D) converter per-channel (total of 1920x2 A/Ds). It allows for full frame readout at a high frame rate of up to 120 Hz. Such an on-chip A/D conversion eliminates the need for several A/D converters with fairly high power consumption at the system level. The ROIC power consumption at maximum bandwidth is less than 400 mW. It features a wide range of pixel-level functionality such as several conversion gain options and a 2x2 pixel binning. The ROIC design makes use of the advanced and matured CMOS technology, 0.18 μm, which allows for high functionality and relatively low power consumption. The FPA is mounted on a Cold-Finger by a specially designed ceramic substrate. The whole assembly is housed in a stiffened Dewar that withstands harsh environmental conditions while minimizing the environment heat load contribution to the heat load of the detector. The design enables a 3-megapixel detector with overall low size, weight, and power (SWaP) with respect to comparable large format detectors. In this work we present in detail the characteristic performance of the new Blackbird detector.
SCD为MWIR窗口开发了一种新型1920x1536 / 10 μm数字红外探测器“黑鸟”。黑鸟探测器的特点是焦平面阵列(FPA),它结合了过去几年开发的两种技术模块。第一个是基于成熟平面技术的10 μm InSb像素。第二个构建块是一个创新的10 μm读出集成电路(ROIC)像素。InSb和ROIC阵列使用倒装芯片技术通过铟凸点连接。数字ROIC由一个1920x1536像素的矩阵组成,每个通道(总共1920x2个a /D)有一个模拟到数字(a /D)转换器。它允许以高达120hz的高帧率读出全帧。这种片上A/D转换消除了对几个A/D转换器的需求,在系统级具有相当高的功耗。最大带宽下的ROIC功耗小于400mw。它具有广泛的像素级功能,如几个转换增益选项和2x2像素分割。ROIC设计采用先进成熟的CMOS技术,0.18 μm,具有高功能和相对较低的功耗。FPA通过特殊设计的陶瓷基板安装在Cold-Finger上。整个组件被安置在一个加强杜瓦能耐受恶劣的环境条件,同时最大限度地减少环境热负荷对探测器热负荷的贡献。该设计实现了300万像素的探测器,相对于类似的大画幅探测器,其整体尺寸、重量和功耗(SWaP)都很低。在这项工作中,我们详细介绍了新的黑鸟探测器的特征性能。
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引用次数: 16
期刊
Defense, Security, and Sensing
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